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公开(公告)号：US20060033984A1
公开(公告)日：2006-02-16
申请号：US10914278
申请日：2004-08-10
Applicant: Stephane Bruynooghe , Jens Ullmann
Inventor： Stephane Bruynooghe , Jens Ullmann
IPC: G02B1/00
CPC classification number: G03F7/70825 , G02B7/025 , G03F7/7095
Abstract: An assembly includes a holder (5), an optical component (1) transmitting radiation in a first region of ultraviolet (UV) radiation adhered to the holder by an adhesive (4), the adhesive being hardenable by radiation of a second region of ultraviolet radiation, a first layer (3) disposed between the optical component and the adhesive, and a second layer (2) for enhancing adhesion between the optical component and the first layer. The first layer is capable of transmitting radiation of the second region of UV radiation and obstructing to a high degree transmission of UV radiation of the first region by at least one of absorption and reflection. The optical component has a transmitting zone and the first layer is located outside of the transmitting zone. The second layer for enhancing adhesion between the optical component and the first layer is disposed between the first layer and the optical component. The assembly can be used, for example, in an illumination system and/or a projection system of a microlithography projection apparatus.
Abstract translation: 组件包括保持器（5），光学部件（1），其通过粘合剂（4）在紫外线（UV）辐射的第一区域中透射辐射，所述第一区域通过辐射第二紫外线区域而被固化 辐射，设置在光学部件和粘合剂之间的第一层（3）和用于增强光学部件和第一层之间的粘合力的第二层（2）。 第一层能够透射第二紫外辐射区域的辐射，并且通过吸收和反射中的至少一个阻挡第一区域的紫外线辐射的高度透射。 光学部件具有透射区域，第一层位于透射区域的外部。 用于增强光学部件和第一层之间的粘合力的第二层设置在第一层和光学部件之间。 组件可以用于例如微光刻投影装置的照明系统和/或投影系统中。
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2.发明申请METHOD FOR PRODUCING AN OPTICAL ELEMENT THROUGH A MOLDING PROCESS, OPTICAL ELEMENT PRODUCED ACCORDING TO THE METHOD, COLLECTOR, AND LIGHTING SYSTEM 审中-公开通过模制工艺生产光学元件的方法，根据该方法生产的光学元件，收集器和照明系统公开(公告)号：US20100182710A1
公开(公告)日：2010-07-22
申请号：US12626437
申请日：2009-11-25
Applicant: Udo DINGER , Ulrich Bingel , Jeffrey Erxmeyer , Eral Erzin , Bernhard Weigl , Stephane Bruynooghe
Inventor： Udo DINGER , Ulrich Bingel , Jeffrey Erxmeyer , Eral Erzin , Bernhard Weigl , Stephane Bruynooghe
CPC classification number: C25D1/06 , B82Y10/00 , C23C14/0005 , C23C28/023 , C23C28/322 , C23C28/345 , C23C28/42 , C25D7/08 , G02B5/0816 , G02B5/0891 , G03F7/70166 , G03F7/70958 , G21K1/062 , G21K2201/061 , G21K2201/064 , G21K2201/067 , Y10T29/49812
Abstract: A method for producing an optical element or part of an optical element having a base body, including:—providing a mold body (21, 1000, 2000) which has a surface corresponding to the geometry of the optical element;—depositing a layer system (7) including at least one separation layer system (15, 1010, 2010) on the surface of the mold body (21, 1000, 2000);—electroforming a base body (4, 1030, 2030) on the layer system (7); and—detaching at least the base body from the mold body (21, 1000, 2000) at the separation layer system (15, 1010, 2010).
Abstract translation: 一种用于制造具有基体的光学元件或光学元件的一部分的方法，包括： - 提供具有对应于所述光学元件的几何形状的表面的模具体（21,1000,2000）; - 沉积层系统 （7），包括在所述模体（21,1000,2000）的表面上的至少一个分离层系统（15,1010,2010）; - 在所述层系统（7）上电铸基体（4,1030,2030） ）; 并且在分离层系统（15,1010,2010）将至少基体从模体（21,1000,2000）分离。
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公开(公告)号：US08854602B2
公开(公告)日：2014-10-07
申请号：US10580179
申请日：2004-11-22
Applicant: Bernhard Gellrich , Andreas Wurmbrand , Jens Kugler , Armin Schoeppach , Christian Zengerling , Stephane Bruynooghe
Inventor： Bernhard Gellrich , Andreas Wurmbrand , Jens Kugler , Armin Schoeppach , Christian Zengerling , Stephane Bruynooghe
CPC classification number: G03F7/70341 , G03F7/70808 , G03F7/70825 , G03F7/70891
Abstract: A holding device for an optical element in an objective has a mount that is connected to the objective, on the one hand, and at least indirectly to the optical element, on the other hand. Arranged between the mount and the optical element is a reinforcing element whose coefficient of thermal expansion corresponds substantially to the coefficient of thermal expansion of the optical element.
Abstract translation: 另一方面，用于目标中的光学元件的保持装置具有一方面连接到物镜并且至少间接连接到光学元件的安装座。 在安装件和光学元件之间布置的是其热膨胀系数基本上对应于光学元件的热膨胀系数的增强元件。
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公开(公告)号：US20080002170A1
公开(公告)日：2008-01-03
申请号：US10580179
申请日：2004-11-22
Applicant: Bernhard Gellrich , Andreas Wurmbrand , Jens Kugler , Armin Schoeppach , Christian Zengerling , Stephane Bruynooghe
Inventor： Bernhard Gellrich , Andreas Wurmbrand , Jens Kugler , Armin Schoeppach , Christian Zengerling , Stephane Bruynooghe
CPC classification number: G03F7/70341 , G03F7/70808 , G03F7/70825 , G03F7/70891
Abstract: A holding device for an optical element in an objective has a mount that is connected to the objective, on the one hand, and at least indirectly to the optical element, on the other hand. Arranged between the mount and the optical element is a reinforcing element whose coefficient of thermal expansion corresponds substantially to the coefficient of thermal expansion of the optical element.
Abstract translation: 另一方面，用于目标中的光学元件的保持装置具有一方面连接到物镜并且至少间接连接到光学元件的安装座。 在安装件和光学元件之间布置的是其热膨胀系数基本上对应于光学元件的热膨胀系数的增强元件。
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