Surface texture measuring instrument

    公开(公告)号:US08549899B2

    公开(公告)日:2013-10-08

    申请号:US12923120

    申请日:2010-09-02

    IPC分类号: G01B5/28

    摘要: A surface texture measuring instrument includes a force sensor (1), an actuator (11) and a detector (12). The surface texture measuring instrument further includes: a scanning controller (54) that collects a detection signal from the force sensor (1) and drives the actuator such that the detecting signal coincides with a target measurement value; a touch signal generator (51) that generates a touch signal when the detection signal from the force sensor (1) coincides with the target measurement value; and a measurement value collecting unit (55) that collects a measurement value from a counter (26) at a predetermined time interval in a state where a fluctuation range of the detection signal from the force sensor (1) is within a preset range when a scanning controller is in operation, the latch counter (52) collecting a measurement value from a latch counter (52) each time the touch signal is generated in a state where the detection signal from the force sensor (1) oscillates and an amplitude exceeds the preset range.

    Surface texture measuring instrument
    2.
    发明申请
    Surface texture measuring instrument 有权
    表面纹理测量仪

    公开(公告)号:US20110005307A1

    公开(公告)日:2011-01-13

    申请号:US12923119

    申请日:2010-09-02

    IPC分类号: G01B5/28

    摘要: A surface texture measuring instrument includes a force sensor (1), an actuator (11) and a detector (12). The surface texture measuring instrument further includes: a scanning controller (54) that collects a detection signal from the force sensor (1) and drives the actuator such that the detecting signal coincides with a target measurement value; a touch signal generator (51) that generates a touch signal when the detection signal from the force sensor (1) coincides with the target measurement value; and a measurement value collecting unit (55) that collects a measurement value from a counter (26) at a predetermined time interval in a state where a fluctuation range of the detection signal from the force sensor (1) is within a preset range when a scanning controller is in operation, the latch counter (52) collecting a measurement value from a latch counter (52) each time the touch signal is generated in a state where the detection signal from the force sensor (1) oscillates and an amplitude exceeds the preset range.

    摘要翻译: 表面纹理测量仪器包括力传感器(1),致动器(11)和检测器(12)。 表面纹理测量仪器还包括:扫描控制器(54),其收集来自力传感器(1)的检测信号并驱动致动器,使得检测信号与目标测量值一致; 当来自力传感器(1)的检测信号与目标测量值一致时产生触摸信号的触摸信号发生器(51); 以及测量值收集单元(55),其在来自力传感器(1)的检测信号的波动范围处于预设范围内的状态下以预定时间间隔从计数器(26)收集测量值,当a 扫描控制器正在运行时,每当在来自力传感器(1)的检测信号振荡并且幅度超过该值的状态下每次产生触摸信号时,锁存计数器(52)从锁存计数器(52)收集测量值 预设范围。

    Signal converter, signal processor and signal conversion transmission system
    3.
    发明授权
    Signal converter, signal processor and signal conversion transmission system 有权
    信号转换器,信号处理器和信号转换传输系统

    公开(公告)号:US08131896B2

    公开(公告)日:2012-03-06

    申请号:US12801241

    申请日:2010-05-28

    IPC分类号: G06F13/12 G06F13/14 G06F13/42

    CPC分类号: G06F13/4045 G06F2213/0042

    摘要: An input tool has: an I/O unit having a digimatic interface; a first signal conversion unit that converts a measurement signal in a signal format according to an HID keyboard protocol capable of being processed by an HID driver; a second signal conversion unit that converts the measurement signal into a signal format according to a virtual serial port protocol capable of being processed by a VCP driver; a conversion controller that makes one of the first signal conversion unit and the second signal conversion unit to convert a signal format of the measurement signal; and a USB communicator having a USB interface that is connectable with a PC, the USB communicator outputting the measurement signal.

    摘要翻译: 输入工具具有:具有数字接口的I / O单元; 第一信号转换单元,其根据能够被HID驱动器处理的HID键盘协议转换信号格式的测量信号; 第二信号转换单元,其将测量信号转换为根据能够由VCP驱动器处理的虚拟串行端口协议的信号格式; 转换控制器,使第一信号转换单元和第二信号转换单元之一转换测量信号的信号格式; 以及具有可与PC连接的USB接口的USB通信器,所述USB通信器输出测量信号。

    Signal converter, signal processor and signal conversion transmission system
    4.
    发明申请
    Signal converter, signal processor and signal conversion transmission system 有权
    信号转换器,信号处理器和信号转换传输系统

    公开(公告)号:US20100312930A1

    公开(公告)日:2010-12-09

    申请号:US12801241

    申请日:2010-05-28

    IPC分类号: G06F13/12 G06F13/42

    CPC分类号: G06F13/4045 G06F2213/0042

    摘要: An input tool has: an I/O unit having a digimatic interface; a first signal conversion unit that converts a measurement signal in a signal format according to an HID keyboard protocol capable of being processed by an HID driver; a second signal conversion unit that converts the measurement signal into a signal format according to a virtual serial port protocol capable of being processed by a VCP driver; a conversion controller that makes one of the first signal conversion unit and the second signal conversion unit to convert a signal format of the measurement signal; and a USB communicator having a USB interface that is connectable with a PC, the USB communicator outputting the measurement signal.

