公开(公告)号：US07390164B2

公开(公告)日：2008-06-24

申请号：US10571642

申请日：2004-08-27

申请人： Yasushi Maejima ,  Yutaka Inayoshi ,  Shinji Kawanishi ,  Kou Sakurai ,  Hiroyuki Suda ,  Takeshi Akimoto

发明人： Yasushi Maejima ,  Yutaka Inayoshi ,  Shinji Kawanishi ,  Kou Sakurai ,  Hiroyuki Suda ,  Takeshi Akimoto

IPC分类号： F04D19/04 ,  F01D1/36

CPC分类号： F04D19/042 ,  F04D19/04 ,  F04D29/266

摘要： Provided are a fixing structure for fixing a rotor to a rotor shaft, in which the contact state of the contact surfaces of the rotor shaft and the rotor is stabilized to thereby maintain the rotation balance of the rotor shaft and the rotor, making it possible to prevent oscillation, and a turbo molecular pump having such a fixing structure. On the outer peripheral portion of the upper surface of a fastening portion (253), there is concentrically formed a rotor shaft (213) side contact surface (257) to be brought into contact with a rotor (103). Further, in the inner periphery of the contact surface (257), there is formed a spot facing portion (259) whose upper surface is recessed from the contact surface (257). Thus, when the rotor shaft (213) is fastened to the rotor (103), there is formed, at the portion where the spot facing portion (259) is formed, a gap (265) which has a depth corresponding to the depth of the spot facing portion (259) and which is between the contact surface (187) of the rotor (103) and the spot facing portion (259).

摘要翻译： 提供了一种用于将转子固定到转子轴的固定结构，其中转子轴和转子的接触表面的接触状态稳定，从而保持转子轴和转子的旋转平衡，使得可以 防止振动，以及具有这种固定结构的涡轮分子泵。 在紧固部（253）的上表面的外周部上同心地形成与转子（103）接触的转子轴（213）侧接触面（257）。 此外，在接触面（257）的内周形成有上表面从接触面（257）凹陷的光斑对置部（259）。 因此，当转子轴（213）紧固到转子（103）时，在形成有点对面部分（259）的部分形成有与深度相对应的深度的间隙（265） 位于转子（103）的接触表面（187）和光斑对向部分（259）之间的光斑对置部分（259）。

公开(公告)号：US06890145B2

公开(公告)日：2005-05-10

申请号：US10294826

申请日：2002-11-14

申请人： Masayoshi Takamine ,  Yasushi Maejima ,  Shinji Kawanishi ,  Yoshiyuki Sakaguchi ,  Satoshi Okudera ,  Kenji Kabata ,  Yutaka Inayoshi

发明人： Masayoshi Takamine ,  Yasushi Maejima ,  Shinji Kawanishi ,  Yoshiyuki Sakaguchi ,  Satoshi Okudera ,  Kenji Kabata ,  Yutaka Inayoshi

IPC分类号： F04D29/00 ,  F04D19/04 ,  F04D29/02 ,  F04D29/66

CPC分类号： F04D29/023 ,  F04D19/04 ,  F04D29/662 ,  F05D2230/53 ,  F05D2260/95 ,  F05D2300/171 ,  F05D2300/21 ,  F05D2300/40 ,  Y10S416/50

摘要： A vacuum pump has a pump case having a gas suction port at an upper surface thereof, a rotor shaft mounted in the pump case for undergoing rotation, and a rotor connected to the rotor shaft for rotation therewith. The rotor has inner and outer circumferential surfaces coated with a corrosion-resistant film treated by nonelectrolytic plating. Rotor blades are disposed in the pump case and are integrally connected to the outer circumferential surface of the rotor. Stator blades are integrally connected to the pump case so that the rotor blades and the stator blades are alternately positioned and arranged. A balancing body is disposed on the inner circumferential surface of the rotor for balancing the rotor during rotation thereof.

摘要翻译： 真空泵具有在其上表面具有气体吸入口的泵壳体，安装在用于旋转的泵壳体中的转子轴，以及连接到转子轴上以与其一起旋转的转子。 转子具有涂覆有通过非电解电镀处理的耐腐蚀膜的内外表面。 转子叶片设置在泵壳体中并与转子的外周面一体地连接。 定子叶片一体地连接到泵壳体，使得转子叶片和定子叶片交替地定位和布置。 平衡体设置在转子的内周面上，用于在转子旋转期间平衡转子。

公开(公告)号：US09453510B2

公开(公告)日：2016-09-27

申请号：US13991069

申请日：2011-10-18

申请人： Shinji Kawanishi ,  Takashi Sudo

发明人： Shinji Kawanishi ,  Takashi Sudo

IPC分类号： F04D19/04 ,  F04D3/00 ,  F04D29/52 ,  F04D29/64 ,  F04D29/70 ,  F04D29/54

CPC分类号： F04D3/00 ,  F04D19/042 ,  F04D19/044 ,  F04D19/046 ,  F04D29/526 ,  F04D29/541 ,  F04D29/642 ,  F04D29/701 ,  F05D2260/607

摘要： In a rotor blade cylindrical portion or a stator portion in which thread grooves are formed, convex surfaces (thread groove peak surfaces) configuring the peak sections of the thread grooves are cut by a desired amount over the entire circumference (a circumferential direction of the thread grooves) of a certain range in an axial direction. As a result, the gap on the lower side of the thread groove portion can partially be expanded by cutting the thread groove peak surfaces by a desired amount.

