公开(公告)号：US08978670B2

公开(公告)日：2015-03-17

申请号：US12897384

申请日：2010-10-04

申请人： Junya Minamida ,  Issei Ueda ,  Yasuhiro Chouno ,  Osamu Kuroda ,  Kazuyoshi Eshima ,  Masahiro Yoshida ,  Satoshi Morita

发明人： Junya Minamida ,  Issei Ueda ,  Yasuhiro Chouno ,  Osamu Kuroda ,  Kazuyoshi Eshima ,  Masahiro Yoshida ,  Satoshi Morita

IPC分类号： B08B3/00 ,  H01L21/67

CPC分类号： H01L21/67051 ,  H01L21/6708 ,  H01L21/67178 ,  H01L21/6719 ,  H01L21/67196 ,  Y10S414/135

摘要： Provided is a substrate processing apparatus wherein, even if a trouble occurs, it is bound to continue a process for the substrate without stopping the substrate processing apparatus entirely. The substrate processing apparatus according to the present disclosure includes first and second substrate conveying devices configured to convey wafers, and first and second processing blocks provided on the right and left sides of the substrate conveying device and having processing unit arrays each configured to perform the same process. Processing unit arrays on one side and processing unit arrays on the other side are respectively connected to a processing liquid supply system commonly provided with them. And, when any one of substrate conveying devices, processing liquid supply systems has a problem, the process for the wafer can be performed in the processing unit array to which the substrate conveying device and the processing liquid supply system under normal operation belong.

摘要翻译： 提供了一种基板处理装置，其中即使发生故障，也必须在不停止基板处理装置的情况下继续进行基板的处理。 根据本公开的基板处理装置包括被配置为输送晶片的第一和第二基板输送装置，以及设置在基板输送装置的左侧和左侧的第一和第二处理块，并且具有各自被配置为执行相同的处理单元阵列 处理。 一侧的处理单元阵列和另一侧的处理单元阵列分别连接到通常设置有它们的处理液体供应系统。 并且，当基板输送装置中的任一个处理液供给系统存在问题时，可以在基板输送装置和处理液供给系统正常运转所属的处理单元阵列中进行晶片的处理。

公开(公告)号：US20140120264A1

公开(公告)日：2014-05-01

申请号：US14128109

申请日：2012-06-07

申请人： Yuichiro Inatomi ,  Takashi Tanaka ,  Osamu Kuroda ,  Mitsuaki Iwashita ,  Yusuke Saito

发明人： Yuichiro Inatomi ,  Takashi Tanaka ,  Osamu Kuroda ,  Mitsuaki Iwashita ,  Yusuke Saito

IPC分类号： B05C11/10

CPC分类号： B05C11/1039 ,  C23C18/1619 ,  C23C18/1632 ,  C23C18/165 ,  C23C18/168 ,  C23C18/1682 ,  C23C18/1683 ,  C23C18/32

摘要： A plating apparatus 20 has a substrate holding/rotating device 110 configured to hold and rotate a substrate 2 and a plating liquid supplying device 30 configured to supply a plating liquid 35 onto the substrate 2. The plating liquid supplying device 30 has a supply tank 31 configured to store therein the plating liquid 35 to be supplied onto the substrate 2, a discharge nozzle 32 configured to discharge the plating liquid 35 onto the substrate 2 and a plating liquid supplying line 33 through which the plating liquid 35 within the supply tank 31 is supplied into the discharge nozzle 32. Further, an ammonia gas storage unit 170 is connected to the supply tank 31, and a concentration of an ammonia component within the plating liquid 35 stored in the supply tank 31 can be maintained within a preset target range.

摘要翻译： 电镀装置20具有：基板保持旋转装置110，被配置为保持和旋转基板2;以及电镀液供给装置30，其被配置为将电镀液体35供给到基板2上。电镀液供给装置30具有供给槽31 被配置为在其中存储供给到基板2上的镀液35，将镀液33排出到基板2上的排出喷嘴32和供给槽31内的镀液35通过该电镀液供给路33 供给到排出喷嘴32.此外，氨气体收容部170与供给罐31连接，能够将储存在供给槽31内的镀液35内的氨成分浓度维持在预先设定的目标范围内。

