Interface between conveyor and semiconductor process tool load port
    2.
    发明授权
    Interface between conveyor and semiconductor process tool load port 有权
    输送机和半导体加工工具加载口之间的接口

    公开(公告)号:US07771151B2

    公开(公告)日:2010-08-10

    申请号:US11178072

    申请日:2005-07-08

    IPC分类号: H01L21/68

    摘要: The present invention generally comprises a tool load device for transferring a container between a container transport system and a processing tool. The tool load device may service a single load port or multiple load ports. Regardless, the tool load device is preferably located between the load port of the processing tool and the section of the container transport system passing the processing tool. The tool load device provides an improved method of moving containers between a conventional load port and, for example, a conveyor. In another embodiment, the tool load device is coupled with an x-drive assembly that moves the tool load device along a path that is substantially parallel to the container transport system passing in front of the load port—allowing the tool load device to service multiple load ports.

    摘要翻译: 本发明通常包括用于在容器运输系统和加工工具之间转运容器的工具装载装置。 工具装载设备可以服务于单个装载端口或多个装载端口。 无论如何,工具装载装置优选地位于处理工具的装载端口和通过处理工具的容器运输系统的部分之间。 工具装载装置提供了一种在常规负载端口和例如输送机之间移动容器的改进方法。 在另一个实施例中,工具装载装置与x驱动组件联接,该x驱动组件沿着基本上平行于通过装载端口前方的集装箱运输系统的路径移动工具装载装置 - 允许工具装载装置服务多个 加载端口。

    Wave Power
    3.
    发明申请
    Wave Power 有权
    波力

    公开(公告)号:US20090311925A1

    公开(公告)日:2009-12-17

    申请号:US12087961

    申请日:2007-01-18

    IPC分类号: B63H1/32 G05D1/02

    摘要: A wave-powered water vehicle includes a surface float, a submerged swimmer, and a tether which connects the float and the swimmer, so that the swimmer moves up and down as a result of wave motion. The swimmer includes one or more fins which interact with the water as the swimmer moves up and down, and generate forces which propel the vehicle forward. The vehicle, which need not be manned, can carry communication and control equipment so that it can follow a course directed by signals sent to it, and so that it can record or transmit data from sensors on the vehicle.

    摘要翻译: 波浪水车辆包括表面浮子,潜水游泳者和连接浮子和游泳者的系绳,使得游泳者由于波浪运动而上下移动。 游泳者包括一个或多个鳍,当游泳者上下移动时,它们与水相互作用,并产生推动车辆前进的力。 无需载人的车辆可以携带通信和控制设备,使其可以遵循发送给它的信号所指导的路线,并且可以记录或传输车辆上传感器的数据。

    Direct tool loading
    5.
    发明授权
    Direct tool loading 失效
    直接加载工具

    公开(公告)号:US07410340B2

    公开(公告)日:2008-08-12

    申请号:US11064880

    申请日:2005-02-24

    IPC分类号: B65G1/133

    摘要: The present invention comprises a container transport and loading system. The system generally comprises a load port for presenting articles to a tool and a container transport system. In one embodiment, the load port includes a vertically movable FOUP advance plate assembly that is adapted to load and unload a FOUP from a conveyor that passes by the load port and move the FOUP horizontally. In another embodiment, the load port includes a vertically movable support structure that is adapted to load and unload a container from a shuttle that passes by the load port. The various embodiments of the load port and container transport system are improvements over conventional container transport systems. The present invention also includes a shuttle for simultaneously transporting multiple containers that a load port may load or unload a container from.

    摘要翻译: 本发明包括容器运输和装载系统。 该系统通常包括用于将物品呈现给工具的装载端口和容器运输系统。 在一个实施例中,负载端口包括可垂直移动的FOUP提前板组件,其适于从通过负载端口的传送器加载和卸载FOUP并水平移动FOUP。 在另一个实施例中,负载端口包括可垂直移动的支撑结构,其适于从穿过负载端口的梭子加载和卸载容器。 负载端口和集装箱运输系统的各种实施例是相对于常规集装箱运输系统的改进。 本发明还包括用于同时运送多个容器的梭子,负载口可装载或卸载容器。

    Loader and buffer for reduced lot size
    7.
    发明申请
    Loader and buffer for reduced lot size 有权
    装载机和缓冲区可减少批量

    公开(公告)号:US20080152466A1

    公开(公告)日:2008-06-26

    申请号:US11644240

    申请日:2006-12-22

    IPC分类号: B65H5/08

    摘要: A system comprising a load port and a transfer module. In one embodiment, the load port includes a plate having a first opening and a second opening, a first workpiece access port, a second workpiece access port and at least one storage location. The storage location(s) may be located either beneath the second workpiece access port or above the first workpiece access port. The transfer mosule, which is located adjacent the load port, includes a load arm for moving the workpiece containers between the first workpiece access port, the second workpiece access port, any of the storage shelves and a material transport system.

