利索-全球专利检索

  1. 登录
  2. 注册

搜索结果

60 条记录 (耗时 0.022 秒)

    Heat treatment apparatus and heat treatment method
    1.
    发明授权
    Heat treatment apparatus and heat treatment method 有权
    热处理设备及热处理方法

    公开(公告)号：US09324591B2

    公开(公告)日：2016-04-26

    申请号：US13438234

    申请日：2012-04-03

    申请人： Koji Yoshii ,  Tatsuya Yamaguchi ,  Wenling Wang ,  Takanori Saito

    发明人： Koji Yoshii ,  Tatsuya Yamaguchi ,  Wenling Wang ,  Takanori Saito

    IPC分类号： F27D21/00 ,  H01L21/67

    CPC分类号： H01L21/67109 ,  H01L21/67248

    摘要： A heat treatment apparatus including: a processing container for processing wafers held in a boat; heaters for heating the processing container; and a control section for controlling the heaters. Heater temperature sensors are provided between the heaters and the processing container, in-container temperature sensors are provided in the processing container, and movable temperature sensors are provided in the boat. The temperature sensors are connected to a temperature estimation section. The temperature estimation section selects two of the three types of temperature sensors, e.g. the movable temperature sensors and the in-container temperature sensors, and determines the temperature of a wafer according to the following formula: T=T1×(1−α)+T2×α, α>1, where T1 and T2 represent detection temperatures of the selected temperature sensors, and α represents a mixing ratio.

    摘要翻译： 一种热处理设备，包括：处理容器，用于处理保存在船上的晶片; 用于加热处理容器的加热器; 以及用于控制加热器的控制部。 加热器温度传感器设置在加热器和处理容器之间，容器内温度传感器设置在处理容器中，并且可移动的温度传感器设置在船上。 温度传感器连接到温度估计部。 温度估计部分选择三种类型的温度传感器中的两种，例如， 可移动温度传感器和容器内温度传感器，并根据以下公式确定晶片的温度：T = T1×（1-α）+ T2×α，α> 1，其中T1和T2表示检测温度 的选定温度传感器，α表示混合比。

    FILM DEPOSITION APPARATUS
    3.
    发明申请
    FILM DEPOSITION APPARATUS 审中-公开
    胶片沉积装置

    公开(公告)号：US20130068163A1

    公开(公告)日：2013-03-21

    申请号：US13425483

    申请日：2012-03-21

    申请人： Tatsuya YAMAGUCHI ,  Masafumi Ishida ,  Hiroyuki Hashimoto ,  Shigure Ohmukai ,  Atsushi Ando

    发明人： Tatsuya YAMAGUCHI ,  Masafumi Ishida ,  Hiroyuki Hashimoto ,  Shigure Ohmukai ,  Atsushi Ando

    IPC分类号： C23C16/02

    CPC分类号： H01L21/02118 ,  B05D1/36 ,  B05D1/60 ,  B05D3/104 ,  H01L21/02271 ,  H01L21/02312 ,  H01L21/67109 ,  H01L21/67303 ,  H01L21/67757

    摘要： A film deposition apparatus includes a film deposition chamber into which a substrate is carried, a heating mechanism that heats the substrate carried into the film deposition chamber, an adhesion accelerating agent feed mechanism that feeds an adhesion accelerating agent gas into the film deposition chamber, and a control part that controls the heating mechanism and the adhesion accelerating agent feed mechanism. When depositing a polyimide film on the substrate by feeding a first source gas formed of dianhydride and a second source gas formed of diamine into the film deposition chamber, the control part is configured to control the adhesion accelerating agent feed mechanism to treat a surface of the substrate with the adhesion accelerating agent gas by feeding the adhesion accelerating agent gas into the film deposition chamber until the substrate is heated to a predetermined temperature for depositing the polyimide film.

    摘要翻译： 一种成膜装置，包括：载置基板的成膜室，将载置于成膜室内的基板加热的加热机构，将粘附促进剂气体送入成膜室的粘合促进剂供给机构，以及 控制加热机构和附着促进剂供给机构的控制部。 当通过将由二酐形成的第一源气体和由二胺形成的第二源气体供给到成膜室中而在基板上沉积聚酰亚胺膜时，控制部分被配置为控制粘合促进剂进料机构以处理 通过将粘合促进剂气体进料到成膜室中直到基板被加热到用于沉积聚酰亚胺膜的预定温度为止，具有附着促进剂气体的基板。

    HEAT TREATMENT APPARATUS AND HEAT TREATMENT METHOD
    4.
    发明申请
    HEAT TREATMENT APPARATUS AND HEAT TREATMENT METHOD 有权
    热处理设备和热处理方法

