公开(公告)号：US09081027B2

公开(公告)日：2015-07-14

申请号：US12734228

申请日：2008-10-02

Applicant: Reinhard Neul ,  Johannes Classen ,  Torsten Ohms ,  Burkhard Kuhlmann ,  Axel Franke ,  Oliver Kohn ,  Daniel Christoph Meisel ,  Joerg Hauer ,  Udo-Martin Gomez ,  Kersten Kehr

Inventor： Reinhard Neul ,  Johannes Classen ,  Torsten Ohms ,  Burkhard Kuhlmann ,  Axel Franke ,  Oliver Kohn ,  Daniel Christoph Meisel ,  Joerg Hauer ,  Udo-Martin Gomez ,  Kersten Kehr

IPC: G01C19/56 ,  G01P3/44 ,  G01C19/574 ,  F16F1/02

CPC classification number: G01C19/574 ,  F16F1/025 ,  G01C19/5747 ,  G01P3/44

Abstract: A yaw-rate sensor having a substrate and a plurality of movable substructures that are mounted over a surface of the substrate, the movable substructures being coupled to a shared, in particular, central spring element, where the movable substructures are excitable into a coupled oscillation in a plane that extends parallel to the surface of the substrate, the movable substructures having Coriolis elements, where deflections of the Coriolis elements induced by a Coriolis force are detectable, a first Coriolis element being provided for detecting a yaw rate about a first axis, a second Coriolis element being provided for detecting a yaw rate about a second axis, the second axis being oriented perpendicularly to the first axis.

Abstract translation: 具有衬底和多个可移动子结构的偏转速率传感器，其安装在衬底的表面上，可移动子结构耦合到共享的，特别是中心弹簧元件，其中可移动子结构可激发成耦合振荡 在平行于衬底的表面延伸的平面中，具有科里奥利元件的可移动子结构，其中可检测科里奥利力引起的科里奥利元件的偏转，第一科里奥利元件用于检测围绕第一轴线的偏航率， 提供了用于检测围绕第二轴线的偏航率的第二科里奥利元件，所述第二轴线垂直于所述第一轴线定向。

公开(公告)号：US20130098154A1

公开(公告)日：2013-04-25

申请号：US13635581

申请日：2011-01-19

Applicant: Reinhard Neul ,  Christian Rettig ,  Achim Trautmann ,  Daniel Christoph Meisel ,  Alexander Buhmann ,  Manuel Engesser ,  Ando Feyh

Inventor： Reinhard Neul ,  Christian Rettig ,  Achim Trautmann ,  Daniel Christoph Meisel ,  Alexander Buhmann ,  Manuel Engesser ,  Ando Feyh

IPC: G01P15/09

CPC classification number: G01P15/09 ,  G01P15/0802 ,  G01P15/12 ,  G01P15/123

Abstract: A piezoresistive micromechanical sensor component includes a substrate, a seismic mass, at least one piezoresistive bar, and a measuring device. The seismic mass is suspended from the substrate such that it can be deflected. The at least one piezoresistive bar is provided between the substrate and the seismic mass and is subject to a change in resistance when the seismic mass is deflected. The at least one piezoresistive bar has a lateral and/or upper and/or lower conductor track which at least partially covers the piezoresistive bar and extends into the region of the substrate. The measuring device is electrically connected to the substrate and to the conductor track and is configured to measure the change in resistance over a circuit path which runs from the substrate through the piezoresistive bar and from the piezoresistive bar through the lateral and/or upper and/or lower conductor track.

Abstract translation: 压阻微机电传感器部件包括基板，抗震块，至少一个压阻棒和测量装置。 地震质量从基板悬挂使其能够偏转。 所述至少一个压阻棒设置在所述基底和所述抗震块之间，并且当所述地震质量被偏转时，所述至少一个压阻棒经受阻力的变化。 至少一个压阻棒具有至少部分地覆盖压阻棒并延伸到衬底的区域中的横向和/或上部和/或下部导体轨道。 测量装置电连接到基板和导体轨道，并且被配置成测量电路的电阻变化，该电阻通过基板通过压阻棒和从压阻棒通过横向和/或上部和/ 或下导体轨道。

公开(公告)号：US07825840B2

公开(公告)日：2010-11-02

申请号：US11883093

申请日：2005-12-13

Applicant: Rainer Willig ,  Burkhard Kuhlmann ,  Udo-Martin Gomez ,  Wolfram Bauer ,  Reinhard Neul ,  Christoph Lang ,  Michael Veith

Inventor： Rainer Willig ,  Burkhard Kuhlmann ,  Udo-Martin Gomez ,  Wolfram Bauer ,  Reinhard Neul ,  Christoph Lang ,  Michael Veith

IPC: H03M3/00

CPC classification number: H03M3/404 ,  H03M3/424 ,  H03M3/464

Abstract: A delta sigma modulator includes an oscillatory system having a natural frequency and an electronics and a control loop which acts upon the electronics from the oscillatory system and again upon the oscillatory system from the electronics. The control loop provides that a gain in the control loop demonstrates a peaking in a frequency range around the natural frequency of the oscillatory system.