摘要翻译： 在形成有螺纹槽的转子叶片圆筒部或定子部中，构成螺纹槽的峰部的凸面（螺纹槽峰面）在整个圆周（螺纹的周向）上被切割成期望的量 凹槽）在轴向上具有一定范围。 结果，可以通过将螺纹槽峰面切割所需量来部分地扩大螺纹槽部的下侧的间隙。

公开(公告)号：US20130243583A1

公开(公告)日：2013-09-19

申请号：US13991069

申请日：2011-10-18

申请人： Shinji Kawanishi ,  Takashi Sudo

发明人： Shinji Kawanishi ,  Takashi Sudo

IPC分类号： F04D3/00

CPC分类号： F04D3/00 ,  F04D19/042 ,  F04D19/044 ,  F04D19/046 ,  F04D29/526 ,  F04D29/541 ,  F04D29/642 ,  F04D29/701 ,  F05D2260/607

摘要： In a rotor blade cylindrical portion or a stator portion in which thread grooves are formed, convex surfaces (thread groove peak surfaces) configuring the peak sections of the thread grooves are cut by a desired amount over the entire circumference (a circumferential direction of the thread grooves) of a certain range in an axial direction. As a result, the gap on the lower side of the thread groove portion can partially be expanded by cutting the thread groove peak surfaces by a desired amount.

摘要翻译： 在形成有螺纹槽的转子叶片圆筒部或定子部中，构成螺纹槽的峰部的凸面（螺纹槽峰面）在整个圆周（螺纹的周向）上被切割成期望的量 凹槽）在轴向上具有一定范围。 结果，可以通过将螺纹槽峰面切割所需量来部分地扩大螺纹槽部的下侧的间隙。

公开(公告)号：US20080118351A1

公开(公告)日：2008-05-22

申请号：US11662229

申请日：2005-08-26

申请人： Takeshi Akimoto ,  Shinji Kawanishi

发明人： Takeshi Akimoto ,  Shinji Kawanishi

IPC分类号： F01D9/02

CPC分类号： F04D19/042 ,  F04D29/542

摘要： A stator vane of a turbo molecular pump suitable for reducing damage of the stator vane is provided. The stator vane (B) of a turbo molecular pump formed annular is formed by abutting a pair of stator vane halves (30,30). In this state, a gap (S) is formed in an inner rim portion (32).

摘要翻译： 提供了适用于减少定子叶片损坏的涡轮分子泵的定子叶片。 涡轮分子泵形成环形的定子叶片（B）通过邻接一对定子叶片半部（30,30）而形成。 在该状态下，在内缘部（32）上形成间隙（S）。

公开(公告)号：US20070031270A1

公开(公告)日：2007-02-08

申请号：US10571642

申请日：2004-08-27

申请人： Yasushi Maejima ,  Yutaka Inayoshi ,  Shinji Kawanishi ,  Kou Sakurai ,  Hiroyuki Suda ,  Takesi Akimoto

发明人： Yasushi Maejima ,  Yutaka Inayoshi ,  Shinji Kawanishi ,  Kou Sakurai ,  Hiroyuki Suda ,  Takesi Akimoto

IPC分类号： F04D19/04 ,  F04B17/00

CPC分类号： F04D19/042 ,  F04D19/04 ,  F04D29/266

摘要： Provided are a fixing structure for fixing a rotor to a rotor shaft, in which the contact state of the contact surfaces of the rotor shaft and the rotor is stabilized to thereby maintain the rotation balance of the rotor shaft and the rotor, making it possible to prevent oscillation, and a turbo molecular pump having such a fixing structure. On the outer peripheral portion of the upper surface of a fastening portion (253), there is concentrically formed a rotor shaft (213) side contact surface (257) to be brought into contact with a rotor (103). Further, in the inner periphery of the contact surface (257), there is formed a spot facing portion (259) whose upper surface is recessed from the contact surface (257). Thus, when the rotor shaft (213) is fastened to the rotor (103), there is formed, at the portion where the spot facing portion (259) is formed, a gap (265) which has a depth corresponding to the depth of the spot facing portion (259) and which is between the contact surface (187) of the rotor (103) and the spot facing portion (259).

