公开(公告)号：US20090279284A1

公开(公告)日：2009-11-12

申请号：US12089974

申请日：2006-07-19

申请人： Seiji Takeuchi ,  Tetsuya Hamada ,  Noriyuki Ohashi

发明人： Seiji Takeuchi ,  Tetsuya Hamada ,  Noriyuki Ohashi

IPC分类号： G09F13/08 ,  F21K7/00

CPC分类号： G02B6/0068 ,  G02B6/003 ,  G02B6/0073 ,  G02B6/0085 ,  G02F1/133615

摘要： In the case where RGB light emitting elements are used as light sources of a surface emitting type illumination device, the occurrence of color irregularity in the vicinity of a light incident surface is prevented, so that uniform white light is obtained on an entire light outgoing surface. In a light source device including light emitting elements of respective colors including red light emitting elements, green light emitting elements, and blue light emitting elements that emit light in a red (R) wavelength range, light in a green (G) wavelength range, and light in a blue (B) wavelength range, respectively, the light emitting elements being provided on one principal surface of a substrate, the light emitting elements of the respective colors are aligned in a longitudinal direction of the substrate, the number of the green light emitting elements is larger than the number of each of the red light emitting elements and the blue light emitting elements, and the light emitting elements of the respective colors in the longitudinal direction of the substrate are aligned at regular Intervals for each of the colors.

摘要翻译： 在使用RGB发光元件作为表面发光型照明装置的光源的情况下，防止在光入射面附近发生颜色不规则，使得在整个光出射面上获得均匀的白光 。 在包括发射红色（R）波长范围的光的红色发光元件，绿色发光元件和蓝色发光元件的各种颜色的发光元件的光源装置中，具有绿色（G）波长范围的光， 和蓝色（B）波长范围的光，发光元件分别设置在基板的一个主表面上，各颜色的发光元件沿基板的纵向排列，绿色的数量 发光元件大于红色发光元件和蓝色发光元件的数量，并且基板的纵向方向上的各种颜色的发光元件以每种颜色的规则间隔对准。

公开(公告)号：US07573563B2

公开(公告)日：2009-08-11

申请号：US11366356

申请日：2006-03-01

申请人： Kenji Yamazoe ,  Seiji Takeuchi ,  Akiyoshi Suzuki

发明人： Kenji Yamazoe ,  Seiji Takeuchi ,  Akiyoshi Suzuki

IPC分类号： G03B27/72 ,  G03B27/42 ,  G03B27/54

CPC分类号： G03F7/7085 ,  G01J4/04 ,  G03F7/70058 ,  G03F7/70566 ,  G03F7/70591

摘要： An exposure apparatus includes an illumination optical system for illuminating the reticle using the ultraviolet light from the light source, and a polarization measuring unit measuring the polarization state of the ultraviolet light, the polarization measuring unit including an optical unit for providing at least three different phase differences to the ultraviolet light that has passed at least part of the illumination optical system, a polarization element for providing a different transmittance in accordance with a polarization state of the ultraviolet light that has passed the optical unit, and an image pickup device for detecting a light intensity of the ultraviolet light that has passed the polarization element, the polarization measuring unit measuring the polarization state of the ultraviolet light that has passed the at least part of the illumination optical system based on a detection result of the image pickup device.

摘要翻译： 曝光装置包括：照明光学系统，其使用来自光源的紫外光照射标线片;以及偏振光测量单元，测量紫外光的偏振状态，所述偏振光测量单元包括用于提供至少三个不同相位的光学单元 与通过照明光学系统的至少一部分的紫外线的差异，根据通过光学单元的紫外线的偏振状态提供不同透射率的偏振元件，以及用于检测 通过偏振元件的紫外线的光强度，所述偏振光测定单元，根据所述摄像元件的检测结果，测量已经通过所述照明光学系统的至少一部分的紫外线的偏振状态。

