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公开(公告)号：US20080102218A1
公开(公告)日：2008-05-01
申请号：US11969139
申请日：2008-01-03
申请人： Paul Comita , Lance Scudder , David Carlson
发明人： Paul Comita , Lance Scudder , David Carlson
IPC分类号： B05D3/00
CPC分类号： C07F7/0896 , C01B33/04 , C01B33/107 , C07F7/12 , C23C16/24 , C23C16/30
摘要： Methods for depositing a silicon-containing film are described. The methods may include delivering a silicon compound to a surface or a substrate, and reacting the silicon compound to grow the silicon-containing film. The silicon compound may be one or more compounds having a formula selected from the group Si4X8, Si4X10, Si5X10, and Si5X12, where X is independently a hydrogen or halogen.
摘要翻译： 描述了沉积含硅膜的方法。 所述方法可以包括将硅化合物递送到表面或基底，并使硅化合物反应生长含硅膜。 硅化合物可以是一种或多种具有选自下列化学式的化合物：Si 4 S 8 S 8，Si 4 X 10， / SUB，Si 5 X 10和Si 5 X 12，其中X独立地是氢或 卤素。
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公开(公告)号：US06562720B2
公开(公告)日：2003-05-13
申请号：US10077439
申请日：2002-02-14
IPC分类号： H01L21302
CPC分类号： H01L21/02046 , C23C16/0236 , C30B29/06 , C30B33/12 , H01L21/02381 , H01L21/02433 , H01L21/0245 , H01L21/02532 , H01L21/0262 , H01L21/02658 , H01L21/30604 , H01L21/3065 , H01L21/31116 , H01L21/67115 , H01L21/67155 , H01L21/76254 , Y10S438/964 , Y10S438/977
摘要： A method of smoothing a silicon surface formed on a substrate. According to the present invention a substrate having a silicon surface is placed into a chamber and heated to a temperature of between 1000°-1300° C. While the substrate is heated to a temperature between 1000°-1300° C., the silicon surface is exposed to a gas mix comprising H2 and HCl in the chamber to smooth the silicon surface.
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公开(公告)号：US20070240632A1
公开(公告)日：2007-10-18
申请号：US11549033
申请日：2006-10-12
申请人： Kaushal Singh , Paul Comita , Lance Scudder , David Carlson
发明人： Kaushal Singh , Paul Comita , Lance Scudder , David Carlson
IPC分类号： C30B23/00
CPC分类号： C07F7/0896 , C01B33/04 , C01B33/107 , C07F7/12 , C23C16/24 , C23C16/30
摘要： Embodiments of the invention relate to methods for depositing silicon-containing materials on a substrate. In one example, a method for selectively and epitaxially depositing a silicon-containing material is provided which includes positioning and heating a substrate containing a crystalline surface and a non-crystalline surface within a process chamber, exposing the substrate to a process gas containing neopentasilane, and depositing an epitaxial layer on the crystalline surface. In another example, a method for blanket depositing a silicon-containing material is provide which includes positioning and heating a substrate containing a crystalline surface and feature surfaces within a process chamber and exposing the substrate to a process gas containing neopentasilane and a carbon source to deposit a silicon carbide blanket layer across the crystalline surface and the feature surfaces. Generally, the silicon carbide blanket layer contains a silicon carbide epitaxial layer selectively deposited on the crystalline surface.
摘要翻译： 本发明的实施例涉及在衬底上沉积含硅材料的方法。 在一个实例中，提供了一种用于选择性和外延沉积含硅材料的方法，其包括在处理室内定位和加热含有结晶表面和非结晶表面的基底，将基底暴露于含有新戊硅烷的工艺气体中， 以及在所述晶体表面上沉积外延层。 在另一个实例中，提供了一种用于覆盖沉积含硅材料的方法，其包括定位和加热含有结晶表面的基底和处理室内的特征表面，并将基底暴露于含有新戊硅烷和碳源的工艺气体沉积 跨过结晶表面和特征表面的碳化硅毯层。 通常，碳化硅覆盖层包含选择性地沉积在晶体表面上的碳化硅外延层。
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公开(公告)号：US20050264805A1
公开(公告)日：2005-12-01
申请号：US11055244
申请日：2005-02-09
申请人： Evan Cromwell , Steven Miller , Christopher Shumate , Paul Comita
发明人： Evan Cromwell , Steven Miller , Christopher Shumate , Paul Comita
CPC分类号： G01N21/253 , B01L3/5085 , B01L2300/0806 , G01N21/6408 , G01N21/6445 , G01N21/6452 , G01N35/028
摘要： Methods and apparatus for assaying biological materials employ multi-well substrates as described herein. The substrates include a plurality of wells, typically each of several nanoliters volume or smaller having consistent dimensions and formed in a rigid substrate such as a glass disk. Each well may be provided with a circumferential lip to minimize crosstalk between wells and/or facilitate optical location of the individual wells during interrogation. Samples are provided to the individual wells and assayed by an optical technique employing fluorescence, polarization, reflectance, or the like. A scanning laser system may be employed for this purpose. The substrate may rotate during the scan to allow consistent interrogation of the wells without stopping and starting the rotation. Multiple rotations may also be employed repeatedly interrogate the samples for use in a kinetic study, for example.
