公开(公告)号：US08246846B1

公开(公告)日：2012-08-21

申请号：US12889687

申请日：2010-09-24

申请人： David T. Chang ,  Tsung-Yuan Hsu

发明人： David T. Chang ,  Tsung-Yuan Hsu

IPC分类号： C23F3/00

CPC分类号： H03H9/462 ,  H01H59/0009 ,  H03H9/465 ,  H03H2009/241

摘要： A method for fabricating integrated MEMS switches and filters includes forming cavities in a silicon substrate, metalizing a first pattern on a quartz substrate to form first switch and filter elements, bonding the quartz substrate to the silicon substrate so that the first switch and filter elements are located within one of the cavities, thinning the quartz substrate, forming conductive vias in the quartz substrate, metalizing a second pattern on a second surface of the quartz substrate to form second switch and filter elements, etching the quartz substrate to separate MEMS switches from filters, forming protrusions on a host substrate, metalizing a third metal pattern on the host substrate to form metal anchors and third switch elements, compression bonding the metal anchors on the host substrate to second switch and filter elements, forming signal lines to integrate the MEMS switches and filters and removing the silicon substrate.

摘要翻译： 一种用于制造集成的MEMS开关和滤波器的方法包括在硅衬底中形成空腔，将石英衬底上的第一图案金属化以形成第一开关和滤波器元件，将石英衬底接合到硅衬底，使得第一开关和滤波器元件 位于一个空腔内，使石英衬底变薄，在石英衬底中形成导电通孔，在石英衬底的第二表面上金属化第二图案以形成第二开关和滤光元件，蚀刻石英衬底以将MEMS开关与过滤器分离 在主机基板上形成突起，在主机基板上形成金属化第三金属图案以形成金属锚和第三开关元件，将主机基板上的金属锚固件压接到第二开关和滤波元件，形成信号线以集成MEMS开关 并过滤并去除硅衬底。

公开(公告)号：US08176607B1

公开(公告)日：2012-05-15

申请号：US12575634

申请日：2009-10-08

申请人： Randall L. Kubena ,  Tsung-Yuan Hsu

发明人： Randall L. Kubena ,  Tsung-Yuan Hsu

IPC分类号： H04R17/10 ,  B21D53/76

CPC分类号： H04R17/00 ,  Y10T29/42 ,  Y10T29/49165 ,  Y10T29/49401

摘要： A method for fabricating VHF and/or UHF quartz resonators (for higher sensitivity) in a cartridges design with the quartz resonators requiring much smaller sample volumes than required by conventional resonators, and also enjoying smaller size and more reliable assembly. MEMS fabrication approaches are used to fabricate with quartz resonators in quartz cavities with electrical interconnects on a top side of a substrate for electrical connection to the electronics preferably through pressure pins in a plastic module. An analyte is exposed to grounded electrodes on a single side of the quartz resonators, thereby preventing electrical coupling of the detector signals through the analyte. The resonators can be mounted on the plastic cartridge or on arrays of plastic cartridges with the use of inert bonding material, die bonding or wafer bonding techniques. This allows the overall size, cost, and required biological sample volume to be reduced while increasing the sensitivity for detecting small mass changes.

摘要翻译： 一种用于在墨盒设计中制造VHF和/或UHF石英谐振器（用于更高灵敏度）的方法，其中石英谐振器比常规谐振器要求的样品体积要小得多，并且还具有更小的尺寸和更可靠的组装。 MEMS制造方法用于在石英腔中制造石英谐振器，在基底的顶侧具有电互连，用于通过塑料模块中的压力引脚电连接到电子装置。 分析物暴露于石英谐振器单侧的接地电极，从而防止检测器信号通过分析物的电耦合。 谐振器可以使用惰性接合材料，管芯接合或晶片接合技术安装在塑料盒或塑料盒阵列上。 这允许减小整体尺寸，成本和所需的生物样品体积，同时增加用于检测小质量变化的灵敏度。

公开(公告)号：US08059045B1

公开(公告)日：2011-11-15

申请号：US12193500

申请日：2008-08-18

申请人： James H. Schaffner ,  Tsung-Yuan Hsu ,  Daniel F. Sievenpiper

发明人： James H. Schaffner ,  Tsung-Yuan Hsu ,  Daniel F. Sievenpiper

IPC分类号： H01Q1/12 ,  H01Q1/36

CPC分类号： H01Q1/12 ,  H01Q1/273 ,  H01Q13/203

摘要： An antenna having an impedance matching section for attaching to a sheet or a garment. The antenna has a first, a second, and a third leaky substantially coaxial conductor. The first and the third coaxial conductors have an electrically conductive layer placed on the dielectric in a double helix. The second coaxial conductor has an electrically conductive layer placed on the dielectric in a single helix. The first coaxial conductor is coupled to the second coaxial conductor, the second coaxial conductor is coupled to the third coaxial conductor; and the third coaxial conductor is coupled in use to a first termination impedance. Methods to make the foregoing structures are also described.

