SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME
    1.
    发明申请
    SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME 审中-公开
    半导体器件及其制造方法

    公开(公告)号:US20110284957A1

    公开(公告)日:2011-11-24

    申请号:US13093073

    申请日:2011-04-25

    IPC分类号: H01L29/78 H01L21/78

    摘要: To fabricate a power MOSFET, etc. high in voltage-proofing (or breakdown voltage) and low in ON resistance (or On-state resistance) by a trench filling method, trial manufacture of power MOSFETs, etc. has been repeated with varying internal structures and layouts of super junction structures in a chip inner region located inside a guard ring. As a result, there occasionally occurred a source-drain voltage-proofing defect attributable to outer end portions of a supper junction structure. In one aspect of the present invention there is provided a semiconductor device having a power semiconductor element with a super junction structure introduced substantially throughout the whole surface of a drift region, the super junction structure being provided substantially throughout the whole surfaces of end portions of a semiconductor chip which configures the semiconductor device.

    摘要翻译: 为了通过沟槽填充方法制造高耐压(或击穿电压)和低导通电阻(或导通电阻)的功率MOSFET等,已经重复了功率MOSFET的试验制造,内部变化 位于保护环内部的芯片内部区域中的超结结构的结构和布局。 结果,有时会发生源于超级结结构的外端部的源极 - 漏极电压防止缺陷。 在本发明的一个方面中,提供了一种半导体器件,其具有基本上在漂移区的整个表面上引入超导结的功率半导体元件,超连接结构基本上设置在整个表面的整个表面 配置半导体器件的半导体芯片。

    Laser generator
    2.
    发明授权
    Laser generator 有权
    激光发生器

    公开(公告)号:US07315561B2

    公开(公告)日:2008-01-01

    申请号:US10553084

    申请日:2004-11-16

    IPC分类号: H01S3/22

    摘要: Flow laminators are attached to gas introducing parts installed in a laser generator preventing impurities from attaching to surfaces of a translucent mirror and a condensing lens. The flow laminators prevent airflow from producing a turbulent flow and air on the surface of the mirror and the lens are cleaned up, therewith reducing attachment of impurities further.

    摘要翻译: 流动层压机连接到安装在激光发生器中的气体引入部件,防止杂质附着到半透明反射镜和聚光透镜的表面。 流动层压机防止气流产生湍流,反射镜表面上的空气被清理,从而减少了杂质的附着。

    Laser oscillator and laser machining apparatus
    3.
    发明授权
    Laser oscillator and laser machining apparatus 有权
    激光振荡器和激光加工设备

    公开(公告)号:US09379511B2

    公开(公告)日:2016-06-28

    申请号:US13203778

    申请日:2010-03-08

    摘要: A laser oscillator includes a blower for blowing laser gas to discharge tubes; a gas circulation path for connecting discharge tubes and a blower; a gear chamber pressure detector for detecting the pressure of the gear chamber disposed in the blower; and an alarm part for issuing an alarm when the pressure detected in the gear chamber pressure detector is higher than a predetermined pressure. The predetermined pressure is set based on the average value of the pressure on the laser gas inlet side and the pressure on the laser gas outlet side of the blower. This configuration can prevent the entry of the oil mist generated from the blower into the gas circulation path and an increase in the gas consumption, while maintaining stable laser output for an extended period of time without increasing the running cost.

    摘要翻译: 激光振荡器包括用于将激光气体吹送到放电管的鼓风机; 用于连接放电管和鼓风机的气体循环路径; 用于检测设置在鼓风机中的齿轮室的压力的齿轮室压力检测器; 以及当在齿轮室压力检测器中检测到的压力高于预定压力时发出报警的报警部件。 基于激光气体入口侧的压力的平均值和鼓风机的激光气体出口侧的压力来设定预定压力。 这种结构可以防止从鼓风机产生的油雾进入气体循环路径并增加气体消耗,同时在不增加运行成本的同时保持稳定的激光输出。

    Position controlling device
    4.
    发明授权
    Position controlling device 有权
    位置控制装置

    公开(公告)号:US08082048B2

    公开(公告)日:2011-12-20

    申请号:US12247771

    申请日:2008-10-08

    申请人: Satoshi Eguchi

    发明人: Satoshi Eguchi

    IPC分类号: G05B11/32 G05B11/02 G05D1/02

    CPC分类号: G05B19/404 G05B2219/49176

    摘要: A structure is provided in which a thrust feed forward structure for operating a structure to be driven without vibration and a control structure which simultaneously compensates for positional deviation caused by the thrust feed forward structure and positional deviation caused by a base displacement are included in a position controlling device (3). Alternatively, a structure is provided in which an acceleration and deceleration process for realizing response of the position of the structure to be driven and base displacement without vibration and a control structure which determines a feed forward amount with respect to a position instruction value after the acceleration and deceleration process are provided to the position controlling device.

    摘要翻译: 提供一种结构,其中用于操作无振动的结构的推进前馈结构和同时补偿由推力前馈结构引起的位置偏差和由基座位移引起的位置偏差的控制结构包括在位置 控制装置(3)。 或者,提供一种结构,其中实现用于实现待驱动结构的位置的响应的加速和减速过程以及没有振动的基座位移以及相对于加速之后的位置指令值确定前馈量的控制结构 并且向位置控制装置提供减速处理。

    Axis-of-rotation position control device
    5.
    发明授权
    Axis-of-rotation position control device 有权
    旋转轴位置控制装置

    公开(公告)号:US07750592B2

    公开(公告)日:2010-07-06

    申请号:US11969090

    申请日:2008-01-03

    申请人: Satoshi Eguchi

    发明人: Satoshi Eguchi

    IPC分类号: G05B13/04 G05D3/12

    CPC分类号: G05B13/042

    摘要: When performing numerical control of a rotary table, the moment of inertia and the center of gravity of a control target change because of a placed object fixed onto the rotary table. A rotary table to which a placed object has been fixed serves as a target plant, the actual motion of this is compared with motion calculated by an identification model of the target plant, and a torque command value is corrected. The identification model comprises a term pertaining to angular acceleration and a term pertaining to angle of rotation, and by including the term pertaining to angle of rotation, correction of a torque command corresponding to a change in the center of gravity can be performed.

