PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
    1.
    发明申请
    PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS 有权
    等离子体处理方法和等离子体处理装置

    公开(公告)号:US20120031875A1

    公开(公告)日:2012-02-09

    申请号:US13195925

    申请日:2011-08-02

    Abstract: A plasma processing method includes: etching an anti reflection coating film with plasma generated from an etching gas by using a resist film that is patterned as a mask, in a deposited film in which an Si-ARC film constituting the anti reflection coating film is formed on a layer to be etched and the ArF resist film is formed on the anti reflection coating film; and modifying the ArF resist film with plasma generated from a modifying gas including a CF4 gas, a COS gas and an Ar gas by introducing the modifying gas into a plasma processing apparatus, wherein the modifying is performed before the etching.

    Abstract translation: 一种等离子体处理方法包括:在形成有构成防反射涂膜的Si-ARC膜的沉积膜中,通过使用图案化掩模的抗蚀剂膜来蚀刻由蚀刻气体产生的等离子体的抗反射涂膜 在待蚀刻的层上,在防反射涂膜上形成ArF抗蚀剂膜; 以及通过将改性气体引入等离子体处理装置中,由包括CF 4气体,COS气体和Ar气体的改性气体产生的等离子体来改性ArF抗蚀剂膜,其中在蚀刻之前进行修饰。

    PLASMA ETCHING METHOD
    2.
    发明申请
    PLASMA ETCHING METHOD 有权
    等离子体蚀刻法

    公开(公告)号:US20080194114A1

    公开(公告)日:2008-08-14

    申请号:US12025341

    申请日:2008-02-04

    Inventor: Ryoichi Yoshida

    Abstract: In a plasma etching method, a substrate including an underlying film, an insulating film and a resist mask is plasma etched to thereby form a number of holes in the insulating film including a dense region and a sparse region by using a parallel plate plasma etching apparatus for applying a plasma-generating high frequency electric power to a space between an upper and a lower electrode and a biasing high frequency electric power to the lower electrode. The plasma etching method includes mounting the substrate on a mounting table; supplying a first process gas containing carbon and fluorine to form the holes in the insulating film to a depth close to the underlying film; and supplying a second process gas including an inert gas and another gas contain carbon and fluorine to have the holes reach the underlying film while applying a negative DC voltage to the upper electrode.

    Abstract translation: 在等离子体蚀刻方法中,包括下面的膜,绝缘膜和抗蚀剂掩模的衬底被等离子体蚀刻,从而通过使用平行板等离子体蚀刻装置在包括致密区域和稀疏区域的绝缘膜中形成多个孔 用于将等离子体产生的高频电力施加到上电极和下电极之间的空间以及向下电极施加偏压高频电力。 等离子体蚀刻方法包括将基板安装在安装台上; 提供含有碳和氟的第一工艺气体以在绝缘膜中形成靠近底层膜的深度的孔; 并且提供包括惰性气体和另一种气体的第二处理气体含有碳和氟,以使空穴到达底层膜,同时向上电极施加负的DC电压。

    Method for estimating composition of product obtained by liquefaction of coal
    3.
    发明授权
    Method for estimating composition of product obtained by liquefaction of coal 失效
    估算煤液化产物成分的方法

    公开(公告)号:US06319725B1

    公开(公告)日:2001-11-20

    申请号:US09538740

    申请日:2000-03-30

    Abstract: The present invention provides a method of estimating ingredients of liquefaction products of coal or its analogues from a resonance spectrum thereof obtained using their solid state 13C nuclear magnetic resonance spectrometer. The method comprises the first step of obtaining a resonance spectrum of coal or its analogues using a solid state 13C nuclear magnetic resonance spectrometer, the second step of determining distribution of various types of carbon having different linkage types which constitute the molecular structure of the coal or its analogues, and the third step of estimating ingredients of liquefaction products of the coal or its analogues on the basis of the determined carbon distribution.

