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    FABRICATION METHOD OF ELECTROMECHANICAL TRANSDUCER FILM, FABRICATION METHOD OF ELECTROMECHANICAL TRANSDUCER ELEMENT, ELECTROMECHANICAL TRANSDUCER ELEMENT, LIQUID EJECTION HEAD, AND IMAGE FORMING APPARATUS
    5.
    发明申请
    FABRICATION METHOD OF ELECTROMECHANICAL TRANSDUCER FILM, FABRICATION METHOD OF ELECTROMECHANICAL TRANSDUCER ELEMENT, ELECTROMECHANICAL TRANSDUCER ELEMENT, LIQUID EJECTION HEAD, AND IMAGE FORMING APPARATUS 有权
    机电传感器膜的制造方法，机电传感器元件的制造方法，机电传感器元件，液体喷射头和图像形成装置

    公开(公告)号：US20160049579A1

    公开(公告)日：2016-02-18

    申请号：US14827902

    申请日：2015-08-17

    Applicant: Akira SHIMOFUKU ,  Atsushi TAKEUCHI ,  Osamu MACHIDA

    Inventor： Akira SHIMOFUKU ,  Atsushi TAKEUCHI ,  Osamu MACHIDA

    IPC: H01L41/332 ,  H01L41/08 ,  H01L41/25 ,  B41J2/14

    CPC classification number: H01L41/332 ,  B41J2/14233 ,  B41J2/161 ,  B41J2/1629 ,  B41J2/164 ,  B41J2/1645 ,  H01L41/0805 ,  H01L41/1876 ,  H01L41/25 ,  H01L41/318 ,  H01L41/331

    Abstract: A method of fabricating an electromechanical transducer film includes applying a precursor solution on a support substrate, heating the substrate at a first temperature to form a ceramic thin-film in amorphous state, applying a sol-gel solution onto the ceramic thin-film, and heating the ceramic thin-film at a second temperature to form an electromechanical transducer thin-film in amorphous state. The method further includes heating the ceramic and transducer thin-films at a third temperature to thermally decompose an organic substance in the sol-gel solution and form a unitary thin-film, processing the unitary thin-film to form a patterned unitary thin-film, modifying an area on which the patterned film is not formed, discharging the sol-gel solution onto a surface of the patterned film by a liquid discharge head to apply the sol-gel solution to the surface of the patterned film, and heating the patterned film at a fourth temperature to crystallize the patterned film.

    Abstract translation: 制造机电换能器膜的方法包括将前体溶液施加在支撑基板上，在第一温度下加热基板以形成非晶状态的陶瓷薄膜，将溶胶 - 凝胶溶液施加到陶瓷薄膜上，以及 在第二温度下加热陶瓷薄膜以形成非晶态的机电换能器薄膜。 该方法还包括在第三温度下加热陶瓷和换能器薄膜以热分解溶胶 - 凝胶溶液中的有机物质并形成整体薄膜，处理整体薄膜以形成图案化单一薄膜 对未形成图案化膜的区域进行修饰，通过液体排出头将溶胶 - 凝胶溶液排出到图案化膜的表面上，将溶胶 - 凝胶溶液涂布到图案化膜的表面，并加热图案化膜 膜在第四温度下结晶图案化膜。

    Method of forming electromechanical transducer film, electromechanical transducer film, electromechanical transducer element, and liquid discharge head
    6.
    发明授权
    Method of forming electromechanical transducer film, electromechanical transducer film, electromechanical transducer element, and liquid discharge head 有权
    形成机电换能器膜，机电换能器膜，机电换能器元件和液体排出头的方法

    公开(公告)号：US09085145B2

    公开(公告)日：2015-07-21

    申请号：US14243177

    申请日：2014-04-02

    Applicant: Akira Shimofuku ,  Osamu Machida ,  Ryoh Tashiro ,  Yasuhiro Watanabe

    Inventor： Akira Shimofuku ,  Osamu Machida ,  Ryoh Tashiro ,  Yasuhiro Watanabe

    IPC: B41J2/045 ,  H01L41/22 ,  H04R17/00 ,  B41J2/14 ,  B41J2/16 ,  H01L41/047

    CPC classification number: B41J2/14201 ,  B41J2/161 ,  B41J2/164 ,  H01L41/047 ,  H01L41/318 ,  H01L41/331

    Abstract: Disclosed is an electromechanical transducer film forming method including a surface modification process; an application process; and processes of drying, thermally decomposing, and crystallizing sol-gel solution applied to a portion of a surface of a first electrode. An electromechanical transducer film is formed on a desired pattern area on the surface of the first electrode by repeating the above processes. In the application process, each of dots of the sol-gel solution applied by the inkjet method drops onto both a first area inside the desired pattern area and a second area outside the desired pattern area. The first area is a hydrophilic area on the surface of the first electrode, and the second area is a hydrophobic area on the surface of the first electrode. The hydrophilic area and the hydrophobic area have been modified by the surface modification process.

