公开(公告)号：US08284489B2

公开(公告)日：2012-10-09

申请号：US11853665

申请日：2007-09-11

Applicant: Christopher S. Koeppen ,  Steven E. Parks

Inventor： Christopher S. Koeppen ,  Steven E. Parks

IPC: G02B27/44

CPC classification number: G02B6/29395 ,  G02B6/29311 ,  G02B6/34

Abstract: Spectrally filtering at least one input beam includes dispersing spectral components of at least one input beam at different respective angles in a spectral plane; changing at least some of the angles of the propagation axes of the dispersed spectral components so that the maximum angular separation among the propagation axes of the spectral components changes; receiving a plurality of the dispersed spectral components incident on a reflective surface at a location at which the central rays of each of the spectral components are incident at different points on the reflective surface; and tilting the reflective surface to select at least one and fewer than all of the received spectral components to be directed to a selected output path.

Abstract translation: 频谱滤波至少一个输入光束包括在光谱平面中以不同的相应角度分散至少一个输入光束的光谱分量; 改变分散的光谱分量的传播轴的至少一些角度，使得光谱分量的传播轴之间的最大角度间隔变化; 在每个所述光谱分量的中心射线入射到所述反射表面上的不同点处的位置处接收入射在反射表面上的多个分散光谱分量; 并且倾斜所述反射表面以选择要被引导到所选择的输出路径的至少一个且少于所有接收的频谱分量。

公开(公告)号：US20090067054A1

公开(公告)日：2009-03-12

申请号：US11853665

申请日：2007-09-11

Applicant: Christopher S. Koeppen ,  Steven E. Parks

Inventor： Christopher S. Koeppen ,  Steven E. Parks

IPC: G02B5/20 ,  G02B5/04

CPC classification number: G02B6/29395 ,  G02B6/29311 ,  G02B6/34

Abstract: Spectrally filtering at least one input beam includes dispersing spectral components of at least one input beam at different respective angles in a spectral plane; changing at least some of the angles of the propagation axes of the dispersed spectral components so that the maximum angular separation among the propagation axes of the spectral components changes; receiving a plurality of the dispersed spectral components incident on a reflective surface at a location at which the central rays of each of the spectral components are incident at different points on the reflective surface; and tilting the reflective surface to select at least one and fewer than all of the received spectral components to be directed to a selected output path.

Abstract translation: 频谱滤波至少一个输入光束包括在光谱平面中以不同的相应角度分散至少一个输入光束的光谱分量; 改变分散的光谱分量的传播轴的至少一些角度，使得光谱分量的传播轴之间的最大角度间隔变化; 在每个所述光谱分量的中心射线入射到所述反射表面上的不同点处的位置处接收入射在反射表面上的多个分散光谱分量; 并且倾斜所述反射表面以选择要被引导到所选择的输出路径的至少一个且少于所有接收的频谱分量。

公开(公告)号：US20090040615A1

公开(公告)日：2009-02-12

申请号：US11837385

申请日：2007-08-10

Applicant: Christopher S. Koeppen ,  Steven E. Parks

Inventor： Christopher S. Koeppen ,  Steven E. Parks

IPC: G02B5/18

CPC classification number: G02B5/1866

Abstract: Spectrally filtering at least one input beam includes: dispersing spectral components of at least one input beam at respective angles in a spectral plane; changing at least some of the angles of the propagation axes of the dispersed spectral components so that a plurality of the spectral components reflect from a single reflective surface; and tilting the reflective surface to select at least one and fewer than all of the received spectral components to be directed to an output spatial mode.

Abstract translation: 至少一个输入光束的光谱滤波包括：在光谱平面中以各自的角度分散至少一个输入光束的光谱分量; 改变分散的光谱分量的传播轴的至少一些角度，使得多个光谱分量从单个反射表面反射; 并且倾斜所述反射表面以选择要被引导到输出空间模式的至少一个且少于所有接收的频谱分量。

公开(公告)号：US06666588B1

公开(公告)日：2003-12-23

申请号：US10264345

申请日：2002-10-03

Applicant: Neal H. Thorsten ,  Christopher S. Koeppen ,  Steven E. Parks ,  Wayne F. Thomas ,  Kenneth R. Mahon

Inventor： Neal H. Thorsten ,  Christopher S. Koeppen ,  Steven E. Parks ,  Wayne F. Thomas ,  Kenneth R. Mahon

IPC: G02B636

CPC classification number: G02B6/4249 ,  G02B6/4221 ,  G02B6/4226

Abstract: A method is provided for assembling an optical collimator array. The method begins by directing light through a first optical collimator to produce a first optical output beam. The first collimator is supported by a first carrier element. The first collimator is rotated about its central longitudinal axis to adjust a position of the first optical output beam on a surface that intercepts the first optical output beam. The first carrier element is then rotated about a carrier axis perpendicular to the central longitudinal axis and in a plane containing the central longitudinal axis to further adjust the position of the first optical output beam on the surface. The first collimator continues to be rotated about these axes until the first optical output beam is located at a desired position on the surface, at which point the first optical collimator is secured to the first carrier element. Next, the first carrier element itself is secured to prevent rotation about the carrier axis. The aforementioned steps are repeated for a second optical collimator producing a second optical output beam, which is supported by a second carrier element. The second optical collimator continues to be rotated about the two axes until the second optical output beam is located at a second position on the surface that is offset from the position of the first optical output beam by a prescribed amount. Finally, the second optical collimator is secured to the second carrier element and the second carrier element is secured to the first carrier element.