公开(公告)号：US07262920B2

公开(公告)日：2007-08-28

申请号：US10684294

申请日：2003-10-10

申请人： Yasuyuki Unno ,  Seiji Takeuchi

发明人： Yasuyuki Unno ,  Seiji Takeuchi

IPC分类号： G02B3/00

CPC分类号： G03F7/70966 ,  C30B11/00 ,  C30B29/12 ,  G02B1/02 ,  Y10S117/918

摘要： An optical element and a manufacturing method therefor, an exposure apparatus, and a device manufacturing method that can reduce the effect of intrinsic birefringence under high NA conditions. According to an optical element as one aspect of the present invention, an angle between a [0 0 1] axis of an isometric crystal and an optical axis is less than 10°, and preferably 0°.

摘要翻译： 一种光学元件及其制造方法，曝光装置和可以在高NA条件下降低固有双折射效应的器件制造方法。 根据作为本发明的一个方面的光学元件，等轴晶体的[0 0]轴与光轴之间的角度小于10°，优选为0°。

公开(公告)号：US07015456B2

公开(公告)日：2006-03-21

申请号：US10429742

申请日：2003-05-06

申请人： Seiji Takeuchi ,  Yasuhiro Kishikawa

发明人： Seiji Takeuchi ,  Yasuhiro Kishikawa

IPC分类号： H01J40/14

CPC分类号： G03F7/7085 ,  G01J4/04 ,  G03F7/70566

摘要： A polarization state detecting system includes a first dividing device for dividing incident light into two light beams having the same polarization state as the incident light, a detector for detecting one of the two light beams from the first dividing device, through a polarizer, and an acquisition device for acquiring information regarding the polarization state of the incident light on the basis of an output of the detector. The first dividing device includes a first element, a second element and a third element. The second element is disposed so that a p-polarization component reflected by the first element is reflected by the second element as an s-polarization component. The third element is disposed so that a p-polarization component transmitted through the first element is reflected by the third element as an s-polarization component, and one of the two light beams is light reflected by the first element and reflected by the second element, while the other of the two light beams is light transmitted through the first element and transmitted through the third element.

摘要翻译： 偏振态检测系统包括：第一分割装置，用于将入射光分成具有与入射光相同的偏振状态的两个光束;检测器，用于通过偏振器检测来自第一分割装置的两个光束中的一个;以及 获取装置，用于基于检测器的输出获取关于入射光的偏振状态的信息。 第一分割装置包括第一元件，第二元件和第三元件。 第二元件设置成使得由第一元件反射的p偏振分量作为s偏振分量被第二元件反射。 第三元件设置成使得透过第一元件的p偏振分量被第三元件作为s偏振分量反射，并且两个光束中的一个被第一元件反射并由第二元件反射 而两个光束中的另一个光透过第一元件透过第三元件。

公开(公告)号：US06835215B2

公开(公告)日：2004-12-28

申请号：US10021093

申请日：2001-12-19

申请人： Hidetoshi Honbo ,  Seiji Takeuchi ,  Hideto Momose ,  Tatsuo Horiba ,  Yasushi Muranaka ,  Yoshito Ishii

发明人： Hidetoshi Honbo ,  Seiji Takeuchi ,  Hideto Momose ,  Tatsuo Horiba ,  Yasushi Muranaka ,  Yoshito Ishii

IPC分类号： H01M600

CPC分类号： H01M4/587 ,  C01B32/20 ,  C01P2002/74 ,  C01P2004/61 ,  C01P2006/40 ,  C01P2006/80 ,  H01M4/133 ,  H01M4/1391 ,  H01M4/1393 ,  H01M4/366 ,  H01M4/505 ,  H01M4/525 ,  H01M10/0525 ,  H01M10/058 ,  H01M2004/021 ,  Y02T10/7011 ,  Y10T29/49108 ,  Y10T29/49112

摘要： Provided is a carbon material having a superior reversibility in lithium intercalation-deintercalation reaction, and a non-aqueous secondary battery using the carbon material as an active material for a negative electrode, which has a high energy density and an excellent rapid charging and discharging characteristics. Graphite powder having a maximum particle diameter of less than 100 &mgr;m and an existing reaction of rhombohedral structure in the crystalline structure of less than 20% is used as an active material for the negative electrode of the non-aqueous secondary battery. The graphite powder can be obtained by pulverizing raw graphite with a jet mill, and subsequently treating the powder at a temperature equal to or higher than 900°C.

