Beam-Induced Deposition of Low-Resistivity Material
    1.
    发明申请
    Beam-Induced Deposition of Low-Resistivity Material 审中-公开
    光诱导沉积低电阻材料

    公开(公告)号:US20120308740A1

    公开(公告)日:2012-12-06

    申请号:US13351088

    申请日:2012-01-16

    Abstract: An improved method of beam deposition to deposit a low-resistivity metal. Preferred embodiments of the present invention use a novel focused ion beam induced deposition precursor to deposit low-resistivity metallic material such as tin. Applicants have discovered that by using a methylated or ethylated metal such as hexamethylditin as a precursor, material can be deposited having a resistivity as low as 40 μΩ·cm.

    Abstract translation: 一种改进的光束沉积方法来沉积低电阻率金属。 本发明的优选实施方案使用新颖的聚焦离子束诱导沉积前体来沉积诸如锡的低电阻率金属材料。 申请人已经发现,通过使用甲基化或乙基化金属如六甲基锡作为前体,可以沉积具有低至40μΩ·cm·cm的电阻率的材料。

    HIGH SELECTIVITY, LOW DAMAGE ELECTRON-BEAM DELINEATION ETCH
    5.
    发明申请
    HIGH SELECTIVITY, LOW DAMAGE ELECTRON-BEAM DELINEATION ETCH 有权
    高选择性,低损耗电子束分层蚀刻

    公开(公告)号:US20100197142A1

    公开(公告)日:2010-08-05

    申请号:US12363376

    申请日:2009-01-30

    CPC classification number: H01L21/306 H01L21/3065 H01L21/31116 H01L21/32137

    Abstract: A method and apparatus for selective etching a substrate using a focused beam. For example, multiple gases may be used that are involved in competing beam-induced and spontaneous reactions, with the result depending on the materials on the substrate. The gases may include, for example, an etchant gas and an auxiliary gas that inhibits etching.

    Abstract translation: 一种使用聚焦光束选择性蚀刻衬底的方法和装置。 例如,可以使用涉及光束诱导和自发反应的多种气体,结果取决于衬底上的材料。 气体可以包括例如蚀刻剂气体和抑制蚀刻的辅助气体。

    Advertising housing for mass transit
    6.
    发明申请
    Advertising housing for mass transit 审中-公开
    公共交通广告住房

    公开(公告)号:US20090307870A1

    公开(公告)日:2009-12-17

    申请号:US12213139

    申请日:2008-06-16

    CPC classification number: G09F21/04 G09F23/00 Y10T16/44

    Abstract: Advertising is mounted for viewing in a rigid hollow housing that surrounds or otherwise encompasses a handle strap that at its upper end is attached to an overhead bar or rail on a bus, train or the like, and that has a lower end which is passed down through the middle of the housing so as to project a lower handle-end of the strap from the bottom of the housing. A hand-hold of toroidal or other shape, may be inserted at, or mounted to, the handle-end of the strap. The hand-hold may be sized to keep the housing from falling off the end of the strap.

    Abstract translation: 广告被安装用于在刚性中空壳体中观察,该刚性中空壳体围绕或以其他方式包围手柄带,其手柄带在其上端附接到总线,列车等上的架空杆或轨道上,并且具有向下通过的下端 通过外壳的中间,从外壳的底部突出出一个下表带的下端。 环形或其他形状的手持件可以插入或安装到带的手柄端。 手持件的尺寸可以确保外壳不脱离带的端部。

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