    公开(公告)号：US20120258415A1

    公开(公告)日：2012-10-11

    申请号：US13438234

    申请日：2012-04-03

    申请人： Koji YOSHII ,  Tatsuya Yamaguchi ,  Wenling Wang ,  Takanori Saito

    发明人： Koji YOSHII ,  Tatsuya Yamaguchi ,  Wenling Wang ,  Takanori Saito

    IPC分类号： F27D21/00 ,  F27D3/00

    CPC分类号： H01L21/67109 ,  H01L21/67248

    摘要： A heat treatment apparatus including: a processing container for processing wafers held in a boat; heaters for heating the processing container; and a control section for controlling the heaters. Heater temperature sensors are provided between the heaters and the processing container, in-container temperature sensors are provided in the processing container, and movable temperature sensors are provided in the boat. The temperature sensors are connected to a temperature estimation section. The temperature estimation section selects two of the three types of temperature sensors, e.g. the movable temperature sensors and the in-container temperature sensors, and determines the temperature of a wafer according to the following formula: T=T1×(1−α)+T2×α, α>1, where T1 and T2 represent detection temperatures of the selected temperature sensors, and α represents a mixing ratio.

    摘要翻译： 一种热处理设备，包括：处理容器，用于处理保存在船上的晶片; 用于加热处理容器的加热器; 以及用于控制加热器的控制部。 加热器温度传感器设置在加热器和处理容器之间，容器内温度传感器设置在处理容器中，并且可移动的温度传感器设置在船上。 温度传感器连接到温度估计部。 温度估计部分选择三种类型的温度传感器中的两种，例如， 可移动温度传感器和容器内温度传感器，并根据以下公式确定晶片的温度：T = T1×（1-α）+ T2×α，α> 1，其中T1和T2表示检测温度 的选定温度传感器，α表示混合比。

    Method for producing pentacyclic taxans
    5.
    发明授权
    Method for producing pentacyclic taxans 有权
    五环类紫杉醇的生产方法

    公开(公告)号：US07678919B2

    公开(公告)日：2010-03-16

    申请号：US12238070

    申请日：2008-09-25

    申请人： Akihiro Imura ,  Tatsuya Yamaguchi ,  Yoshihiro Takayanagi ,  Seishiro Uchida

    发明人： Akihiro Imura ,  Tatsuya Yamaguchi ,  Yoshihiro Takayanagi ,  Seishiro Uchida

    IPC分类号： C07D493/04

    CPC分类号： C07D213/61 ,  C07D493/08 ,  Y02P20/55

    摘要： Taxan derivatives are produced efficiently and inexpensively, which are useful as oral-administrable antitumor compounds.A compound of formula (1) (wherein R1 is an alkyl group, an alkenyl group, an alkynyl group, a cycloalkyl group, an aryl group or a heterocyclic group; R2 is a hydroxyl group optionally having a protective group) is processed with an alkali metal permanganate to produce a compound of formula (2), which may be a starting material for oral-administrable antitumor compounds.

    摘要翻译： 衍生物有效和廉价地生产，其可用作口服给药的抗肿瘤化合物。 式（1）化合物（其中R 1为烷基，烯基，炔基，环烷基，芳基或杂环基; R 2为任选具有保护基的羟基） 碱金属高锰酸盐制备式（2）化合物，其可以是口服给药的抗肿瘤化合物的起始物质。

    Recording medium playback apparatus
    7.
    发明申请
    Recording medium playback apparatus 有权
    记录介质播放装置

    公开(公告)号：US20050038972A1

    公开(公告)日：2005-02-17

    申请号：US10914353

    申请日：2004-08-09

    申请人： Jyun Tabuchi ,  Tatsuya Yamaguchi

    发明人： Jyun Tabuchi ,  Tatsuya Yamaguchi

    IPC分类号： G06F12/00 ,  G11B20/10 ,  G11B27/10

    CPC分类号： G11B20/10 ,  G11B27/105 ,  G11B2220/2545

    摘要： In one aspect of the invention, text data recorded on a CD conforming to the CD-TEXT format is displayed using a minimum amount of memory. Storage capacity to be used per data item is calculated by dividing the available storage capacity by the number of text data items to be displayed on a display section, and the text data is read from the CD and is stored in a memory by limiting the storage capacity per data item to the thus calculated storage capacity. Priority may be given to a specific data item for which full data is acquired, and the remaining capacity may be equally divided among the other data items. In another aspect of the invention, text data recorded in a plurality of different languages on a CD conforming to the CD-TEXT format is acquired in as many languages as possible by using a minimum amount of memory. A block selected based on a predetermined criterion, such as the starting block or a block recorded in a specific language, is acquired first, and then a further block or blocks are selected and acquired as the remaining memory capacity allows.