    Abstract translation: 本发明提供一种使用其固态13C核磁共振光谱仪从其共振光谱估算煤或其类似物的液化产物成分的方法。 该方法包括使用固态13C核磁共振光谱仪获得煤或其类似物的共振谱的第一步骤,确定构成煤的分子结构的具有不同连接类型的各种类型的碳的分布的第二步骤 其类似物,以及根据确定的碳分布估算煤或其类似物的液化产物成分的第三步。

    Air bag assembly having an integral exterior nozzle
    4.
    发明授权
    Air bag assembly having an integral exterior nozzle 失效
    气囊组件具有一体的外部喷嘴

    公开(公告)号:US6050600A

    公开(公告)日:2000-04-18

    申请号:US21148

    申请日:1998-02-10

    Inventor: Ryoichi Yoshida

    CPC classification number: B60R21/23

    Abstract: An air bag assembly includes an inflatable bag which has an entrance for receiving pressurized gas. The entrance of the inflatable bag is connected with an outlet of a nozzle disposed integrally with and at an exterior of the inflatable bag. The pressurized gas is transmitted into the inflatable bag through the nozzle. An inlet of the nozzle is provided with a mouthpiece through which pressurized gas is injected.

    Abstract translation: 气囊组件包括具有用于接收加压气体的入口的可充气袋。 充气袋的入口与可充气袋一体地设置在喷嘴的外部的喷嘴的出口连接。 加压气体通过喷嘴传送到可充气袋中。 喷嘴的入口设置有吹口,加压气体通过该接口被喷射。

    Occupant protective device
    5.
    发明授权
    Occupant protective device 有权
    乘员保护装置

    公开(公告)号:US06047985A

    公开(公告)日:2000-04-11

    申请号:US146099

    申请日:1998-09-03

    Inventor: Ryoichi Yoshida

    CPC classification number: B60R21/0132 B60R21/01558 B60R2021/01225

    Abstract: An occupant protective device, which can precisely determine clash severity of a vehicle collision and suitably protect an occupant according to the clash severity, detects acceleration by an acceleration sensor 1, finds the acceleration, the magnitude of the acceleration, the variation with time of the acceleration, and the decrease in velocity in a control circuit 2, determines clash severity, and actuates inflators 3a, 3b according to the clash severity.

    Abstract translation: 可以精确地确定车辆碰撞的冲突严重性并根据冲突严重性适当地保护乘员的乘员保护装置,通过加速度传感器1检测加速度,找到加速度,加速度的大小,随着时间的变化 控制电路2中的加速度和速度的降低确定冲突严重性,并且根据冲突严重性致动充气器3a,3b。

    Retractor shaft-rotating type pretensioner
    6.
    发明授权
    Retractor shaft-rotating type pretensioner 失效
    回转器旋转型预热器

    公开(公告)号:US5190239A

    公开(公告)日:1993-03-02

    申请号:US844797

    申请日:1992-03-02

    CPC classification number: B60R22/4619 B60R2022/468

    Abstract: A retractor shaft-rotating type pretensioner for a vehicle seat belt has a pulley that is normally not engaged with the belt reel shaft of the retractor but is movable into driving engagement with the belt reel shaft upon operation of a power source and rotates it such as to rotate the reel shaft in the belt-winding direction and thereby apply a pretension to the belt. A movable spacer is detachably coupled to the pulley such that it is moved by the pulley upon rotation of the pulley by the power source from a retracted position to an engaging position in which it is engaged between the pulley and a portion of a fixed member and maintains the pulley in driving engagement with the reel shaft and in the engaging position is uncoupled from the pulley so that the pulley can continue to rotate.

    Abstract translation: 用于车辆安全带的牵开器轴旋转式预紧器具有通常不与牵开器的带卷轴接合的滑轮,但是在操作电源时可移动成与带卷轴进行驱动接合,并使其旋转,例如 以使卷轴在带卷绕方向旋转,从而对皮带施加预紧力。 可移动间隔件可拆卸地联接到滑轮,使得当皮带轮由电源从缩回位置转动到接合位置时,滑轮由滑轮移动到接合位置,在该接合位置中,滑轮与固定构件的一部分接合, 保持滑轮与卷轴的驱动接合,并且在接合位置与皮带轮脱开,从而滑轮能够继续旋转。

    Apparatus for transfer of powder into high-pressure vessel and method
for transfer
    8.
    发明授权
    Apparatus for transfer of powder into high-pressure vessel and method for transfer 失效
    用于将粉末转移到高压容器中的装置和用于转移的方法

    公开(公告)号:US4127151A

    公开(公告)日:1978-11-28

    申请号:US741301

    申请日:1976-11-12

    CPC classification number: G01F11/18 B01J3/02

    Abstract: An apparatus for the transfer of powder into a high-pressure vessel comprises a cylinder, two pistons disposed one on top of the other inside said cylinder and two openings formed in the circular wall of the cylinder, the one opening serving as an inlet for entry of the powder and the other opening serving as an outlet for exit of the powder into the high-pressure vessel. The transfer of powder from the powder hopper into the high-pressure vessel by use of said apparatus is accomplished by a method which comprises connecting the inlet of said apparatus to the discharge tube of the powder hopper and the outlet of the apparatus to the powder lead tube of the high-pressure vessel respectively, driving the two pistons so as to interpose a space therebetween communicating with the inlet opening, then moving the pistons in unison for thereby causing said space to move down the cylinder interior to a position in communication with the outlet opening so that the powder in the space can fall into the high-pressure vessel and then driving the pistons together to eliminate the space between them.