摘要翻译： 用于测定生物材料的方法和装置采用本文所述的多孔底物。 衬底包括多个孔，通常具有一定尺寸的几个纳升体积或更小的孔，并形成在诸如玻璃盘的刚性衬底中。 每个孔可以设置有圆周唇缘，以最小化井之间的串扰和/或促使询问期间各个孔的光学定位。 将样品提供给各个孔，并通过使用荧光，极化，反射率等的光学技术进行测定。 为此目的可以采用扫描激光系统。 衬底可以在扫描期间旋转，以允许孔的一致询问，而不停止和开始旋转。 例如，也可以多次旋转重复地询问用于动力学研究的样品。
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公开(公告)号：US06476362B1
公开(公告)日：2002-11-05
申请号：US09660565
申请日：2000-09-12
IPC分类号： F27B514
CPC分类号： H01L21/67115 , H05B3/0047
摘要： A lamp array for a thermal processing chamber. The lamp array includes a plurality of lamps arranged in a generally circular array. The plurality of lamps can be arranged in one or more concentric rings to form a generally circular array. Additional lamp arrays can be provided adjacent the circumference of the circular array or outermost concentric ring to provide a generally rectangular heating pattern. At least one row of lamps can be provided tangentially to the circular portion of the lamp array to provide preheating or postheating of process gases in the flow direction of a rectangular processing chamber.
摘要翻译： 用于热处理室的灯阵列。 灯阵列包括以大致圆形阵列布置的多个灯。 多个灯可以布置在一个或多个同心环中以形成大致圆形的阵列。 可以在圆形阵列或最外同心环的圆周附近设置附加的灯阵列，以提供大致矩形的加热图案。 至少一排灯可以与灯阵列的圆形部分相切地提供，以在矩形处理室的流动方向上提供工艺气体的预加热或后加热。
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6.发明授权公开(公告)号：US06399510B1
公开(公告)日：2002-06-04
申请号：US09660001
申请日：2000-09-12
申请人： Norma B. Riley , Roger N. Anderson , Grant D. Imper , Paul Comita
发明人： Norma B. Riley , Roger N. Anderson , Grant D. Imper , Paul Comita
IPC分类号： H01L2100
CPC分类号： C23C16/45502 , C23C16/455 , H01L21/67069
摘要： A semiconductor substrate processing chamber provides a bi-directional process gas flow for deposition or etching processes. The bi-directional gas flow provides uniformity of deposition layer thickness or uniformity of etching without the need to rotate the substrate. Junctions are provided at opposite ends of a processing chamber. Inlet and outlet ports are provided on each junction. Inlet and outlet ports on opposite junctions cooperate to provide a gas flow in a first direction for half of the process cycle, and in a second direction for the other half of the process cycle.
摘要翻译： 半导体衬底处理室为沉积或蚀刻工艺提供双向工艺气流。 双向气流提供沉积层厚度的均匀性或蚀刻的均匀性，而不需要旋转衬底。 在处理室的相对端设有连接点。 每个交汇处都提供入口和出口。 相对接合处的入口和出口协作，以在第一方向上提供气流，用于处理循环的一半，并且在处理循环的另外一半的第二方向。
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公开(公告)号：US20060003320A1
公开(公告)日：2006-01-05
申请号：US11173814
申请日：2005-07-01
申请人： Steven Miller , Paul Comita , Evan Cromwell , Christopher Shumate
发明人： Steven Miller , Paul Comita , Evan Cromwell , Christopher Shumate
CPC分类号： G01N33/582 , B82Y5/00 , B82Y10/00 , C12Q1/6816 , G01N21/6408 , G01N21/6428 , G01N21/6445 , G01N2021/6419 , G01N2021/6421 , G01N2021/6432 , G01N2021/6441 , G01N2021/6478 , G01N2021/6484 , G01N2201/067 , G01N2201/0697 , G01N2201/0833 , C12Q2563/107 , C12Q2561/119
摘要： Methods, apparatus, and system, implementing and using techniques for detecting a presence of one or more target analytes in particular regions of interest of one or more samples. One or more samples including objects and one or more target analytes are provided. Some of the target analytes are labeled with a fluorophore and are bound to some of the objects in the samples. The samples are illuminated with fluorescence inducing light and fluorescent light is collected from one or more regions of the one or more samples. At least one anisotropy measurement of the samples is performed to identify regions of interest where one or more target analytes are bound to the objects. The collected fluorescent light from the regions of interest is analyzed to determine a presence of target analytes that are bound to the objects in the one or more samples.
