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    TWO-PART RETAINING RING WITH INTERLOCK FEATURES
    1.
    发明申请
    TWO-PART RETAINING RING WITH INTERLOCK FEATURES 有权
    具有互锁功能的两部分保持环

    公开(公告)号：US20130324017A1

    公开(公告)日：2013-12-05

    申请号：US13907658

    申请日：2013-05-31

    申请人： Irfanulla Khuddus Rahmathullah ,  Bopanna Ichettira Vansantha ,  Padma Gopalakrishnan ,  Ravi Aswathnarayanaiah ,  Abraham Palaty ,  Young J. Paik ,  Stacy Meyer ,  James Klingler ,  Ashish Bhatnagar

    发明人： Irfanulla Khuddus Rahmathullah ,  Bopanna Ichettira Vansantha ,  Padma Gopalakrishnan ,  Ravi Aswathnarayanaiah ,  Abraham Palaty ,  Young J. Paik ,  Stacy Meyer ,  James Klingler ,  Ashish Bhatnagar

    IPC分类号： B24B37/32

    CPC分类号： B24B37/32

    摘要： A retaining ring includes an annular lower portion and an annular upper portion. The annular lower portion has a main body with a bottom surface for contacting a polishing pad during polishing, an inner rim projecting upward from the main body, an outer rim projecting upward from the main body and separated from the inner rim by a gap, and a plurality of azimuthally separated interlock features positioned between the inner rim and the outer rim, each interlock feature projecting upwardly from the main body. The annular upper portion has a top surface and a bottom surface and a plurality of azimuthally separated recesses in the bottom surface, the recesses defining thin portions of the upper portion, the plurality of interlock features fitting into the plurality of recesses. The lower portion is a plastic and the upper portion is a material that is more rigid than the plastic.

    摘要翻译： 保持环包括环形下部和环形上部。 环形下部具有主体，其具有用于在抛光期间接触抛光垫的底面，从主体向上突出的内边缘，从主体向上突出并与内边缘分开的外缘间隙， 位于内边缘和外边缘之间的多个方位分离的互锁特征，每个互锁特征从主体向上突出。 环形上部具有顶表面和底表面以及在底表面中的多个方位分离的凹槽，所述凹部限定上部的薄部分，多个互锁特征装配到多个凹部中。 下部是塑料，上部是比塑料更硬的材料。

    Two-Part Plastic Retaining Ring
    2.
    发明申请
    Two-Part Plastic Retaining Ring 审中-公开
    两部分塑料保持环

    公开(公告)号：US20130035022A1

    公开(公告)日：2013-02-07

    申请号：US13560606

    申请日：2012-07-27

    申请人： Young J. Paik ,  James Klingler ,  Stacy Meyer ,  Christopher R. Mahon ,  Laxman Murugesh ,  Ashish Bhatnagar ,  Padma Gopalakrishnan

    发明人： Young J. Paik ,  James Klingler ,  Stacy Meyer ,  Christopher R. Mahon ,  Laxman Murugesh ,  Ashish Bhatnagar ,  Padma Gopalakrishnan

    IPC分类号： B24B37/32

    CPC分类号： B24B37/32

    摘要： A retaining ring includes a generally annular lower portion and a generally annular upper portion. The lower portion has a bottom surface for contacting a polishing pad during polishing and a top surface. The upper portion has a bottom surface secured to the top surface of the lower portion and a top surface configured to be mechanically affixed to and abut a rigid base of a carrier head. The lower portion is a first plastic, and the upper portion is a different second plastic that is about the same or more rigid than the first plastic.

    摘要翻译： 保持环包括大致环形的下部和大致环形的上部。 下部具有用于在抛光期间接触抛光垫的底表面和顶表面。 上部具有固定到下部的顶表面的底表面和被配置为机械地固定到承载头的刚性基座并邻接其的刚性基座的顶表面。 下部是第一塑料，上部是与第一塑料大致相同或更刚性的不同的第二塑料。

    HIGH EFFICIENCY ELECTROSTATIC CHUCK ASSEMBLY FOR SEMICONDUCTOR WAFER PROCESSING
    3.
    发明申请
    HIGH EFFICIENCY ELECTROSTATIC CHUCK ASSEMBLY FOR SEMICONDUCTOR WAFER PROCESSING 审中-公开
    用于半导体波浪加工的高效静电卡盘组件

    公开(公告)号：US20120154974A1

    公开(公告)日：2012-06-21

    申请号：US13214152

    申请日：2011-08-19

    申请人： Ashish Bhatnagar ,  Monika Agarwal ,  Padma Gopalakrishnan ,  Daniel Martin

    发明人： Ashish Bhatnagar ,  Monika Agarwal ,  Padma Gopalakrishnan ,  Daniel Martin

    IPC分类号： H01L21/68 ,  B32B38/00 ,  B32B37/00

    CPC分类号： H01L21/6831 ,  H01L21/67017 ,  H01L21/67092 ,  H01L21/67103 ,  H01L21/6833

    摘要： The present invention generally provides a high efficiency electrostatic chuck including a flex stack having an electrode disposed between two layers of dielectric material. At least one of the layers is a standard or high purity thermoplastic film. The flex stack may have a matte finish on the substrate supporting surface to provide benefits such as improved temperature distribution across the surface of the chuck. The non-substrate supporting or pedestal receiving side of the flex stack may be plasma treated to provide a desired surface finish, which is then bonded to a pedestal using an acrylic or epoxy adhesive resulting in superior bonding strength compared to traditional polymer electrostatic chucks. The electrode may be a sheet electrode on a release liner, which enables ease of manufacturing.

    摘要翻译： 本发明通常提供一种高效率的静电卡盘，其包括具有布置在两层电介质材料之间的电极的柔性叠片。 至少一层是标准的或高纯度的热塑性薄膜。 柔性叠层可以在基板支撑表面上具有无光泽的表面，以提供诸如改善卡盘表面温度分布的优点。 柔性叠层的非基板支撑或基座接收侧可以被等离子体处理以提供期望的表面光洁度，然后使用丙烯酸或环氧粘合剂将其结合到基座，从而与传统的聚合物静电卡盘相比具有优异的粘合强度。 电极可以是剥离衬垫上的片状电极，这使得易于制造。