    摘要翻译： 在本发明的一个方面，使用最小量的存储器来显示记录在符合CD-TEXT格式的CD上的文本数据。 通过将可用存储容量除以要显示在显示部分上的文本数据项的数量来计算要用于每个数据项的存储容量，并且从CD读取文本数据，并通过限制存储来存储在存储器中 每个数据项的容量与这样计算的存储容量。 可以对获取完整数据的特定数据项给予优先权，并且剩余容量可以在其他数据项之间平均分配。 在本发明的另一方面，通过使用最小量的存储器以尽可能多的语言获取以符合CD-TEXT格式的CD上记录在多种不同语言中的文本数据。 首先获取基于预定标准（例如开始块或以特定语言记录的块）所选择的块，然后作为剩余存储容量允许来选择和获取另外的块或块。

    Reel spring for use of a magnetic tape cassette and a magnetic tape cassette
    8.
    发明授权
    Reel spring for use of a magnetic tape cassette and a magnetic tape cassette 失效
    用于磁带盒和磁带盒的卷簧

    公开(公告)号：US06471151B1

    公开(公告)日：2002-10-29

    申请号：US09830330

    申请日：2001-04-26

    申请人： Akihisa Kita ,  Tatsuya Yamaguchi

    发明人： Akihisa Kita ,  Tatsuya Yamaguchi

    IPC分类号： G11B23087

    CPC分类号： G11B23/08728 ,  G11B23/08721

    摘要： The reel spring for use in a magnetic tape cassette comprises a fixing portion which is fixed to a boss of a cassette case by means of a boss hole, an arm portion which forces a reel in an axial direction of rotation and a bending portion provided between the fixing portion and the arm portion in an L-like shape. The ratio of a length of the fixing portion of the reel spring to a height of the boss is 4.0 or more. The length of the fixing portion is longer than that of the arm portion by 1 mm to 5 mm. The magnetic tape cassette employs the reel spring which is capable of enhancing production efficiency in fabricating the magnetic tape cassette while maintaining a specified force of the reel spring.

    摘要翻译： 用于磁带盒的卷轴弹簧包括：固定部分，其通过凸台孔固定到盒壳体的凸台;臂部分，其将卷轴轴向旋转;以及弯曲部分， 固定部分和臂部分呈L形。 卷轴弹簧的固定部分的长度与凸台的高度之比为4.0以上。 固定部的长度比臂部的长度长1mm〜5mm。 磁带盒采用卷轴弹簧，其能够在保持卷轴弹簧的指定力的同时提高制造磁带盒的生产效率。

    Temperature control method, storage medium storing a program therefor, temperature control apparatus, and heat treatment apparatus
    10.
    发明授权
    Temperature control method, storage medium storing a program therefor, temperature control apparatus, and heat treatment apparatus 有权
    温度控制方法，存储其程序的存储介质，温度控制装置和热处理装置

    公开(公告)号：US09209057B2

    公开(公告)日：2015-12-08

    申请号：US13571011

    申请日：2012-08-09

    申请人： Koji Yoshii ,  Tatsuya Yamaguchi ,  Wenling Wang ,  Takanori Saito

    发明人： Koji Yoshii ,  Tatsuya Yamaguchi ,  Wenling Wang ,  Takanori Saito

    IPC分类号： H05B1/02 ,  H01L21/677 ,  H01L21/67

    CPC分类号： H01L21/67781 ,  H01L21/67248

    摘要： Provided is a method of controlling temperatures of objects to be heated in a heating unit by adjusting a heating rate of each of a plurality of heating elements, based on temperature detection values detected at a plurality of temperature detection elements, wherein the plurality of temperature detection elements are positioned at different positions and the plurality of heating elements are positioned at different positions. The method includes estimating a temperature of each of the plurality of temperature detection elements by using a first estimation algorithm when one of the plurality of temperature detection elements is broken, based on the temperature detection values of the temperature detection elements excluding the broken temperature detection element, and controlling the temperatures of the objects to be heated based on the estimated temperatures.

    摘要翻译： 提供了一种通过基于在多个温度检测元件检测到的温度检测值来调节多个加热元件的加热速度来控制加热单元中待加热物体的温度的方法，其中多个温度检测 元件位于不同的位置，并且多个加热元件位于不同的位置。 该方法包括：基于除了断开的温度检测元件之外的温度检测元件的温度检测值，通过使用第一估计算法来估计多个温度检测元件中的每一个的温度， 并且基于估计的温度来控制被加热物体的温度。