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公开(公告)号：US20090308030A1
公开(公告)日：2009-12-17
申请号：US12545145
申请日：2009-08-21
CPC分类号： H01L21/6773 , H01L21/67733 , H01L21/67769
摘要： In a first aspect, a method of opening a substrate carrier is provided. The method includes moving the substrate carrier such that a door of the substrate carrier contacts a supporting member; employing the supporting member to support the door; moving a housing of the substrate carrier away from the supporting member; and pivoting the supporting member and door below a bottom surface of the substrate carrier. Numerous other aspects are provided.
摘要翻译： 在第一方面，提供一种打开衬底载体的方法。 该方法包括移动衬底载体，使得衬底载体的门接触支撑构件; 使用支撑构件来支撑门; 使所述基板载体的壳体远离所述支撑构件移动; 以及使所述支撑构件和门在所述衬底载体的底表面下方枢转。 提供了许多其他方面。
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公开(公告)号：US6139406A
公开(公告)日：2000-10-31
申请号：US879447
申请日：1997-06-24
申请人： Daniel Kennedy , Boris Fuksshimov , Victor Belitsky , Boris Fishkin , Kyle Brown , Tom Osterheld , Jeff Beeler , Ginetto Addiego
发明人： Daniel Kennedy , Boris Fuksshimov , Victor Belitsky , Boris Fishkin , Kyle Brown , Tom Osterheld , Jeff Beeler , Ginetto Addiego
IPC分类号： B24B37/04 , B24B53/007 , B24B57/02 , H01L21/304 , B24B7/00
CPC分类号： B24B53/017 , B24B37/04 , B24B57/02
摘要： The present invention provides a method and apparatus for delivering one or more rinse agents to a surface, such as a polishing pad surface and preferably one or more polishing fluids. The invention also provides a method of cleaning one or more surfaces, such as a polishing pad surface and a substrate surface, by delivering a spray of one or more rinse agents to the surface and, preferably, causing the rinse agent to flow across the surface from a central region to an outer region where unwanted debris and material is collected.
摘要翻译： 本发明提供了一种用于将一种或多种漂洗剂递送到诸如抛光垫表面，优选一种或多种抛光流体的表面的方法和装置。 本发明还提供了一种通过将一种或多种漂洗剂的喷雾递送到表面来清洁一个或多个表面（例如抛光垫表面和基材表面）的方法，并且优选地使冲洗剂流过表面 从中心区域到外部区域，其中收集有不需要的碎屑和材料。
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3.发明授权Method and apparatus for removing a substrate from a polishing pad in a chemical mechanical polishing system 失效用于在化学机械抛光系统中从抛光垫移除基材的方法和装置
公开(公告)号：US5899801A
公开(公告)日：1999-05-04
申请号：US741662
申请日：1996-10-31
CPC分类号： B24B37/345
摘要： A chemical mechanical polishing apparatus has a platen with a cavity with an opening to the top surface of the platen. A polishing pad is located at an upper surface of the platen. A flexible membrane is positioned in the cavity to define a first and a second volume. A pressure source is connected to the second volume to flex the membrane, and a lifting member is positioned in the first volume so that flexing of the membrane extends the lifting member through the opening to lift the substrate off the polishing pad. Alternately, de-ionized water may be forced through a passage in the platen and an aperture in the polishing pad to lift the substrate.
摘要翻译： 化学机械抛光装置具有带有空腔的台板，该空腔具有通向台板顶表面的开口。 抛光垫位于压板的上表面。 柔性膜定位在空腔中以限定第一和第二体积。 压力源连接到第二体积以弯曲膜，并且提升构件定位在第一体积中，使得膜的弯曲使提升构件延伸穿过开口以将衬底提离抛光垫。 或者，去离子水可以被迫通过压板中的通道和抛光垫中的孔以提升衬底。
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公开(公告)号：US07637707B2
公开(公告)日：2009-12-29
申请号：US11257801
申请日：2005-10-24
申请人： Ilya Perlov , Evgueni Gantvarg , Victor Belitsky
发明人： Ilya Perlov , Evgueni Gantvarg , Victor Belitsky
IPC分类号： B65G49/07
CPC分类号： H01L21/67167 , H01L21/67769 , H01L21/68707 , Y10S414/14
摘要： A cassette stocker includes a plurality of cassette storage shelves positioned adjacent a cleanroom wall above a cassette docking station, and a cassette mover to carry a cassette between the shelves and the docking station. An interstation transfer apparatus includes an overhead support beam and a transfer arm adapted to carry a cassette between processing stations.