    摘要翻译: 输入工具具有:具有数字接口的I / O单元; 第一信号转换单元,其根据能够被HID驱动器处理的HID键盘协议转换信号格式的测量信号; 第二信号转换单元,其将测量信号转换为根据能够由VCP驱动器处理的虚拟串行端口协议的信号格式; 转换控制器,使第一信号转换单元和第二信号转换单元之一转换测量信号的信号格式; 以及具有可与PC连接的USB接口的USB通信器,所述USB通信器输出测量信号。

    Profiling controlling method and controller for contact type probes, and contact type measuring machine
    5.
    发明授权
    Profiling controlling method and controller for contact type probes, and contact type measuring machine 有权
    接触式探头型材控制方法和控制器,接触式测量机

    公开(公告)号:US07769560B2

    公开(公告)日:2010-08-03

    申请号:US12022556

    申请日:2008-01-30

    IPC分类号: G01B5/20

    CPC分类号: G01B3/008 G01B5/012 G01B7/012

    摘要: In profiling control of a contact type probe in which a contact point is moved along a surface of an object to be measured, while being in contact with the object by a constant measurement force F, a contact determination level is provided for detecting a predetermined force smaller than a target measurement force is applied to the contact point, contact determination is performed at the time when force applied to the contact point reaches the contact determination level during approach, and the contact point is shifted from position control to force control for bringing the contact point into contact with the object by the target measurement force. Thereby contact trace is prevented from occurring on the object to be measured without reducing approach speed as much as possible and lowering measurement efficiency. In this case, a command value of the force control may be interpolated and gradually increased from the contact determination level to the target measurement force, and thus impact increase and over-shoot can be prevented from causing due to high-response.

    摘要翻译: 在接触型探针的成形控制中,其中接触点沿着被测量物体的表面移动,同时通过恒定的测量力F与物体接触,提供接触确定水平以检测预定的力 小于目标测量力被施加到接触点时,在接近点施加的力达到接近时的接触确定水平时进行接触确定,并且接触点从位置控制转移到力控制 接触点通过目标测量力与物体接触。 从而防止在待测对象上发生接触迹线,而不会尽可能地降低接近速度并降低测量效率。 在这种情况下,力控制的指令值可以被内插并从接触判定水平逐渐增加到目标测量力,因此可以防止由于高响应而引起的冲击增加和过度拍摄。

    Surface texture measuring instrument
    6.
    发明申请
    Surface texture measuring instrument 有权
    表面纹理测量仪

    公开(公告)号:US20070295100A1

    公开(公告)日:2007-12-27

    申请号:US11806614

    申请日:2007-06-01

    IPC分类号: G01N3/08

    摘要: A surface texture measuring instrument includes a force sensor (1), an actuator (11) and a detector (12). The surface texture measuring instrument further includes: a scanning controller (54) that collects a detection signal from the force sensor (1) and drives the actuator such that the detecting signal coincides with a target measurement value; a touch signal generator (51) that generates a touch signal when the detection signal from the force sensor (1) coincides with the target measurement value; and a measurement value collecting unit (55) that collects a measurement value from a counter (26) at a predetermined time interval in a state where a fluctuation range of the detection signal from the force sensor (1) is within a preset range when a scanning controller is in operation, the latch counter (52) collecting a measurement value from a latch counter (52) each time the touch signal is generated in a state where the detection signal from the force sensor (1) oscillates and an amplitude exceeds the preset range.

    摘要翻译: 表面纹理测量仪器包括力传感器(1),致动器(11)和检测器(12)。 表面纹理测量仪器还包括:扫描控制器(54),其收集来自力传感器(1)的检测信号并驱动致动器,使得检测信号与目标测量值一致; 当来自力传感器(1)的检测信号与目标测量值一致时产生触摸信号的触摸信号发生器(51); 以及测量值收集单元(55),其在来自力传感器(1)的检测信号的波动范围处于预设范围内的状态下以预定时间间隔从计数器(26)收集测量值,当a 扫描控制器正在运行时,每当在来自力传感器(1)的检测信号振荡并且幅度超过该值的状态下每次产生触摸信号时,锁存计数器(52)从锁存计数器(52)收集测量值 预设范围。

    Measuring instrument
    7.
    发明授权
    Measuring instrument 有权
    测量仪器

    公开(公告)号:US08191408B2

    公开(公告)日:2012-06-05

    申请号:US12494954

    申请日:2009-06-30

    IPC分类号: G01B5/26

    CPC分类号: G01B3/008

    摘要: A surface texture measuring instrument includes a contact piece to be in contact with an object, a sensor driving mechanism that moves the contact piece along the surface of the object, a controller that controls the sensor mechanism, and a force sensor that detects a measuring force exerted on the contact piece when the contact piece is brought into contact with the object. The controller includes a target value output that outputs a target value of the measuring force, a feedback controller that performs feedback control of the sensor driving mechanism based on a deviation between the measuring force and the target value, and a feedback compensator provided on the feedback controller. The feedback compensator performs feedback compensation in accordance with the measuring force.

