Highly integrated wafer bonded MEMS devices with release-free membrane manufacture for high density print heads
    2.
    发明授权
    Highly integrated wafer bonded MEMS devices with release-free membrane manufacture for high density print heads 有权
    高度集成的晶片粘合MEMS器件,具有无释放膜制造用于高密度打印头

    公开(公告)号:US08455271B2

    公开(公告)日:2013-06-04

    申请号:US11693209

    申请日:2007-03-29

    IPC分类号: H01L21/00 B41J2/135

    摘要: A method of fabricating a MEMS inkjet type print head and the resulting device is disclosed. The method includes providing a driver component and separately providing an actuatable membrane component, the actuatable membrane component being formed in the absence of an acid etch removing a sacrificial layer. The separately provided actuatable membrane component is bonded to the driver component and a nozzle plate is attached to the actuatable membrane component subsequent to the bonding. Separately fabricating the components removes the need for hydrofluoric acid etch removal of a sacrificial layer previously required for forming the actuatable membrane with respect to the driver component.

    摘要翻译: 公开了制造MEMS喷墨型打印头的方法和所得到的装置。 该方法包括提供驱动器部件并且单独地提供可致动的膜部件,可致动的膜部件在不存在去除牺牲层的酸蚀刻的情况下形成。 单独提供的致动膜部件被结合到驱动器部件,并且在接合之后将喷嘴板附接到可致动膜部件。 单独制造组件不需要先前为相对于驱动器部件形成可致动膜所需的牺牲层的氢氟酸蚀刻去除。

    INDEPENDENT ADJUSTMENT OF DROP MASS AND VELOCITY USING STEPPED NOZZLES
    4.
    发明申请
    INDEPENDENT ADJUSTMENT OF DROP MASS AND VELOCITY USING STEPPED NOZZLES 有权
    使用STEPPED喷嘴独立调整液压质量和速度

    公开(公告)号:US20110242218A1

    公开(公告)日:2011-10-06

    申请号:US12751077

    申请日:2010-03-31

    IPC分类号: B41J2/14 B41J2/16

    摘要: Methods and systems of ejecting ink drops from an inkjet printer are disclosed. The methods and systems can include a printhead with one or more stepped nozzles each with an associated entrance diameter and exit diameter. Ink can be received into the printhead and formed into ink drops in the stepped nozzles. The ink drops can each have an associated drop mass and drop speed. The stepped nozzles can be provided such that the exit diameter can independently dictate the drop mass and the entrance diameter can independently dictate the drop speed. As such, the complexity of jet design optimization is reduced.

    摘要翻译: 公开了从喷墨打印机喷出墨滴的方法和系统。 方法和系统可以包括具有一个或多个阶梯式喷嘴的打印头,每个具有相关联的入口直径和出口直径。 油墨可以被接收到打印头中并且形成为阶梯式喷嘴中的墨滴。 墨滴可以各自具有相关联的液滴质量和液滴速度。 可以设置阶梯喷嘴,使得出口直径可以独立地决定液滴质量,并且入口直径可以独立地决定液滴速度。 因此,喷射设计优化的复杂性降低。

    Self-aligned precision datums for array die placement
    5.
    发明授权
    Self-aligned precision datums for array die placement 失效
    用于阵列管芯放置的自对准精密基准

    公开(公告)号:US07681985B2

    公开(公告)日:2010-03-23

    申请号:US12422532

    申请日:2009-04-13

    IPC分类号: B41J2/25

    摘要: A method and resulting device for accurately positioning an array of die modules in an imaging array, including larger partial width arrays and full page width arrays, is described herein. The method includes forming physical reference datum directly on an individual silicon die module, and positioning the individual die modules on a temporary holder. The temporary holder includes an alignment tool and singulated die are placed onto the temporary holder by abutting the physical reference datum against the alignment tool. A vacuum temporarily secures the die positioned on the temporary holder, and a permanent substrate is then attached to the die of the temporary holder. The temporary holder is released in favor of the permanent substrate having the accurately aligned die modules thereon.