    摘要翻译: 当进行旋转工作台的数字控制时,控制目标的惯性矩和重心因固定在旋转工作台上的放置物体而改变。 固定有放置对象的旋转台用作目标工厂,将其的实际运动与由目标工厂的识别模型计算的运动进行比较,并且校正转矩指令值。 识别模型包括与角加速度有关的术语和与旋转角度有关的术语,并且通过包括关于旋转角度的术语,可以执行与重心的改变相对应的扭矩命令的校正。

    Laser generator
    7.
    发明申请
    Laser generator 有权
    激光发生器

    公开(公告)号:US20060187996A1

    公开(公告)日:2006-08-24

    申请号:US10553084

    申请日:2004-11-16

    IPC分类号: H01S3/08 H01S3/13

    摘要: Flow laminators are attached to gas introducing parts installed in a laser generator preventing impurities from attaching to surfaces of a translucent mirror and a condensing lens. The flow laminators prevent airflow from producing a turbulent flow and air on the surface of the mirror and the lens are cleaned up, therewith reducing attachment of impurities further.

    摘要翻译: 流动层压机连接到安装在激光发生器中的气体引入部件,防止杂质附着到半透明反射镜和聚光透镜的表面。 流动层压机防止气流产生湍流,反射镜表面上的空气被清理,从而减少了杂质的附着。

    Gas laser oscillator
    8.
    发明授权

    公开(公告)号:US06434181B1

    公开(公告)日:2002-08-13

    申请号:US09843950

    申请日:2001-04-30

    IPC分类号: H01S3097

    摘要: A gas laser oscillator having at least three discharge tubes disposed along the optical axis, and a spacer having an opening centered on the optical axis. The spacer is disposed between a partially reflective mirror and the closest discharge tube. Further, the discharge tubes are disposed in series along the optical axis, and satisfy the following three formulas simultaneously: Formula 1 r1/r2 > 1.0 Formula 2 L2/(L1 + L2)

    Deflection-error-reduced position control apparatus for ball screw drive system
    9.
    发明授权
    Deflection-error-reduced position control apparatus for ball screw drive system 失效
    滚珠丝杠驱动系统的偏转误差位置控制装置

    公开(公告)号:US06184644B2

    公开(公告)日:2001-02-06

    申请号:US09079365

    申请日:1998-05-15

    申请人: Satoshi Eguchi

    发明人: Satoshi Eguchi

    IPC分类号: G05B19404

    摘要: In an apparatus for controlling the position of an object driven by a servomotor via a ball screw drive system, parameters of the ball screw drive system are determined from a position command value, an acceleration command value, a torque command value and a motor speed, based on which a dynamic deflection extent while the object is driven at an adjustable speed is calculated. To compensate for this dynamic deflection extent, a deflection compensation command section calculates a deflection compensation value, a deflection speed compensation value, and a deflection torque compensation value. These compensation values are added to their related sections in the position control apparatus individually and collectively compensate for the dynamic deflection.

    摘要翻译: 在通过滚珠丝杠驱动系统控制由伺服马达驱动的物体的位置的装置中,根据位置指令值,加速度指令值,转矩指令值和马达速度来确定滚珠丝杠驱动系统的参数, 计算出物体以可调速度驱动时的动态偏转程度。 为了补偿该动态偏转程度,偏转补偿指令部分计算偏转补偿值,偏转速度补偿值和偏转转矩补偿值。 这些补偿值被单独地添加到位置控制装置的相关部分,并且共同补偿动态偏转。

    Laser generator
    10.
    发明授权
    Laser generator 失效
    激光发生器

    公开(公告)号:US5850412A

    公开(公告)日:1998-12-15

    申请号:US765270

    申请日:1996-12-20

    CPC分类号: H01S3/005 B23K26/704

    摘要: The present invention relates to a laser generator in which a laser beam is generated by energizing a laser medium and is amplified optically with optically amplifying mirrors, and the laser beam is received by a absorber, wherein a spacer 9 having a through hole 9a for passing therethrough the laser beam and at least one small second through hole 9b is arranged at a circumference of an absorber 7, and a cooling medium 12 circulates in the small second through hole 9b of the spacer 9. In this structure, if a scattering laser beam is generated at the circumference of the laser beam absorber, a parallelism of the optical amplifying mirrors is maintained so that the laser generator can generate the stable laser beam.

    摘要翻译: PCT No.PCT / JP96 / 01125 Sec。 371日期1996年12月20日第 102(e)日期1996年12月20日PCT 1996年4月25日PCT PCT。 出版物WO96 / 34438 日期:1996年10月31日本发明涉及一种激光发生器,其中通过激励激光介质产生激光束并用光学放大镜光学放大,激光束被吸收体接收,其中具有 用于通过激光束的通孔9a和至少一个小的第二通孔9b布置在吸收体7的圆周上,并且冷却介质12在间隔件9的小的第二通孔9b中循环。在该结构中, 如果在激光束吸收体的圆周处产生散射激光束,则保持光放大镜的平行度,使得激光发生器能够产生稳定的激光束。