公开(公告)号：US20090161943A1

公开(公告)日：2009-06-25

申请号：US12338528

申请日：2008-12-18

申请人： Hiroyuki Yamashita ,  Norio Sakaiya ,  Kei Shimura ,  Masaaki Ito

发明人： Hiroyuki Yamashita ,  Norio Sakaiya ,  Kei Shimura ,  Masaaki Ito

IPC分类号： G01N21/88 ,  G06T11/20 ,  G06K9/00

CPC分类号： G01N21/88 ,  G01N21/9501 ,  G01N21/956 ,  G01N21/95607 ,  G01N2021/8848 ,  G01N2021/8861 ,  G06K9/2036 ,  G06K2209/19 ,  G06T7/00

摘要： The invention is directed to find a false defect from defect candidates and obtain a threshold with which the false defect can be eliminated by the smallest number of review times. Defect candidates are reviewed and selected as a defect or a false defect. By deleting a defect candidate having a characteristic quantity equal to or less than that of the false defect from a map or displaying it in another sign, the false defect can be determined visually. Since the defect candidate having the characteristic quantity equal to or less than that of the selected false defect is deleted from the map or displayed in another sign, the defect candidates unnecessary to set a threshold are not reviewed. The number of defect candidates to be reviewed can be largely reduced as compared with that in the conventional technique. Further, by repeating the above work, the threshold is automatically calculated, and an inspection result map with the threshold is displayed, so that a re-inspection is unnecessary.

摘要翻译： 本发明旨在从缺陷候选中找到虚假缺陷，并获得最小次数的审查时间可以消除错误缺陷的阈值。 缺陷候选者被审查和选择为缺陷或假缺陷。 通过从地图中删除具有等于或小于虚假缺陷的特征量的缺陷候选物，或者以另一个符号显示，可以视觉地确定假缺陷。 由于具有等于或小于所选择的错误缺陷的特征量的缺陷候选者从地图中删除或以另一个符号显示，所以不会检查不必设置阈值的缺陷候选。 与常规技术相比，可以大大减少待审查的缺陷候选物的数量。 此外，通过重复上述工作，自动计算阈值，并且显示具有阈值的检查结果图，使得不需要重新检查。

公开(公告)号：US08351683B2

公开(公告)日：2013-01-08

申请号：US12338528

申请日：2008-12-18

申请人： Hiroyuki Yamashita ,  Norio Sakaiya ,  Kei Shimura ,  Masaaki Ito

发明人： Hiroyuki Yamashita ,  Norio Sakaiya ,  Kei Shimura ,  Masaaki Ito

IPC分类号： G01N21/88 ,  G06T11/20

CPC分类号： G01N21/88 ,  G01N21/9501 ,  G01N21/956 ,  G01N21/95607 ,  G01N2021/8848 ,  G01N2021/8861 ,  G06K9/2036 ,  G06K2209/19 ,  G06T7/00

摘要： The invention is directed to find a false defect from defect candidates and obtain a threshold with which the false defect can be eliminated by the smallest number of review times. Defect candidates are reviewed and selected as a defect or a false defect. By deleting a defect candidate having a characteristic quantity equal to or less than that of the false defect from a map or displaying it in another sign, the false defect can be determined visually. Since the defect candidate having the characteristic quantity equal to or less than that of the selected false defect is deleted from the map or displayed in another sign, the defect candidates unnecessary to set a threshold are not reviewed. The number of defect candidates to be reviewed can be largely reduced as compared with that in the conventional technique. Further, by repeating the above work, the threshold is automatically calculated, and an inspection result map with the threshold is displayed, so that a re-inspection is unnecessary.

摘要翻译： 本发明旨在从缺陷候选中找到虚假缺陷，并获得最小次数的审查时间可以消除错误缺陷的阈值。 缺陷候选者被审查和选择为缺陷或假缺陷。 通过从地图中删除具有等于或小于虚假缺陷的特征量的缺陷候选物，或者以另一个符号显示，可以视觉地确定假缺陷。 由于具有等于或小于所选择的错误缺陷的特征量的缺陷候选者从地图中删除或以另一个符号显示，所以不会检查不必设置阈值的缺陷候选。 与常规技术相比，可以大大减少待审查的缺陷候选物的数量。 此外，通过重复上述工作，自动计算阈值，并且显示具有阈值的检查结果图，使得不需要重新检查。