Abstract translation: 提供了一种用于组装光学准直器阵列的方法。 该方法开始于将光引导通过第一光学准直器以产生第一光学输出光束。 第一准直器由第一载体元件支撑。 第一准直器绕其中心纵向轴线旋转以调整第一光学输出光束在截取第一光学输出光束的表面上的位置。 然后，第一载体元件围绕垂直于中心纵向轴线的载体轴线旋转，并且在包含中心纵向轴线的平面中旋转，以进一步调节第一光学输出光束在表面上的位置。 第一准直器继续围绕这些轴旋转，直到第一光学输出光束位于表面上的期望位置，此时第一光学准直器被固定到第一载体元件。 接下来，第一载体元件本身被固定以防止围绕载体轴线旋转。 对于产生第二光学输出光束的第二光学准直仪重复上述步骤，第二光学准直器由第二载体元件支撑。 第二光学准直器继续围绕两个轴线旋转，直到第二光学输出光束位于表面上从第一光学输出光束的位置偏移预定量的第二位置。 最后，第二光学准直器被固定到第二载体元件，第二载体元件被固定到第一载体元件。

公开(公告)号：US20090303562A1

公开(公告)日：2009-12-10

申请号：US12135354

申请日：2008-06-09

Applicant: Christopher S. Koeppen ,  Steven E. Parks

Inventor： Christopher S. Koeppen ,  Steven E. Parks

IPC: G02B26/00

CPC classification number: G01J3/06 ,  G01J1/029 ,  G01J3/02 ,  G01J3/021 ,  G01J3/14 ,  G01J3/1804 ,  G01J2003/064 ,  G01J2003/1213 ,  G02B6/2931 ,  G02B6/29311 ,  G02B6/29313 ,  G02B6/29389 ,  G02B6/34

Abstract: For spectrally filtering at least one input beam, a first reflective element is configured to tilt to multiple tilt orientations that each corresponds to a different angle of propagation of at least one input beam. One or more optical elements are configured to change at least some of the relative angles of propagation of the input beam for different tilt orientations of the first reflective element. A spectrally dispersive element is configured to receive the input beam at a location at which the central ray of the input beam is incident at different points on the spectrally dispersive element for each of the tilt orientations, and configured to disperse spectral components of the input beam at different respective angles in a spectral plane. The first reflective element is configured to tilt to select at least one and fewer than all of the dispersed spectral components to be directed to a selected output path.

Abstract translation: 为了对至少一个输入光束进行光谱滤波，第一反射元件被配置为倾斜到多个倾斜取向，其各自对应于至少一个输入光束的不同传播角度。 一个或多个光学元件被配置为改变用于第一反射元件的不同倾斜取向的输入光束的相对传播角度的至少一些。 光谱分散元件被配置为在输入光束的中心射线入射到用于每个倾斜取向的光谱色散元件上的不同点的位置处接收输入光束，并且被配置为分散输入光束的光谱分量 在光谱平面中以不同的相应角度。 第一反射元件被配置为倾斜以选择要被引导到所选择的输出路径的至少一个且少于所有分散的光谱分量。

公开(公告)号：US06301434B1

公开(公告)日：2001-10-09

申请号：US09274815

申请日：1999-03-22

Applicant: James McDiarmid ,  Kristian E. Johnsgard ,  Steven E. Parks ,  Mark W. Johnsgard

Inventor： James McDiarmid ,  Kristian E. Johnsgard ,  Steven E. Parks ,  Mark W. Johnsgard

IPC: F26B1900

CPC classification number: H01L21/67115 ,  C23C16/4404 ,  C23C16/481 ,  C23C16/488

Abstract: A thermal processing system and method for processing a semiconductor substrate. A lamp system radiates through a window to heat the substrate. A dual gas manifold provides purge gas through a top showerhead to prevent deposits on the window and provides gas through a lower showerhead to deposit a material on the substrate. A thin support and a radiative cavity with thin radiation shields is used to support and insulate the substrate. A peripheral heater also heats the edges to enhance uniformity. An opaque quartz liner is used to reduce contaminants and undesired deposits and simplify cleaning.

