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公开(公告)号：US08552665B2
公开(公告)日：2013-10-08
申请号：US12859998
申请日：2010-08-20
IPC分类号： G05F1/00
CPC分类号： H05H1/46 , H05H2001/4682
摘要： Proactive arc management systems and methods are disclosed. In many implementations, proactive arc management is accomplished by executing an arc handling routine in response to an actual arc occurring in the plasma load and in response to proactive arc handling requests in a sampling interval. The number of proactive arc handling requests in a sampling interval is a function of a proactive arc management count that in turn is a function of actual number of arcs in a preceding sampling interval. Accordingly during a present sampling interval proactive arc management executes arc handling for actual arcs in the present sampling interval and for each count in a proactive arc management count updated as a function of the number of arcs in the immediately preceding sampling interval.
摘要翻译： 公开了主动弧管理系统和方法。 在许多实现中，主动电弧管理是通过响应于在等离子体负载中发生的实际电弧并且响应于采样间隔中的主动电弧处理请求执行电弧处理程序而实现的。 采样间隔中的主动弧处理请求的数量是主动弧管理计数的函数，而主动弧管理计数又是先前采样间隔中实际弧数的函数。 因此，在当前采样间隔期间，主动弧管理对当前采样间隔中的实际弧执行弧处理，并且以在紧接在前的采样间隔内的弧数的函数更新的主动弧管理计数中的每个计数。
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2.发明授权Mass flow controller having a first pair of thermal sensing elements opposing a second pair of thermal sensing elements 有权质量流量控制器具有与第二对热敏元件相对的第一对热敏元件公开(公告)号：US07971480B2
公开(公告)日：2011-07-05
申请号：US12250205
申请日：2008-10-13
IPC分类号： G01F1/68
CPC分类号： G01F1/6847 , G01F1/6842 , G01F1/696 , G01F5/00 , G05D7/0635 , Y10T137/0324 , Y10T137/7737
摘要： One embodiment of the present invention involves a thermal sensor and a method of using the same. One thermal sensor is adapted to output a signal which is unaffected by external longitudinal and orthogonal thermal gradients. In one embodiment, the mass flow controller thermal sensor comprises a capillary tube having an upstream tube portion, a tube bend portion, and a downstream tube portion, the downstream portion being substantially parallel to the upstream portion. A distance between the upstream tube portion and the downstream tube portion in one embodiment is no greater than half the upstream portion and downstream portion lengths, a first pair of thermal sensing elements are coupled to the upstream tube portion and a second pair of thermal sensing elements are coupled to the downstream tube portion.
摘要翻译： 本发明的一个实施例涉及一种热传感器及其使用方法。 一个热传感器适于输出不受外部纵向和正交热梯度影响的信号。 在一个实施例中，质量流量控制器热传感器包括具有上游管部分，管弯曲部分和下游管部分的毛细管，该下游部分基本上平行于上游部分。 在一个实施例中，上游管部分和下游管部分之间的距离不大于上游部分和下游部分长度的一半，第一对热敏元件耦合到上游管部分和第二对热敏元件 耦合到下游管部分。
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公开(公告)号：US20100089459A1
公开(公告)日：2010-04-15
申请号：US12250205
申请日：2008-10-13
CPC分类号： G01F1/6847 , G01F1/6842 , G01F1/696 , G01F5/00 , G05D7/0635 , Y10T137/0324 , Y10T137/7737
摘要： One embodiment of the present invention involves a thermal sensor and a method of using the same. One thermal sensor is adapted to output a signal which is unaffected by external longitudinal and orthogonal thermal gradients. In one embodiment, the mass flow controller thermal sensor comprises a capillary tube having an upstream tube portion, a tube bend portion, and a downstream tube portion, the downstream portion being substantially parallel to the upstream portion. A distance between the upstream tube portion and the downstream tube portion in one embodiment is no greater than half the upstream portion and downstream portion lengths, a first pair of thermal sensing elements are coupled to the upstream tube portion and a second pair of thermal sensing elements are coupled to the downstream tube portion.
