公开(公告)号：US20080085413A1

公开(公告)日：2008-04-10

申请号：US11860199

申请日：2007-09-24

申请人： Kazuhito Shimoda ,  Ryo Koshiishi ,  Satoshi Tomioka ,  Hideo Kawabe

发明人： Kazuhito Shimoda ,  Ryo Koshiishi ,  Satoshi Tomioka ,  Hideo Kawabe

IPC分类号： C23C14/28 ,  B32B17/10

CPC分类号： C23C16/483 ,  C23C16/45517 ,  C23C16/45519 ,  Y10T428/31

摘要： A laser processing apparatus includes a support table, a local exhaust device, and a laser light source unit. The support table supports a processing object. The local exhaust device directs laser light into a local exhaust unit in which pressure is locally adjusted over the support table. The laser light source unit outputs the laser light. The local exhaust device is capable of relatively being lifted from the support table by injecting a lift gas to the support table. The processing object includes a multilayer film formed of two or more layers with different materials. An input unit into which reflectance of the processing object is inputted is connected to the laser light source unit.

摘要翻译： 激光加工装置包括支撑台，局部排气装置和激光光源单元。 支持表支持处理对象。 局部排气装置将激光引导到局部排气单元中，其中压力在支撑台上局部调节。 激光光源单元输出激光。 局部排气装置能够通过将提升气体注入支撑台而相对地从支撑台提升。 处理对象包括由具有不同材料的两层或更多层形成的多层膜。 输入处理对象的反射率的输入单元连接到激光光源单元。

公开(公告)号：US08922893B2

公开(公告)日：2014-12-30

申请号：US13594495

申请日：2012-08-24

申请人： Ryo Koshiishi ,  Yuichi Takai ,  Hiroyuki Nagai

发明人： Ryo Koshiishi ,  Yuichi Takai ,  Hiroyuki Nagai

IPC分类号： G02B27/10 ,  G02B3/14 ,  G02B27/22 ,  G02B26/00

CPC分类号： G02B3/14 ,  G02B26/005 ,  G02B27/2214 ,  Y10T156/10

摘要： There is provided an optical element including first and second substrates that are disposed to face each other; a pair of wall portions that are erected on an inner surface of the first substrate facing the second substrate to be adjacent to each other in a first direction and extend in a second direction different from the first direction; first and second electrodes that are disposed on wall surfaces of the pair of wall portions to be insulated from each other and face each other and are provided to be apart from the first substrate; an insulating film that covers the first and second electrodes; a third electrode that is provided on an inner surface of the second substrate facing the first substrate; and a polar liquid and a non-polar liquid that are sealed between the first substrate and the second substrate and have different refractive indexes.

摘要翻译： 提供了一种光学元件，包括彼此相对配置的第一和第二基板; 一对壁部，其竖立在所述第一基板的面向所述第二基板的内表面上，以在第一方向上彼此相邻并且沿与所述第一方向不同的第二方向延伸; 第一和第二电极，其设置在所述一对壁部的壁表面上以彼此绝缘并且彼此面对并且设置成与第一基板分离; 覆盖所述第一和第二电极的绝缘膜; 第三电极，其设置在所述第二基板的面向所述第一基板的内表面上; 以及密封在第一基板和第二基板之间并具有不同折射率的极性液体和非极性液体。

公开(公告)号：US20130057960A1

公开(公告)日：2013-03-07

申请号：US13594495

申请日：2012-08-24

申请人： Ryo Koshiishi ,  Yuichi Takai ,  Hiroyuki Nagai

发明人： Ryo Koshiishi ,  Yuichi Takai ,  Hiroyuki Nagai

IPC分类号： G02B3/12 ,  B32B38/10 ,  B32B37/14 ,  G02B27/10 ,  B32B37/02

CPC分类号： G02B3/14 ,  G02B26/005 ,  G02B27/2214 ,  Y10T156/10

摘要： There is provided an optical element including first and second substrates that are disposed to face each other; a pair of wall portions that are erected on an inner surface of the first substrate facing the second substrate to be adjacent to each other in a first direction and extend in a second direction different from the first direction; first and second electrodes that are disposed on wall surfaces of the pair of wall portions to be insulated from each other and face each other and are provided to be apart from the first substrate; an insulating film that covers the first and second electrodes; a third electrode that is provided on an inner surface of the second substrate facing the first substrate; and a polar liquid and a non-polar liquid that are sealed between the first substrate and the second substrate and have different refractive indexes.

