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1.
公开(公告)号:US20130058728A1
公开(公告)日:2013-03-07
申请号:US13601512
申请日:2012-08-31
申请人: Gang Xiong , Feng Liao , Rick C. Powell
发明人: Gang Xiong , Feng Liao , Rick C. Powell
IPC分类号: B65G53/08
CPC分类号: C23C14/24 , B65G53/16 , C23C14/228
摘要: An improved feeder system and method for a vapor transport deposition system that includes a carrier gas bypass flow line to allow for continuous carrier gas flow to a vaporizer unit when a vibratory unit which supplies powdered material and carrier gas to the vaporizer unit is out of service. A process gas flow line to the vibratory unit may be included when the powdered material contains a powdered dopant in the material mix.
摘要翻译: 一种用于蒸气传输沉积系统的改进的馈送系统和方法,其包括载气旁路流线,以便当向蒸发器单元供应粉末材料和载气的振动单元失去使用时,允许连续的载气流向蒸发器单元 。 当粉末材料在材料混合物中含有粉末掺杂剂时,可以包括到振动单元的工艺气体流线。
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公开(公告)号:US20130017317A1
公开(公告)日:2013-01-17
申请号:US13549118
申请日:2012-07-13
申请人: Kenneth M. Ring , Rick C. Powell , William Logan , Feng Liao , Xilin Peng
发明人: Kenneth M. Ring , Rick C. Powell , William Logan , Feng Liao , Xilin Peng
IPC分类号: C23C16/52
CPC分类号: C23C14/566 , C23C16/52
摘要: Method and apparatus for controlling evacuation pressure of a load lock connected to a processing chamber uses prior pressure changes detected in the processing chamber when the load lock communicates with the processing chamber.
摘要翻译: 用于控制连接到处理室的负载锁的抽空压力的方法和装置在加载锁与处理室通信时使用在处理室中检测到的先前的压力变化。
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公开(公告)号:US09328408B2
公开(公告)日:2016-05-03
申请号:US12320060
申请日:2009-01-15
申请人: Rick C. Powell
发明人: Rick C. Powell
CPC分类号: H01L21/02631 , C23C14/0629 , C23C14/32 , H01J37/32009 , H01J37/32541 , H01J37/3255 , H01J37/32623
摘要: An apparatus for depositing a film on a substrate which includes a distributor for providing a semiconductor coating on a substrate, a power source for heating the distributor and a plasma source positioned proximate to a distributor for exposing the semiconductor coating to a plasma prior to deposition on the substrate.
摘要翻译: 一种用于在基板上沉积膜的装置,其包括用于在基板上提供半导体涂层的分布器,用于加热分布器的电源和靠近分布器定位的等离子体源,用于在沉积之前将半导体涂层暴露于等离子体 底物。
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公开(公告)号:US08334455B2
公开(公告)日:2012-12-18
申请号:US12507793
申请日:2009-07-22
申请人: Akhlesh Gupta , Rick C. Powell , David Eaglesham
发明人: Akhlesh Gupta , Rick C. Powell , David Eaglesham
CPC分类号: H01L31/02963 , H01L31/022466 , H01L31/0296 , H01L31/073 , H01L31/18 , H01L31/1828 , H01L31/1884 , Y02E10/543 , Y02P70/521
摘要: A photovoltaic cell can include a dopant in contact with a semiconductor layer.
摘要翻译: 光伏电池可以包括与半导体层接触的掺杂剂。
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公开(公告)号:US20090246940A1
公开(公告)日:2009-10-01
申请号:US12320060
申请日:2009-01-15
申请人: Rick C. Powell
发明人: Rick C. Powell
CPC分类号: H01L21/02631 , C23C14/0629 , C23C14/32 , H01J37/32009 , H01J37/32541 , H01J37/3255 , H01J37/32623
摘要: A method and apparatus for depositing a film on a substrate includes a plasma source positioned proximate to a distributor configured to provide a semiconductor coating on a substrate.
摘要翻译: 用于在衬底上沉积膜的方法和设备包括位于靠近分配器定位的等离子体源,其被配置为在衬底上提供半导体涂层。
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公开(公告)号:US20110139240A1
公开(公告)日:2011-06-16
申请号:US12969075
申请日:2010-12-15
申请人: Arnold Allenic , Benyamin Buller , Markus Gloeckler , Imran Khan , Viral Parikh , Rick C. Powell , Igor Sankin , Gang Xiong
发明人: Arnold Allenic , Benyamin Buller , Markus Gloeckler , Imran Khan , Viral Parikh , Rick C. Powell , Igor Sankin , Gang Xiong
IPC分类号: H01L31/0216 , H01L31/0224
CPC分类号: H01L31/03529 , H01L31/0296 , H01L31/065 , H01L31/072 , H01L31/073 , H01L31/074 , Y02E10/543 , Y02P70/521
摘要: A discontinuous or reduced thickness window layer can improve the efficiency of CdTe-based or other kinds of solar cells.
