公开(公告)号：US09240767B2

公开(公告)日：2016-01-19

申请号：US13484961

申请日：2012-05-31

Applicant: Byron Neville Burgess ,  William Robert Krenik ,  Stuart M. Jacobsen

Inventor： Byron Neville Burgess ,  William Robert Krenik ,  Stuart M. Jacobsen

IPC: H03H9/02 ,  H03H9/17

CPC classification number: H03H9/02102 ,  H03H9/175

Abstract: An integrated resonator apparatus comprises a piezoelectric resonator, an acoustic Bragg reflector coupled to the piezoelectric resonator, and a substrate on which the acoustic Bragg reflector is disposed. The apparatus also includes an active heater layer covering the piezoelectric resonator. Heat produced by the active heater layer is controllable by an amount of current provided through the heater layer.

Abstract translation: 集成谐振器装置包括压电谐振器，耦合到压电谐振器的声布拉格反射器，以及布置有声布拉格反射器的基板。 该装置还包括覆盖压电谐振器的主动加热器层。 由活性加热器层产生的热可通过加热器层提供的电流量来控制。

公开(公告)号：US06977196B1

公开(公告)日：2005-12-20

申请号：US10642969

申请日：2003-08-18

Applicant: Darius L. Crenshaw ,  Stuart M. Jacobsen ,  David J. Seymour

Inventor： Darius L. Crenshaw ,  Stuart M. Jacobsen ,  David J. Seymour

IPC: H01C7/00 ,  H01H1/00 ,  H01H59/00 ,  H01L21/822 ,  H01L27/04 ,  H01P1/10 ,  H01L21/8234 ,  H01L21/8244

CPC classification number: H01H59/0009 ,  H01H1/0036 ,  Y10T29/435 ,  Y10T29/49004 ,  Y10T29/4902 ,  Y10T29/49071 ,  Y10T29/49117

Abstract: The present invention provides a method and product-by-method of integrating a bias resistor in circuit with a bottom electrode of a micro-electromechanical switch on a silicon substrate. The resistor and bottom electrode are formed simultaneously by first sequentially depositing a layer of a resistor material (320), a hard mask material (330) and a metal material (340) on a silicon substrate forming a stack. The bottom electrode and resistor lengths are subsequently patterned and etched (350) followed by a second etching (360) process to remove the hard mask and metal materials from the defined resistor length. Finally, in a preferred embodiment, the bottom electrode and resistor structure is encapsulated with a layer of dielectric which is patterned and etched (370) to correspond to the defined bottom electrode and resistor.

Abstract translation: 本发明提供了一种将电路中的偏置电阻与硅基板上的微机电开关的底电极集成的方法和方法。 电阻器和底部电极通过首先在形成叠层的硅衬底上依次沉积电阻材料层（320），硬掩模材料（330）和金属材料（340）而同时形成。 随后对底部电极和电阻器长度进行图案化和蚀刻（350），随后进行第二蚀刻（360）处理，以从限定的电阻器长度去除硬掩模和金属材料。 最后，在一个优选实施例中，底部电极和电阻器结构用一层电介质封装，电介质层被图案化并蚀刻（370）以对应于限定的底部电极和电阻器。

公开(公告)号：US06737326B2

公开(公告)日：2004-05-18

申请号：US09852921

申请日：2001-05-10

Applicant: Philipp Steinmann ,  Stuart M. Jacobsen ,  Louis N. Hutter ,  Fred D. Bailey

Inventor： Philipp Steinmann ,  Stuart M. Jacobsen ,  Louis N. Hutter ,  Fred D. Bailey

IPC: H01L2120

CPC classification number: H01L28/20 ,  H01L21/32051 ,  H01L23/522 ,  H01L27/0802 ,  H01L28/24 ,  H01L2924/0002 ,  H01L2924/00

Abstract: A method for integrating a thin film resistor into an interconnect process flow where one of the metal layers is used as a hardmask. After a via (42) etch and fill, the thin film resistor material (62) is deposited. The metal interconnect layer (76) is then deposited, including any barrier layers desired. The metal leads (70) are then etched together with the shape of the thin film resistor (60). The metal (76) over the thin film resistor (60) is then removed.

