公开(公告)号：US10151423B2

公开(公告)日：2018-12-11

申请号：US14782589

申请日：2014-04-04

申请人： Ben Shelef ,  Shmuel Erez

发明人： Ben Shelef ,  Shmuel Erez

IPC分类号： F16C11/10 ,  F16M11/12 ,  F16M11/10 ,  F16M11/14 ,  G02B7/00 ,  F16M11/04 ,  F16M11/22

摘要： A kinematic mount with more than three mating elements. To function properly, the sum total of DOFs constrained by the mating elements is six. Mounts that have four mating elements—for example a Pivot and three Spacers, or two Sliders and two Spacers, are beneficial. Conditions are shown under which the four-legged mounts are kinematic, stable and can be assembled from one direction, kinematic mount connecting two subassemblies along a mating direction, comprised of four mating elements, each mating element having two components, each attached to a different subassembly, two of said mating elements being Slider mating elements each having a Slide Axis and constraining two degrees of motion, and the other two of said mating elements each being a Spacer mating element each having a Spacer Axis and constraining a single degree of motion, said mating elements configured to jointly constrain six independent degrees of motion.

公开(公告)号：US09202725B2

公开(公告)日：2015-12-01

申请号：US11490950

申请日：2006-07-24

申请人： Rubinder S. Randhawa ,  Shmuel Erez ,  Harry Christov ,  Basha Sajjad

发明人： Rubinder S. Randhawa ,  Shmuel Erez ,  Harry Christov ,  Basha Sajjad

IPC分类号： B65G47/24 ,  H01L21/67 ,  H01L21/673

CPC分类号： H01L21/67057 ,  H01L21/67313

摘要： A substrate holding and rotary driving mechanism, e.g., for a cleaning chamber with vertical orientation of the wafer, that is comprised of a three-armed spider which is rotatingly installed on the outer side of the cleaning chamber and rotatingly supports on the outer ends of its arms outer shafts with eccentrically arranged inner shafts. The inner shafts pass through the outer shafts into the cleaning chamber where they support contact rollers, while the opposite ends of the inner shafts support gears driven into rotation by a synchronous belt. The contact rollers can be moved apart for insertion or removal of wafers from and into the chamber. This is achieved by turning the spider with eccentric inner shafts in one or another direction.

摘要翻译： 基板保持和旋转驱动机构，例如用于具有晶片垂直取向的清洁室，其由旋转安装在清洁室的外侧上并旋转地支撑在外部的三臂蜘蛛构成， 其臂外轴具有偏心布置的内轴。 内轴通过外轴进入清洁室，在那里它们支撑接触辊，而内轴的相对端支撑由同步带驱动旋转的齿轮。 接触辊可以移开，以将晶片从腔室中进入或移出。 这是通过在一个或另一个方向上转动具有偏心内轴的蜘蛛来实现的。

公开(公告)号：US09194531B2

公开(公告)日：2015-11-24

申请号：US13032607

申请日：2011-02-22

申请人： Ben Shelef ,  Shmuel Erez

发明人： Ben Shelef ,  Shmuel Erez

IPC分类号： F16M7/00 ,  F16M11/04 ,  F16M11/12

CPC分类号： F16M7/00 ,  F16M11/041 ,  F16M11/121 ,  Y10T403/74

摘要： A kinematic mount in which mobile spheroid bodies belonging to one component mate with conical depressions in a second component. The mobility of the spheroid bodies is achieved using round shafts and tight-fitting holes.

摘要翻译： 运动座，其中属于一个部件的可动球体与第二部件中的锥形凹陷配合。 使用圆形轴和紧固孔实现球体的移动性。

公开(公告)号：US08852048B2

公开(公告)日：2014-10-07

申请号：US13214154

申请日：2011-08-19

申请人： Ben Shelef ,  Shmuel Erez

发明人： Ben Shelef ,  Shmuel Erez

IPC分类号： F16H57/08 ,  F16H49/00 ,  F16H25/06

CPC分类号： F16H49/001 ,  F16H2025/066

摘要： Described is a planetary harmonic differential transmission, comprised of a rigid externally-toothed inner sprocket, a rigid internally-toothed outer sprocket, a deformable belt that is toothed on both its internal and external faces, and a set of free-rotating planetary sprockets that are mounted on a rotating carrier cage and cause the belt to progressively engage and disengage from successive portions of the rigid sprockets. The input to the transmission is the relative motion between the carrier cage and the inner sprocket, and the output is the relative motion between the outer sprocket and the inner sprocket, resulting in a differential transmission.