摘要翻译： 一种具有用于连接到片材或衣服的阻抗匹配部分的天线。 天线具有第一，第二和第三泄漏基本上同轴的导体。 第一和第三同轴导体具有以双螺旋形式放置在电介质上的导电层。 第二同轴导体具有以单螺旋形式放置在电介质上的导电层。 第一同轴导体耦合到第二同轴导体，第二同轴导体耦合到第三同轴导体; 并且第三同轴导体在使用中被耦合到第一端接阻抗。 还描述了制造上述结构的方法。

公开(公告)号：US07280015B1

公开(公告)日：2007-10-09

申请号：US11006426

申请日：2004-12-06

申请人： James H. Schaffner ,  Tsung-Yuan Hsu ,  Adele E. Schmitz ,  Hui-Pin Hsu

发明人： James H. Schaffner ,  Tsung-Yuan Hsu ,  Adele E. Schmitz ,  Hui-Pin Hsu

IPC分类号： H01H51/22

CPC分类号： H01H59/0009 ,  H01H2001/0047 ,  H01H2059/0054

摘要： Apparatus for a micro-electro-mechanical switch that provides single pole, double throw switching action. The switch has two input lines and two output lines. The switch has a seesaw cantilever arm with contacts at each end that electrically connect the input lines with the output lines. The cantilever arm is latched into position by frictional forces between structures on the cantilever arm and structures on the substrate in which the cantilever arm is disposed. The state of the switch is changed by applying an electrostatic force at one end of the cantilever arm to overcome the mechanical force holding the other end of the cantilever arm in place.

摘要翻译： 用于微机电开关的装置，其提供单极双掷切换动作。 开关有两条输入线和两条输出线。 开关具有跷跷板悬臂，每端具有触点，将输入线与输出线电连接。 悬臂由于悬臂上的结构与设置有悬臂的基板上的结构之间的摩擦力而被锁定到位。 通过在悬臂的一端施加静电力来克服将悬臂的另一端保持就位的机械力来改变开关的状态。

公开(公告)号：US07233296B2

公开(公告)日：2007-06-19

申请号：US11207512

申请日：2005-08-19

申请人： Hyok J. Song ,  Tsung Yuan Hsu ,  Daniel F. Sievenpiper ,  Timothy J. Talty ,  Hui-Pin Hsu

发明人： Hyok J. Song ,  Tsung Yuan Hsu ,  Daniel F. Sievenpiper ,  Timothy J. Talty ,  Hui-Pin Hsu

IPC分类号： H01Q1/32

CPC分类号： H01Q1/1271 ,  H01Q13/106

摘要： A method for improving the efficiency of antennas having transparent thin-film conductive surfaces, and antennas improved by the method are disclosed. For a selected frequency of antenna operation, values for surface current density in areas distributed over the surface of the thin-film are determined. Regions of the surface containing areas having concentrated current flow are identified based upon the determined values of current density. Antenna efficiency is improved by increasing conductivity in areas of the thin-film surface found to have concentrated current flow. The method enables the improvement of the efficiency of antennas having transparent thin-film conducting surfaces, without unnecessarily obstructing the optical view through the thin-film surfaces of the antennas.

摘要翻译： 公开了一种用于提高具有透明薄膜导电表面的天线的效率的方法和通过该方法改进的天线。 对于天线操作的选定频率，确定分布在薄膜表面上的区域中的表面电流密度值。 基于确定的电流密度值来识别包含具有集中电流的区域的表面区域。 通过增加发现具有集中的电流流动的薄膜表面的区域中的导电性来提高天线效率。 该方法能够提高具有透明薄膜导电表面的天线的效率，而不会不必要地阻碍通过天线的薄膜表面的光学视图。

公开(公告)号：US06396368B1

公开(公告)日：2002-05-28

申请号：US09438085

申请日：1999-11-10

申请人： Lap-Wai Chow ,  Tsung-Yuan Hsu ,  Daniel J. Hyman ,  Robert Y. Loo ,  Paul Ouyang ,  James H. Schaffner ,  Adele Schmitz ,  Robert N. Schwartz

发明人： Lap-Wai Chow ,  Tsung-Yuan Hsu ,  Daniel J. Hyman ,  Robert Y. Loo ,  Paul Ouyang ,  James H. Schaffner ,  Adele Schmitz ,  Robert N. Schwartz

IPC分类号： H01P110

CPC分类号： B81C1/00246 ,  B81B2201/014 ,  B81C2201/014 ,  B81C2203/0714 ,  B81C2203/0735 ,  H01H1/58 ,  H01H59/0009 ,  H01H2001/0057

