公开(公告)号：US20090100657A1

公开(公告)日：2009-04-23

申请号：US12344829

申请日：2008-12-29

申请人： Robert Aigner

发明人： Robert Aigner

IPC分类号： H01L41/22

CPC分类号： H03H9/02102 ,  Y10T29/42 ,  Y10T29/49128 ,  Y10T29/49155

摘要： A piezoelectric resonator includes a piezoelectric layer having a first resonance frequency temperature coefficient of a first sign, a first and a second electrode, the piezoelectric layer being arranged between the first and second electrodes, and a compensation layer arranged between the first electrode and the piezoelectric layer, of a compensation material having a second resonance frequency temperature coefficient of a second sign opposite to the first one, wherein the compensation material is provided with a modification material to increase a conductivity of the compensation layer in a direction of the first electrode and the piezoelectric layer.

摘要翻译： 压电谐振器包括具有第一符号的第一谐振频率温度系数的压电层，第一和第二电极，压电层布置在第一和第二电极之间，以及补偿层，布置在第一电极和压电体之间 层，其具有与第一谐振频率温度系数相反的第二共振频率温度系数的补偿材料，其中所述补偿材料设置有修改材料，以在所述第一电极的方向上增加所述补偿层的导电性， 压电层。

公开(公告)号：US20080197430A1

公开(公告)日：2008-08-21

申请号：US11791963

申请日：2005-11-29

申请人： Robert Aigner ,  Ralf Brederlow ,  Lude Elbrecht ,  Heinrich Heiss ,  Stephan Marksteiner ,  Werner Simburger ,  Roland Thewes ,  Hans-Jorg Timme

发明人： Robert Aigner ,  Ralf Brederlow ,  Lude Elbrecht ,  Heinrich Heiss ,  Stephan Marksteiner ,  Werner Simburger ,  Roland Thewes ,  Hans-Jorg Timme

IPC分类号： H01L27/00 ,  H01L21/00 ,  G01N29/00

CPC分类号： G01N29/036 ,  B01L3/5085 ,  B01L2300/0645 ,  B01L2300/0663 ,  B01L2300/0819 ,  G01N33/02 ,  G01N33/15 ,  G01N33/48707 ,  G01N2291/0256 ,  H01L2224/81801 ,  H01L2924/01068 ,  H01L2924/13091 ,  H01L2924/00

摘要： A biochemical semiconductor chip laboratory is disclosed including a coupled address and control chip for biochemical analyses and a method for producing the same. In at least one embodiment the semiconductor chip laboratory has a semiconductor sensor chip, which provides numerous analytical positions for biochemical samples in a matrix. The sensor chip is located on the address and control chip and the analytical positions are in electric contact with a printed contact structure on the upper face of the address and control chip via low-resistance through-platings through the semiconductor substrate of the semiconductor chip.

摘要翻译： 公开了一种生物化学半导体芯片实验室，其包括用于生化分析的耦合地址和控制芯片及其制造方法。 在至少一个实施例中，半导体芯片实验室具有半导体传感器芯片，其为矩阵中的生物化学样品提供许多分析位置。 传感器芯片位于地址和控制芯片上，并且分析位置通过半导体芯片的半导体衬底的低电阻穿透与地址和控制芯片的上表面上的印刷接触结构电接触。

公开(公告)号：US07339445B2

公开(公告)日：2008-03-04

申请号：US11246996

申请日：2005-10-07

申请人： Robert Aigner ,  Martin Handtmann

发明人： Robert Aigner ,  Martin Handtmann

IPC分类号： H03H9/70

CPC分类号： H03H9/706

摘要： A duplexer for connection with an antenna comprises an antenna port, a transmitting filter comprising bulk acoustic wave (BAW) resonators having a first antenna side impedance coupled with the antenna port, a receiving filter comprising BAW resonators having a second antenna side impedance coupled with the antenna port, and a shunt inductance coupled between the antenna port and ground. The shunt inductance and the first and second antenna side impedances of the transmitting filter and the receiving filter are selected in such a way that the shunt inductance turns the first and second input impedance in a negative direction in a Smith diagram.