Abstract translation: 一种用于处理半导体衬底的热处理系统和方法。 灯系统通过窗口辐射以加热基板。 双气体歧管通过顶部淋浴头提供净化气体，以防止窗户上的沉积物，并通过下部喷头提供气体以将材料沉积在基底上。 使用薄支撑和具有薄辐射屏蔽的辐射腔来支撑和绝缘基板。 外围加热器还加热边缘以增强均匀性。 使用不透明的石英衬垫来减少污染物和不期望的沉积物并简化清洁。

公开(公告)号：US20120320376A1

公开(公告)日：2012-12-20

申请号：US13549702

申请日：2012-07-16

Applicant: Christopher S. Koeppen ,  Steven E. Parks

Inventor： Christopher S. Koeppen ,  Steven E. Parks

IPC: G01J3/02 ,  G02B26/08

CPC classification number: G02B6/29395 ,  G02B6/29311 ,  G02B6/34

Abstract: Spectrally filtering at least one input beam includes dispersing spectral components of at least one input beam at different respective angles in a spectral plane; changing at least some of the angles of the propagation axes of the dispersed spectral components so that the maximum angular separation among the propagation axes of the spectral components changes; receiving a plurality of the dispersed spectral components incident on a reflective surface at a location at which the central rays of each of the spectral components are incident at different points on the reflective surface; and tilting the reflective surface to select at least one and fewer than all of the received spectral components to be directed to a selected output path.

Abstract translation: 频谱滤波至少一个输入光束包括在光谱平面中以不同的相应角度分散至少一个输入光束的光谱分量; 改变分散的光谱分量的传播轴的至少一些角度，使得光谱分量的传播轴之间的最大角度间隔变化; 在每个所述光谱分量的中心射线入射到所述反射表面上的不同点处的位置处接收入射在反射表面上的多个分散光谱分量; 并且倾斜所述反射表面以选择要被引导到所选择的输出路径的至少一个且少于所有接收的频谱分量。

公开(公告)号：US07864423B2

公开(公告)日：2011-01-04

申请号：US11837385

申请日：2007-08-10

Applicant: Christopher S. Koeppen ,  Steven E. Parks

Inventor： Christopher S. Koeppen ,  Steven E. Parks

IPC: G02B27/44

CPC classification number: G02B5/1866

Abstract: Spectrally filtering at least one input beam includes: dispersing spectral components of at least one input beam at respective angles in a spectral plane; changing at least some of the angles of the propagation axes of the dispersed spectral components so that a plurality of the spectral components reflect from a single reflective surface; and tilting the reflective surface to select at least one and fewer than all of the received spectral components to be directed to an output spatial mode.

Abstract translation: 至少一个输入光束的光谱滤波包括：在光谱平面中以各自的角度分散至少一个输入光束的光谱分量; 改变分散的光谱分量的传播轴的至少一些角度，使得多个光谱分量从单个反射表面反射; 并且倾斜所述反射表面以选择要被引导到输出空间模式的至少一个且少于所有接收的频谱分量。

公开(公告)号：US07817272B2

公开(公告)日：2010-10-19

申请号：US12135354

申请日：2008-06-09

Applicant: Christopher S. Koeppen ,  Steven E. Parks

Inventor： Christopher S. Koeppen ,  Steven E. Parks

IPC: G01J3/26

CPC classification number: G01J3/06 ,  G01J1/029 ,  G01J3/02 ,  G01J3/021 ,  G01J3/14 ,  G01J3/1804 ,  G01J2003/064 ,  G01J2003/1213 ,  G02B6/2931 ,  G02B6/29311 ,  G02B6/29313 ,  G02B6/29389 ,  G02B6/34

Abstract: For spectrally filtering at least one input beam, a first reflective element is configured to tilt to multiple tilt orientations that each corresponds to a different angle of propagation of at least one input beam. One or more optical elements are configured to change at least some of the relative angles of propagation of the input beam for different tilt orientations of the first reflective element. A spectrally dispersive element is configured to receive the input beam at a location at which the central ray of the input beam is incident at different points on the spectrally dispersive element for each of the tilt orientations, and configured to disperse spectral components of the input beam at different respective angles in a spectral plane. The first reflective element is configured to tilt to select at least one and fewer than all of the dispersed spectral components to be directed to a selected output path.

Abstract translation: 为了对至少一个输入光束进行光谱滤波，第一反射元件被配置为倾斜到多个倾斜取向，其各自对应于至少一个输入光束的不同传播角度。 一个或多个光学元件被配置为改变用于第一反射元件的不同倾斜取向的输入光束的相对传播角度的至少一些。 光谱分散元件被配置为在输入光束的中心射线入射到用于每个倾斜取向的光谱色散元件上的不同点处的位置处接收输入光束，并且被配置为分散输入光束的光谱分量 在光谱平面中以不同的相应角度。 第一反射元件被配置为倾斜以选择要被引导到所选择的输出路径的至少一个且少于所有分散的光谱分量。