Abstract translation: 一种用于将薄膜电阻器集成到互连工艺流程中的方法，其中一个金属层用作硬掩模。 在通孔（42）蚀刻和填充之后，沉积薄膜电阻器材料（62）。 然后沉积金属互连层（76），包括所需的任何阻挡层。 然后将金属引线（70）与薄膜电阻器（60）的形状一起蚀刻。 然后去除薄膜电阻器（60）上方的金属（76）。

公开(公告)号：US06404127B2

公开(公告)日：2002-06-11

申请号：US09760398

申请日：2001-01-12

Applicant: Stuart M. Jacobsen ,  Steven M. Jaffe ,  Hergen Eilers ,  Michieal L. Jones ,  Irving Jaffe

Inventor： Stuart M. Jacobsen ,  Steven M. Jaffe ,  Hergen Eilers ,  Michieal L. Jones ,  Irving Jaffe

IPC: G02B518

CPC classification number: H01L51/5262 ,  G02F1/1336 ,  G02F1/133602 ,  G02F1/133621 ,  G02F2001/133521 ,  H01J29/28 ,  H01J61/42 ,  H01J63/06 ,  H01L51/5265 ,  H05B33/12 ,  H05B33/22 ,  Y10S428/917

Abstract: A resonant microcavity display (20) having microcavity with a substrate (25), a phosphor active region (50) and front and rear reflectors (30 and 60). The front and rear reflectors may be spaced to create either a standing or traveling electromagnetic wave to enhance the efficiency of the light transmission.

Abstract translation: 具有微腔与基底（25），荧光体活性区（50）和前后反射器（30和60）的共振微腔显示器（20）。 前后反射器可以间隔开以形成立起或行进的电磁波，以提高光传输的效率。

公开(公告)号：US06198211B1

公开(公告)日：2001-03-06

申请号：US09073711

申请日：1998-05-06

Applicant: Steven M. Jaffe ,  Hergen Eilers ,  Michieal L. Jones ,  Stuart M. Jacobsen ,  Irving Jaffe

Inventor： Steven M. Jaffe ,  Hergen Eilers ,  Michieal L. Jones ,  Stuart M. Jacobsen ,  Irving Jaffe

IPC: H01J2910

CPC classification number: H01J29/28 ,  G02F1/133516 ,  G02F2001/133521 ,  H01J61/42 ,  H05B33/12 ,  H05B33/22

Abstract: A resonant microcavity display (20) having microcavity with a substrate (25), a phosphor active region (50) and front and rear reflectors (30 and 60). The front and rear reflectors may be spaced to create either a standing or taveling electromagnetic wave to enhance the efficiency of the light transmission.

Abstract translation: 具有微腔与基底（25），荧光体活性区（50）和前后反射器（30和60）的共振微腔显示器（20）。 前后反射器可以间隔开以形成立起或分散的电磁波，以提高光传输的效率。

公开(公告)号：US5469018A

公开(公告)日：1995-11-21

申请号：US94767

申请日：1993-07-20

Applicant: Stuart M. Jacobsen ,  Steven M. Jaffe ,  Hergen Eilers ,  Michieal L. Jones

Inventor： Stuart M. Jacobsen ,  Steven M. Jaffe ,  Hergen Eilers ,  Michieal L. Jones

IPC: G02B5/08 ,  H01J29/10 ,  H01J29/28 ,  H01J61/42 ,  H01J63/06 ,  H01L51/50 ,  H05B33/12 ,  H05B33/22 ,  H05B33/24 ,  H01S3/08

CPC classification number: H01J61/42 ,  H01J29/28 ,  H01J63/06 ,  H05B33/12 ,  H05B33/22

Abstract: A resonant microcavity display, comprising a thin-film resonant microcavity with a phosphor active region is disclosed. The microcavity comprises: a rigid substrate; a front reflector disposed upon the rigid substrate; a phosphor active region disposed upon the front reflector; and a back reflector disposed upon the active region. The display preferentially emits light that propagates along the axis perpendicular to plane of the display, due to its quantum mechanical properties. It exhibits high external efficiency, highly controllable chromaticity, high resolution, highly directional output and highly efficient heat transfer characteristics. For these reasons it provides a suitable display element for projection screen television, high definition television, direct view television, flat panel displays, optical coupling, and other applications.