    摘要翻译: 表面纹理测量仪器包括与物体接触的接触片,沿着物体表面移动接触片的传感器驱动机构,控制传感器机构的控制器和检测测量力的力传感器 当接触片与物体接触时施加在接触片上。 控制器包括输出测量力的目标值的目标值输出,基于测量力与目标值之间的偏差执行传感器驱动机构的反馈控制的反馈控制器,以及反馈补偿器 控制器。 反馈补偿器根据测量力执行反馈补偿。

    Surface texture measuring instrument
    9.
    发明授权
    Surface texture measuring instrument 有权
    表面纹理测量仪

    公开(公告)号:US07814779B2

    公开(公告)日:2010-10-19

    申请号:US11806614

    申请日:2007-06-01

    IPC分类号: G01B5/28

    摘要: A surface texture measuring instrument includes a force sensor (1), an actuator (11) and a detector (12). The surface texture measuring instrument further includes: a scanning controller (54) that collects a detection signal from the force sensor (1) and drives the actuator such that the detecting signal coincides with a target measurement value; a touch signal generator (51) that generates a touch signal when the detection signal from the force sensor (1) coincides with the target measurement value; and a measurement value collecting unit (55) that collects a measurement value from a counter (26) at a predetermined time interval in a state where a fluctuation range of the detection signal from the force sensor (1) is within a preset range when a scanning controller is in operation, the latch counter (52) collecting a measurement value from a latch counter (52) each time the touch signal is generated in a state where the detection signal from the force sensor (1) oscillates and an amplitude exceeds the preset range.

    摘要翻译: 表面纹理测量仪器包括力传感器(1),致动器(11)和检测器(12)。 表面纹理测量仪器还包括:扫描控制器(54),其收集来自力传感器(1)的检测信号并驱动致动器,使得检测信号与目标测量值一致; 当来自力传感器(1)的检测信号与目标测量值一致时产生触摸信号的触摸信号发生器(51); 以及测量值收集单元(55),其在来自力传感器(1)的检测信号的波动范围处于预设范围内的状态下以预定时间间隔从计数器(26)收集测量值,当a 扫描控制器正在运行时,每当在来自力传感器(1)的检测信号振荡并且幅度超过该值的状态下每次产生触摸信号时,锁存计数器(52)从锁存计数器(52)收集测量值 预设范围。

    Surface profile measuring instrument
    10.
    发明授权
    Surface profile measuring instrument 有权
    表面轮廓测量仪

    公开(公告)号:US07318285B2

    公开(公告)日:2008-01-15

    申请号:US11469076

    申请日:2006-08-31

    IPC分类号: G01B5/20 G01B5/00

    CPC分类号: G01B7/012 G01B5/008 G01B7/008

    摘要: Provided are a measuring section (210) including a vibrating contact-type probe having a measuring force detection circuit (219) which detects a measuring force acting to the contact portion (212); a moving unit (a three-dimensional drive mechanism (300), a vertical movement drive mechanism (220)) that moves the measuring section (210) relative to a workpiece surface (S); and a drive control unit (400) that controls the moving unit based on the magnitude of the measuring force output from the measuring force detection circuit (219). The drive control unit (400) includes: a scanning-measurement control section (410) that moves for scanning the contact portion along the workpiece surface (S) with the measuring force maintained at the designated scanning measuring force; and a touching-measurement control section (420) that conducts touching-measurements on the workpiece surface (S) in a repeated manner, in the measurements the contact portion (212) being adapted to intermittently contact the workpiece surface (S) at a touch detecting measuring force.

    摘要翻译: 提供了一种测量部分(210),包括具有检测作用于接触部分(212)的测量力的测量力检测电路(219)的振动接触型探头; 移动单元(三维驱动机构,300),垂直运动驱动机构(220)),其使所述测量部(210)相对于工件表面(S)移动; 以及基于从测量力检测电路(219)输出的测量力的大小来控制移动单元的驱动控制单元(400)。 驱动控制单元(400)包括:扫描测量控制部(410),用于以维持指定的扫描测量力的测量力沿着工件表面(S)扫描接触部; 以及触摸测量控制部分(420),其以重复的方式在所述工件表面(S)上进行触摸测量,在所述测量中,所述接触部分(212)适于以触摸间歇地接触所述工件表面(S) 检测测量力。