摘要翻译： 提供了一种光学元件，包括彼此相对配置的第一和第二基板; 一对壁部，其竖立在所述第一基板的面向所述第二基板的内表面上，以在第一方向上彼此相邻并且沿与所述第一方向不同的第二方向延伸; 第一和第二电极，其设置在所述一对壁部的壁表面上以彼此绝缘并且彼此面对并且设置成与第一基板分离; 覆盖所述第一和第二电极的绝缘膜; 第三电极，其设置在所述第二基板的面向所述第一基板的内表面上; 以及密封在第一基板和第二基板之间并具有不同折射率的极性液体和非极性液体。

公开(公告)号：US20060226381A1

公开(公告)日：2006-10-12

申请号：US11279362

申请日：2006-04-11

申请人： Hideo Kawabe ,  Naoji Nada ,  Ryo Koshiishi

发明人： Hideo Kawabe ,  Naoji Nada ,  Ryo Koshiishi

IPC分类号： G01N21/86

CPC分类号： B23K26/03 ,  B23K26/066 ,  B23K26/073 ,  B23K2101/40 ,  G02B27/0933 ,  G02B27/095

摘要： An optical device is provided. The optical device including an optical member having a first main surface and a second main surface, which respectively serve as an entrance surface and an exit surface for light from a directional light source, and made of a material having a refractive index greater than 1; and a support member at least including swing means for the optical member, wherein the first and second main surfaces of the optical member swingable by the support member are able to be inclined with respect to an optical path of the light from the directional light source.

摘要翻译： 提供光学装置。 该光学装置包括具有第一主表面和第二主表面的光学构件，其分别用作来自定向光源的光的入射表面和出射表面，并且由折射率大于1的材料制成; 以及至少包括用于所述光学构件的摆动装置的支撑构件，其中由所述支撑构件摆动的所述光学构件的所述第一和第二主表面能够相对于来自所述定向光源的光的光路倾斜。

公开(公告)号：US08390175B2

公开(公告)日：2013-03-05

申请号：US12929406

申请日：2011-01-21

申请人： Ryo Koshiishi ,  Yoshihiro Oshima ,  Akira Ono

发明人： Ryo Koshiishi ,  Yoshihiro Oshima ,  Akira Ono

IPC分类号： H01L41/00 ,  G02F1/03

CPC分类号： G02B27/0006 ,  G03B17/02 ,  H04N5/2254

摘要： An optical device includes: an optical device body; a first transparent electrode film deposited on a light incident side; a second transparent electrode film so formed that the first and second transparent electrode films face away from each other; and a first ferroelectric film deposited at least between the first and second transparent electrode films, wherein the first ferroelectric film vibrates in response to a drive voltage applied through the first and second transparent electrode films.

摘要翻译： 光学装置包括：光学装置主体; 沉积在光入射侧的第一透明电极膜; 这样形成的第二透明电极膜使得第一和第二透明电极膜彼此背离; 以及至少沉积在第一和第二透明电极膜之间的第一铁电体膜，其中第一铁电膜响应于通过第一和第二透明电极膜施加的驱动电压而振动。

公开(公告)号：US20110205630A1

公开(公告)日：2011-08-25

申请号：US12929406

申请日：2011-01-21

申请人： Ryo Koshiishi ,  Yoshihiro Oshima ,  Akira Ono

发明人： Ryo Koshiishi ,  Yoshihiro Oshima ,  Akira Ono

IPC分类号： G02B27/00

CPC分类号： G02B27/0006 ,  G03B17/02 ,  H04N5/2254

摘要： An optical device includes: an optical device body; a first transparent electrode film deposited on a light incident side; a second transparent electrode film so formed that the first and second transparent electrode films face away from each other; and a first ferroelectric film deposited at least between the first and second transparent electrode films, wherein the first ferroelectric film vibrates in response to a drive voltage applied through the first and second transparent electrode films.

摘要翻译： 光学装置包括：光学装置主体; 沉积在光入射侧的第一透明电极膜; 这样形成的第二透明电极膜使得第一和第二透明电极膜彼此背离; 以及至少沉积在第一和第二透明电极膜之间的第一铁电体膜，其中第一铁电膜响应于通过第一和第二透明电极膜施加的驱动电压而振动。

公开(公告)号：US07824930B2

公开(公告)日：2010-11-02

申请号：US12100234

申请日：2008-04-09

申请人： Ryo Koshiishi ,  Hideo Kawabe ,  Nobuhiko Mukai ,  Akiko Tsutsui

发明人： Ryo Koshiishi ,  Hideo Kawabe ,  Nobuhiko Mukai ,  Akiko Tsutsui

IPC分类号： H01L21/66

CPC分类号： H01L27/3276 ,  G02F2001/136263 ,  H01L2251/568

摘要： A method of manufacturing a substrate formed with a plurality of wiring patterns on a base, includes: a first inspection step of identifying a faulty wiring pattern having electric short circuit or disconnection by performing an electric inspection respectively for the plurality of wiring patterns; a second inspection step of examining a relative position of a defect on the base and at least one of a type and a size of the defect by an optical inspection; a matching step of matching a result of the first inspection step with a result of the second inspection step, and identifying a critical defect having electric short circuit or disconnection; and a third inspection step of examining a relative position in a pixel and an effective range of the critical defect by an optical inspection.