Abstract translation: 公开了一种包括具有磷光体活性区域的薄膜谐振微腔的共振微腔显示器。 微腔包括：刚性基底; 设置在刚性基板上的前反射器; 设置在前反射器上的荧光体有源区; 以及设置在有源区上的后反射器。 由于其量子力学性能，显示器优先发射沿垂直于显示器平面的轴传播的光。 它表现出高的外部效率，高度可控的色度，高分辨率，高定向输出和高效的传热特性。 由于这些原因，它提供了用于投影屏幕电视，高分辨率电视，直观观看电视，平板显示器，光耦合等应用的合适的显示元件。

公开(公告)号：US20090104540A1

公开(公告)日：2009-04-23

申请号：US11873473

申请日：2007-10-17

Applicant: Byron N. Burgess ,  Stuart M. Jacobsen

Inventor： Byron N. Burgess ,  Stuart M. Jacobsen

IPC: G03F1/00 ,  H01L21/8234

CPC classification number: H01L21/8234 ,  G03F1/32

Abstract: In one aspect there is provided a gray scale lithographic mask that comprises a transparent substrate and a metallic layer located over the substrate, wherein the metallic layer has tapered edges with a graded transparency. The lithographic mask, along with etching processes may be used to transfer a pattern 450a into a layer of a semiconductor device.

Abstract translation: 在一个方面，提供了一种灰度级光刻掩模，其包括透明基板和位于基板上方的金属层，其中金属层具有渐变透明度的锥形边缘。 光刻掩模以及蚀刻工艺可以用于将图案450a转移到半导体器件的层中。

公开(公告)号：US20090029542A1

公开(公告)日：2009-01-29

申请号：US12240372

申请日：2008-09-29

Applicant: Willmar E. SUBIDO ,  Edgardo Hortaleza ,  Stuart M. Jacobsen

Inventor： Willmar E. SUBIDO ,  Edgardo Hortaleza ,  Stuart M. Jacobsen

IPC: H01L21/44

CPC classification number: H01L24/85 ,  B23K20/007 ,  B23K26/0006 ,  B23K26/22 ,  B23K26/352 ,  B23K28/02 ,  B23K2101/40 ,  B23K2103/08 ,  B23K2103/10 ,  B23K2103/12 ,  H01L24/45 ,  H01L24/48 ,  H01L24/78 ,  H01L2224/05624 ,  H01L2224/05639 ,  H01L2224/05644 ,  H01L2224/05647 ,  H01L2224/05664 ,  H01L2224/45015 ,  H01L2224/45124 ,  H01L2224/45139 ,  H01L2224/45144 ,  H01L2224/45147 ,  H01L2224/45164 ,  H01L2224/48091 ,  H01L2224/48463 ,  H01L2224/48505 ,  H01L2224/48624 ,  H01L2224/48639 ,  H01L2224/48644 ,  H01L2224/48647 ,  H01L2224/48664 ,  H01L2224/48724 ,  H01L2224/48739 ,  H01L2224/48744 ,  H01L2224/48747 ,  H01L2224/48764 ,  H01L2224/48824 ,  H01L2224/48839 ,  H01L2224/48844 ,  H01L2224/48847 ,  H01L2224/48864 ,  H01L2224/78268 ,  H01L2224/78301 ,  H01L2224/85014 ,  H01L2224/85016 ,  H01L2224/85039 ,  H01L2224/85045 ,  H01L2224/85205 ,  H01L2224/85214 ,  H01L2924/01005 ,  H01L2924/01013 ,  H01L2924/01014 ,  H01L2924/01019 ,  H01L2924/01029 ,  H01L2924/01033 ,  H01L2924/01046 ,  H01L2924/01047 ,  H01L2924/0106 ,  H01L2924/01079 ,  H01L2924/01082 ,  H01L2924/01327 ,  H01L2924/10253 ,  H01L2924/00014 ,  H01L2924/00

Abstract: The invention provides methods and systems for laser assisted wirebonding. One or more conditioning laser pulses are used to prepare a bonding surface for wirebonding by removing impurities such as residues from manufacturing processes, oxides, or irregularities on the bonding surface. Subsequently, a free air ball is brought into contact with the conditioned bonding surface to form a weld.