摘要翻译： 盒式存储器包括邻近盒式基座上方的洁净室壁定位的多个盒式存储架，以及用于在盒架和对接站之间承载盒的盒式移动器。 站间传送设备包括架空支撑梁和适于在处理站之间携带盒的传送臂。
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公开(公告)号：US07578647B2
公开(公告)日：2009-08-25
申请号：US11051504
申请日：2005-02-04
IPC分类号： B65G65/34
CPC分类号： H01L21/67772 , H01L21/67353 , H01L21/67363 , H01L21/67373 , H01L21/67379 , Y10S414/137
摘要： In a first aspect, an apparatus is provided for opening a substrate carrier door of a substrate carrier. The apparatus includes a supporting member adapted to (1) support the substrate carrier door at a load port; (2) allow removal of the door from the substrate carrier; and (3) pivot the removed door below a bottom surface of the substrate carrier. Numerous other aspects are provided.
摘要翻译： 在第一方面，提供一种用于打开衬底载体的衬底载体门的装置。 该装置包括适于（1）在负载端口处支撑基板载体门的支撑构件; （2）允许从基板载体移除门; 和（3）将移除的门枢转在衬底载体的底表面下方。 提供了许多其他方面。
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公开(公告)号：US20050232734A1
公开(公告)日：2005-10-20
申请号：US11051504
申请日：2005-02-04
IPC分类号： B65G65/04 , H01L21/00 , H01L21/673 , H01L21/677
CPC分类号： H01L21/67772 , H01L21/67353 , H01L21/67363 , H01L21/67373 , H01L21/67379 , Y10S414/137
摘要： In a first aspect, an apparatus is provided for opening a substrate carrier door of a substrate carrier. The apparatus includes a supporting member adapted to (1) support the substrate carrier door at a load port; (2) allow removal of the door from the substrate carrier; and (3) pivot the removed door below a bottom surface of the substrate carrier. Numerous other aspects are provided.
摘要翻译： 在第一方面，提供一种用于打开衬底载体的衬底载体门的装置。 该装置包括适于（1）在负载端口处支撑基板载体门的支撑构件; （2）允许从基板载体移除门; 和（3）将移除的门枢转在衬底载体的底表面下方。 提供了许多其他方面。
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公开(公告)号：US6082951A
公开(公告)日：2000-07-04
申请号：US12323
申请日：1998-01-23
申请人： Eric A. Nering , Ilya Perlov , Eugene Gantvarg , Victor Belitsky
发明人： Eric A. Nering , Ilya Perlov , Eugene Gantvarg , Victor Belitsky
IPC分类号： B65G49/07 , H01L21/67 , H01L21/677
CPC分类号： H01L21/67775 , H01L21/67772 , Y10S414/137 , Y10S414/139
摘要： A pod loading station and method of operation are provided for enabling the transfer and introduction of wafers into a processing system from a wafer pod. The pod loading station generally includes a movable receiving platform for supporting a wafer pod and a movable pod door receiver having a pod door latch actuating mechanism disposed thereon. The movable platform supports a wafer pod, moves the wafer pod into engagement with the pod door receiver, and then retracts to enable the door supported by the door receiver to be removed from the opening of the pod. The pod door receiver then lowers the pod door below the pod to enable access to the pod opening.