摘要翻译： 提供了一种具有优异的锂嵌入 - 脱插反应的可逆性的碳材料和使用碳材料作为负极活性物质的非水二次电池，其具有高的能量密度和优异的快速充放电特性 。 作为非水二次电池的负极的活性物质，使用最大粒径小于100μm的石墨粉末和晶体结构中菱方结构的现有反应小于20％。 石墨粉末可以通过用喷射磨粉碎原料石墨，然后在等于或高于900℃的温度下处理粉末来获得。

公开(公告)号：US06638662B2

公开(公告)日：2003-10-28

申请号：US09505203

申请日：2000-02-16

申请人： Junya Kaneda ,  Seiji Takeuchi ,  Noriyuki Watanabe ,  Takahiro Yamaki ,  Yasushi Muranaka ,  Yasuhisa Aono

发明人： Junya Kaneda ,  Seiji Takeuchi ,  Noriyuki Watanabe ,  Takahiro Yamaki ,  Yasushi Muranaka ,  Yasuhisa Aono

IPC分类号： H01M458

CPC分类号： H01M4/133 ,  H01M4/38 ,  H01M4/587 ,  Y10T29/49108

摘要： A lithium secondary battery comprising a positive electrode, a negative electrode containing a lithium ion-storable/dischargeable negative electrode-active material and a lithium ion conductive, non-aqueous electrolytic solution or polymer electrolyte, characterized in that the negative electrode-active material comprises particles of carbonaceous material and particles of metal and metal oxide capable of enhancing lithium ion interstitial diffusibility/releasability as embedded in the particles of carbonaceous material, particles of carbonaceous materials and lithium ion interstitially diffusible/releasable particles being prepared by carbonization of a mixture thereof with MA or carbon precursor, has a high capacity and a long cycle life, and can be used in various electric appliances.

摘要翻译： 一种锂二次电池，其包含正极，含锂离子可储存/可放电负极活性材料的负极和锂离子传导性非水电解液或聚合物电解质，其特征在于，所述负极活性物质包含 碳质材料颗粒和能够提高锂离子间隙扩散性/脱模性的金属和金属氧化物颗粒，其包含在碳质材料颗粒中，碳质材料颗粒和锂离子间隙可扩散/释放颗粒通过其与 MA或碳前体，具有高容量和长的循环寿命，可用于各种电器。

公开(公告)号：US06611376B1

公开(公告)日：2003-08-26

申请号：US09089480

申请日：1998-06-02

申请人： Eiichi Murakami ,  Seiji Takeuchi

发明人： Eiichi Murakami ,  Seiji Takeuchi

IPC分类号： G02B2744

CPC分类号： G03F7/70216 ,  G02B5/1847 ,  Y10S359/90

摘要： The present invention discloses a diffractive optical element whose optical axis can be precisely positioned, and a method of manufacturing the diffractive optical element. The diffractive optical element includes a region provided with a concentric uneven pattern and having a predetermined light bending characteristic, and a peripheral section worked so that the optical axis of the diffractive optical element determined by the light bending characteristic of the region aligns with the center of the profile of the diffractive optical element.