摘要翻译: 不连续或减薄的窗口层可以提高CdTe或其他类型的太阳能电池的效率。
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公开(公告)号:US20110088768A1
公开(公告)日:2011-04-21
申请号:US12903800
申请日:2010-10-13
申请人: Markus Gloeckler , Rick C. Powell
发明人: Markus Gloeckler , Rick C. Powell
IPC分类号: H01L31/0224 , H01L31/0352 , H01L31/0272
CPC分类号: H01L31/0296 , H01L31/02966 , H01L31/073 , H01L31/1832 , H01L31/1836 , H01L31/1864 , Y02E10/543 , Y02P70/521
摘要: A method of manufacturing a photovoltaic device may include forming a cadmium zinc sulfide layer on a substrate; depositing a cadmium telluride layer on the cadmium zinc sulfide layer; contacting a cadmium chloride to the cadmium telluride layer; and annealing one or more layers, where the one or more layers includes at least the cadmium telluride layer.
摘要翻译: 制造光伏器件的方法可以包括在衬底上形成硫化镉锌层; 在镉硫化锌层上沉积碲化镉层; 使氯化镉与碲化镉层接触; 并退火一层或多层,其中所述一层或多层至少包括碲化镉层。
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公开(公告)号:US20090194166A1
公开(公告)日:2009-08-06
申请号:US12262424
申请日:2008-10-31
申请人: Rick C. Powell , Upali Jayamaha , Anke Abken , Markus Gloeckler , Akhlesh Gupta , Roger T. Green , Peter Meyers
发明人: Rick C. Powell , Upali Jayamaha , Anke Abken , Markus Gloeckler , Akhlesh Gupta , Roger T. Green , Peter Meyers
IPC分类号: H01L31/0256 , H01L31/18 , H01L31/04
CPC分类号: H01L31/073 , H01L31/022466 , H01L31/02963 , H01L31/03042 , H01L31/1828 , H01L31/1864 , H01L31/1868 , H01L31/1884 , Y02E10/50 , Y02E10/543 , Y02E10/544 , Y02P70/521
摘要: A photovoltaic cell can include a dopant in contact with a semiconductor layer.
摘要翻译: 光伏电池可以包括与半导体层接触的掺杂剂。
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9.
公开(公告)号:US09359668B2
公开(公告)日:2016-06-07
申请号:US13601512
申请日:2012-08-31
申请人: Gang Xiong , Feng Liao , Rick C. Powell
发明人: Gang Xiong , Feng Liao , Rick C. Powell
CPC分类号: C23C14/24 , B65G53/16 , C23C14/228
摘要: An improved feeder system and method for a vapor transport deposition system that includes a carrier gas bypass flow line to allow for continuous carrier gas flow to a vaporizer unit when a vibratory unit which supplies powdered material and carrier gas to the vaporizer unit is out of service. A process gas flow line to the vibratory unit may be included when the powdered material contains a powdered dopant in the material mix.
摘要翻译: 一种用于蒸气传输沉积系统的改进的馈送系统和方法,其包括载气旁路流线,以便当向蒸发器单元供应粉末材料和载气的振动单元失去使用时,允许连续的载气流向蒸发器单元 。 当粉末材料在材料混合物中含有粉末掺杂剂时,可以包括到振动单元的工艺气体流线。
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公开(公告)号:US09263608B2
公开(公告)日:2016-02-16
申请号:US12262424
申请日:2008-10-31
申请人: Rick C. Powell , Upali Jayamaha , Anke Abken , Markus Gloeckler , Akhlesh Gupta , Roger T. Green , Peter Meyers
发明人: Rick C. Powell , Upali Jayamaha , Anke Abken , Markus Gloeckler , Akhlesh Gupta , Roger T. Green , Peter Meyers
IPC分类号: H01L31/00 , H01L31/0296 , H01L31/0224 , H01L31/0304 , H01L31/18
CPC分类号: H01L31/073 , H01L31/022466 , H01L31/02963 , H01L31/03042 , H01L31/1828 , H01L31/1864 , H01L31/1868 , H01L31/1884 , Y02E10/50 , Y02E10/543 , Y02E10/544 , Y02P70/521
摘要: A photovoltaic cell can include a dopant in contact with a semiconductor layer.
摘要翻译: 光伏电池可以包括与半导体层接触的掺杂剂。
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