公开(公告)号：US20110234710A1

公开(公告)日：2011-09-29

申请号：US13071435

申请日：2011-03-24

申请人： Seiichi Fujita ,  Shiro Yazaki

发明人： Seiichi Fujita ,  Shiro Yazaki

IPC分类号： B41J2/045 ,  H01L41/22

CPC分类号： B41J2/14233 ,  B41J2202/03 ,  Y10T29/42

摘要： There is provided a liquid ejecting head in which a surface layer of a vibration plate at the side of a flow path formation substrate is formed by an insulating film made of zirconium oxide and a protection film made of a material which is resistant to liquid is provided on a surface of the flow path formation substrate so as to cover wall surfaces of liquid flow paths.

摘要翻译： 提供了一种液体喷射头，其中通过由氧化锆制成的绝缘膜形成在流路形成基板一侧的振动板的表面层，并且提供由耐液体的材料制成的保护膜 在流路形成基板的表面上，以覆盖液流路径的壁面。

公开(公告)号：US07252354B2

公开(公告)日：2007-08-07

申请号：US10488747

申请日：2002-09-11

申请人： Maki Ito ,  Masami Murai ,  Shiro Yazaki

发明人： Maki Ito ,  Masami Murai ,  Shiro Yazaki

IPC分类号： B41J29/38 ,  B41J2/045

CPC分类号： B41J2/04581 ,  B41J2/04588 ,  B41J2/04593

摘要： A liquid-ejecting apparatus according to which targeted good characteristics can be obtained, and moreover the scope for material selection can be broadened is provided. The liquid-ejecting apparatus contracts a pressure chamber and thus ejects liquid through application of voltage to a piezoelectric body, and is such that the driving waveform applied to the piezoelectric body during the liquid ejecting operation comprises a high potential period (a2) in which a voltage exhibiting an electric field strength exceeding the coercive electric field of the piezoelectric body is applied, and a reverse potential period (a6) in which a voltage such that the potential becomes of the opposite polarity to the polarity in the high potential period or the potential becomes zero is applied.

摘要翻译： 可以获得目标良好特性的液体喷射装置，并且还可以扩大材料选择的范围。 液体喷射装置使压力室收缩，从而通过向压电体施加电压喷射液体，并且使得在液体喷射操作期间施加到压电体的驱动波形包括高电位周期（a 2），其中 施加表现出超过压电体的矫顽电场的电场强度的电压，和施加使电位成为与高电位期间极性相反极性的电压的反向电势周期（a 6），或 电位变为零。

公开(公告)号：US20060290747A1

公开(公告)日：2006-12-28

申请号：US10573356

申请日：2004-09-24

申请人： Masato Shimada ,  Shiro Yazaki ,  Tsutomu Nishiwaki ,  Akihito Tsuda ,  Masataka Yamada

发明人： Masato Shimada ,  Shiro Yazaki ,  Tsutomu Nishiwaki ,  Akihito Tsuda ,  Masataka Yamada

IPC分类号： B41J2/045

CPC分类号： B41J2/1623 ,  B41J2/14233 ,  B41J2/161 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1632 ,  B41J2/1635 ,  B41J2/1642 ,  B41J2002/14241 ,  B41J2002/14419 ,  B41J2002/14491

摘要： There are provided a liquid-jet head which can reliably prevent breakage of piezoelectric elements over a long period of time, and a method for manufacturing the liquid-jet head, as well as a liquid-jet apparatus. Further, there are provided a liquid-jet head which can effectively prevent a drop in the amount of displacement of a vibration plate caused through drive of a piezoelectric element, and a method for manufacturing the liquid-jet head, as well as a liquid-jet apparatus. A liquid-jet head includes a channel substrate 10 which has pressure generation chambers 12 formed therein and communicating nozzle orifices for discharging liquid droplets, and piezoelectric elements 300 each of which is composed of a lower electrode 60, a piezoelectric layer 70, and an upper electrode 80 and which are disposed on one surface of the channel substrate 10 via a vibration plate, wherein at least pattern regions of the respective layers which constitute the piezoelectric elements 300 are covered with an insulating film 100 formed of an inorganic insulating material.

