Abstract:
A system and method for fabricating a mandrel wound antenna are provided. The method includes securing a first end of a wire to a first portion of a mandrel tool, where the mandrel tool includes a faceplate supporting a plurality of posts, and the posts arranged and disposed to define non-overlapping circumferential patterns. The method also includes wrapping the wire around outer peripheries of the plurality of posts to form non-overlapping wire coils around the plurality of circumferential patterns to provide an antenna. The method further includes securing a second end of the wire to a second portion of the mandrel tool, cutting the wire in proximity to the second end, attaching the antenna to a substrate separate from the faceplate, and detaching the antenna from the faceplate.
Abstract:
A smart card inlay and method for assembling the same are provided. The method includes attaching a first trace to a substrate, attaching a second trace to the substrate, attaching an antenna wire to the substrate, coupling a first end of the antenna wire to a first area of the first trace, and coupling a second end of the antenna wire to a first area of the second trace. A second area of the first trace and a second area of the second trace are configured to be coupled to an integrated circuit (IC) or IC module, and the first area of the first trace is located away from the second area of the first trace and the first area of the second trace is located away from the second area of the second trace.
Abstract:
A method of manufacturing a semiconductor device. The method comprises forming conductive and ferroelectric material layers on a semiconductor substrate. The material layers are patterned to form electrodes and a ferroelectric layer of a ferroelectric capacitor, wherein a conductive residue is generated on sidewalls of the ferroelectric capacitor as a by-product of the patterning. The method also comprises removing the conductive residue using a physical plasma etch clean-up process that includes maintaining a substrate temperature that is greater than about 60° C.
Abstract:
In accordance with the present teachings, semiconductor devices and methods of making semiconductor devices and dielectric stack in an integrated circuit are provided. The method of forming a dielectric stack in an integrated circuit can include providing a semiconductor structure including one or more copper interconnects and forming an etch stop layer over the semiconductor structure in a first processing chamber. The method can also include forming a thin silicon oxide layer over the etch stop layer in the first processing chamber and forming an ultra low-k dielectric layer over the thin silicon oxide layer in a second processing chamber, wherein forming the thin silicon oxide layer improves adhesion between the etch stop layer and the ultra low-k dielectric as compared to a dielectric stack that is devoid of the thin silicon oxide layer between the etch stop layer and the ultra low-k dielectric.
Abstract:
A method of forming a gate electrode (24′) for a metal-oxide-semiconductor (MOS) integrated circuit is disclosed. A hardmask layer (26), for example formed of silicon-rich nitride, is deposited over a polysilicon layer (24) from which the gate electrode (24′) is to be formed. An anti-reflective coating, or bottom anti-reflective coating or BARC, layer (29) is then formed over the hardmask layer (26), and photoresist (30) is photolithographically patterned to define the pattern of the gate electrode (24′), although to a wider, photolithographic, width (LW). The pattern is transferred from the photoresist (30) to the BARC layer (29). The remaining elements of the BARC layer (29) are then trimmed, preferably by a timed isotropic etch, to a sub-lithographic width (SW). This pattern is then transferred to the hardmask layer (26) by an anisotropic etch of that layer, using the trimmed BARC elements (29) as a mask. The hardmask layer elements (26′) then mask the etch of the underlying polysilicon layer (24), to define the gate electrodes (24′), having gate widths that are narrower than the minimum dimension available through photolithography.
Abstract:
The present invention provides a process for increasing the hermeticity of a hermetic layer, a method for manufacturing an interconnect structure, and a method for manufacturing an integrated circuit. The process for increasing the hermeticity of the hermetic layer, without limitation, includes providing a hermetic layer over a substrate (160), the hermetic layer having a initial hermeticity, and subjecting the hermetic layer to an energy beam, thereby causing the initial hermeticity to improve (170).
Abstract:
A method of forming a gate electrode (24′) for a metal-oxide-semiconductor (MOS) integrated circuit is disclosed. A hardmask layer (26), for example formed of silicon-rich nitride, is deposited over a polysilicon layer (24) from which the gate electrode (24′) is to be formed. An anti-reflective coating, or bottom anti-reflective coating or BARC, layer (29) is then formed over the hardmask layer (26), and photoresist (30) is photolithographically patterned to define the pattern of the gate electrode (24′), although to a wider, photolithographic, width (LW). The pattern is transferred from the photoresist (30) to the BARC layer (29). The remaining elements of the BARC layer (29) are then trimmed, preferably by a timed isotropic etch, to a sub-lithographic width (SW). This pattern is then transferred to the hardmask layer (26) by an anisotropic etch of that layer, using the trimmed BARC elements (29) as a mask. The hardmask layer elements (26′) then mask the etch of the underlying polysilicon layer (24), to define the gate electrodes (24′), having gate widths that are narrower than the minimum dimension available through photolithography.
Abstract:
A method for operating a pulse detonation system. The method includes providing a pulse detonation chamber including a plurality of detonation tubes extending therein, and detonating a mixture of fuel and air within each detonation tube such that at least a first tube is detonated at a different time than at least a second detonation tube.
Abstract:
A unique, solid flat panel lighting emitting luminaire has been created that utilizes a light source remote from the luminaire coupled with a hollow light pipe. The light panel luminaire is fed light flux via a hollow light pipe system into one or two edges of the flat panel. The light panel has imbedded irregular tapered tetrahedron light guides that emit light in a uniform controlled fashion over the length of the emitting surface. The subject lighting luminaire provides light emitted from an adjacent High Intensity Discharge (HID) light source. The luminaire is specifically designed to provide light over a large surface for backlit billboard applications without the limitations of traditional fluorescent light source light boxes. The luminaire does not require any maintenance to its interior as the light source is remote from the emitting surface. The luminaire is one continuous surface without visible seams, that would allow direct attachment of paint or transparency informational signage or simply provide a large surface of homogenous light for a back lit replaceable mediums. The light panel design allows the use of a signal or multiple light sources within a hollow light pipe light concentrator. One or more lamp types such as metal halide and/or high pressure sodium could be combined to deliver a color balanced light flux light source. The longevity and high efficiency of the HID light source light bulbs over fluorescent bulbs is well known. The light source is remote from the light emitting surface and allows any transparent, semi-transparent or semi-opaque material to be installed permanently of temporarily without having to be removed from the light panel emitting surface to facilitate bulb replacement or light box maintenance. The tapered hollow light pipe concentrator efficiently collects light flux and delivers the flux to the edge of the light panel without using glass or plastic fiber optic light guides. Light emitting panel sections can be fabricated and assembled into one homogeneous surface for any usual billboard size.