摘要翻译： 用于与天线连接的双工器包括天线端口，发射滤波器，包括具有与天线端口耦合的第一天线侧阻抗的体声波（BAW）谐振器，接收滤波器，包括具有与第二天线侧阻抗耦合的第二天线侧阻抗的BAW谐振器 天线端口和耦合在天线端口和地之间的并联电感。 选择发射滤波器和接收滤波器的并联电感和第一和第二天线侧阻抗，使得并联电感在史密斯图中将负的第一和第二输入阻抗转变成负方向。

公开(公告)号：US07199683B2

公开(公告)日：2007-04-03

申请号：US11068522

申请日：2005-02-28

申请人： Robert Thalhammer ,  Robert Aigner ,  Stephan Marksteiner

发明人： Robert Thalhammer ,  Robert Aigner ,  Stephan Marksteiner

IPC分类号： H03H9/00 ,  H03H9/54

CPC分类号： H03H9/0211 ,  H03H9/175

摘要： A BAW resonator includes a resonator region having a piezo-electric layer between two excitation electrodes, wherein an acoustic standing wave forms when operating the BAW resonator at a resonant frequency. Furthermore, the BAW resonator includes a leaky wave reflection structure formed to reflect leaky waves generated when operating the BAW resonator, wherein the leaky waves propagate in a direction differing from a propagation direction of the acoustic standing wave.

摘要翻译： BAW谐振器包括在两个激励电极之间具有压电层的谐振器区域，其中在谐振频率下操作BAW谐振器时形成声驻波。 此外，BAW谐振器包括形成为反映在操作BAW谐振器时产生的漏波的泄漏波反射结构，其中漏波沿与声驻波的传播方向不同的方向传播。

公开(公告)号：US20060290446A1

公开(公告)日：2006-12-28

申请号：US11174446

申请日：2005-07-01

申请人： Robert Aigner ,  Martin Handtmann

发明人： Robert Aigner ,  Martin Handtmann

IPC分类号： H03H9/70 ,  H03H9/58

CPC分类号： H03H9/605 ,  H03H9/02015 ,  H03H9/02133

摘要： A description is given of a BAW apparatus having a first BAW resonator and a second BAW resonator which are connected antiparallel to one another so as to reduce non-linear effects, in particular harmonics.

摘要翻译： 给出了具有第一BAW谐振器和第二BAW谐振器的BAW装置的描述，其彼此反平行连接，以便减少非线性效应，特别是谐波。

公开(公告)号：US20050206476A1

公开(公告)日：2005-09-22

申请号：US10804830

申请日：2004-03-19

申请人： Juha Ella ,  Robert Aigner

发明人： Juha Ella ,  Robert Aigner

IPC分类号： H03H7/42 ,  H03H9/54 ,  H03H9/58 ,  H03H9/60 ,  H03H9/70

CPC分类号： H03H7/42 ,  H03H9/584 ,  H03H9/589 ,  H03H9/706

摘要： A duplexer comprising a transmit resonator device and a receive resonator device for filtering transmit and receive signals. The resonator device has a first BAW resonator for generating an acoustic wave signal from an input electric signal, a first acoustic delay for delaying the acoustic wave signal, and an intermediate BAW resonator for receiving the delayed acoustic wave signal at one end and converting the delayed acoustic wave signal to an electric signal. Through electrical coupling, the electric signal also appears at another end of the intermediate BAW resonator for generating a further acoustic wave signal at the other end. The resonator further comprises a second delay for delaying the further acoustic wave signal, and a second BAW resonator for producing an output electric signal from the delayed further acoustic wave signal. The duplexer can be used in a transceiver in a mobile phone.

摘要翻译： 一种双工器，包括发射谐振器装置和用于滤波发射和接收信号的接收谐振器装置。 谐振器装置具有用于从输入电信号产生声波信号的第一BAW谐振器，用于延迟声波信号的第一声学延迟和用于在一端接收延迟的声波信号的中间BAW谐振器，并将延迟的 声波信号到电信号。 通过电耦合，电信号也出现在中间BAW谐振器的另一端，用于在另一端产生另外的声波信号。 谐振器还包括用于延迟另外的声波信号的第二延迟，以及用于从延迟的进一步的声波信号产生输出电信号的第二BAW谐振器。 双工器可用于手机中的收发器。

公开(公告)号：US06878604B2

公开(公告)日：2005-04-12

申请号：US10333727

申请日：2001-07-03

申请人： Robert Aigner ,  Lueder Elbrecht ,  Thomas Rainer Herzog ,  Stephan Marksteiner ,  Winfried Nessler

发明人： Robert Aigner ,  Lueder Elbrecht ,  Thomas Rainer Herzog ,  Stephan Marksteiner ,  Winfried Nessler

IPC分类号： H01L21/28 ,  H01L37/02 ,  H01L41/08 ,  H01L41/09 ,  H01L41/22 ,  H01L41/319 ,  H03H3/02 ,  H03H9/17 ,  H01L21/20

CPC分类号： H03H9/175 ,  H01L37/02 ,  H01L41/319

摘要： A semiconductor component is provided having a layer sequence for conversion of acoustic to thermal signals and electrical voltage changes to one another, as well as a process for its production. The layer sequence has a lower electrode, an upper electrode and a layer which is arranged between them and is piezoelectrical or pyroelectrical. An auxiliary layer is arranged between the lower electrode and the layer and is used for homogeneously oriented growth of the layer during the production process. The auxiliary layer preferably consists essentially of amorphous silicon, amorphous silicon oxide or amorphous silicon nitride.