Abstract translation: ΔΣ调制器包括具有固有频率的振荡系统以及电子装置和控制回路，其从振荡系统作用于电子装置，并且再次来自电子装置的振荡系统。 控制回路提供控制回路中的增益表现在围绕振荡系统的固有频率的频率范围内的峰值。

公开(公告)号：US07591179B2

公开(公告)日：2009-09-22

申请号：US10556172

申请日：2004-03-24

Applicant: Dietmar Krieg ,  Udo-Martin Gomez ,  Reinhard Neul

Inventor： Dietmar Krieg ,  Udo-Martin Gomez ,  Reinhard Neul

IPC: G01P9/04

CPC classification number: G01C19/5712 ,  G01C19/5726 ,  G01C19/5776

Abstract: A micromechanical motion sensor is capable of detecting a deflection imparted to an oscillatably mounted bar spring element excited to a permanent periodic oscillation by an electrostatic oscillating drive to which a periodic drive voltage is applied. To compensate non-linearities of the resonance frequency response of the bar spring element, a sum of a normal drive voltage signal and a compensation drive signal may be applied to a comb drive. In an alternative embodiment, separate compensation comb drive units may be additionally provided to the comb drive units used for the oscillation drive and a compensation voltage signal may be applied to them to compensate for the non-linearity.

Abstract translation: 微机械运动传感器能够检测通过施加周期性驱动电压的静电振荡驱动器激发到永久周期性振荡的可摆放安装的弹簧元件的偏转。 为了补偿棒弹簧元件的共振频率响应的非线性，可以将正常驱动电压信号和补偿驱动信号的总和施加到梳齿驱动器。 在替代实施例中，分离的补偿梳驱动单元可以附加地提供给用于振荡驱动的梳状驱动单元，并且补偿电压信号可以被施加到它们以补偿非线性。

公开(公告)号：US07134337B2

公开(公告)日：2006-11-14

申请号：US11328755

申请日：2006-01-09

Applicant: Rainer Willig ,  Andreas Thomae ,  Burkhard Kuhlmann ,  Joerg Hauer ,  Udo-Martin Gomez ,  Siegbert Goetz ,  Christian Doering ,  Michael Fehrenbach ,  Wolfram Bauer ,  Udo Bischof ,  Reinhard Neul ,  Karsten Funk ,  Markus Lutz ,  Gerhard Wucher ,  Jochen Franz

Inventor： Rainer Willig ,  Andreas Thomae ,  Burkhard Kuhlmann ,  Joerg Hauer ,  Udo-Martin Gomez ,  Siegbert Goetz ,  Christian Doering ,  Michael Fehrenbach ,  Wolfram Bauer ,  Udo Bischof ,  Reinhard Neul ,  Karsten Funk ,  Markus Lutz ,  Gerhard Wucher ,  Jochen Franz

IPC: G01P9/04

CPC classification number: G01C19/5747

Abstract: An exemplary embodiment of the present invention creates a micromechanical rotational rate sensor having a first Coriolis mass element and a second Coriolis mass element which may be situated over a surface of a substrate. An exemplary embodiment of a micromechanical rotational rate sensor may have an activating device by which the first Coriolis mass element and the second Coriolis mass element are able to have vibrations activated along a first axis. An exemplary embodiment of a micromechanical rotational rate sensor may have a detection device by which deflections of the first Coriolis mass elements and of the second Coriolis element are able to be detected along a second axis, which is perpendicular to the first axis, on the basis of a correspondingly acting Coriolis force. The first axis and second axis may run parallel to the surface of the substrate. The detecting device may have a first detection mass device and a second detection mass device. The centers of gravity of the first Coriolis mass element, the second Coriolis mass element, the first detection mass device and the second detection mass device may coincide at a common mass center of gravity when they are at rest.