公开(公告)号：US08517929B2

公开(公告)日：2013-08-27

申请号：US13166765

申请日：2011-06-22

申请人： Osamu Kuroda ,  Takayuki Iida

发明人： Osamu Kuroda ,  Takayuki Iida

IPC分类号： A61B1/06 ,  A61B1/04

CPC分类号： A61B1/05 ,  A61B1/0653 ,  A61B1/07 ,  G02B23/2469 ,  G02B27/48 ,  G06T5/002 ,  G06T2207/10024 ,  G06T2207/10068

摘要： An endoscope system is able to stably obtain an image free from speckle interference. A captured image including a first basic color component B on which a speckle noise of a laser beam is superimposed and a second basic color component G not including the speckle noise. A speckle noise component Bs is extracted based on difference information between the first basic color component B and the second basic color component G Based on the extracted speckle noise component Bs, the speckle noise component Bs is removed from the first basic color component B, so as to obtain a good observation image free from the speckle noise.

摘要翻译： 内窥镜系统能够稳定地获得没有斑点干扰的图像。 包括其上叠加有激光束的斑点噪声的第一基本色彩分量B和不包括斑点噪声的第二基色分量G的拍摄图像。 基于第一基色分量B和第二基色分量G之间的差信息提取散斑噪声分量Bs基于提取的散斑噪声分量Bs，从第一基色分量B除去斑点噪声分量Bs，因此 以获得没有斑点噪声的良好观察图像。

公开(公告)号：US08210190B2

公开(公告)日：2012-07-03

申请号：US12204234

申请日：2008-09-04

申请人： Norihiro Ito ,  Osamu Kuroda

发明人： Norihiro Ito ,  Osamu Kuroda

IPC分类号： B08B3/00

CPC分类号： H01L21/67051 ,  H01L21/67265 ,  H01L21/68742

摘要： An apparatus for accurately determining if a substrate is properly retained by a substrate-retaining mechanism. The apparatus includes a substrate-retaining mechanism to retain a wafer, a treatment liquid supply mechanism to supply a treatment liquid to the wafer, and a rotatable cup adapted to rotate as an integral unit with the substrate-retaining mechanism while covering the outer peripheral portion of the wafer. The substrate-retaining mechanism has a retaining member with two ends. If the first end retains a wafer, the second end is in an upper position. If the first end retains no wafer, the second end is in a lower position. A touch sensor is arranged below the second end of the retaining member so that, when the second end is in the lower position, the second end makes contact with the touch sensor.

摘要翻译： 一种用于准确地确定衬底是否被衬底保持机构适当地保持的装置。 该装置包括：保持晶片的基板保持机构，向晶片供给处理液的处理液供给机构，以及适于作为与基板保持机构一体化的单元旋转的可旋转杯，同时覆盖外周部 的晶片。 基板保持机构具有两端的保持构件。 如果第一端保持晶片，则第二端处于上部位置。 如果第一端不保留晶片，则第二端处于较低位置。 触摸传感器布置在保持构件的第二端的下方，使得当第二端处于下部位置时，第二端与触摸传感器接触。

公开(公告)号：US20120083656A1

公开(公告)日：2012-04-05

申请号：US13248703

申请日：2011-09-29

申请人： Osamu KURODA

发明人： Osamu KURODA

IPC分类号： A61B1/06 ,  F21V13/04

CPC分类号： A61B1/0638 ,  A61B1/00096 ,  A61B1/063 ,  A61B1/0646 ,  A61B1/0669

摘要： An endoscope light source unit comprising: a first light source section emitting a first illumination light composed of white light; a second light source section emitting a second illumination light orthogonally to a direction in which the first illumination light travels; a light combining member transmitting the first illumination light through a transmission section and, at the same time, reflecting the second illumination light by means of a reflection section to form a combined light so that a beam of the second illumination light may be located in a central part of a beam of the first illumination light; a shaping lens for modifying the beam of the second illumination light emitted; and a condenser lens for converging the combined light.

