摘要:
In an oscillating apparatus or a frequency detecting apparatus in which a center frequency and a variable frequency range are freely or optionally established with a high stability and a high accuracy, a first frequency component of a signal from a first crystal oscillator and a second frequency component of another signal from a second crystal oscillator are subjected to a synthesizing operation in a synthesizer and to other operations to obtain a desired center frequency and a desired variable frequency range.
摘要:
To provide an electron exposure apparatus capable of providing high resolution and performing electron exposure at high speed, integrated tips are used. Only the tips provided at ends control distances between the tips and the surface of a wafer, and the tips used for electron exposure follow the wafer according to deformations of cantilevers, which occur due to the Coulomb force resultant from a voltage applied to each tip.
摘要:
A method of coating by supplying a liquid material from a nozzle tip to form a film on a substrate surface facing to the nozzle, having the steps of: preparing a translation mechanism, which is capable of moving the nozzle in an in-plane direction and in a thickness direction of the substrate; making the nozzle to come gradually closer to the substrate, after positioning of the nozzle on the in-plane of the substrate, by using the translation mechanism; detecting electric current flowing through the nozzle from the substrate surface, when a semiconductor droplet supplied from the nozzle tip contacts with an electrode installed at the substrate surface; stopping accession of the nozzle to the substrate, when the electric current exceeds threshold value set in advance; and making the nozzle tip apart from the substrate farther than in the stopping, so as to coat the substrate with the liquid material.
摘要:
In an oscillating apparatus or a frequency detecting apparatus in which a center frequency and a variable frequency range are freely or optionally established with a high stability and a high accuracy, a first frequency component of a signal from a first crystal oscillator and a second frequency component of another signal from a second crystal oscillator are subjected to a synthesizing operation in a synthesizer and to other operations to obtain a desired center frequency and a desired variable frequency range.
摘要:
Current passed through a resist layer or insulating layer is controlled by changing the amplitude of an AC voltage to provide an electron exposure device or electric characteristics evaluation device using a scanning probe.
摘要:
A surface of an insulator or semiconductor substrate is irradiated with a beam such as an electron beam, an electromagnetic wave beam, an ion beam, etc. to excite carriers so as to form an electrical conductive layer on the surface of and in the inside of the substrate to thereby make it possible to perform observation and micro working on the insulator by using a scanning tunneling microscope.
摘要:
At the time of carrying out measurement of a biological tissue with a probe microscope, measurement is to be realized while maintain survival conditions for a cell.As a holder for the probe microscope, a measurement holder including: a container in which a measurement object is housed; a first cover section which covers at least a part of the measurement object and has an aperture for inserting a measurement probe; and a second cover section which is connected to the first cover section, covers the container, and has an aperture for inserting the measurement probe, is used.
摘要:
A method of coating by supplying a liquid material from a nozzle tip to form a film on a substrate surface facing to the nozzle, having the steps of: preparing a translation mechanism, which is capable of moving the nozzle in an in-plane direction and in a thickness direction of the substrate; making the nozzle to come gradually closer to the substrate, after positioning of the nozzle on the in-plane of the substrate, by using the translation mechanism; detecting electric current flowing through the nozzle from the substrate surface, when a semiconductor droplet supplied from the nozzle tip contacts with an electrode installed at the substrate surface; stopping accession of the nozzle to the substrate, when the electric current exceeds threshold value set in advance; and making the nozzle tip apart from the substrate farther than in the stopping, so as to coat the substrate with the liquid material.
摘要:
A buffer circuit ID provided for connecting an atom level device (for example, an Atom Relay Transistor circuit), formed by arranging atoms in a predetermined pattern, to a device such as a semiconductor device and a quantum device. The buffer circuit can be formed as a voltage or current amplification circuit. The voltage amplification circuit may be a single electron transistor circuit, and the current amplification circuit may be an avalanche amplification device circuit. The Atom Relay Transistor circuit and the device such as a semiconductor device and a quantum device are formed substantially on the same flat insulating member, and connected by a fine connection structure made of a conductive body such as metal.
摘要:
A magnetic force microscope capable of measuring the absolute value of a magnetic field with high resolution without causing a change in magnetization state of the probe. The magnetic force microscope includes a cantilever, a probe, a displacement detector that detects a displacement of the probe, a specimen carrier, and various transfer units. The magnetic force microscope that measures an undulation distribution as well as a magnetic field distribution on the surface of a specimen placed on the specimen carrier is further provided with a magnetic-field impress-unit that impresses a magnetic field to the probe, and an output of the magnetic-field impress-unit is controlled such that a magnetic force impressed onto the probe 5 is turned zero to thereby measure a magnetic field distribution on the surface of the specimen.