摘要翻译： 本发明公开了一种可精确定位其光轴的衍射光学元件，以及制造衍射光学元件的方法。 衍射光学元件包括设置有同心凹凸图案并具有预定光弯曲特性的区域，并且加工周边部分，使得由该区域的光弯曲特性确定的衍射光学元件的光轴与 衍射光学元件的轮廓。

公开(公告)号：US5777744A

公开(公告)日：1998-07-07

申请号：US648417

申请日：1996-05-15

申请人： Minoru Yoshii ,  Masanobu Hasegawa ,  Kyoichi Miyazaki ,  Seiji Takeuchi

发明人： Minoru Yoshii ,  Masanobu Hasegawa ,  Kyoichi Miyazaki ,  Seiji Takeuchi

IPC分类号： G03F7/20 ,  G01B11/00

CPC分类号： G03F7/70558 ,  G03F7/70641 ,  G03F7/70675

摘要： A state-of-formation detecting system for detecting a state of formation of a periodic pattern formed, through exposure light, upon an object with a photosensitive material applied thereto, includes a light projecting device for projecting input light onto the periodic pattern, and a determining device for receiving signal light from the periodic pattern and for detecting a change in the input light, to determine the state of formation of the periodic pattern on the basis of the change in the input light.

摘要翻译： 一种用于检测通过曝光光形成的周期性图案的形成状态的状态检测系统，包括用于将输入光投射到周期性图案上的投光装置，以及 确定装置，用于接收来自周期性图案的信号光并用于检测输入光的变化，以基于输入光的变化确定周期性图案的形成状态。

公开(公告)号：US5652657A

公开(公告)日：1997-07-29

申请号：US467922

申请日：1995-06-06

申请人： Minoru Yoshii ,  Michio Kohno ,  Seiya Miura ,  Kyoichi Miyazaki ,  Toshihiko Tsuji ,  Seiji Takeuchi

发明人： Minoru Yoshii ,  Michio Kohno ,  Seiya Miura ,  Kyoichi Miyazaki ,  Toshihiko Tsuji ,  Seiji Takeuchi

IPC分类号： G01N21/88 ,  G01N21/94 ,  G01N21/956 ,  G03F1/62 ,  G03F1/84 ,  H01L21/027 ,  G01B11/00

CPC分类号： G01N21/94

摘要： An inspection system inspecting an original with a pellicle, which system includes a light source for providing a light beam, a first detecting device for receiving light produced as a result of passage of the light beam through the pellicle, a second detecting device for receiving light produced as a result of non-passage of the light beam through the pellicle, and a processing system for determining information related to transmissivity of the pellicle, on the basis of outputs of the first and second detecting devices.

摘要翻译： 一种用防护薄膜组件检查原件的检查系统，该系统包括用于提供光束的光源，用于接收由于光束通过防护薄膜的结果而产生的光的第一检测装置，用于接收光的第二检测装置 由于不通过光束通过防护薄膜组件而产生的结果，以及用于根据第一和第二检测装置的输出确定与防护薄膜组件的透射率有关的信息的处理系统。

公开(公告)号：US5461474A

公开(公告)日：1995-10-24

申请号：US266512

申请日：1994-06-27

申请人： Minoru Yoshii ,  Noriyuki Nose ,  Masayuki Suzuki ,  Kyoichi Miyazaki ,  Toshihiko Tsuji ,  Seiji Takeuchi

发明人： Minoru Yoshii ,  Noriyuki Nose ,  Masayuki Suzuki ,  Kyoichi Miyazaki ,  Toshihiko Tsuji ,  Seiji Takeuchi

IPC分类号： G01N21/88 ,  G01N21/94 ,  G01N21/956 ,  H01L21/66

CPC分类号： G01N21/956 ,  G01N21/94

摘要： When inspecting the presence of foreign matter on a surface to be inspected by scanning the surface with a light beam from a light source utilizing a scanning system, and receiving scattered light from the surface by a detector, a correlation is utilized between a signal representing first scattered light obtained from the detector when the light beam scans a first line on the surface, and a signal representing second scattered light obtained from the detector when the light beam scans a second line displaced from the first line by a predetermined amount in a direction orthogonal to the direction of the first line.

摘要翻译： 当通过利用扫描系统的来自光源的光束扫描表面并通过检测器接收来自表面的散射光来检查要检查的表面上的异物的存在时，在表示第一 当光束扫描表面上的第一条线时，从检测器获得的散射光，以及当光束沿正交方向扫描从第一条线移位预定量的第二条线时，从检测器获得的第二散射光的信号 到第一行的方向。