Abstract translation: 本发明提供了用于激光辅助引线键合的方法和系统。 使用一个或多个调理激光脉冲来通过去除粘合表面上的制造工艺，氧化物或不规则物的残留物等杂质来制备用于引线接合的接合表面。 随后，使自由空气球与调节的接合表面接触以形成焊缝。

公开(公告)号：US06698082B2

公开(公告)日：2004-03-02

申请号：US09941031

申请日：2001-08-28

Applicant: Darius L. Crenshaw ,  Stuart M. Jacobsen ,  David J. Seymour

Inventor： Darius L. Crenshaw ,  Stuart M. Jacobsen ,  David J. Seymour

IPC: H01H4300

CPC classification number: H01H59/0009 ,  H01H1/0036 ,  Y10T29/435 ,  Y10T29/49004 ,  Y10T29/4902 ,  Y10T29/49071 ,  Y10T29/49117

Abstract: The present invention provides a method and product-by-method of integrating a bias resistor in circuit with a bottom electrode of a micro-electromechanical switch on a silicon substrate. The resistor and bottom electrode are formed simultaneously by first sequentially depositing a layer of a resistor material (320), a hard mask material (330) and a metal material (340) on a silicon substrate forming a stack. The bottom electrode and resistor lengths are subsequently patterned and etched (350) followed by a second etching (360) process to remove the hard mask and metal materials from the defined resistor length. Finally, in a preferred embodiment, the bottom electrode and resistor structure is encapsulated with a layer of dielectric which is patterned and etched (370) to correspond to the defined bottom electrode and resistor.

Abstract translation: 本发明提供了一种将电路中的偏置电阻与硅基板上的微机电开关的底电极集成的方法和方法。 电阻器和底部电极通过首先在形成叠层的硅衬底上依次沉积电阻材料层（320），硬掩模材料（330）和金属材料（340）而同时形成。 随后对底部电极和电阻器长度进行图案化和蚀刻（350），随后进行第二蚀刻（360）处理，以从限定的电阻器长度去除硬掩模和金属材料。 最后，在一个优选实施例中，底部电极和电阻器结构用一层电介质封装，电介质层被图案化并蚀刻（370）以对应于限定的底部电极和电阻器。

公开(公告)号：US5616986A

公开(公告)日：1997-04-01

申请号：US516944

申请日：1995-08-18

Applicant: Stuart M. Jacobsen ,  Steven M. Jaffe ,  Hergen Eilers ,  Michieal L. Jones

Inventor： Stuart M. Jacobsen ,  Steven M. Jaffe ,  Hergen Eilers ,  Michieal L. Jones

IPC: G02B5/08 ,  H01J29/10 ,  H01J29/28 ,  H01J61/42 ,  H01J63/06 ,  H01L51/50 ,  H05B33/12 ,  H05B33/22 ,  H05B33/24 ,  H01S3/08

CPC classification number: H01J61/42 ,  H01J29/28 ,  H01J63/06 ,  H05B33/12 ,  H05B33/22

Abstract: A resonant microcavity display, comprising a thin-film resonant microcavity with a phosphor active region is disclosed. The microcavity comprises: a rigid substrate; a front reflector disposed upon the rigid substrate; a phosphor active region disposed upon the front reflector; and a back reflector disposed upon the active region. The display preferentially emits light that propagates along the axis perpendicular to plane of the display, due to its quantum mechanical properties. It exhibits high external efficiency, highly controllable chromaticity, high resolution, highly directional output and highly efficient heat transfer characteristics. For these reasons it provides a suitable display element for projection screen television, high definition television, direct view television, flat panel displays, optical coupling, and other applications.

Abstract translation: 公开了一种包括具有磷光体活性区域的薄膜谐振微腔的共振微腔显示器。 微腔包括：刚性基底; 设置在刚性基板上的前反射器; 设置在前反射器上的荧光体有源区; 以及设置在有源区上的后反射器。 由于其量子力学性能，显示器优先发射沿垂直于显示器平面的轴传播的光。 它表现出高的外部效率，高度可控的色度，高分辨率，高定向输出和高效的传热特性。 由于这些原因，它提供了用于投影屏幕电视，高分辨率电视，直观观看电视，平板显示器，光耦合等应用的合适的显示元件。