Low clearance magnetic head having a contact detection sensor
    1.
    发明授权
    Low clearance magnetic head having a contact detection sensor 有权
    具有接触检测传感器的低间隙磁头

    公开(公告)号:US08717711B2

    公开(公告)日:2014-05-06

    申请号:US13247931

    申请日:2011-09-28

    IPC分类号: G11B5/60

    CPC分类号: G11B5/607 G11B5/6076

    摘要: According to one embodiment, a magnetic data system includes a magnetic disk medium, a magnetic head having a writer element and/or a reader element, an exothermic resistor element for thermal fly-height control (TFC), a contact detection sensor having a resistor element and at least one contact detection electrode, and an insulating film on a medium facing side of the magnetic head to protect the contact detection sensor, the insulating film having a thickness greater than the contact detection electrode, a drive mechanism for passing the magnetic disk medium over the magnetic head, and a controller electrically coupled to the magnetic head for controlling operation of the magnetic head, wherein the controller adjusts magnetic spacing between the magnetic head and the magnetic disk medium via thermal distortion of the exothermic resistor element. The contact detection sensor may be used as a second TFC resistor element.

    摘要翻译: 根据一个实施例,磁数据系统包括磁盘介质,具有写入器元件和/或读取器元件的磁头,用于热飞跃高度控制的放热电阻器元件(TFC),具有电阻器的接触检测传感器 元件和至少一个接触检测电极,以及在磁头的面向介质侧的绝缘膜,以保护接触检测传感器,绝缘膜的厚度大于接触检测电极;驱动机构,用于使磁盘 介质在磁头上,以及控制器,其电耦合到磁头用于控制磁头的操作,其中控制器通过放热电阻器元件的热失真来调节磁头和磁盘介质之间的磁间隔。 接触检测传感器可以用作第二TFC电阻元件。

    Method of manufacturing a magnetic read sensor having a low resistance cap structure
    3.
    发明授权
    Method of manufacturing a magnetic read sensor having a low resistance cap structure 失效
    具有低电阻帽结构的磁读取传感器的制造方法

    公开(公告)号:US08568602B2

    公开(公告)日:2013-10-29

    申请号:US13009738

    申请日:2011-01-19

    IPC分类号: C23F1/00 B44C1/22

    摘要: A method for manufacturing a magnetic sensor that decreases area resistance and decreases MR ratio of the sensor by eliminating any oxide formation in the capping layer of the sensor. The method includes forming a sensor stack having a multi-layer capping structure formed there-over. The multi-layer capping structure can include first, second, third and fourth layers. The second layer is constructed of a material that is not easily oxidized and which is different from the first layer. The sensor can be formed using a mask that includes a carbon hard mask. After the sensor stack has been formed by ion milling, the hard mask can be removed by reactive ion etching. Then, a cleaning process is performed to remove the second, third and fourth layers of the capping layer structure using an end point detection method such as secondary ion mass spectrometry to detect the presence of the second layer.

    摘要翻译: 一种制造磁传感器的方法,其通过消除传感器的覆盖层中的任何氧化物形成来降低传感器的面积电阻并降低MR比。 该方法包括形成其上形成有多层封盖结构的传感器堆叠。 多层封盖结构可以包括第一层,第二层,第三层和第四层。 第二层由不容易氧化并且不同于第一层的材料构成。 传感器可以使用包括碳硬掩模的掩模形成。 在通过离子铣削形成传感器堆叠之后,可以通过反应离子蚀刻去除硬掩模。 然后,使用诸如二次离子质谱法的终点检测方法来进行清洁处理以去除覆盖层结构的第二层,第三层和第四层,以检测第二层的存在。

    LOW CLEARANCE MAGNETIC HEAD HAVING A CONTACT DETECTION SENSOR
    4.
    发明申请
    LOW CLEARANCE MAGNETIC HEAD HAVING A CONTACT DETECTION SENSOR 有权
    具有接触检测传感器的低间隙磁头

    公开(公告)号:US20130077189A1

    公开(公告)日:2013-03-28

    申请号:US13247931

    申请日:2011-09-28

    IPC分类号: G11B5/56 G01R27/08

    CPC分类号: G11B5/607 G11B5/6076

    摘要: According to one embodiment, a magnetic data system includes a magnetic disk medium, a magnetic head having a writer element and/or a reader element, an exothermic resistor element for thermal fly-height control (TFC), a contact detection sensor having a resistor element and at least one contact detection electrode, and an insulating film on a medium facing side of the magnetic head to protect the contact detection sensor, the insulating film having a thickness greater than the contact detection electrode, a drive mechanism for passing the magnetic disk medium over the magnetic head, and a controller electrically coupled to the magnetic head for controlling operation of the magnetic head, wherein the controller adjusts magnetic spacing between the magnetic head and the magnetic disk medium via thermal distortion of the exothermic resistor element. The contact detection sensor may be used as a second TFC resistor element.

    摘要翻译: 根据一个实施例,磁数据系统包括磁盘介质,具有写入器元件和/或读取器元件的磁头,用于热飞跃高度控制的放热电阻器元件(TFC),具有电阻器的接触检测传感器 元件和至少一个接触检测电极,以及在磁头的面向介质侧的绝缘膜,以保护接触检测传感器,绝缘膜的厚度大于接触检测电极;驱动机构,用于使磁盘 介质在磁头上,以及控制器,其电耦合到磁头用于控制磁头的操作,其中控制器通过放热电阻器元件的热失真来调节磁头和磁盘介质之间的磁间隔。 接触检测传感器可以用作第二TFC电阻元件。

    METHOD OF MANUFACTURING A MAGNETIC READ SENSOR HAVING A LOW RESISTANCE CAP STRUCTURE
    5.
    发明申请
    METHOD OF MANUFACTURING A MAGNETIC READ SENSOR HAVING A LOW RESISTANCE CAP STRUCTURE 失效
    制造具有低电阻CAP结构的磁读式传感器的方法

    公开(公告)号:US20120184053A1

    公开(公告)日:2012-07-19

    申请号:US13009738

    申请日:2011-01-19

    IPC分类号: H01L21/02

    摘要: A method for manufacturing a magnetic sensor that decreases area resistance and decreases MR ratio of the sensor by eliminating any oxide formation in the capping layer of the sensor. The method includes forming a sensor stack having a multi-layer capping structure formed there-over. The multi-layer capping structure can include first, second, third and fourth layers. The second layer is constructed of a material that is not easily oxidized and which is different from the first layer. The sensor can be formed using a mask that includes a carbon hard mask. After the sensor stack has been formed by ion milling, the hard mask can be removed by reactive ion etching. Then, a cleaning process is performed to remove the second, third and fourth layers of the capping layer structure using an end point detection method such as secondary ion mass spectrometry to detect the presence of the second layer.

    摘要翻译: 一种制造磁传感器的方法,其通过消除传感器的覆盖层中的任何氧化物形成来降低传感器的面积电阻并降低MR比。 该方法包括形成其上形成有多层封盖结构的传感器堆叠。 多层封盖结构可以包括第一层,第二层,第三层和第四层。 第二层由不容易氧化并且不同于第一层的材料构成。 传感器可以使用包括碳硬掩模的掩模形成。 在通过离子铣削形成传感器堆叠之后,可以通过反应离子蚀刻去除硬掩模。 然后,使用诸如二次离子质谱法的终点检测方法来进行清洁处理以去除覆盖层结构的第二层,第三层和第四层,以检测第二层的存在。