公开(公告)号：US06752017B2

公开(公告)日：2004-06-22

申请号：US10258339

申请日：2003-03-19

Applicant: Rainer Willig ,  Andreas Thomae ,  Burkhard Kuhlmann ,  Joerg Hauer ,  Udo Martin Gomez ,  Siegbert Goetz ,  Christian Doering ,  Michael Fehrenbach ,  Wolfram Bauer ,  Udo Bischof ,  Reinhard Neul ,  Karsten Funk ,  Markus Lutz ,  Gerhard Wucher ,  Jochen Franz

Inventor： Rainer Willig ,  Andreas Thomae ,  Burkhard Kuhlmann ,  Joerg Hauer ,  Udo Martin Gomez ,  Siegbert Goetz ,  Christian Doering ,  Michael Fehrenbach ,  Wolfram Bauer ,  Udo Bischof ,  Reinhard Neul ,  Karsten Funk ,  Markus Lutz ,  Gerhard Wucher ,  Jochen Franz

IPC: G01P1514

CPC classification number: G01C19/5747

Abstract: A yaw-rate sensor is proposed having a first and a second Coriolis element (100, 200) which are arranged side-by-side above a surface (1) of a substrate. The Coriolis elements (100, 200) are induced to oscillate parallel to a first axis. Due to a Coriolis force, the Coriolis elements (100, 200) are deflected in a second axis which is perpendicular to the first axis. The first and second Coriolis elements (100, 200) are coupled by a spring (52) which is designed to be yielding in the first and in the second axis. Thus, the frequencies of the oscillations in the two axes are developed differently for the in-phase and antiphase oscillation.

Abstract translation: 一种偏转速率传感器，包括在衬底表面上并排布置的第一和第二科里奥利元件。 诱导科里奥利元件平行于第一轴振荡。 由于科里奥利力，科里奥利元件在垂直于第一轴线的第二轴线上偏转。 第一和第二科里奥利元件通过被配置为在第一轴线和第二轴线中屈服的弹簧联接。 因此，对于同相和反相振荡，两轴的振荡频率不同。

公开(公告)号：US20140326070A1

公开(公告)日：2014-11-06

申请号：US14334407

申请日：2014-07-17

Applicant: Reinhard Neul ,  Johannes Classen ,  Torsten Ohms ,  Burkhard Kuhlmann ,  Axel Franke ,  Oliver Kohn ,  Daniel Christoph Meisel ,  Joerg Hauer ,  Udo-Martin Gomez ,  Kersten Kehr

Inventor： Reinhard Neul ,  Johannes Classen ,  Torsten Ohms ,  Burkhard Kuhlmann ,  Axel Franke ,  Oliver Kohn ,  Daniel Christoph Meisel ,  Joerg Hauer ,  Udo-Martin Gomez ,  Kersten Kehr

IPC: G01P3/44 ,  F16F1/02 ,  G01C19/574

CPC classification number: G01C19/574 ,  F16F1/025 ,  G01C19/5747 ,  G01P3/44

Abstract: A yaw-rate sensor having a substrate and a plurality of movable substructures that are mounted over a surface of the substrate, the movable substructures being coupled to a shared, in particular, central spring element, means being provided for exciting the movable substructures into a coupled oscillation in a plane that extends parallel to the surface of the substrate, the movable substructures having Coriolis elements, means being provided for detecting deflections of the Coriolis elements induced by a Coriolis force, a first Coriolis element being provided for detecting a yaw rate about a first axis, a second Coriolis element being provided for detecting a yaw rate about a second axis, the second axis being oriented perpendicularly to the first axis.

Abstract translation: 具有基板和多个可移动子结构的偏转速率传感器，其安装在所述基板的表面上，所述可移动子结构联接到共享的，特别是中心的弹簧元件，所述装置用于将所述可移动子结构激励为 在平行于衬底表面延伸的平面中的耦合振荡，具有科里奥利元件的可移动子结构被提供用于检测由科里奥利力引起的科里奥利元件的偏转，第一科里奥利元件用于检测围绕 第一轴线，第二科里奥利元件被提供用于检测围绕第二轴线的横摆率，所述第二轴线垂直于所述第一轴线定向。

公开(公告)号：US08375786B2

公开(公告)日：2013-02-19

申请号：US12308533

申请日：2007-08-24

Applicant: Reinhard Neul

Inventor： Reinhard Neul

IPC: G01C19/56

CPC classification number: G01C19/5762

Abstract: A rotation-rate sensor having at least one quadrature compensation pattern, which includes at least one first electrode and one second electrode. The second electrode has a first electrode surface and a second electrode surface which are situated opposite to each other. The first electrode is situated in an intermediate space, between the first electrode surface and the second electrode surface. The first electrode surface and also the second electrode surface, over their extension, are at a different distance from the first electrode. The first electrode surface and the second electrode surface of the second electrode are at generally the same distance from each other, over their extension.

