APPARATUS FOR REFINING SILICON AND METHOD FOR REFINING SILICON
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    发明申请
    APPARATUS FOR REFINING SILICON AND METHOD FOR REFINING SILICON 审中-公开
    用于精制硅的装置和精炼硅的方法

    公开(公告)号:US20120103020A1

    公开(公告)日:2012-05-03

    申请号:US13382419

    申请日:2010-07-08

    IPC分类号: C01B33/037 C03B5/225

    CPC分类号: C01B33/037

    摘要: The present invention is a silicon refining apparatus including, in a reduced pressure vessel: a crucible capable of holding molten silicon; a heat-retaining lid capable of being placed over the crucible; and a heating device. The crucible has a lateral outer-circumferential portion provided with a first thermal-insulation material. The heat-retaining lid is a plate-like member made of carbon felt and provided with a carbon composite material at least on opposed main surfaces. The heat-retaining lid has opposed main surfaces with an opening formed to extend therethrough. The carbon composite material on the main surface of the heat-retaining lid on the crucible side is so placed as to cover an upper surface of the first thermal-insulation material when the heat-retaining lid is placed at an upper surface of the crucible.

    摘要翻译: 本发明是一种硅精炼装置,其在减压容器中包括能够保持熔融硅的坩埚; 能够放置在坩埚上方的保温盖; 和加热装置。 坩埚具有设置有第一绝热材料的横向外周部分。 保温盖是由碳毡制成的板状构件,至少在相对的主面上设置有碳复合材料。 保温盖具有相对的主表面,其开口形成为延伸穿过其中。 当将保温盖放置在坩埚的上表面时,在坩埚侧的保温盖的主表面上的碳复合材料被放置成覆盖第一绝热材料的上表面。