摘要： A microelectromechanical (MEM) switch is fabricated inexpensively by using processing steps which are standard for fabricating multiple metal layer integrated circuits, such as CMOS. The exact steps may be adjusted to be compatible with the process of a particular foundry, resulting in a device which is both low cost and readily integrable with other circuits. The processing steps include making contacts for the MEM switch from metal plugs which are ordinarily used as vias to connect metal layers which are separated by a dielectric layer. Such contact vias are formed on either side of a sacrificial metallization area, and then the interconnect metallization is removed from between the contact vias, leaving them separated. Dielectric surrounding the contacts is etched back so that they protrude toward each other. Thus, when the contacts are moved toward each other by actuating the MEM switch, they connect firmly without obstruction. Tungsten is typically used to form vias in CMOS processes, and it makes an excellent contact material, but other via metals may also be employed as contacts. Interconnect metallization may be employed for other structural and interconnect needs of the MEM switch, and is preferably standard for the foundry and process used. Various metals and dielectric materials may be used to create the switches, but in a preferred embodiment the interconnect metal layers are aluminum and the dielectric material is SiO2, materials which are fully compatible with standard four-layer CMOS fabrication processes.

摘要翻译： 通过使用标准制造多个金属层集成电路（如CMOS）的处理步骤，廉价地制造了微机电（MEM）开关。 可以将精确的步骤调整为与特定代工厂的过程兼容，从而导致低成本且易于与其他电路集成的装置。 处理步骤包括通过通常用作通孔的金属插头进行MEM开关的接触，以连接由电介质层分离的金属层。 这种接触通孔形成在牺牲金属化区域的任一侧，然后从接触通孔之间移除互连金属化，使它们分离。 围绕触点的介质被回蚀，使得它们彼此突出。 因此，当通过致动MEM开关使触点彼此移动时，它们牢固地连接而不阻塞。 钨通常用于在CMOS工艺中形成通孔，并且它制成优良的接触材料，但也可以使用其它通孔金属作为接触。 互连金属化可以用于MEM开关的其他结构和互连需求，并且优选地是用于所使用的铸造和工艺的标准。 可以使用各种金属和介电材料来制造开关，但是在优选实施例中，互连金属层是铝，并且介电材料是SiO 2，与标准四层CMOS制造工艺完全兼容的材料。

公开(公告)号：US6046659A

公开(公告)日：2000-04-04

申请号：US080326

申请日：1998-05-15

申请人： Robert Y. Loo ,  Adele Schmitz ,  Julia Brown ,  Jonathan Lynch ,  Debabani Choudhury ,  James Foschaar ,  Daniel J. Hyman ,  Brett Warneke ,  Juan Lam ,  Tsung-Yuan Hsu ,  Jae Lee ,  Mehran Mehregany

发明人： Robert Y. Loo ,  Adele Schmitz ,  Julia Brown ,  Jonathan Lynch ,  Debabani Choudhury ,  James Foschaar ,  Daniel J. Hyman ,  Brett Warneke ,  Juan Lam ,  Tsung-Yuan Hsu ,  Jae Lee ,  Mehran Mehregany

IPC分类号： H01H1/50 ,  H01H59/00 ,  H01P1/12 ,  H01P1/10 ,  H01H57/00

CPC分类号： B81B3/0072 ,  H01G5/18 ,  H01G5/38 ,  H01G5/40 ,  H01H59/0009 ,  H01P1/12 ,  B81B2201/014 ,  B81B2203/0118 ,  H01H1/50

摘要： Methods for the design and fabrication of micro-electro-mechanical switches are disclosed. Two different switch designs with three different switch fabrication techniques are presented for a total of six switch structures. Each switch has a multiple-layer armature with a suspended biasing electrode and a conducting transmission line affixed to the structural layer of the armature. A conducting dimple is connected to the conducting line to provide a reliable region of contact for the switch. The switch is fabricated using silicon nitride as the armature structural layer and silicon dioxide as the sacrificial layer supporting the armature during fabrication. Hydrofluoric acid is used to remove the silicon dioxide layer with post-processing in a critical point dryer to increase yield.