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公开(公告)号：US20050046849A1
公开(公告)日：2005-03-03
申请号：US10928484
申请日：2004-08-26
CPC分类号： G01N21/6452 , G01N21/6408 , G01N21/6445 , G01N21/6458 , G01N2021/6484 , G02B21/0048 , G02B21/0068 , G02B21/0076 , G02B21/16
摘要： Methods and apparatus, including computer program products, implementing and using techniques for collecting optical data pertaining to one or more characteristics of a sample. A light beam of a first frequency is scanned onto a sample surface using one or more illumination optical elements. Light of a second frequency is collected from a scan line on the sample surface using one or more collection optical elements. None of the one or more collection optical elements are included among the one or more illumination optical elements. The collected light is transmitted to a detector.
摘要翻译： 方法和装置，包括计算机程序产品，用于收集与样品的一个或多个特征有关的光学数据的实施和使用技术。 使用一个或多个照明光学元件将第一频率的光束扫描到样品表面上。 使用一个或多个收集光学元件从样品表面上的扫描线收集第二频率的光。 在一个或多个照明光学元件中不包括一个或多个收集光学元件。 所收集的光被传送到检测器。
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公开(公告)号：US20050046848A1
公开(公告)日：2005-03-03
申请号：US10927748
申请日：2004-08-26
CPC分类号： G01N21/6452 , G01N21/6408 , G01N21/6445 , G01N21/6458 , G01N2021/6484 , G02B21/0048 , G02B21/0068 , G02B21/0076 , G02B21/16
摘要： Methods and apparatus, including computer program products, implementing and using techniques for collecting optical data pertaining to one or more characteristics of a sample. The apparatus has a light source, one or more illumination optical elements, a scanner, one or more collection optical elements, and a device forming an aperture that limits detection of light from the sample. The illumination optical elements direct a light beam from the light source onto the sample. The scanner scans the light beam across the sample. The collection optical elements collect light from the sample and transmit the collected light to a detector. None of the collection optical elements are included among the illumination optical elements. The device forming an aperture limits detection of light from the sample to light associated with a limited vertical depth within the sample, and is one of the collection optical elements.
摘要翻译： 方法和装置，包括计算机程序产品，用于收集与样品的一个或多个特征有关的光学数据的实施和使用技术。 该装置具有光源，一个或多个照明光学元件，扫描器，一个或多个收集光学元件，以及形成限制来自样品的光的检测的孔径的装置。 照明光学元件将来自光源的光束引导到样品上。 扫描仪扫描样品上的光束。 收集光学元件收集来自样品的光并将收集的光传输到检测器。 在照明光学元件中不包括收集光学元件。 形成孔径的装置将从样品的光的检测限制到与样品内的有限垂直深度相关联的光，并且是收集光学元件之一。
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10.发明申请公开(公告)号：US20070171417A1
公开(公告)日：2007-07-26
申请号：US11336388
申请日：2006-01-20
申请人： Evan Cromwell , Steven Miller , Robert Trujillo , Paul Comita
发明人： Evan Cromwell , Steven Miller , Robert Trujillo , Paul Comita
IPC分类号： G01N21/00
CPC分类号： B01L3/50853 , B01L2200/0684 , B01L2300/0654 , B01L2300/0829 , G01N21/0303 , G01N21/49
摘要： Methods and apparatus for performing scatterometry measurements of biological samples as described herein. A substrate having formed therein one or more sample wells is provided. Each sample well is configured to hold a sample solution containing objects that are to be characterized based on their light scattering properties. One or more sample solutions are dispensed into the sample wells. A specular reflection reducing element is applied to at least some of the sample solutions in the sample wells to decrease reflections of light into one or more detectors. A light beam is directed from a light source onto the objects in the sample wells. Light scattered by the objects in the sample wells is collected and transmitted to one or more detectors. The signal from the detectors is analyzed to detect the one or more characteristics of the one or more samples.
摘要翻译： 如本文所述进行生物样品的散射测量的方法和装置。 提供了其中形成有一个或多个样品阱的衬底。 每个样品孔构造成容纳含有根据其光散射性质进行表征的物体的样品溶液。 将一种或多种样品溶液分配到样品孔中。 将镜面反射减少元件应用于样品阱中的至少一些样品溶液以减少光反射到一个或多个检测器中。 将光束从光源引导到样品孔中的物体上。 被样品孔中的物体散射的光被收集并传输到一个或多个检测器。 分析来自检测器的信号以检测一个或多个样品的一个或多个特性。
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