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公开(公告)号：US07863752B2
公开(公告)日：2011-01-04
申请号：US12392947
申请日：2009-02-25
Applicant: Robert Ostrom
Inventor： Robert Ostrom
CPC classification number: G02B26/0841 , B81B2201/045 , B81B2203/058 , B81B2207/096 , B81C1/00095 , G02B26/0866 , Y10T29/49002
Abstract: A MEMS device and fabrication method are disclosed. A bottom substrate having an insulating layer sandwiched between an upper layer and a lower layer may be bonded to a device layer. One or more portions of the upper layer may be selectively removed to form one or more device cavities. Conductive vias may be formed through the lower layer at locations that underlie the one or more device cavities and electrically isolated from the lower layer. Devices may be formed from the device layer. Each device overlies a corresponding device cavity. Each device may be connected to the rest of the device layer by one or more corresponding hinges formed from the device layer. One or more electrical contacts may be formed on a back side of the lower layer. Each contact is electrically connected to a corresponding conductive via.
Abstract translation: 公开了MEMS器件和制造方法。 具有夹在上层和下层之间的绝缘层的底部基板可以结合到器件层。 可以选择性地去除上层的一个或多个部分以形成一个或多个器件腔。 导电通孔可以在位于一个或多个器件空腔下方并且与下层电隔离的位置处通过下层形成。 设备可以从设备层形成。 每个设备覆盖相应的设备腔。 每个设备可以通过由设备层形成的一个或多个相应铰链连接到设备层的其余部分。 一个或多个电触头可以形成在下层的背面上。 每个触点电连接到相应的导电通孔。
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公开(公告)号：US07539371B2
公开(公告)日：2009-05-26
申请号：US12107014
申请日：2008-04-21
Applicant: Massimo Martinelli , Long Yang , Mark H. Garrett , Robert Ostrom , Joseph E. Davis
Inventor： Massimo Martinelli , Long Yang , Mark H. Garrett , Robert Ostrom , Joseph E. Davis
IPC: G02B6/26
CPC classification number: G02B6/29311 , G02B6/29383 , G02B6/352 , G02B6/356 , G02B6/3594 , G02B6/4246 , G02B26/0833 , G02B27/0911
Abstract: A micromirror for use in an optical apparatus may comprise a reflective portion, configured to be rotatable about a switching axis and an attenuation axis that is different from the switching axis. The reflective portion may include an edge that is substantially parallel to the attenuation axis. The edge may include one or more edge features that protrude above a plane of the micromirror surface and/or are submerged below the plane of the micromirror surface, and/or have an edge shape that deviates from a straight line. Alternatively, an array of micromirrors may have mirrors characterized by sawtooth features disposed along edges that are substantially parallel to the attenuation axis.
Abstract translation: 用于光学设备的微反射镜可以包括反射部分，其被配置为围绕开关轴线可旋转，并且衰减轴线与切换轴线不同。 反射部分可以包括基本上平行于衰减轴线的边缘。 边缘可以包括突出在微镜表面的平面上方和/或被浸没在微反射镜表面的平面之下的一个或多个边缘特征，和/或具有偏离直线的边缘形状。 或者，微镜阵列可以具有以沿着基本上平行于衰减轴线的边缘设置的锯齿形特征的反射镜。
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公开(公告)号：US20100214643A1
公开(公告)日：2010-08-26
申请号：US12392947
申请日：2009-02-25
Applicant: Robert Ostrom
Inventor： Robert Ostrom
CPC classification number: G02B26/0841 , B81B2201/045 , B81B2203/058 , B81B2207/096 , B81C1/00095 , G02B26/0866 , Y10T29/49002
Abstract: A MEMS device and fabrication method are disclosed. A bottom substrate having an insulating layer sandwiched between an upper layer and a lower layer may be bonded to a device layer. One or more portions of the upper layer may be selectively removed to form one or more device cavities. Conductive vias may be formed through the lower layer at locations that underlie the one or more device cavities and electrically isolated from the lower layer. Devices may be formed from the device layer. Each device overlies a corresponding device cavity. Each device may be connected to the rest of the device layer by one or more corresponding hinges formed from the device layer. One or more electrical contacts may be formed on a back side of the lower layer. Each contact is electrically connected to a corresponding conductive via.
Abstract translation: 公开了MEMS器件和制造方法。 具有夹在上层和下层之间的绝缘层的底部基板可以结合到器件层。 可以选择性地去除上层的一个或多个部分以形成一个或多个器件腔。 导电通孔可以在位于一个或多个器件空腔下方并且与下层电隔离的位置处通过下层形成。 设备可以从设备层形成。 每个设备覆盖相应的设备腔。 每个设备可以通过由设备层形成的一个或多个相应铰链连接到设备层的其余部分。 一个或多个电触头可以形成在下层的背面上。 每个触点电连接到相应的导电通孔。
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公开(公告)号：US20080266637A1
公开(公告)日：2008-10-30
申请号：US12107014
申请日：2008-04-21
Applicant: Massimo Martinelli , Long Yang , Mark H. Garrett , Robert Ostrom , Joseph E. Davis
Inventor： Massimo Martinelli , Long Yang , Mark H. Garrett , Robert Ostrom , Joseph E. Davis
IPC: G02B26/08
CPC classification number: G02B6/29311 , G02B6/29383 , G02B6/352 , G02B6/356 , G02B6/3594 , G02B6/4246 , G02B26/0833 , G02B27/0911
Abstract: A micromirror for use in an optical apparatus may comprise a reflective portion, configured to be rotatable about a switching axis and an attenuation axis that is different from the switching axis. The reflective portion may include an edge that is substantially parallel to the attenuation axis. The edge may include one or more edge features that protrude above a plane of the micromirror surface and/or are submerged below the plane of the micromirror surface, and/or have an edge shape that deviates from a straight line. Alternatively, an array of micromirrors may have mirrors characterized by sawtooth features disposed along edges that are substantially parallel to the attenuation axis.
Abstract translation: 用于光学设备的微反射镜可以包括反射部分，其被配置为围绕开关轴线可旋转，并且衰减轴线与切换轴线不同。 反射部分可以包括基本上平行于衰减轴线的边缘。 边缘可以包括突出在微镜表面的平面上方和/或被浸没在微反射镜表面的平面之下的一个或多个边缘特征，和/或具有偏离直线的边缘形状。 或者，微镜阵列可以具有以沿着基本上平行于衰减轴线的边缘设置的锯齿形特征的反射镜。
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公开(公告)号：US06865313B2
公开(公告)日：2005-03-08
申请号：US10435511
申请日：2003-05-09
Applicant: Minyao Mao , Martin Lim , Robert Ostrom
Inventor： Minyao Mao , Martin Lim , Robert Ostrom
IPC: G02B6/35
CPC classification number: G02B6/358 , G02B6/3512 , G02B6/357
Abstract: Bistable latching actuator for use in optical fiber switching applications having a generally planar mechanism with an arm that carries a mirror for movement in a direction perpendicular to the plane of the mechanism, and a bistable mechanical latch for retaining the mirror in stable positions on opposite sides of the plane without contacting the arm. Movement between the two stable positions is initiated and damped with an electrostatic comb drive.
Abstract translation: 用于光纤切换应用的双稳态闭锁致动器具有大致平面的机构，其具有臂，该臂具有在垂直于机构的平面的方向上运动的反射镜，以及用于将反射镜保持在相对侧的稳定位置的双稳态机械闩锁 不接触手臂。 启动两个稳定位置之间的运动并用静电梳驱动阻尼。