    摘要翻译: 一种包括负载端口和转移模块的系统。 在一个实施例中,负载端口包括具有第一开口和第二开口的板,第一工件接入端口,第二工件接入端口和至少一个存储位置。 存储位置可以位于第二工件访问端口下方或第一工件访问端口的上方。 位于负载端口附近的转移清除器包括用于在第一工件接入端口,第二工件接入端口,任何存储搁板和材料输送系统之间移动工件容器的负载臂。

    Workpiece handling robot
    8.
    发明授权
    Workpiece handling robot 有权
    工件处理机器人

    公开(公告)号:US06634851B1

    公开(公告)日:2003-10-21

    申请号:US09483625

    申请日:2000-01-14

    IPC分类号: B25J1804

    摘要: A wafer handling robot is disclosed for transporting workpieces such as semiconductor wafers and flat panel displays between process tools and/or workpiece storage locations within a wafer fab. The robot includes a base comprising a rigid backbone for providing a significant degree of structural stability to the robot. The base further includes a mast, a linear drive system for translating the mast, and a shoulder drive system for rotating the mast. The shoulder drive system includes a harmonic drive reduction system for providing a stiff, smooth and precise output rotation of the mast section. The robot further includes a proximal link fixedly mounted to the mast for rotation with the mast, and a distal link rotatably mounted to the proximal link. An end effector for supporting various workpieces is rotationally mounted to the distal end of the distal link. An elbow drive is mounted to the proximal link, extending down into the mast section, for driving rotation of the distal link with respect to the proximal link. Torque is transmitted from the elbow drive to the distal link by steel straps wrapped around a drive pulley from the elbow drive and a driven pulley in the distal link. Similarly, torque is transmitted from the distal link to the end effector via a second set of steel straps wrapped around pulleys provided in the distal link and end effector, respectively.

    摘要翻译: 公开了一种晶片处理机器人,用于在晶片制造厂内的工艺工具和/或工件存储位置之间输送诸如半导体晶片和平板显示器的工件。 机器人包括一个底座,它包括一个刚性骨架,为机器人提供了很大程度的结构稳定性。 基座还包括桅杆,用于平移桅杆的线性驱动系统和用于旋转桅杆的台肩驱动系统。 肩部驱动系统包括用于提供桅杆部分的刚性,平滑和精确的输出旋转的谐波驱动减速系统。 机器人还包括固定地安装到桅杆上以使桅杆旋转的近端链节和可旋转地安装到近端连杆的远端连杆。 用于支撑各种工件的端部执行器旋转地安装到远端连杆的远端。 肘部驱动器安装到近端连杆,向下延伸到桅杆部分中,用于驱动远端连杆相对于近端连杆的旋转。 扭矩由弯头驱动器和远端连杆的从动皮带轮缠绕在驱动皮带轮周围的钢带从弯头传动装置传递到远端连杆。 类似地,扭矩通过分别缠绕在设置在远端连杆和端部执行器中的滑轮周围的第二组钢带从远端连杆传递到末端执行器。

    Wave power
    9.
    发明申请
    Wave power 有权
    波力

    公开(公告)号:US20120094556A1

    公开(公告)日:2012-04-19

    申请号:US13199646

    申请日:2011-09-06

    IPC分类号: B63H19/02

    摘要: A wave-powered water vehicle includes a surface float, a submerged swimmer, and a tether which connects the float and the swimmer, so that the swimmer moves up and down as a result of wave motion. The swimmer includes one or more fins which interact with the water as the swimmer moves up and down, and generate forces which propel the vehicle forward. The vehicle, which need not be manned, can carry communication and control equipment so that it can follow a course directed by signals sent to it, and so that it can record or transmit data from sensors on the vehicle.

    摘要翻译: 波浪水车辆包括表面浮子,潜水游泳者和连接浮子和游泳者的系绳,使得游泳者由于波浪运动而上下移动。 游泳者包括一个或多个鳍,当游泳者上下移动时,它们与水相互作用,并产生推动车辆前进的力。 无需载人的车辆可以携带通信和控制设备,使其可以遵循发送给它的信号所指导的路线,并且可以记录或传输车辆上传感器的数据。

    Modular terminal for high-throughput AMHS
    10.
    发明授权
    Modular terminal for high-throughput AMHS 有权
    用于高通量AMHS的模块化终端

    公开(公告)号:US07798759B2

    公开(公告)日:2010-09-21

    申请号:US11433980

    申请日:2006-05-15

    IPC分类号: B65G1/00

    摘要: The present invention generally comprises an apparatus for transporting containers between a first transport system and a second transport system. In one embodiment, the first transport system comprises a ceiling-based conveyor and the second transport system comprises a floor-based conveyor. The present invention may further include storage shelves, preferably substantially horizontally aligned about a common vertical plane with a section of one of the transport systems. The transport system may be located either directly above the uppermost storage shelf or beneath the lowermost storage shelf in order to add storage capacity within the fab. A vertical module transports containers between the transport systems and the at least one storage shelf.

    摘要翻译: 本发明通常包括用于在第一输送系统和第二输送系统之间输送容器的装置。 在一个实施例中,第一输送系统包括基于天花板的输送机,第二输送系统包括基于地板的输送机。 本发明还可以包括存储架,优选地基本上水平地围绕公共垂直平面对准,其中一个传送系统的一部分。 运输系统可以位于最上面的储物架的正上方,或者位于最下面的储物架之下,以便增加储存容量。 垂直模块在运输系统和至少一个存储架之间运输容器。