摘要翻译： 描述了一种行星谐波差动传动装置，其包括刚性外齿内链轮，刚性内齿轮外链轮，可变形皮带，其外表面均有齿形，以及一组自由旋转的行星链轮， 安装在旋转的承载架上，并使皮带与刚性链轮的连续部分逐渐接合和脱开。 变速器的输入是托架架和内链轮之间的相对运动，输出是外链轮和内链轮之间的相对运动，导致差速传动。

公开(公告)号：US20070087606A1

公开(公告)日：2007-04-19

申请号：US11419302

申请日：2006-05-19

申请人： Gad Shelef ,  Shmuel Erez

发明人： Gad Shelef ,  Shmuel Erez

IPC分类号： H01R13/52

CPC分类号： F16J15/0881 ,  F16J15/04 ,  F16J15/0887 ,  F16J15/0893 ,  F16L23/18

摘要： A sealing system comprises a pair of clamping members and a sealing member between them. The sealing member is defined by a generatrix following a closed-loop curve around a longitudinal axis. In a cross-section in a plane that includes the longitudinal axis, the generatrix of the sealing member can have a substantially diagonal orientation between the clamping members. When an axial clamping force is applied, the clamping force is converted by the sealing member into a compression force that is greater than the clamping force along the generatrix.

摘要翻译： 密封系统包括一对夹紧构件和它们之间的密封构件。 密封构件由围绕纵向轴线的闭环曲线之后的母线限定。 在包括纵向轴线的平面中的横截面中，密封构件的母线可以在夹紧构件之间具有基本上对角的取向。 当施加轴向夹紧力时，夹紧力由密封构件转换成大于沿母线的夹紧力的压缩力。

公开(公告)号：US06333268B1

公开(公告)日：2001-12-25

申请号：US09630231

申请日：2000-08-01

申请人： Vladimir Starov ,  Shmuel Erez ,  Syed S. Basha ,  Arkadiy I. Shimanovich ,  Ravi Vellanki ,  Krishnan Shrinivasan ,  Karen A. Reinhardt ,  Aleksandr Kabansky

发明人： Vladimir Starov ,  Shmuel Erez ,  Syed S. Basha ,  Arkadiy I. Shimanovich ,  Ravi Vellanki ,  Krishnan Shrinivasan ,  Karen A. Reinhardt ,  Aleksandr Kabansky

IPC分类号： G03F736

CPC分类号： H01L21/02054 ,  G03F7/42 ,  G03F7/427 ,  H01J37/32357 ,  H01L21/76814

摘要： Adherent matrix layers such as post-etch and other post-process residues are removed from a substrate by exposing them to a vapor phase solvent to allow penetration of the vapor phase solvent into the adherent matrix layers and condensing the vapor phase solvent into the adherent matrix layers and revaporized to promote fragmentation of the matrix and facilitate removal. Megasonic energy may be transmitted via a transmission member to the adherent matrix through the solvent condensed thereon to loosen fragments and particles. The substrate is typically rotated to improve contact between the megasonic energy transmission member and the condensed solvent and achieve more uniform cleaning. A co-solvent which is soluble in the vapor phase solvent may be added to enhance removal of specific adherent matrix materials. A plasma pretreatment may be employed to react with and modify the matrix in a way that improves subsequent penetration by the vapor phase solvent and fragmentation of the adherent matrix for more complete removal from the substrate.

公开(公告)号：US20160069506A1

公开(公告)日：2016-03-10

申请号：US14782589

申请日：2014-04-04

申请人： Ben SHELEF ,  Shmuel EREZ

发明人： Ben Shelef ,  Shmuel Erez

IPC分类号： F16M11/04 ,  F16M7/00

CPC分类号： F16M11/14 ,  F16C11/106 ,  F16M11/041 ,  F16M11/121 ,  F16M11/22 ,  G02B7/003 ,  Y10T403/32311

摘要： A kinematic mount with more than three mating elements. To function properly, the sum total of DOFs constrained by the mating elements is six. Mounts that have four mating elements—for example a Pivot and three Spacers, or two Sliders and two Spacers, are beneficial. Conditions are shown under which the four-legged mounts are kinematic, stable and can be assembled from one direction, kinematic mount connecting two subassemblies along a mating direction, comprised of four mating elements, each mating element having two components, each attached to a different subassembly, two of said mating elements being Slider mating elements each having a Slide Axis and constraining two degrees of motion, and the other two of said mating elements each being a Spacer mating element each having a Spacer Axis and constraining a single degree of motion, said mating elements configured to jointly constrain six independent degrees of motion.