摘要翻译： 一种内窥镜光源单元，包括：第一光源部，发射由白光组成的第一照明光; 第二光源部分，发射与第一照明光行进的方向正交的第二照明光; 透光透过第一照明光的光结合部件，并且通过反射部反射第二照明光，形成组合光，使第二照明光的光束位于 第一照明光束的中心部分; 用于改变发射的第二照明光束的成像透镜; 以及用于会聚合光的聚光透镜。

公开(公告)号：US20110054252A1

公开(公告)日：2011-03-03

申请号：US12868349

申请日：2010-08-25

申请人： Takao OZAKI ,  Osamu KURODA ,  Takayuki NAKAMURA ,  Takayuki IIDA

发明人： Takao OZAKI ,  Osamu KURODA ,  Takayuki NAKAMURA ,  Takayuki IIDA

IPC分类号： A61B1/04

CPC分类号： A61B1/00089 ,  A61B1/00165 ,  A61B1/00167 ,  A61B1/045

摘要： An endoscope for image pickup of an object by receiving image light with an image sensor includes an elongated tube. A fiber optic image guide includes a plurality of optical fibers being bundled, and has a distal tip, is inserted through the elongated tube, for transmitting the image light focused on the distal tip by an objective lens system in a proximal direction. A piezoelectric actuator is disposed on an outer side of the fiber optic image guide, for periodically displacing the distal tip, wherein the image sensor picks up the image light from the fiber optic image guide for plural times in synchronism with displacement, to form one synthesized image. A hood device is mounted on a head assembly of the elongated tube, and shiftable between a closed position for covering a distal end face of the head assembly and an open position for revealing the distal end face.

摘要翻译： 通过用图像传感器接收图像光来对物体进行图像拾取的内窥镜包括细长管。 光纤图像引导件包括捆扎的多个光纤，并且具有远端，通过细长管插入，用于通过物镜系统沿近端方向透射聚焦在远端上的图像光。 压电致动器设置在光纤图像引导件的外侧上，用于周期性地移动远侧末端，其中图像传感器从位移与光纤图像引导件同步地拾取图像光以形成一个合成的 图片。 罩装置安装在细长管的头部组件上，并可在用于覆盖头部组件的远端面的关闭位置和用于露出远端面的打开位置之间移动。

公开(公告)号：US07492812B2

公开(公告)日：2009-02-17

申请号：US11209627

申请日：2005-08-24

申请人： Teruhisa Ninomiya ,  Yusuke Kawasaki ,  Osamu Kuroda ,  Yoshinori Tanaka

发明人： Teruhisa Ninomiya ,  Yusuke Kawasaki ,  Osamu Kuroda ,  Yoshinori Tanaka

IPC分类号： H04L5/16

CPC分类号： H04B1/525 ,  G06K7/0008

摘要： An RFID transceiver device is capable of high sensitivity reception, by the reduction of noise, irrespective of the distance to the tag. The RFID transceiver device includes a delay circuit between a local oscillation circuit and a demodulation circuit, wherein the amount of delay of the delay circuit is set to a magnitude corresponding to the path difference between the path of leakage, via a duplexer into the demodulation circuit, of transmission signal output from the local oscillation circuit for transmission, and the path of direct input of the local oscillation signal from the local oscillation circuit to the demodulation circuit.

摘要翻译： RFID收发器设备能够通过降低噪声来实现高灵敏度接收，而与标签的距离无关。 RFID收发器装置包括在本地振荡电路和解调电路之间的延迟电路，其中延迟电路的延迟量被设置为对应于泄漏路径之间的路径差的大小，经由双工器到解调电路 的从本地振荡电路输出的发送信号进行发送，以及将本地振荡信号从本地振荡电路直接输入到解调电路的路径。

公开(公告)号：US20070204595A1

公开(公告)日：2007-09-06

申请号：US11746313

申请日：2007-05-09

申请人： Hiroshi HANAOKA ,  Osamu Kuroda ,  Ryouta Doi ,  Hidehiro Iizuka ,  Toshio Ogawa ,  Hisao Yamashita ,  Shigeru Azuhata ,  Yuichi Kitahara ,  Toshifumi Hiratsuka ,  Kojiro Okude ,  Norihiro Shinotsuka ,  Toshio Manaka

发明人： Hiroshi HANAOKA ,  Osamu Kuroda ,  Ryouta Doi ,  Hidehiro Iizuka ,  Toshio Ogawa ,  Hisao Yamashita ,  Shigeru Azuhata ,  Yuichi Kitahara ,  Toshifumi Hiratsuka ,  Kojiro Okude ,  Norihiro Shinotsuka ,  Toshio Manaka

