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23 条记录 (耗时 0.019 秒)

    Method and apparatus for evaluating thin films
    1.
    发明授权
    Method and apparatus for evaluating thin films 有权
    评估薄膜的方法和装置

    公开(公告)号：US07544935B2

    公开(公告)日：2009-06-09

    申请号：US11296641

    申请日：2005-12-08

    申请人： Shohei Terada ,  Kazutoshi Kaji ,  Tatsumi Hirano ,  Gyeong-su Park ,  Se-ahn Song ,  Jong-bong Park

    发明人： Shohei Terada ,  Kazutoshi Kaji ,  Tatsumi Hirano ,  Gyeong-su Park ,  Se-ahn Song ,  Jong-bong Park

    IPC分类号： G01N23/04

    CPC分类号： G01N23/2251 ,  G01B15/02

    摘要： A method for evaluating thin films comprises the steps of inputting measurement conditions, generating electron beams from an electron source to condense the electron beams to a specimen by a condenser lens, enlarging the electron beams transmitted by the specimen with imaging lenses to image an enlarged image of the specimen, acquiring elemental maps of the specimen with an element analyzer to display the acquired elemental maps, measuring a length of the elemental maps, and correcting the measurement conditions. Disclosed is an evaluating apparatus that implements the above evaluating method.

    摘要翻译： 一种评估薄膜的方法包括以下步骤：输入测量条件，从电子源产生电子束，通过聚光透镜将电子束聚集到样本，扩大由成像透镜透射的电子束成像放大图像 通过元素分析仪获取样本的元素图，以显示所获取的元素图，测量元素图的长度，以及校正测量条件。 公开了实现上述评价方法的评价装置。

    Transmission electron microscope having electron spectrometer
    10.
    发明授权
    Transmission electron microscope having electron spectrometer 失效
    透射电子显微镜，具有电子光谱仪

    公开(公告)号：US08436301B2

    公开(公告)日：2013-05-07

    申请号：US13133653

    申请日：2009-11-11

    申请人： Shohei Terada ,  Yoshifumi Taniguchi ,  Tatsumi Hirano

    发明人： Shohei Terada ,  Yoshifumi Taniguchi ,  Tatsumi Hirano

    IPC分类号： H01J37/26

    CPC分类号： H01J37/05 ,  H01J37/153 ,  H01J37/244 ,  H01J2237/2446

    摘要： In a spectral image formed by two orthogonal axes, one of which is an axis of the amount of energy loss and the other of which is an axis of positional information, by the use of an electron spectrometer and a transmission electron microscope, distortion in the spectral image of a sample to be analyzed is corrected with high efficiency and high accuracy by comparing electron beam positions calculated from a two-dimensional electron beam position image formed by the two orthogonal axes (the axis of the amount of energy loss and the axis of positional information) with reference electron beam positions, and calculating amounts of the distortion based on the differences of the electron beam positions. Method and apparatus are offered which correct distortion in a spectral image with high efficiency and high accuracy, the image being formed by the two orthogonal axes (the axis of the amount of energy loss and the axis of positional information).

    摘要翻译： 在由两个正交轴形成的光谱图像中，其中一个是能量损失量的轴，另一个是位置信息的轴，通过使用电子光谱仪和透射电子显微镜，在 通过比较从由两个正交轴形成的二维电子束位置图像计算的电子束位置（能量损失量的轴和能量损失的轴线），以高效率和高精度来校正要分析的样本的光谱图像 位置信息），以及基于电子束位置的差异计算失真量。 提供了以高效率和高精度校正光谱图像失真的方法和装置，该图像由两个正交轴（能量损失量的轴和位置信息的轴）形成。