摘要翻译： 具有三个以上配合元件的运动座。 为了正常工作，由配合元件约束的自由度的总和为6。 具有四个配合元件的安装座（例如枢轴和三个隔板，或两个滑块和两个隔板）是有益的。 显示的条件是四腿安装座是运动学的，稳定的，并且可以从一个方向组装，运动安装沿着配合方向连接两个子组件，包括四个配合元件，每个配合元件具有两个部件，每个部件分别连接到不同的部件 子组件中的两个，所述配合元件是滑块配合元件，每个滑动配合元件具有滑动轴并限制两个运动方向，并且所述配合元件中的另外两个是每个具有间隔轴并且限制单个运动的间隔配合元件， 所述配合元件被配置为共同约束六个独立的运动程度。

公开(公告)号：US20150184895A1

公开(公告)日：2015-07-02

申请号：US14574360

申请日：2014-12-17

申请人： Ben Shelef ,  Shmuel Erez

发明人： Ben Shelef ,  Shmuel Erez

IPC分类号： F24J2/46

CPC分类号： F24S40/20 ,  F24S20/20 ,  F24S23/71 ,  F24S25/00 ,  F24S25/10 ,  F24S2023/874 ,  H01L31/0547 ,  Y02E10/47 ,  Y02E10/52

摘要： A system and method for maintenance of a reflector with. The system may be incorporated to be an integral part of the dish assembly and may be operated autonomously or remotely. The system may include a controller programmed to activate the system according to set schedule or according to reflectivity drop of the light from the dish. The system includes a foldable arm that is folded when not in use so as not to interfere with the operation of the dish. When in use, the arm unfolds and includes injectors to inject fluids, such as air and/or liquids to clean the surface of the dish. The arm may include water injectors followed by drying air injectors, such as air knife. The system may include waste liquid collection system, such as a gutter and reservoir.

摘要翻译： 一种用于维护反射器的系统和方法。 该系统可以结合成为盘组件的组成部分，并且可以自主地或远程地操作。 该系统可以包括被编程为根据设定的时间表或根据来自盘的光的反射率下降来激活系统的控制器。 该系统包括可折叠臂，其在不使用时折叠，以便不干扰盘的操作。 当使用时，臂展开并且包括注射器以注射流体，例如空气和/或液体以清洁盘的表面。 手臂可以包括喷水器，然后干燥空气喷射器，例如气刀。 该系统可以包括废液收集系统，例如沟槽和贮存器。

公开(公告)号：US20120046140A1

公开(公告)日：2012-02-23

申请号：US13214154

申请日：2011-08-19

申请人： Ben SHELEF ,  Shmuel Erez

发明人： Ben SHELEF ,  Shmuel Erez

IPC分类号： F16H9/26 ,  F16H55/30

CPC分类号： F16H49/001 ,  F16H2025/066

摘要： Described is a planetary harmonic differential transmission, comprised of a rigid externally-toothed inner sprocket, a rigid internally-toothed outer sprocket, a deformable belt that is toothed on both its internal and external faces, and a set of free-rotating planetary sprockets that are mounted on a rotating carrier cage and cause the belt to progressively engage and disengage from successive portions of the rigid sprockets. The input to the transmission is the relative motion between the carrier cage and the inner sprocket, and the output is the relative motion between the outer sprocket and the inner sprocket, resulting in a differential transmission.

摘要翻译： 描述了一种行星谐波差动传动装置，其包括刚性外齿内链轮，刚性内齿轮外链轮，可变形皮带，其外表面均有齿形，以及一组自由旋转的行星链轮， 安装在旋转的承载架上，并使皮带与刚性链轮的连续部分逐渐接合和脱开。 变速器的输入是托架架和内链轮之间的相对运动，输出是外链轮和内链轮之间的相对运动，导致差速传动。

公开(公告)号：US20110206453A1

公开(公告)日：2011-08-25

申请号：US13032607

申请日：2011-02-22

申请人： Ben Shelef ,  Shmuel Erez

发明人： Ben Shelef ,  Shmuel Erez

IPC分类号： F16D1/00

CPC分类号： F16M7/00 ,  F16M11/041 ,  F16M11/121 ,  Y10T403/74

摘要： A kinematic mount is described in which mobile spheroid bodies belonging to one component mate with conical depressions in a second component. The mobility of the spheroid bodies is achieved using round shafts and tight-fitting holes.

摘要翻译： 描述了一种运动座，其中属于一个部件的移动球体在第二部件中与锥形凹陷配合。 使用圆形轴和紧固孔实现球体的移动性。