IPC分类号： F01N3/00

CPC分类号： F01N11/002 ,  B01D53/9422 ,  B01D53/9495 ,  B01D2255/1021 ,  B01D2255/1023 ,  B01D2255/1025 ,  B01D2255/2022 ,  B01D2255/2027 ,  B01D2255/2047 ,  B01D2255/2061 ,  B01D2255/2063 ,  B01D2255/2065 ,  B01D2255/91 ,  F01N3/0814 ,  F01N3/0842 ,  F01N3/0871 ,  F01N3/0878 ,  F01N13/009 ,  F01N2250/12 ,  F01N2430/06 ,  F01N2510/06 ,  F01N2570/04 ,  F01N2610/03 ,  F02D41/027 ,  F02D41/0275 ,  F02D41/1455 ,  F02D41/146 ,  F02D41/1462 ,  F02D41/1463 ,  F02D41/1465 ,  F02D2200/0806 ,  F02D2200/0814 ,  Y02A50/2324 ,  Y02T10/22 ,  Y02T10/47

摘要： An exhaust gas purification apparatus for use in an internal combustion engine comprises an exhaust gas duct connected to the engine through which exhaust gas containing NOx gas passes, and a catalyst disposed in the exhaust gas duct such that it contacts the exhaust gas. The catalyst chemically adsorbs NOx when a stoichiometric amount of a gaseous oxidizing agent present in the exhaust gas is larger than that of a gaseous reducing agent present in the exhaust gas for reducing NOx, adsorbed NOx is catalytically reduced in the presence of a reducing agent when the stoichiometric amount of the oxidizing agent is not larger that of the reducing agent.

摘要翻译： 一种用于内燃机的废气净化装置，包括与发动机连接的废气管道，通过该排气气体通过含有NO x气体的废气，以及设置在排气管道中的催化剂， 接触废气。 当排气中存在的化学计量的气态氧化剂大于废气中存在的用于还原NOx的气态还原剂的催化剂时，催化剂化学吸附NO x， 当还原剂的化学计量量不大于还原剂的化学计量时，在还原剂的存在下催化还原吸附的NO x。

公开(公告)号：US07171973B2

公开(公告)日：2007-02-06

申请号：US10195453

申请日：2002-07-16

申请人： Takehiko Orii ,  Tatsuya Nishida ,  Osamu Kuroda

发明人： Takehiko Orii ,  Tatsuya Nishida ,  Osamu Kuroda

IPC分类号： B08B3/02

CPC分类号： H01L21/67051 ,  C03C23/0075 ,  H01L21/67028 ,  H01L21/67178 ,  Y10S134/901 ,  Y10S134/902

摘要： The substrate processing apparatus has an enclosure structure enclosing a substrate support member to define a processing space. The enclosure structure has an opening closed by a shutter. A processing fluid supply unit, which supplies processing fluid, such as chemical liquid, is accommodated in a housing. The processing fluid supply unit accommodated in the housing is advanced into the processing space through the opening of the enclosure structure to feed the processing fluid onto the substrate supported by the substrate support member.

摘要翻译： 衬底处理设备具有包围衬底支撑构件以限定处理空间的封闭结构。 外壳结构具有由快门关闭的开口。 供给处理流体（如化学液体）的处理流体供应单元容纳在壳体中。 容纳在壳体中的处理流体供应单元通过外壳结构的打开而进入处理空间，以将处理流体供给到由基板支撑构件支撑的基板上。

公开(公告)号：US20060060803A1

公开(公告)日：2006-03-23

申请号：US11225164

申请日：2005-09-14

申请人： Yoshihiro Ishikawa ,  Masakazu Nakajo ,  Osamu Kuroda ,  Yuzuru Ohtsuka ,  Hideki Suzuki ,  Yasunori Ohta

发明人： Yoshihiro Ishikawa ,  Masakazu Nakajo ,  Osamu Kuroda ,  Yuzuru Ohtsuka ,  Hideki Suzuki ,  Yasunori Ohta

IPC分类号： G01T1/105

CPC分类号： G01T1/2014 ,  A61B6/4494 ,  G01T1/2016 ,  G03B42/02

摘要： When cassettes are placed on a conveyor disposed in a cassette loader and detectors disposed on a support plate on the conveyor detect information of identification strips on side walls of the cassettes, the cassettes are judged as being loaded properly in the cassette loader. When the detectors fail to detect the identification strips, the cassettes are judged as not being loaded in a desired state in the cassette loader.