Abstract translation: 具有至少一个正交补偿图案的旋转速率传感器，其包括至少一个第一电极和一个第二电极。 第二电极具有彼此相对定位的第一电极表面和第二电极表面。 第一电极位于第一电极表面和第二电极表面之间的中间空间中。 第一电极表面以及第二电极表面在其延伸部分上与第一电极的距离不同。 第二电极的第一电极表面和第二电极表面在它们的延伸部上彼此大致相同的距离。

公开(公告)号：US20110088469A1

公开(公告)日：2011-04-21

申请号：US12513834

申请日：2007-11-08

Applicant: Reinhard Neul ,  Johannes Classen ,  Sebastian Gracki ,  Burkhard Kuhlmann ,  Axel Franke ,  Oliver Kohn ,  Kersten Kehr ,  Christian Gerhardt

Inventor： Reinhard Neul ,  Johannes Classen ,  Sebastian Gracki ,  Burkhard Kuhlmann ,  Axel Franke ,  Oliver Kohn ,  Kersten Kehr ,  Christian Gerhardt

IPC: G01C19/56

CPC classification number: G01C19/5712

Abstract: A method and system are provided including a rotation-rate sensor having a substrate, a bearing, a vibrating structure suspended on the bearing by springs in a rotatable manner for performing a planar driving vibration motion, and drive means for producing the planar driving vibration motion of the vibrating structure. The rotation-rate sensor has first evaluation means for detecting a rotation in a first axis of rotation and second evaluation means for detecting a rotation in a second axis of rotation.

Abstract translation: 提供了一种方法和系统，其包括旋转速率传感器，其具有基板，轴承，以可旋转的方式由弹簧悬挂在轴承上的振动结构，用于执行平面驱动振动运动;以及驱动装置，用于产生平面驱动振动运动 的振动结构。 旋转速率传感器具有用于检测第一旋转轴线的旋转的第一评估装置和用于检测第二旋转轴线的旋转的第二评估装置。

公开(公告)号：US07313958B2

公开(公告)日：2008-01-01

申请号：US10471635

申请日：2002-09-25

Applicant: Rainer Willig ,  Jochen Franz ,  Burkhard Kuhlmann ,  Joerg Hauer ,  Udo-Martin Gomez ,  Dieter Maurer ,  Christian Doering ,  Wolfram Bauer ,  Udo Bischof ,  Reinhard Neul ,  Johannes Classen ,  Christoph Lang ,  Jens Frey

Inventor： Rainer Willig ,  Jochen Franz ,  Burkhard Kuhlmann ,  Joerg Hauer ,  Udo-Martin Gomez ,  Dieter Maurer ,  Christian Doering ,  Wolfram Bauer ,  Udo Bischof ,  Reinhard Neul ,  Johannes Classen ,  Christoph Lang ,  Jens Frey

IPC: G01C19/00

CPC classification number: G01C19/5747

Abstract: A rotational rate sensor having a substrate and a Coriolis element is proposed, the Coriolis element being situated over a surface of a substrate; a driving arrangement being provided, by which the Coriolis element is induced to vibrations parallel to a first axis; a detection arrangement being provided, by which an excursion of the Coriolis elements is detectable on the basis of a Coriolis force in a second axis that is provided to be essentially perpendicular to the first axis; the first and second axis being parallel to the surface of the substrate; sensor elements that are designated to be at least partially movable with respect to the substrate being provided; a force-conveying arrangement being provided; the force-conveying arrangement being provided to convey a static force effect between the substrate and at least one of the sensor elements.

Abstract translation: 提出了具有基板和科里奥利元件的旋转速率传感器，科里奥利元件位于基板的表面上方; 提供了一种驱动装置，通过该驱动装置将科里奥利元件引入平行于第一轴线的振动; 提供了一种检测装置，通过该检测装置可以基于设置成基本上垂直于第一轴线的第二轴线中的科里奥利力检测科里奥利元件的偏移; 所述第一和第二轴平行于所述基板的表面; 指定为相对于所述基板至少部分移动的传感器元件; 提供力传递装置; 所述力输送装置被提供以在所述基底和所述传感器元件中的至少一个之间传递静态力效应。