摘要翻译： 提供了能够可靠地防止压电元件长时间破裂的液体喷射头，以及喷液头的制造方法以及喷液装置。 此外，还提供了一种液体喷射头，其能够有效地防止由压电元件的驱动引起的振动板的位移量的下降，以及液体喷射头的制造方法， 喷气机 液体喷射头包括：通道基板10，其具有形成在其中的压力产生室12和用于喷射液滴的连通喷嘴孔;以及压电元件300，每个压电元件由下电极60，压电层70和上 电极80，其经由振动板设置在通道基板10的一个表面上，其中构成压电元件300的各层的至少图案区域被由无机绝缘材料形成的绝缘膜100覆盖。

公开(公告)号：US20060203041A1

公开(公告)日：2006-09-14

申请号：US11430893

申请日：2006-05-10

申请人： Masato Shimada ,  Shinri Sakai ,  Shiro Yazaki

发明人： Masato Shimada ,  Shinri Sakai ,  Shiro Yazaki

IPC分类号： B41J2/045

CPC分类号： B41J2/1646 ,  B41J2/14233 ,  B41J2/161 ,  B41J2002/14387 ,  B41J2002/14491

摘要： To provide an ink jet recording head with a decreased initial deflection amount of a diaphragm and an ink jet recorder comprising the ink jet recording head. An ink jet recording head which has a flow passage formation substrate 10 where pressure generation chambers 12 communicating with nozzle openings are defined and a piezoelectric element being placed on one side of the flow passage formation substrate 10 via a diaphragm and having at least a lower electrode 60, a piezoelectric layer 70, and an upper electrode 80, characterized in that at least one of layers deposited together with the piezoelectric layer 70 is a compression film 50 having a compressive stress and the compression film 50 has at least a part in a thickness direction removed in at least a part of an area opposed to the pressure generation chamber, whereby the stress of the whole film is decreased.

摘要翻译： 提供具有减小的隔膜的初始偏转量的喷墨记录头和包括喷墨记录头的喷墨记录器。 一种喷墨记录头，其具有流路形成基板10，其中形成有与喷嘴开口连通的压力产生室12，并且压电元件通过隔膜放置在流路形成基板10的一侧上，并具有至少一个下电极 60，压电层70和上电极80，其特征在于，与压电层70一起沉积的层中的至少一层是具有压缩应力的压缩膜50，压缩膜50具有至少一部分厚度 方向在与压力产生室相对的区域的至少一部分中移除，由此整个膜的应力减小。

公开(公告)号：US06231169B1

公开(公告)日：2001-05-15

申请号：US09069992

申请日：1998-04-30

申请人： Shiro Yazaki ,  Shinri Sakai

发明人： Shiro Yazaki ,  Shinri Sakai

IPC分类号： B41J2045

CPC分类号： B41J2/14233 ,  B41J2002/14387

摘要： An ink jet recording head includes at least a row of nozzle aperture; a passage formed substrate having partitions forming at least a row of pressure generating chambers, each communicating the respective nozzle aperture; a diaphragm forming a part of the pressure generating chambers and at least an upper surface of which serves as a lower electrode; a piezoelectric vibrator including, a piezoelectric active part having a piezoelectric layer formed on the surface of the diaphragm, and an upper electrode formed on the surface of said piezoelectric layer and formed in an area opposite to said pressure generating chamber; and a backing member joined to the side of the piezoelectric layer and having partitioning walls forming a concave portion being space to extent that a movement of the piezoelectric active part is not prevented, and fixed to the passage formed substrate such that each partitioning wall is opposite to the partition of the passage formed substrate.