    摘要翻译: 本文描述了一种用于在包括更大的部分宽度阵列和全页宽度阵列的成像阵列中精确地定位管芯模块阵列的方法和所得到的装置。 该方法包括直接在单个硅模块上形成物理参考数据,并将各个模具模块定位在临时固定器上。 临时保持器包括对准工具,并且通过将物理基准原件抵靠对准工具而将单个模具放置在临时保持器上。 真空暂时固定定位在临时保持器上的模具,然后将永久基板附接到临时保持器的模具。 临时保持器被释放,有利于其上具有精确对准的模具模块的永久基板。

    Self-aligned precision datums for array die placement
    6.
    发明授权
    Self-aligned precision datums for array die placement 失效
    用于阵列管芯放置的自对准精密基准

    公开(公告)号:US07571970B2

    公开(公告)日:2009-08-11

    申请号:US11777475

    申请日:2007-07-13

    IPC分类号: B41J2/155

    摘要: A method and resulting device for accurately positioning an array of die modules in an imaging array, including larger partial width arrays and full page width arrays, is described herein. The method includes forming physical reference datum directly on an individual silicon die module, and positioning the individual die modules on a temporary holder. The temporary holder includes an alignment tool and singulated die are placed onto the temporary holder by abutting the physical reference datum against the alignment tool. A vacuum temporarily secures the die positioned on the temporary holder, and a permanent substrate is then attached to the die of the temporary holder. The temporary holder is released in favor of the permanent substrate having the accurately aligned die modules thereon.

    摘要翻译: 本文描述了一种用于在包括更大的部分宽度阵列和全页宽度阵列的成像阵列中精确地定位管芯模块阵列的方法和所得到的装置。 该方法包括直接在单个硅模块上形成物理参考数据,并将各个模具模块定位在临时固定器上。 临时保持器包括对准工具,并且通过将物理基准原件抵靠对准工具而将单个模具放置在临时保持器上。 真空暂时固定定位在临时保持器上的模具,然后将永久基板附接到临时保持器的模具。 临时保持器被释放,有利于其上具有精确对准的模具模块的永久基板。

    Fabry-perot piezoelectric tunable filter
    7.
    发明申请
    Fabry-perot piezoelectric tunable filter 有权
    法布里 - 珀罗压电可调滤波器

    公开(公告)号:US20090040616A1

    公开(公告)日:2009-02-12

    申请号:US11890575

    申请日:2007-08-07

    IPC分类号: G02B27/00

    摘要: Disclosed is a microelectromechanically tunable Fabry-Perot device and method of manufacturing tunable Fabry-Perot device and method of manufacturing. The F-P device comprises a first and second substrate which has partially reflective planar surfaces, and the partially reflective planar surfaces are separated by a predetermined separation distance and aligned to provide a F-P cavity, where one or more piezoelectric members are adapted to displace the first and second substrates when an electric field is applied.

    摘要翻译: 公开了一种微机电可调法布里 - 珀罗器件和制造可调谐法布里 - 珀罗器件的方法和制造方法。 FP器件包括第一和第二衬底,其具有部分反射的平面表面,并且部分反射的平面表面被隔开预定的间隔距离并对齐以提供FP腔,其中一个或多个压电元件适于使第一和 施加电场时的第二基板。

    HIGHLY INTEGRATED WAFER BONDED MEMS DEVICES WITH RELEASE-FREE MEMBRANE MANUFACTURE FOR HIGH DENSITY PRINT HEADS
    8.
    发明申请
    HIGHLY INTEGRATED WAFER BONDED MEMS DEVICES WITH RELEASE-FREE MEMBRANE MANUFACTURE FOR HIGH DENSITY PRINT HEADS 有权
    具有高密度打印头的无释放膜制造的高度集成的波形粘结MEMS器件

    公开(公告)号:US20080238997A1

    公开(公告)日:2008-10-02

    申请号:US11693209

    申请日:2007-03-29

    IPC分类号: B41J2/145 H01L21/00

    摘要: A method of fabricating a MEMS inkjet type print head and the resulting device is disclosed. The method includes providing a driver component and separately providing an actuatable membrane component, the actuatable membrane component being formed in the absence of an acid etch removing a sacrificial layer. The separately provided actuatable membrane component is bonded to the driver component and a nozzle plate is attached to the actuatable membrane component subsequent to the bonding. Separately fabricating the components removes the need for hydrofluoric acid etch removal of a sacrificial layer previously required for forming the actuatable membrane with respect to the driver component.