摘要翻译： 提供了具有用于将声信号转换成热信号和电压变化彼此的层序列的半导体部件，以及用于其生产的过程。 层序列具有下电极，上电极和布置在它们之间的层，并且是压电或热电。 辅助层布置在下电极和层之间，并用于在生产过程中层的均匀取向生长。 辅助层优选地基本上由非晶硅，非晶氧化硅或非晶氮化硅组成。

公开(公告)号：US20050062363A1

公开(公告)日：2005-03-24

申请号：US10869817

申请日：2004-06-16

申请人： Robert Aigner ,  Lueder Elbrecht ,  Martin Handtmann ,  Stephan Marksteiner ,  Winfried Nessler ,  Hans-Joerg Timme

发明人： Robert Aigner ,  Lueder Elbrecht ,  Martin Handtmann ,  Stephan Marksteiner ,  Winfried Nessler ,  Hans-Joerg Timme

IPC分类号： H03H3/04 ,  H03H9/17 ,  H01B13/00 ,  H02N2/00

CPC分类号： H03H3/04 ,  Y10T29/42 ,  Y10T29/49155 ,  Y10T29/49156

摘要： In a method for manufacturing a piezoelectric oscillating circuit in thin film technology, wherein the oscillating circuit includes a predetermined natural frequency and a plurality of layers, first of all at least a first layer of the piezoelectric oscillating circuit is generated. Subsequently, by processing the first layer a frequency correction is performed. Subsequently, at least a second layer of the piezoelectric oscillating circuit is generated and processed for performing a second frequency correction.

摘要翻译： 在制造薄膜技术中的压电振荡电路的方法中，其中振荡电路包括预定的固有频率和多层，首先产生压电振荡电路的至少第一层。 随后，通过处理第一层，执行频率校正。 随后，产生并处理至少第二层的压电振荡电路，以执行第二频率校正。

公开(公告)号：US20050012568A1

公开(公告)日：2005-01-20

申请号：US10821116

申请日：2004-04-08

申请人： Robert Aigner ,  Martin Handtmann ,  Stephan Marksteiner ,  Winfried Nessler

发明人： Robert Aigner ,  Martin Handtmann ,  Stephan Marksteiner ,  Winfried Nessler

IPC分类号： H03H9/00 ,  H03H9/17 ,  H03H9/58 ,  H03H9/54

CPC分类号： H03H9/583 ,  H03H9/0095 ,  H03H9/174 ,  H03H9/175 ,  H03H9/176 ,  H03H9/178 ,  H03H9/581 ,  Y10T29/42

摘要： A BAW resonator includes a first piezoelectric layer made of a material oriented toward a first direction, and a second piezoelectric layer made of a material oriented toward a second direction which is opposed to the first direction. The first piezoelectric layer and the second piezoelectric layer are acoustically coupled with each other.

摘要翻译： BAW谐振器包括由朝向第一方向定向的材料制成的第一压电层和由朝向与第一方向相反的第二方向定向的材料制成的第二压电层。 第一压电层和第二压电层彼此声学耦合。

公开(公告)号：US06670866B2

公开(公告)日：2003-12-30

申请号：US10045645

申请日：2002-01-09

申请人： Juha Ellä ,  Robert Aigner

发明人： Juha Ellä ,  Robert Aigner

IPC分类号： H03H954

CPC分类号： H03H9/0571 ,  H03H7/42 ,  H03H9/0095 ,  H03H9/589 ,  H03H9/706

摘要： A bulk acoustic wave device having two resonators in a stacked-up configuration separated by a dielectric layer. The device can be coupled to a lattice filter or a ladder filter to form a passband filter with an unbalanced input port and two balanced output ports. One or more such passband filters can be used, together with another lattice or ladder filter, to form a duplexer having an unbalanced antenna port, two balanced ports for one transceiver part and two balanced ports for another transceiver part.

摘要翻译： 一种具有由电介质层隔开的叠层构造的两个谐振器的体声波器件。 该器件可以耦合到晶格滤波器或梯形滤波器，以形成具有不平衡输入端口和两个平衡输出端口的通带滤波器。 可以使用一个或多个这样的通带滤波器与另一个晶格或梯形滤波器一起形成具有不平衡天线端口的双工器，用于一个收发器部分的两个平衡端口和用于另一个收发器部件的两个平衡端口。