公开(公告)号：US5591262A

公开(公告)日：1997-01-07

申请号：US410315

申请日：1995-03-24

申请人： Hiroyoshi Sago ,  Hideya Kobari ,  Koji Ueda ,  Hidenori Miyamoto ,  Ryuzo Takatsuki

发明人： Hiroyoshi Sago ,  Hideya Kobari ,  Koji Ueda ,  Hidenori Miyamoto ,  Ryuzo Takatsuki

IPC分类号： G03F7/16 ,  B05C11/08 ,  H01L21/00 ,  H01L21/027 ,  H01L21/304 ,  H01L21/306 ,  H01L21/683 ,  B05C7/00

CPC分类号： H01L21/67051 ,  Y10S134/902

摘要： The invention disclosed defined a vertically extending passage through the rotary center of an inner cup or the rotary center of a spinner in a notary chemical treater, disposes a stationary cleaning fluid nozzle in the passage, and injects the cleaning fluid from the nozzle to clean a lid of the rotary chemical treater and the underside of an object treatment within the treater. The underside of the lid and the underside of the objective part are efficiently cleaned, and the need for sealing the movable parts against the cleaning fluid is eliminated because the nozzle is stationary, ensuring the prevention of the cleaning fluid from leaking.

摘要翻译： 本发明公开了一种通过内杯的旋转中心或旋转器在公证化学处理器中的旋转中心的垂直延伸的通道，将固定的清洁流体喷嘴置于通道中，并将喷嘴从喷嘴喷射到清洁 旋转化学处理器的盖子和处理器内的物体处理的下侧。 盖子的下侧和目标部分的下侧被有效地清洁，并且由于喷嘴是静止的，消除了将可动部件密封在清洁流体上的需要，从而确保防止清洗液体泄漏。