摘要翻译： 喷墨记录头包括至少一排喷嘴孔; 通道形成的基板具有形成至少一排压力产生室的隔板，每个压力产生室连通相应的喷嘴孔; 形成压力发生室的一部分并且其至少上表面用作下电极的隔膜; 一种压电振动器，包括：具有形成在所述隔膜表面上的压电层的压电有源部分和形成在所述压电层的表面上并形成在与所述压力发生室相对的区域中的上电极; 以及与所述压电体层侧接合并具有形成凹部的分隔壁的背衬构件，所述隔壁形成为空间，所述隔壁的尺寸使得所述压电有源部的移动不被阻止，并且固定到所述通道形成的基板，使得每个分隔壁相对 到通道形成的基底的分隔。

公开(公告)号：US6109736A

公开(公告)日：2000-08-29

申请号：US33086

申请日：1998-03-02

申请人： Yoshinao Miyata ,  Masato Shimada ,  Kazuhiko Fujimori ,  Koji Sumi ,  Shiro Yazaki ,  Soichi Moriya ,  Tsutomu Hashizume

发明人： Yoshinao Miyata ,  Masato Shimada ,  Kazuhiko Fujimori ,  Koji Sumi ,  Shiro Yazaki ,  Soichi Moriya ,  Tsutomu Hashizume

IPC分类号： B41J2/045 ,  B41J2/055 ,  B41J2/14 ,  B41J2/16

CPC分类号： B41J2/1623 ,  B41J2/14233 ,  B41J2/161 ,  B41J2/1626 ,  B41J2/1631 ,  B41J2002/14387 ,  B41J2002/14419

摘要： An ink jet recording head is provided with a piezoelectric vibrator. The piezoelectric vibrator includes a diaphragm and a piezoelectric active part. The diaphragm includes a pressure generating chamber communicating with a nozzle aperture, at least the upper surface of which acts as a lower electrode. The piezoelectric active part includes a piezoelectric film formed on the surface of the diaphragm and an upper electrode formed on the surface of the piezoelectric film, formed in an area opposite to the pressure generating chamber. A cap member is bonded on one side of the piezoelectric film for sealing a space with a holder to the extent that the motion is secured. The piezoelectric active part is cut off from the outside of the head by sealing dry fluid in the space of the cap member.

摘要翻译： 喷墨记录头设置有压电振动器。 压电振子包括隔膜和压电有源部分。 隔膜包括与喷嘴孔连通的压力产生室，其至少其上表面用作下电极。 压电有源部分包括形成在隔膜表面上的压电膜和形成在压电膜表面上的上电极，形成在与压力发生室相对的区域中。 在压电膜的一侧上结合有盖构件，用于将保持件密封到具有运动的程度。 通过在盖构件的空间中密封干燥流体，从头部的外部切断压电有源部分。

公开(公告)号：US08613498B2

公开(公告)日：2013-12-24

申请号：US13253896

申请日：2011-10-05

申请人： Shiro Yazaki ,  Setsuya Iwashita ,  Eiju Hirai ,  Tsutomu Nishiwaki

发明人： Shiro Yazaki ,  Setsuya Iwashita ,  Eiju Hirai ,  Tsutomu Nishiwaki

IPC分类号： B41J2/045

CPC分类号： B41J2/164 ,  B41J2/04 ,  B41J2/055 ,  B41J2/14233 ,  B41J2/161 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1645 ,  B41J2/1646 ,  B41J2002/14241 ,  B41J2002/14419 ,  B41J2002/14491 ,  Y10T29/42 ,  Y10T29/49401

摘要： A method of manufacturing a liquid jet head includes depositing a lower electrode film on a passage forming substrate and patterning the lower electrode film into a predetermined pattern, forming a piezoelectric layer on the passage forming substrate, forming an intermediate film made of a conductive material on the piezoelectric layer, forming a protective film on the intermediate film and, using the protective film as a mask, patterning by etching the piezoelectric layer together with the intermediate film into a predetermined pattern, peeling off the protective film, and depositing an upper electrode film on the passage forming substrate and patterning the upper electrode film into a predetermined pattern.

公开(公告)号：US08360558B2

公开(公告)日：2013-01-29

申请号：US12944968

申请日：2010-11-12

申请人： Eiju Hirai ,  Shiro Yazaki

发明人： Eiju Hirai ,  Shiro Yazaki

IPC分类号： B41J2/045

CPC分类号： B41J2/14233 ,  B41J2/161 ,  B41J2/1626 ,  B41J2/1646 ,  B41J2002/14241 ,  B41J2002/14266 ,  B41J2002/14491

摘要： A liquid droplet discharging head includes a pressure chamber substrate having a pressure chamber in communication with a nozzle hole. The pressure chamber has compartments adjacent to one another in a first direction. A vibrating plate has a first surface for covering the pressure chamber and a second, opposite, surface. The vibrating plate has a first area surface as a part of the first surface, the first area surface covering the pressure chamber in a view in a second direction that is orthogonal to the first direction and is normal to the first surface. A first conductive layer is formed at a plurality of areas to cover, in a view in the second direction.

