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1.发明授权Temperature compensated surface acoustic wave device and method having buried interdigital transducers for providing an improved insertion loss and quality factor 有权温度补偿表面声波装置和方法具有埋入的叉指式换能器，用于提供改进的插入损耗和品质因素公开(公告)号：US08044553B2
公开(公告)日：2011-10-25
申请号：US12709772
申请日：2010-02-22
摘要： A SAW device having metal electrodes on a surface of the piezoelectric substrate includes a dielectric layer deposited on the surface. Depositing the layer results in seams extending upward from the electrodes extending above the surface of the substrate. An additional seam results from one seam extending from one electrode joining a second seam extending from an adjacent electrode within the dielectric layer and is generally formed above the height of the electrodes. The additional seam is removed through planarization or the like. The dielectric layer may be further planarized for providing a thickness of the dielectric layer above the electrodes as desired.
摘要翻译： 在压电基板的表面上具有金属电极的SAW器件包括沉积在表面上的电介质层。 沉积层导致从在衬底的表面上方延伸的电极向上延伸的接缝。 从一个电极延伸的一个接缝产生一个附加的接缝，该接缝从电介质层中的相邻电极延伸的第二接缝接合，并且通常形成在电极的高度之上。 通过平坦化等除去附加的接缝。 可以进一步平坦化介电层，以根据需要提供电极上方的电介质层的厚度。
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公开(公告)号：US06402590B1
公开(公告)日：2002-06-11
申请号：US09594139
申请日：2000-06-14
IPC分类号： B24B100
CPC分类号： B24B37/30
摘要： The present invention provides a polishing apparatus comprising a carrier head, rigid members coupled to the carrier head at different points on the carrier head, and a controller coupled to each of the rigid members wherein the controller is configured to regulate forces applied against the carrier head through each of the rigid members.
摘要翻译： 本发明提供一种抛光装置，其包括载体头，在载体头上的不同点处联接到载体头的刚性构件和耦合到每个刚性构件的控制器，其中控制器构造成调节施加在载体头上的力 通过每个刚性构件。
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3.发明申请Temperature Compensated Surface Acoustic Wave Device and Method Having Buried Interdigital Transducers for Providing an Improved Insertion Loss and Quality Factor 有权温度补偿表面声波器件和埋入式叉指式传感器提供改进的插入损耗和质量因子的方法公开(公告)号：US20110204747A1
公开(公告)日：2011-08-25
申请号：US12709772
申请日：2010-02-22
摘要： A SAW device having metal electrodes on a surface of the piezoelectric substrate includes a dielectric layer deposited on the surface. Depositing the layer results in seams extending upward from the electrodes extending above the surface of the substrate. An additional seam results from one seam extending from one electrode joining a second seam extending from an adjacent electrode within the dielectric layer and is generally formed above the height of the electrodes. The additional seam is removed through planarization or the like. The dielectric layer may be further planarized for providing a thickness of the dielectric layer above the electrodes as desired.
摘要翻译： 在压电基板的表面上具有金属电极的SAW器件包括沉积在表面上的电介质层。 沉积层导致从在衬底的表面上方延伸的电极向上延伸的接缝。 从一个电极延伸的一个接缝产生一个附加的接缝，该接缝从电介质层中的相邻电极延伸的第二接缝接合，并且通常形成在电极的高度之上。 通过平坦化等除去附加的接缝。 可以进一步平坦化介电层，以根据需要提供电极上方的电介质层的厚度。
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