LAYER ASSEMBLY
    2.
    发明申请
    LAYER ASSEMBLY 有权
    层组装

    公开(公告)号:US20120248403A1

    公开(公告)日:2012-10-04

    申请号:US13076166

    申请日:2011-03-30

    IPC分类号: H01L29/02 H01L33/02

    摘要: The invention inter alia relates to a method of fabricating a layer assembly comprising the steps of: arranging a first layer on top of a carrier; arranging a second layer on top of the first layer; locally modifying the material of the buried first layer and providing at least one modified section in the first layer, wherein the modified material changes or induces mechanical strain in a portion of the second layer which is arranged above the at least one modified section; after locally modifying the material of the buried first layer, depositing a third material on top of the second layer, at least one characteristic of the third material being sensitive to the local mechanical strain in the second layer.

    摘要翻译: 本发明尤其涉及一种制造层组件的方法,包括以下步骤:在载体的顶部上布置第一层; 在第一层的顶部布置第二层; 在第一层中局部改性所述材料并提供至少一个改性部分,其中所述改性材料在所述第二层的布置在所述至少一个改性部分上方的部分中改变或引起机械应变; 在局部改变所埋入的第一层的材料之后,在第二层的顶部上沉积第三材料,第三材料的至少一个特性对第二层中的局部机械应变敏感。

    Layer assembly
    3.
    发明授权
    Layer assembly 有权
    层组装

    公开(公告)号:US08349712B2

    公开(公告)日:2013-01-08

    申请号:US13076166

    申请日:2011-03-30

    IPC分类号: H01L21/20 H01L21/36

    摘要: The invention inter alia relates to a method of fabricating a layer assembly comprising the steps of: arranging a first layer on top of a carrier; arranging a second layer on top of the first layer; locally modifying the material of the buried first layer and providing at least one modified section in the first layer, wherein the modified material changes or induces mechanical strain in a portion of the second layer which is arranged above the at least one modified section; after locally modifying the material of the buried first layer, depositing a third material on top of the second layer, at least one characteristic of the third material being sensitive to the local mechanical strain in the second layer.

    摘要翻译: 本发明尤其涉及一种制造层组件的方法,包括以下步骤:在载体的顶部上布置第一层; 在第一层的顶部布置第二层; 在第一层中局部改性所述材料并提供至少一个改性部分,其中所述改性材料在所述第二层的布置在所述至少一个改性部分上方的部分中改变或引起机械应变; 在局部改变所埋入的第一层的材料之后,在第二层的顶部上沉积第三材料,第三材料的至少一个特性对第二层中的局部机械应变敏感。