    Abstract translation: 公开了一种包括表面改性工艺的机电换能器成膜方法; 申请流程; 以及施加到第一电极表面的一部分上的溶胶 - 凝胶溶液的干燥，热分解和结晶过程。 通过重复上述过程，在第一电极的表面上的期望图案区域上形成机电换能器膜。 在涂布过程中，通过喷墨法施加的溶胶 - 凝胶溶液的每个点落在期望图案区域内的第一区域和期望图案区域外的第二区域上。 第一区域是第一电极表面上的亲水区域，第二区域是第一电极表面上的疏水区域。 亲水区域和疏水区域已经通过表面改性过程进行了修饰。

    Semiconductor device
    9.
    发明授权
    Semiconductor device 有权
    半导体器件

    公开(公告)号：US08772836B2

    公开(公告)日：2014-07-08

    申请号：US13042519

    申请日：2011-03-08

    Applicant: Osamu Machida

    Inventor： Osamu Machida

    IPC: H01L29/66

    CPC classification number: H01L29/7787 ,  H01L29/2003 ,  H01L29/7391 ,  H01L29/872

    Abstract: To provide a semiconductor device in which a rectifying element capable of reducing a leak current in reverse bias when a high voltage is applied and reducing a forward voltage drop Vf and a transistor element are integrally formed on a single substrate.A semiconductor device has a transistor element and a rectifying element on a single substrate. The transistor element has an active layer formed on the substrate and three electrodes (source electrode, drain electrode, and gate electrode) disposed on the active layer. The rectifying element has an anode electrode disposed on the active layer, a cathode electrode which is the drain electrode, and a first auxiliary electrode between the anode electrode and cathode electrode.

    Abstract translation: 提供一种半导体器件，其中，当施加高电压时能够减小反向偏压中的漏电流并且减小正向压降Vf和晶体管元件的整流元件整体形成在单个衬底上。 半导体器件在单个衬底上具有晶体管元件和整流元件。 晶体管元件具有形成在基板上的有源层和设置在有源层上的三个电极（源电极，漏电极和栅电极）。 整流元件具有设置在有源层上的阳极电极，作为漏电极的阴极电极和位于阳极电极和阴极电极之间的第一辅助电极。

    Method for producing electromechanical transducer, electromechanical transducer produced by the method, liquid-droplet jetting head, and liquid-droplet jetting apparatus
    10.
    发明授权
    Method for producing electromechanical transducer, electromechanical transducer produced by the method, liquid-droplet jetting head, and liquid-droplet jetting apparatus 有权
    用于制造机电换能器的方法，通过该方法制造的机电换能器，液滴喷射头和液滴喷射装置

    公开(公告)号：US08646180B2

    公开(公告)日：2014-02-11

    申请号：US13265192

    申请日：2010-05-27

    Applicant: Yoshikazu Akiyama ,  Takakazu Kihira ,  Keiji Ueda ,  Akira Shimofuku ,  Osamu Machida

    Inventor： Yoshikazu Akiyama ,  Takakazu Kihira ,  Keiji Ueda ,  Akira Shimofuku ,  Osamu Machida

    IPC: B21D53/76 ,  B23P17/00 ,  B41J2/015

    CPC classification number: H01L41/0973 ,  H01L41/318

    Abstract: A method of producing an electromechanical transducer includes a first step of partially modifying a surface of a first electrode; a second step of applying a sol-gel liquid including a metal composite oxide to a predetermined area of the partially-modified surface of the first electrode; a third step of performing drying, thermal decomposition, and crystallization on the applied sol-gel liquid to form an electromechanical transduction film, wherein the drying includes a heat-treatment at 120° C., the decomposition includes thermal decomposition performed at 500° C., and the crystallization includes heat treatment for crystallization at 700° C.; a fourth step of repeating the first, second, and third steps to obtain the electromechanical transduction film with a desired thickness; and a fifth step of forming a second electrode on the electromechanical transduction film.

    Abstract translation: 一种制造机电换能器的方法包括：第一步骤，部分地改变第一电极的表面; 将包含金属复合氧化物的溶胶 - 凝胶液施加到第一电极的部分改性表面的预定区域的第二步骤; 在所施加的溶胶 - 凝胶液上进行干燥，热分解和结晶以形成机电转换膜的第三步骤，其中所述干燥包括在120℃下的热处理，所述分解包括在500℃下进行的热分解 ，结晶包括在700℃下结晶的热处理。 重复第一，第二和第三步骤以获得具有所需厚度的机电转换膜的第四步骤; 以及在机电转换膜上形成第二电极的第五步骤。

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