摘要翻译： 液滴喷射头包括具有与喷嘴孔连通的压力室的压力室基板。 压力室具有在第一方向上彼此相邻的隔间。 振动板具有用于覆盖压力室的第一表面和第二相对表面。 振动板具有作为第一表面的一部分的第一区域表面，第一区域表面在与第一方向正交且与第一表面垂直的第二方向上覆盖压力室。 在多个区域形成第一导电层，以在第二方向上覆盖。

公开(公告)号：US08029109B2

公开(公告)日：2011-10-04

申请号：US12359042

申请日：2009-01-23

申请人： Shiro Yazaki

发明人： Shiro Yazaki

IPC分类号： B41J2/045

CPC分类号： B41J2/14209 ,  B41J2/055 ,  B41J2/14233 ,  B41J2002/14241 ,  B41J2002/14419

摘要： A lower electrode 60 in a region opposite each of pressure generation chambers 12 is formed to have a width smaller than the width of the corresponding pressure generation chamber 12, and an upper surface and an end surface of the lower electrode 60 in a region corresponding to each of the pressure generation chambers 12 is covered with a piezoelectric material layer 70. An end surface of the piezoelectric material layer 70 forms a slope surface sloping downward toward the outside, an upper surface and an end surface of the piezoelectric material layer 70 in the region opposite each of the pressure generation chambers 12 are covered with an upper electrode 80, and a distance D1 between the upper surface of the lower electrode 60 and the upper surface of the piezoelectric material layer 70 and a distance D2 between the end surface of the lower electrode 60 and the end surface of the piezoelectric material layer 70 satisfy the relationship D2≧D1.

摘要翻译： 在与压力产生室12相对的区域中的下电极60形成为具有比对应的压力产生室12的宽度小的宽度，以及下电极60的上表面和端面对应于 每个压力产生室12被压电材料层70覆盖。压电材料层70的端面形成向外倾斜的倾斜面，压电材料层70的上表面和端面 与每个压力产生室12相对的区域被上电极80覆盖，下电极60的上表面和压电材料层70的上表面之间的距离D1和 下电极60和压电体层70的端面满足D2≥D1的关系。

公开(公告)号：US20100245491A1

公开(公告)日：2010-09-30

申请号：US12723803

申请日：2010-03-15

申请人： Shiro YAZAKI ,  Eiju HIRAI

发明人： Shiro YAZAKI ,  Eiju HIRAI

IPC分类号： B41J2/045 ,  H01L41/047 ,  H01L41/09

CPC分类号： B41J2/14233 ,  B41J2/055 ,  B41J2002/14241 ,  B41J2002/14419

摘要： A liquid ejecting head includes a flow passage substrate having a pressure generation chamber in communication with a nozzle opening. A piezoelectric element includes first and second electrode and a piezoelectric substance layer and is positioned over one surface of the flow passage substrate. The piezoelectric element is deformed to form a convex toward the pressure generation chamber when the piezoelectric element is driven. A protection film formed from an inorganic material covers the piezoelectric element and has an opening through which an upper surface of the second electrode is exposed. An end of the opening in the protection film viewed in a direction of the length of the pressure generation chamber is located closer to the center than is an area at which the center of curvature of a curve of the piezoelectric element that forms near a wall around the pressure generation chamber during deformation operation.

摘要翻译： 液体喷射头包括具有与喷嘴开口连通的压力产生室的流路基板。 压电元件包括​​第一和第二电极和压电体层，并且位于流路基板的一个表面上。 当压电元件被驱动时，压电元件变形以朝向压力产生室凸出。 由无机材料形成的保护膜覆盖压电元件，并且具有露出第二电极的上表面的开口。 在压力发生室的长度方向上观察的保护膜中的开口的端部比靠近壁周围的压电元件的曲线的曲率中心更靠近中心 在变形操作期间的压力发生室。