    摘要翻译: 公开了制造MEMS喷墨型打印头的方法和所得到的装置。 该方法包括提供驱动器部件并且单独地提供可致动的膜部件,可致动的膜部件在不存在去除牺牲层的酸蚀刻的情况下形成。 单独提供的致动膜部件被结合到驱动器部件,并且在接合之后将喷嘴板附接到可致动膜部件。 单独制造组件不需要先前为相对于驱动器部件形成可致动膜所需的牺牲层的氢氟酸蚀刻去除。

    Fabry-perot tunable filter systems and methods
    9.
    发明授权
    Fabry-perot tunable filter systems and methods 失效
    法布里 - 珀罗可调滤波器系统和方法

    公开(公告)号:US07417746B2

    公开(公告)日:2008-08-26

    申请号:US11319276

    申请日:2005-12-29

    IPC分类号: G01B9/02 G02B27/64

    摘要: A spectral filter includes a two-dimensional array of Fabry-Perot cavity structures, a controller, and a sampling circuit used to switch the Fabry-Perot cavity. The filter receives an incoming image, the sampling circuit switches the cavity to generate a filter image, and the filtered image is detected by the photodetectors to convert a filtered image into digital data. The controller coordinates all the image capture functions of the spectral filter.

    摘要翻译: 光谱滤波器包括法布里 - 珀罗腔结构的二维阵列,控制器和用于切换法布里 - 珀罗腔的采样电路。 滤波器接收输入图像,采样电路切换空腔以产生滤波图像,并且由光电检测器检测滤波图像以将滤波图像转换为数字数据。 控制器协调光谱滤波器的所有图像捕获功能。

    MEMS FABRY-PEROT INLINE COLOR SCANNER FOR PRINTING APPLICATIONS USING STATIONARY MEMBRANES
    10.
    发明申请
    MEMS FABRY-PEROT INLINE COLOR SCANNER FOR PRINTING APPLICATIONS USING STATIONARY MEMBRANES 有权
    用于印刷使用静电膜的应用的MEMS FABRY-PEROT在线彩色扫描仪

    公开(公告)号:US20080080026A1

    公开(公告)日:2008-04-03

    申请号:US11535382

    申请日:2006-09-26

    IPC分类号: H04N1/46

    摘要: A Micro-Electro-Mechanical System (MEMS) based Fabry-Perot array may be used as a spectral filter to light sensing array, such as a CCD or CMOS photodetector. Applying different voltages to the electrodes of individual Fabry-Perot cells within the array allows a gradient in the Fabry-Perot air gap across the Fabry-Perot array. In this manner the MEMS Fabry-Perot array serves as a spectral filter of light passing through the Fabry-Perot array to the photodetector array. Embodiments of the disclosed sensor, used with LEDs that emit light outside the photosensitivity range of a photoreceptor belt, may be used to measure spectral information from toned patches placed upon a photoreceptor belt within a marking system. Other embodiments of the disclosed sensor, used with LEDs that emit light of any wavelength, may be used to measure spectral information from toned patches placed by a marking system upon a non-photosensitive output substrate, such as an intermediate belt or paper.

    摘要翻译: 基于微机电系统(MEMS)的法布里 - 珀罗阵列可用作光传感阵列的光谱滤波器,例如CCD或CMOS光电探测器。 对阵列中的单个法布里 - 珀罗细胞的电极施加不同的电压允许跨法布里 - 珀罗阵列的法布里 - 珀罗气隙的梯度。 以这种方式,MEMS法布里 - 珀罗阵列用作通过法布里 - 珀罗阵列到光电检测器阵列的光的光谱滤波器。 所公开的传感器的实施例,与在感光带的光敏度范围外发出光的LED一起使用,可用于测量放置在标记系统内的感光带上的调色片的光谱信息。 与发射任何波长的光一起使用的所公开的传感器的其它实施例可用于测量由标记系统放置在非光敏输出基底(例如中间带或纸)上的调色贴片的光谱信息。