摘要翻译： 一种制造在基座上形成有多个布线图案的基板的方法，包括：第一检查步骤，通过分别对多个布线图案执行电检查来识别具有电短路或断开的故障布线图案; 第二检查步骤，通过光学检查来检查基底上的缺陷的相对位置和缺陷的类型和尺寸中的至少一个; 将第一检查步骤的结果与第二检查步骤的结果进行匹配的匹配步骤，以及识别具有电短路或断开的临界缺陷; 以及第三检查步骤，通过光学检查来检查像素中的相对位置和临界缺陷的有效范围。

公开(公告)号：US08013270B2

公开(公告)日：2011-09-06

申请号：US11860199

申请日：2007-09-24

申请人： Kazuhito Shimoda ,  Ryo Koshiishi ,  Satoshi Tomioka ,  Hideo Kawabe

发明人： Kazuhito Shimoda ,  Ryo Koshiishi ,  Satoshi Tomioka ,  Hideo Kawabe

IPC分类号： B23K26/04 ,  A61N5/00

CPC分类号： C23C16/483 ,  C23C16/45517 ,  C23C16/45519 ,  Y10T428/31

摘要： A laser processing apparatus includes a support table, a local exhaust device, and a laser light source unit. The support table supports a processing object. The local exhaust device directs laser light into a local exhaust unit in which pressure is locally adjusted over the support table. The laser light source unit outputs the laser light. The local exhaust device is capable of relatively being lifted from the support table by injecting a lift gas to the support table. The processing object includes a multilayer film formed of two or more layers with different materials. An input unit into which reflectance of the processing object is inputted is connected to the laser light source unit.

摘要翻译： 激光加工装置包括支撑台，局部排气装置和激光光源单元。 支持表支持处理对象。 局部排气装置将激光引导到局部排气单元中，其中压力在支撑台上局部调节。 激光光源单元输出激光。 局部排气装置能够通过将提升气体注入支撑台而相对地从支撑台提升。 处理对象包括由具有不同材料的两层或更多层形成的多层膜。 输入处理对象的反射率的输入单元连接到激光光源单元。

公开(公告)号：US20100201658A1

公开(公告)日：2010-08-12

申请号：US12699413

申请日：2010-02-03

申请人： Ryo Koshiishi ,  Manabu Kodate

发明人： Ryo Koshiishi ,  Manabu Kodate

IPC分类号： G06F3/038 ,  H01L21/30

CPC分类号： H01L27/3276 ,  H01L27/124

摘要： A method of manufacturing a display device is provided, in which interlayer short formed in a capacitor in a wiring board or in an intersection between wiring lines may be repaired, and a display device is provided. A method of manufacturing a display device comprising steps of: forming a wiring board having a lower conductive film, an insulating film and an upper conductive film in order on a substrate; repairing interlayer short being short between the upper conductive film and the lower conductive film; and forming display elements on the wiring board. Laser light having a pulse width of 10 picoseconds or less is irradiated to a short-included region including the interlayer short in the step of repairing the interlayer short in order to remove at least the upper conductive film between the lower conductive film, the insulating film and the upper conductive film within the short-included region.

摘要翻译： 提供了一种制造显示装置的方法，其中可以修复在布线板中的电容器中或布线之间的交叉点形成的层间短路，并且提供显示装置。 一种制造显示装置的方法，包括以下步骤：在基板上依次形成具有下导电膜，绝缘膜和上导电膜的布线板; 在上导电膜和下导电膜之间修复层间短短的缺陷; 以及在所述布线板上形成显示元件。 将脉冲宽度为10皮秒以下的激光照射到在修复层间短路的步骤中包含层间短路的短包围区域，以便至少除去下导电膜，绝缘膜之间的上导电膜 并且在短包含区域内的上导电膜。

公开(公告)号：US20080254701A1

公开(公告)日：2008-10-16

申请号：US12100234

申请日：2008-04-09

申请人： Ryo Koshiishi ,  Hideo Kawabe ,  Nobuhiko Mukai ,  Akiko Tsutsui

发明人： Ryo Koshiishi ,  Hideo Kawabe ,  Nobuhiko Mukai ,  Akiko Tsutsui

IPC分类号： H01J9/50

CPC分类号： H01L27/3276 ,  G02F2001/136263 ,  H01L2251/568

摘要： A method of manufacturing a substrate formed with a plurality of wiring patterns on a base, includes: a first inspection step of identifying a faulty wiring pattern having electric short circuit or disconnection by performing an electric inspection respectively for the plurality of wiring patterns; a second inspection step of examining a relative position of a defect on the base and at least one of a type and a size of the defect by an optical inspection; a matching step of matching a result of the first inspection step with a result of the second inspection step, and identifying a critical defect having electric short circuit or disconnection; and a third inspection step of examining a relative position in a pixel and an effective range of the critical defect by an optical inspection.

摘要翻译： 一种制造在基座上形成有多个布线图案的基板的方法，包括：第一检查步骤，通过分别对多个布线图案执行电检查来识别具有电短路或断开的故障布线图案; 第二检查步骤，通过光学检查来检查基底上的缺陷的相对位置和缺陷的类型和尺寸中的至少一个; 将第一检查步骤的结果与第二检查步骤的结果进行匹配的匹配步骤，以及识别具有电短路或断开的临界缺陷; 以及第三检查步骤，通过光学检查来检查像素中的相对位置和临界缺陷的有效范围。