    Abstract translation: 用于将粉末转移到高压容器中的装置包括一个气缸,两个活塞,其一个在另一个的顶部设置在所述气缸内,两个开口形成在气缸的圆形壁中,一个开口用作进入口 的粉末,另一个开口用作用于将粉末排出到高压容器中的出口。 通过使用所述装置将粉末从粉末料斗转移到高压容器中的方法是通过一种方法实现的,该方法包括将所述装置的入口连接到粉末料斗的排出管和装置的出口到粉末引线 分别驱动两个活塞,以便在其间插入与入口开口连通的空间,然后一致地移动活塞,从而使所述空间沿着气缸内部向下移动到与所述高压容器连通的位置 出口开口,使得空间中的粉末可以落入高压容器中,然后将活塞驱动在一起以消除它们之间的空间。

    Plasma etching method
    9.
    发明授权
    Plasma etching method 有权
    等离子蚀刻法

    公开(公告)号:US08821742B2

    公开(公告)日:2014-09-02

    申请号:US12700571

    申请日:2010-02-04

    Abstract: A plasma etching method by using a plasma etching apparatus having a depressurizable processing chamber; a lower electrode for mounting thereon a substrate to be processed in the processing chamber; an upper electrode facing the lower electrode in the processing chamber with a plasma generation region formed therebetween; a radio frequency power supply unit for applying a radio frequency power between the upper electrode and the lower electrode to thereby form a radio frequency electric field in the plasma generation region, the method comprising: supplying a first gas including etchant gas to an upper gas inlet to introduce the first gas through the upper electrode into the plasma generation region; and feeding a second gas including dilution gas to a side gas inlet to introduce the second gas through a sidewall of the processing chamber into the plasma generation region.

    Abstract translation: 一种使用具有可减压处理室的等离子体蚀刻装置的等离子体蚀刻方法; 用于在处理室中安装待处理的基板的下电极; 在处理室中面对下电极的上电极,其间形成有等离子体产生区域; 射频电源单元,用于在所述上电极和所述下电极之间施加射频电力,从而在所述等离子体产生区域中形成射频电场,所述方法包括:将包括蚀刻剂气体的第一气体供应到上部气体入口 将第一气体通过上部电极引入等离子体产生区域; 并将包括稀释气体的第二气体供给到侧气体入口,以将第二气体通过处理室的侧壁引入等离子体产生区域。

    Child seat with deployable side airbags
    10.
    发明授权
    Child seat with deployable side airbags 失效
    带可展开侧面安全气囊的儿童座椅

    公开(公告)号:US07293828B2

    公开(公告)日:2007-11-13

    申请号:US10830305

    申请日:2004-04-23

    Inventor: Ryoichi Yoshida

    Abstract: A child seat includes a seat body having a seat portion, a rear portion, and left and right side panels; airbags to be inflated at sides of a head of a child; and hollow cushions disposed along inner surfaces of the side panels. When an automobile equipped with the child seat collides, the airbags are inflated at the sides of the head of the child, so that an impact applied to the head is absorbed. Furthermore, the cushions absorb a large impact from sides in a side collision and the like. The cushions are preferably disposed below regions where the airbags are inflated. The cushions receive a part of the child other than the head to absorb the impact.

    Abstract translation: 儿童座椅包括具有座部,后部以及左右侧板的座体; 气囊在儿童头部充气; 以及沿着侧板的内表面设置的空心衬垫。 当配备儿童座椅的汽车碰撞时,安全气囊在儿童头部的侧面膨胀,从而吸收施加到头部的冲击。 此外,靠垫在侧面碰撞等中吸收来自侧面的大的冲击。 垫子优选地设置在气囊膨胀的区域的下方。 垫子接收除头部以外的一部分小孩以吸收冲击力。

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