METHODS FOR FABRICATING OPTICAL MICROSTRUCTURES USING A CYLINDRICAL PLATFORM AND A RASTERED RADIATION BEAM
    2.
    发明申请
    METHODS FOR FABRICATING OPTICAL MICROSTRUCTURES USING A CYLINDRICAL PLATFORM AND A RASTERED RADIATION BEAM 有权
    使用圆柱平台和辐射光束制造光学微结构的方法

    公开(公告)号:US20060275714A1

    公开(公告)日:2006-12-07

    申请号:US11465377

    申请日:2006-08-17

    IPC分类号: G02B3/00

    摘要: Optical microstructures, such as microlenses, are fabricated by rotating a cylindrical platform that includes a radiation sensitive layer thereon, about its axis, while simultaneously axially rastering a laser beam across at least a portion of the radiation sensitive layer. The cylindrical platform is also simultaneously translated axially while it is being rotated. The amplitude of the laser beam is continuously varied while rastering. The optical microstructures that are imaged in the radiation sensitive layer can be developed to provide a master for replicating a microlenses.

    摘要翻译: 诸如微透镜的光学微结构通过围绕其轴线旋转包括辐射敏感层的圆柱形平台来制造,同时沿着辐射敏感层的至少一部分轴向地扫描激光束。 圆柱形平台在旋转的同时也被轴向同时平移。 激光束的幅度连续变化。 可以开发在辐射敏感层中成像的光学微结构以提供用于复制微透镜的母版。

    Methods and Apparatus for Processing a Pulsed Laser Beam to Create Apertures Through Microlens Arrays, and Products Produced Thereby
    4.
    发明申请
    Methods and Apparatus for Processing a Pulsed Laser Beam to Create Apertures Through Microlens Arrays, and Products Produced Thereby 失效
    用于处理脉冲激光束以通过微透镜阵列产生孔径的方法和装置,以及由此产生的产品

    公开(公告)号:US20070258149A1

    公开(公告)日:2007-11-08

    申请号:US11382163

    申请日:2006-05-08

    IPC分类号: G02B27/10

    摘要: A pulsed laser beam is used to create apertures in a layer on a back side of a substrate that includes a microlens array on a front side thereof. The pulsed laser beam is focused in a vacuum spatial filter. A profile of the pulsed laser beam that emerges from the vacuum spatial filter is converted to a top hat profile. The laser beam having the top hat profile is diffused. Finally, the pulsed laser beam having the top half profile that has been diffused is impinged through the microlens array on the front side of the substrate and onto the layer on the back side of the substrate. Related apparatus for creating the apertures and microlens array products are also described.

    摘要翻译: 使用脉冲激光束在衬底的背面上的层中产生孔,该衬底的前侧包括微透镜阵列。 脉冲激光束聚焦在真空空间滤光片中。 将从真空空间滤波器出来的脉冲激光束的轮廓转换成顶帽型材。 具有顶帽型材的激光束被扩散。 最后,具有已经扩散的上半部分轮廓的脉冲激光束通过衬底正面上的微透镜阵列和衬底的背面上的层上。 还描述了用于产生孔和微透镜阵列产品的相关装置。

    Systems and methods for fabricating optical microstructures using a cylindrical platform and a rastered radiation beam
    9.
    发明申请
    Systems and methods for fabricating optical microstructures using a cylindrical platform and a rastered radiation beam 有权
    使用圆柱形平台和旋转辐射束制造光学微结构的系统和方法

    公开(公告)号:US20050058947A1

    公开(公告)日:2005-03-17

    申请号:US10661916

    申请日:2003-09-11

    IPC分类号: G02B3/00 G02B5/18 G03C5/00

    摘要: Optical microstructures, such as microlenses, are fabricated by rotating a cylindrical platform that includes a radiation sensitive layer thereon, about its axis, while simultaneously axially rastering a laser beam across at least a portion of the radiation sensitive layer. The cylindrical platform is also simultaneously translated axially while it is being rotated. The amplitude of the laser beam is continuously varied while rastering. The optical microstructures that are imaged in the radiation sensitive layer can be developed to provide a master for replicating a microlenses.

    摘要翻译: 诸如微透镜的光学微结构通过围绕其轴线旋转包括辐射敏感层的圆柱形平台来制造,同时沿着辐射敏感层的至少一部分轴向地扫描激光束。 圆柱形平台在旋转的同时也被轴向同时平移。 激光束的幅度连续变化。 可以开发在辐射敏感层中成像的光学微结构以提供用于复制微透镜的母版。