Abstract:
A plasma processing method includes: etching an anti reflection coating film with plasma generated from an etching gas by using a resist film that is patterned as a mask, in a deposited film in which an Si-ARC film constituting the anti reflection coating film is formed on a layer to be etched and the ArF resist film is formed on the anti reflection coating film; and modifying the ArF resist film with plasma generated from a modifying gas including a CF4 gas, a COS gas and an Ar gas by introducing the modifying gas into a plasma processing apparatus, wherein the modifying is performed before the etching.
Abstract:
In a plasma etching method, a substrate including an underlying film, an insulating film and a resist mask is plasma etched to thereby form a number of holes in the insulating film including a dense region and a sparse region by using a parallel plate plasma etching apparatus for applying a plasma-generating high frequency electric power to a space between an upper and a lower electrode and a biasing high frequency electric power to the lower electrode. The plasma etching method includes mounting the substrate on a mounting table; supplying a first process gas containing carbon and fluorine to form the holes in the insulating film to a depth close to the underlying film; and supplying a second process gas including an inert gas and another gas contain carbon and fluorine to have the holes reach the underlying film while applying a negative DC voltage to the upper electrode.
Abstract:
The present invention provides a method of estimating ingredients of liquefaction products of coal or its analogues from a resonance spectrum thereof obtained using their solid state 13C nuclear magnetic resonance spectrometer. The method comprises the first step of obtaining a resonance spectrum of coal or its analogues using a solid state 13C nuclear magnetic resonance spectrometer, the second step of determining distribution of various types of carbon having different linkage types which constitute the molecular structure of the coal or its analogues, and the third step of estimating ingredients of liquefaction products of the coal or its analogues on the basis of the determined carbon distribution.
Abstract:
An air bag assembly includes an inflatable bag which has an entrance for receiving pressurized gas. The entrance of the inflatable bag is connected with an outlet of a nozzle disposed integrally with and at an exterior of the inflatable bag. The pressurized gas is transmitted into the inflatable bag through the nozzle. An inlet of the nozzle is provided with a mouthpiece through which pressurized gas is injected.
Abstract:
An occupant protective device, which can precisely determine clash severity of a vehicle collision and suitably protect an occupant according to the clash severity, detects acceleration by an acceleration sensor 1, finds the acceleration, the magnitude of the acceleration, the variation with time of the acceleration, and the decrease in velocity in a control circuit 2, determines clash severity, and actuates inflators 3a, 3b according to the clash severity.
Abstract:
A retractor shaft-rotating type pretensioner for a vehicle seat belt has a pulley that is normally not engaged with the belt reel shaft of the retractor but is movable into driving engagement with the belt reel shaft upon operation of a power source and rotates it such as to rotate the reel shaft in the belt-winding direction and thereby apply a pretension to the belt. A movable spacer is detachably coupled to the pulley such that it is moved by the pulley upon rotation of the pulley by the power source from a retracted position to an engaging position in which it is engaged between the pulley and a portion of a fixed member and maintains the pulley in driving engagement with the reel shaft and in the engaging position is uncoupled from the pulley so that the pulley can continue to rotate.
Abstract:
Discharge of a high-pressure gas-occluding liquid from a pressureproof container holding therein said liquid in a compressed state is effected by a method which comprises connecting said pressureproof container through the medium of a valve to a pressureproof receptacle, allowing the liquid to transfer into said pressureproof receptacle, diminishing the pressure within said pressureproof receptacle for thereby separating the occluded high-pressure gas from the liquid and subsequently releasing the liquid alone from the receptacle. For the purpose of said discharge, there is used a device which comprises a pressureproof container, a pressureproof receptacle and a valve through the medium of which said pressureproof container and said pressureproof receptacle are connected, said pressureproof receptacle being provided in the upper portion thereof with a piston adapted so as to have the motion thereof limited via a valve by means of a spring and in the inner portion thereof with a liquid discharge tube laid past a piston and a valve.
Abstract:
An apparatus for the transfer of powder into a high-pressure vessel comprises a cylinder, two pistons disposed one on top of the other inside said cylinder and two openings formed in the circular wall of the cylinder, the one opening serving as an inlet for entry of the powder and the other opening serving as an outlet for exit of the powder into the high-pressure vessel. The transfer of powder from the powder hopper into the high-pressure vessel by use of said apparatus is accomplished by a method which comprises connecting the inlet of said apparatus to the discharge tube of the powder hopper and the outlet of the apparatus to the powder lead tube of the high-pressure vessel respectively, driving the two pistons so as to interpose a space therebetween communicating with the inlet opening, then moving the pistons in unison for thereby causing said space to move down the cylinder interior to a position in communication with the outlet opening so that the powder in the space can fall into the high-pressure vessel and then driving the pistons together to eliminate the space between them.
Abstract:
A plasma etching method by using a plasma etching apparatus having a depressurizable processing chamber; a lower electrode for mounting thereon a substrate to be processed in the processing chamber; an upper electrode facing the lower electrode in the processing chamber with a plasma generation region formed therebetween; a radio frequency power supply unit for applying a radio frequency power between the upper electrode and the lower electrode to thereby form a radio frequency electric field in the plasma generation region, the method comprising: supplying a first gas including etchant gas to an upper gas inlet to introduce the first gas through the upper electrode into the plasma generation region; and feeding a second gas including dilution gas to a side gas inlet to introduce the second gas through a sidewall of the processing chamber into the plasma generation region.
Abstract:
A child seat includes a seat body having a seat portion, a rear portion, and left and right side panels; airbags to be inflated at sides of a head of a child; and hollow cushions disposed along inner surfaces of the side panels. When an automobile equipped with the child seat collides, the airbags are inflated at the sides of the head of the child, so that an impact applied to the head is absorbed. Furthermore, the cushions absorb a large impact from sides in a side collision and the like. The cushions are preferably disposed below regions where the airbags are inflated. The cushions receive a part of the child other than the head to absorb the impact.