摘要翻译： 提供了一个荚装载站和操作方法，用于使得能够从晶片盒将晶片转移和引入处理系统。 荚果装载站通常包括用于支撑晶片盒的可移动接收平台和设置在其上的荚门闩锁致动机构的可移动荚门接收器。 可移动平台支撑晶片盒，将晶片盒移动到与荚门接收器接合，然后缩回以使得门接收器支撑的门能够从荚的开口移除。 荚门接收器然后降低荚壳下面的荚门，以便进入荚果开口。
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公开(公告)号：US20060072986A1
公开(公告)日：2006-04-06
申请号：US11257801
申请日：2005-10-24
申请人： Ilya Perlov , Evgueni Gantvarg , Victor Belitsky
发明人： Ilya Perlov , Evgueni Gantvarg , Victor Belitsky
IPC分类号： H01L21/677
CPC分类号： H01L21/67167 , H01L21/67769 , H01L21/68707 , Y10S414/14
摘要： A cassette stocker includes a plurality of cassette storage shelves positioned adjacent a cleanroom wall above a cassette docking station, and a cassette mover to carry a cassette between the shelves and the docking station. An interstation transfer apparatus includes an overhead support beam and a transfer arm adapted to carry a cassette between processing stations.
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9.发明授权Method and apparatus for automatically changing a polishing pad in a chemical mechanical polishing system 失效用于在化学机械抛光系统中自动改变抛光垫的方法和装置公开(公告)号：US06379221B1
公开(公告)日：2002-04-30
申请号：US08777906
申请日：1996-12-31
IPC分类号： B24B100
CPC分类号： B24B37/20 , B24B37/12 , B24B37/34 , B24B45/003
摘要： A method and an apparatus for automatically replacing a used polishing pad in a chemical mechanical polishing system are described. A controller places a mechanical device against the used polishing pad while the pad is on the polishing platen and activates a pad chucking mechanism that affixes the used pad to the mechanical device. The controller then moves the mechanical device and the pad toward a used pad receptacle, where the pad chucking mechanism is deactivated to release the used pad into the receptacle. The controller then places the mechanical device against a clean polishing pad in a clean pad dispenser and reactivates the pad chucking mechanism to affix the clean pad to the mechanical device. The mechanical device and the clean pad are moved toward the platen, where the pad chucking mechanism is deactivated to release the clean polishing pad onto the platen.
摘要翻译： 描述了一种在化学机械抛光系统中自动更换用过的抛光垫的方法和装置。 控制器将机械装置放置在使用过的抛光垫上，同时衬垫位于研磨台板上并激活将所用垫固定在机械装置上的衬垫夹持机构。 然后，控制器将机械装置和垫朝向使用的垫容器移动，其中垫夹持机构被去激活以将使用的垫释放到容器中。 然后，控制器将机械装置放置在干净的衬垫分配器中的干净的抛光垫上，并重新激活衬垫夹紧机构以将清洁垫固定到机械装置。 机械装置和清洁垫移动到压板，其中垫夹持机构被去激活以将清洁的抛光垫释放到压板上。
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公开(公告)号：US06283692B1
公开(公告)日：2001-09-04
申请号：US09201737
申请日：1998-12-01
申请人： Ilya Perlov , Evgueni Gantvarg , Victor Belitsky
发明人： Ilya Perlov , Evgueni Gantvarg , Victor Belitsky
IPC分类号： B65G4907
CPC分类号： H01L21/67167 , H01L21/67769 , H01L21/68707 , Y10S414/14
摘要： A cassette stocker includes a plurality of cassette storage shelves positioned adjacent a cleanroom wall above a cassette docking station, and a cassette mover to carry a cassette between the shelves and the docking station. An interstation transfer apparatus includes an overhead support beam and a transfer arm adapted to carry a cassette between processing stations.
摘要翻译： 盒式存储器包括邻近盒式基座上方的洁净室壁定位的多个盒式存储架，以及用于在盒架和对接站之间承载盒的盒式移动器。 站间传送设备包括架空支撑梁和适于在处理站之间携带盒的传送臂。
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