摘要翻译： 提供了一种用于将转子固定到转子轴的固定结构，其中转子轴和转子的接触表面的接触状态稳定，从而保持转子轴和转子的旋转平衡，使得可以 防止振动，以及具有这种固定结构的涡轮分子泵。 在紧固部（253）的上表面的外周部上同心地形成与转子（103）接触的转子轴（213）侧接触面（257）。 此外，在接触面（257）的内周形成有上表面从接触面（257）凹陷的光斑对置部（259）。 因此，当转子轴（213）紧固到转子（103）时，在形成有点对面部分（259）的部分形成有与深度相对应的深度的间隙（265） 位于转子（103）的接触表面（187）和光斑对向部分（259）之间的光斑对置部分（259）。

公开(公告)号：US06752588B2

公开(公告)日：2004-06-22

申请号：US10294828

申请日：2002-11-14

申请人： Shinji Kawanishi ,  Yoshiyuki Sakaguchi ,  Yasushi Maejima ,  Satoshi Okudera

发明人： Shinji Kawanishi ,  Yoshiyuki Sakaguchi ,  Yasushi Maejima ,  Satoshi Okudera

IPC分类号： F04D1904

CPC分类号： F04D29/644 ,  F04D19/04 ,  F04D27/0292 ,  F04D29/601

摘要： The present invention provides a vacuum pump in which a damaging torque produced when a rotating rotor crashes into the inner wall of a pump case, is prevented to transfer to a vacuum chamber so as to protect the vacuum chamber. Bolt-holes of flange portions, through which the vacuum pump and the vacuum chamber and also the pump case and a base member disposed below the pump case are fastened, respectively, are formed so as to have larger diameters than the shank diameters of corresponding bolts by 20% or more. With this arrangement, when the entire vacuum turns moved by the damaging torque, the pump case slips relative to the vacuum chamber and the base member by the gaps between the pump case-base member fastening bolt-holes and the pump case-base member fastening bolts. As a result, the damaging torque is absorbed and is prevented to transfer to the vacuum chamber.

摘要翻译： 本发明提供了一种真空泵，其中当旋转的转子撞到泵壳的内壁时产生的损坏扭矩被阻止转移到真空室以保护真空室。 分别固定真空泵和真空室以及泵壳和设置在泵壳下方的底座部件的法兰部分的螺栓孔形成为具有比相应螺栓的柄直径更大的直径 减少20％以上。 通过这种布置，当整个真空通过损坏转矩转动时，泵壳体通过泵壳体 - 基件构件紧固螺栓孔和泵壳体 - 基座构件紧固件之间的间隙相对于真空室和基座构件滑动 螺栓 结果，损坏的扭矩被吸收并被阻止转移到真空室。

公开(公告)号：US07824153B2

公开(公告)日：2010-11-02

申请号：US11662229

申请日：2005-08-26

申请人： Takeshi Akimoto ,  Shinji Kawanishi

发明人： Takeshi Akimoto ,  Shinji Kawanishi

IPC分类号： F01D9/04

CPC分类号： F04D19/042 ,  F04D29/542

摘要： A stator vane for a turbo molecular pump has stator vane halves each having inner and outer rim portions and radially arranged stator blades connected integrally between the inner and outer rim portions. The inner rim portion of each stator vane half has a pair of inner rim ends and the outer rim portion of each stator vane half has a pair of outer rim ends. The stator vane halves are disposed in abutment with one another along an abutment line to form an annular body with the inner rim ends of one of the stator vane halves being disposed in confronting relation with the respective inner rim ends of the other of the stator vane halves and with the outer rim ends of the one of the stator vane halves being disposed in confronting relation with the respective outer rim ends of the other of the stator vane halves. At least each of the inner rim ends or each of the outer rim ends of one of the two stator blade halves being formed shorter in a circumferential direction of the annular body with respect to the abutment line to form a gap between the confronting inner rim ends or the confronting outer rim ends.

摘要翻译： 用于涡轮分子泵的定子叶片具有定子叶片半部，每个叶片半部具有内外缘部分和径向布置的定子叶片，其一体地连接在内轮缘部分和外轮缘部分之间。 每个定子叶片半部的内缘部分具有一对内缘端部，每个定子叶片半部的外缘部分具有一对外缘部。 定子叶片半部沿着邻接线彼此邻接设置以形成环形体，其中一个定子叶片半部的内缘端部与另一个定子叶片的相应内缘端部相对置设置 一个定子叶片半部的外缘端部与另一个定子叶片半部的相应的外缘端面相对地设置。 两个定子叶片半部中的一个的内边缘端部或每个外缘端部中的至少每一个相对于邻接线在环形体的圆周方向上形成为更短，以在相对的内边缘端部之间形成间隙 或相对的外缘结束。