摘要翻译： 本发明的一个实施例涉及一种热传感器及其使用方法。 一个热传感器适于输出不受外部纵向和正交热梯度影响的信号。 在一个实施例中，质量流量控制器热传感器包括具有上游管部分，管弯曲部分和下游管部分的毛细管，该下游部分基本上平行于上游部分。 在一个实施例中，上游管部分和下游管部分之间的距离不大于上游部分和下游部分长度的一半，第一对热敏元件耦合到上游管部分和第二对热敏元件 耦合到下游管部分。
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公开(公告)号：US20100080262A1
公开(公告)日：2010-04-01
申请号：US12238879
申请日：2008-09-26
申请人： R. Mike McDonald
发明人： R. Mike McDonald
IPC分类号： G01K7/00
CPC分类号： G01F5/00 , G01F1/684 , G05D7/0635
摘要： A system and method for operating a mass flow controller is described. One embodiment validates the operation of a mass flow controller thermal sensor, including detecting zero drift and span drift in the sensor by comparing the thermal sensor output to a pressure sensor output. In one embodiment, each sensor provides a signal to a digital controller or other processing unit and the controller calculates the mass flow rates of a gas flowing through the unit as measured by the sensors. The mass flow rates may then be compared to determine if one of the thermal sensor is operating properly.
摘要翻译： 描述了用于操作质量流量控制器的系统和方法。 一个实施例验证质量流量控制器热传感器的操作，包括通过将热传感器输出与压力传感器输出进行比较来检测传感器中的零漂和跨度漂移。 在一个实施例中，每个传感器向数字控制器或其他处理单元提供信号，并且控制器计算由传感器测量的流过单元的气体的质量流量。 然后可以比较质量流量以确定热传感器中的一个是否正常工作。
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公开(公告)号：US20120043890A1
公开(公告)日：2012-02-23
申请号：US12859998
申请日：2010-08-20
IPC分类号： H05H1/24
CPC分类号： H05H1/46 , H05H2001/4682
摘要： Proactive arc management systems and methods are disclosed. In many implementations, proactive arc management is accomplished by executing an arc handling routine in response to an actual arc occurring in the plasma load and in response to proactive arc handling requests in a sampling interval. The number of proactive arc handling requests in a sampling interval is a function of a proactive arc management count that in turn is a function of actual number of arcs in a preceding sampling interval. Accordingly during a present sampling interval proactive arc management executes arc handling for actual arcs in the present sampling interval and for each count in a proactive arc management count updated as a function of the number of arcs in the immediately preceding sampling interval.
摘要翻译： 公开了主动弧管理系统和方法。 在许多实现中，主动电弧管理是通过响应于在等离子体负载中发生的实际电弧并且响应于采样间隔中的主动电弧处理请求执行电弧处理程序而实现的。 采样间隔中的主动弧处理请求的数量是主动弧管理计数的函数，而主动弧管理计数又是先前采样间隔中实际弧数的函数。 因此，在当前采样间隔期间，主动弧管理对当前采样间隔中的实际弧执行弧处理，并且以在紧接在前的采样间隔内的弧数的函数更新的主动弧管理计数中的每个计数。
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公开(公告)号：US07826986B2
公开(公告)日：2010-11-02
申请号：US12238879
申请日：2008-09-26
申请人： R. Mike McDonald
发明人： R. Mike McDonald
IPC分类号： G01F1/00
CPC分类号： G01F5/00 , G01F1/684 , G05D7/0635
摘要： A system and method for operating a mass flow controller is described. One embodiment validates the operation of a mass flow controller thermal sensor, including detecting zero drift and span drift in the sensor by comparing the thermal sensor output to a pressure sensor output. In one embodiment, each sensor provides a signal to a digital controller or other processing unit and the controller calculates the mass flow rates of a gas flowing through the unit as measured by the sensors. The mass flow rates may then be compared to determine if one of the thermal sensor is operating properly.
摘要翻译： 描述了用于操作质量流量控制器的系统和方法。 一个实施例验证质量流量控制器热传感器的操作，包括通过将热传感器输出与压力传感器输出进行比较来检测传感器中的零漂和跨度漂移。 在一个实施例中，每个传感器向数字控制器或其他处理单元提供信号，并且控制器计算由传感器测量的流过单元的气体的质量流量。 然后可以比较质量流量以确定热传感器中的一个是否正常工作。
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