摘要翻译： 公开了微机电开关的设计和制造方法。 提出了三种不同的开关制造技术的两种不同的开关设计，共有六种开关结构。 每个开关具有多层电枢，其具有悬置的偏置电极和固定到电枢的结构层的导电传输线。 导电凹坑连接到导线，为开关提供可靠的接触区域。 该开关使用氮化硅作为电枢结构层和二氧化硅作为在制造期间支撑电枢的牺牲层制造。 氢氟酸用于在临界点干燥器中进行后处理以去除二氧化硅层以提高产率。

公开(公告)号：US4978208A

公开(公告)日：1990-12-18

申请号：US383698

申请日：1989-07-24

申请人： Tsung-Yuan Hsu ,  Shin-Tson Wu ,  Robert Y. Loo

发明人： Tsung-Yuan Hsu ,  Shin-Tson Wu ,  Robert Y. Loo

IPC分类号： A61F9/02 ,  H01L31/14 ,  H01L31/153

CPC分类号： A61F9/023 ,  H01L31/143 ,  H01L31/153

摘要： A spatial light modulator includes a photosensor diode and a photoemitting diode array, each having two semiconductive layers of opposite electrical polarities, and which are sandwiched together with layers of the same polarity (P or N) in electrical contact with each other. Transparent electrode layers are formed on the opposite surfaces of the photosensor diode and photoemitting diode array respectively, in electrical contact with the layers of the opposite polarity. The individual photoemitting diodes are electrically and optically isolated from each other. With a voltage applied across the electrodes which causes the photosensor diode to be reverse biased and the photoemitting diodes to be forward biased, the photoemitting diode array generates a visual display which is a reproduction of a light image incident on the photosensor diode. The photosensor diode may be replaced by a single layer of a photoconductive material. Two of the spatial light modulators may be combined in a frame with suitable optics to provide eye protection goggles.

摘要翻译： 空间光调制器包括光电二极管和光电二极管阵列，每个具有两个具有相反电极性的半导体层，并且它们被彼此电接触的具有相同极性（P或N）的层夹在一起。 透明电极层分别形成在光电二极管和发光二极管阵列的相对表面上，与相反极性的层电接触。 各个发光二极管彼此电隔离和光学隔离。 利用施加在电极两端的电压，使得光电传感器二极管被反向偏置并且光发光二极管被正向偏置，光发光二极管阵列产生视觉显示，其是入射在光电二极管上的光图像的再现。 光传感器二极管可以由单层感光材料代替。 两个空间光调制器可以在框架中与合适的光学器件组合以提供眼睛保护护目镜。

公开(公告)号：US07557677B1

公开(公告)日：2009-07-07

申请号：US11643741

申请日：2006-12-20

申请人： Tsung-Yuan Hsu ,  Randall L. Kubena

发明人： Tsung-Yuan Hsu ,  Randall L. Kubena

IPC分类号： H03H9/13 ,  H03H9/205 ,  H03H9/56 ,  H03H3/02

CPC分类号： H03H9/132 ,  H03H9/56 ,  H03H9/60

摘要： In one embodiment, a cascaded monolithic crystal filter is provided. A first filter includes two resonators having a pair of electrodes with the monolithic crystal between. At least one electrode has a periphery which includes a feature capable of shifting a frequency associated with an anharmonic mode in the filter. The filter has a second resonator acoustically coupled to the first resonator. A second filter is cascaded with the first filter. The second filter includes a pair of acoustically coupled resonators.

摘要翻译： 在一个实施例中，提供了级联的单片晶体滤波器。 第一滤波器包括具有一对电极的两个谐振器，其间具有整体晶体。 至少一个电极具有外围，其包括能够移动与过滤器中的非调谐模式相关联的频率的特征。 滤波器具有声耦合到第一谐振器的第二谐振器。 第二个过滤器与第一个过滤器级联。 第二滤波器包括一对声耦合谐振器。

公开(公告)号：US07388186B2

公开(公告)日：2008-06-17

申请号：US11028495

申请日：2004-12-30

申请人： Richard P. Berg ,  Tsung-Yuan Hsu

发明人： Richard P. Berg ,  Tsung-Yuan Hsu

IPC分类号： H01J40/14

CPC分类号： H01H1/0036 ,  H01H47/24 ,  H01H59/0009 ,  H01H67/22

摘要： An optically controlled mechanical device actuated by electrostatic forces. The device includes electrostatic plates disposed on opposing portions of the device to accumulate charge; conductors to conduct charge to the electrostatic plates from a bias supply; and a photoelectric element having a photoresistive element arranged to affect a quantity of charge reaching the electrostatic plates from the bias supply. The device is caused to actuate to one position when the photoresistive element is exposed to a first level of illumination, and to a another position when the photoresistive element is exposed to a different second level of illumination.

摘要翻译： 由静电力驱动的光学控制的机械装置。 该装置包括设置在装置的相对部分上的静电板以积累电荷; 导体从偏压电源向静电板充电; 以及光电元件，其具有设置成影响从偏置电源到达静电板的电荷量的光致抗蚀剂元件。 当光致抗蚀剂元件暴露于第一级照明时，使该装置致动到一个位置，并且当光致抗蚀剂元件暴露于不同的第二级照明时，该装置被致动到另一位置。