公开(公告)号：US07259358B2

公开(公告)日：2007-08-21

申请号：US10687212

申请日：2003-10-16

申请人： John T. Mariner ,  Timothy Hejl

发明人： John T. Mariner ,  Timothy Hejl

IPC分类号： H05B3/68 ,  C23C14/00

CPC分类号： H01L21/68757 ,  H01L21/67103 ,  H05B3/145

摘要： A graphite heater and method of forming a graphite heater comprising a graphite body configured to form an electrical heating circuit for at least one heating zone through the graphite encapsulated in a continuous overcoat layer comprising at least one of a nitride, carbide, carbonitride or oxynitride of elements selected from a group consisting of B, Al, Si, Ga, refractory hard metals, transition metals, and rare earth metals, or complexes and/or combinations thereof, wherein prior to being configured to form the electrical heating circuit path, the graphite body is coated with a layer comprising at least one of a nitride, carbide, carbonitride or oxynitride of elements selected from a group consisting of B, Al, Si, Ga, refractory hard metals, transition metals, and rare earth metals, or complexes and/or combinations thereof.

摘要翻译： 一种石墨加热器和形成石墨加热器的方法，所述石墨加热器包括石墨体，所述石墨加热器被构造成通过所述石墨形成用于至少一个加热区的电加热回路，所述石墨包封在包含氮化物，碳化物，碳氮化物或氮氧化物中的至少一种的连续外涂层中 选自B，Al，Si，Ga，难熔硬金属，过渡金属和稀土金属的元素，或其复合物和/或其组合，其中在构造成形成电加热电路路径之前，石墨 主体涂覆有包含选自B，Al，Si，Ga，难熔硬金属，过渡金属和稀土金属或复合物的元素的氮化物，碳化物，碳氮化物或氮氧化物中的至少一种的层，以及 /或其组合。

公开(公告)号：US20050064247A1

公开(公告)日：2005-03-24

申请号：US10875861

申请日：2004-06-24

申请人： Ajit Sane ,  Jeffrey Lennartz ,  Jon Leist ,  Daniel Kotabish ,  John Mariner ,  Andrew Macey ,  Douglas Longworth ,  Timothy Hejl ,  Thomas Devan

发明人： Ajit Sane ,  Jeffrey Lennartz ,  Jon Leist ,  Daniel Kotabish ,  John Mariner ,  Andrew Macey ,  Douglas Longworth ,  Timothy Hejl ,  Thomas Devan

IPC分类号： B05D7/22 ,  B32B9/00 ,  C23C16/14 ,  C23C16/36 ,  C23C16/458 ,  C23C16/56 ,  H01L21/00

CPC分类号： C23C16/36 ,  C23C16/4581 ,  Y10T428/24917 ,  Y10T428/30

摘要： A composite coating for use on semi-conductor processing components, comprising a refractory metal carbide coating with its surface modified by at least one of: a) a carbon donor source for a stabilized stoichiometry, and b) a layer of nitride, carbonitride or oxynitride of elements selected from a group B, Al, Si, refractory metals, transition metals, rare earth metals which may or may not contain electrically conducting pattern, and wherein the metal carbide is selected from the group consisting of silicon carbide, tantalum carbide, titanium carbide, tungsten carbide, silicon oxycarbide, zirconium carbide, hafnium carbide, lanthanum carbide, vanadium carbide, niobium carbide, magnesium carbide, chromium carbide, molybdenum carbide, beryllium carbide and mixtures thereof. The composite coating is characterized as having an improved corrosion resistance property and little emissivity sensitivity to wavelengths used in optical pyrometry under the normal semi-conductor processing environments.

摘要翻译： 一种用于半导体加工部件的复合涂层，包括难熔金属碳化物涂层，其表面由以下至少一种修饰：a）用于稳定化学计量的碳供体源，以及b）氮化物，碳氮化物或氮氧化物层 选自B，Al，Si，难熔金属，过渡金属，可能含有导电图案或不含导电图案的稀土金属，其中金属碳化物选自碳化硅，碳化钽，钛 碳化钨，碳化钨，碳氧化硅，碳化锆，碳化铪，碳化镧，碳化钒，碳化铌，碳化镁，碳化铬，碳化钼，碳化铍及其混合物。 该复合涂层的特征在于具有改善的耐腐蚀性能，并且在通常的半导体加工环境下在光学高温测量中使用的波长的发射率灵敏度小。