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1.发明授权Interferometric methods for metrology of surfaces, films and underresolved structures 有权用于测量表面，薄膜和欠解析结构的干涉测量方法公开(公告)号：US08854628B2
公开(公告)日：2014-10-07
申请号：US13238732
申请日：2011-09-21
IPC分类号： G01B9/02 , G01B11/02 , G01N21/41 , G01N21/43 , G01N21/21 , G01N21/45 , G01N21/47 , G01B11/06
CPC分类号： G01B9/02043 , G01B9/02057 , G01B9/0209 , G01B11/0675 , G01B2290/70 , G01N21/21 , G01N21/45 , G01N21/47
摘要： A method for determining information about a test object includes combining two or more scanning interference signals to form a synthetic interference signal; analyzing the synthetic interference signal to determine information about the test object; and outputting the information about the test object. Each of the two or more scanning interference signals correspond to interference between test light and reference light as an optical path length difference between the test and reference light is scanned, wherein the test and reference light are derived from a common source. The test light scatters from the test object over a range of angles and each of the two or more scanning interferometry signals corresponds to a different scattering angle or polarization state of the test light.
摘要翻译： 用于确定关于测试对象的信息的方法包括组合两个或更多个扫描干扰信号以形成合成干扰信号; 分析合成干扰信号以确定关于测试对象的信息; 并输出关于测试对象的信息。 两个或更多个扫描干涉信号中的每一个对应于测试光和参考光之间的干涉，因为扫描测试和参考光之间的光程长度差，其中测试和参考光源自公共源。 测试光在测试对象的范围内散射，并且两个或更多个扫描干涉测量信号中的每一个对应于测试光的不同的散射角或极化状态。
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公开(公告)号：US08698891B2
公开(公告)日：2014-04-15
申请号：US13043784
申请日：2011-03-09
申请人： Justin Turner , Tyler Steele , Stephen L. Mielke , Xavier M. Colonna De Lega , Bruce E. Truax , Andrew D. Meigs
发明人： Justin Turner , Tyler Steele , Stephen L. Mielke , Xavier M. Colonna De Lega , Bruce E. Truax , Andrew D. Meigs
CPC分类号： G01B11/06 , G01B9/02021 , G01B9/0209 , G01B11/2441
摘要： Determining spatial information about a part includes positioning the part in a fixture having two reference surfaces, where the part is positioned between the two reference surfaces, imaging the two reference surfaces and opposing surfaces of the part to different locations of a multi-element detector, simultaneously acquiring images of the opposing sides of the part and the two reference surfaces using the multi-element detector, and determining spatial information about the part based on the simultaneously acquired images.
摘要翻译： 确定关于部件的空间信息包括将部件定位在具有两个参考表面的夹具中，其中部件位于两个参考表面之间，将该部件的两个参考表面和相对表面成像到多元件检测器的不同位置， 使用多元素检测器同时获取部分和两个参考表面的相对侧的图像，以及基于同时获取的图像确定关于该部分的空间信息。
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3.发明申请公开(公告)号：US20120069326A1
公开(公告)日：2012-03-22
申请号：US13238732
申请日：2011-09-21
CPC分类号： G01B9/02043 , G01B9/02057 , G01B9/0209 , G01B11/0675 , G01B2290/70 , G01N21/21 , G01N21/45 , G01N21/47
摘要： A method for determining information about a test object includes combining two or more scanning interference signals to form a synthetic interference signal; analyzing the synthetic interference signal to determine information about the test object; and outputting the information about the test object. Each of the two or more scanning interference signals correspond to interference between test light and reference light as an optical path length difference between the test and reference light is scanned, wherein the test and reference light are derived from a common source. The test light scatters from the test object over a range of angles and each of the two or more scanning interferometry signals corresponds to a different scattering angle or polarization state of the test light.
摘要翻译： 用于确定关于测试对象的信息的方法包括组合两个或更多个扫描干扰信号以形成合成干扰信号; 分析合成干扰信号以确定关于测试对象的信息; 并输出关于测试对象的信息。 两个或更多个扫描干涉信号中的每一个对应于测试光和参考光之间的干涉，因为扫描测试和参考光之间的光程长度差，其中测试和参考光源自公共源。 测试光在测试对象的范围内散射，并且两个或更多个扫描干涉测量信号中的每一个对应于测试光的不同的散射角或极化状态。
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公开(公告)号：US08649024B2
公开(公告)日：2014-02-11
申请号：US13309244
申请日：2011-12-01
CPC分类号： G01B11/2441 , A61F9/00836 , A61F2009/00844 , G02B21/244
摘要： Methods for forming a three-dimensional image of a test object include directing light to a surface of best-focus of an imaging optic, where the light has an intensity modulation in at least one direction in the surface of best-focus, scanning a test object relative to the imaging optic so that a surface of the measurement object passes through the surface of best-focus of the imaging optic as the test object is scanned, acquiring, for each of a series of positions of the test object during the scan, a single image of the measurement object using the imaging optic, in which the intensity modulation of the light in the surface of best-focus is different for successive images, and forming a three-dimensional image of the test object based on the acquired images.
摘要翻译： 用于形成测试对象的三维图像的方法包括将光引导到成像光学器件的最佳焦点的表面，其中光在最佳对焦表面中的至少一个方向上具有强度调制，扫描测试 相对于成像光学元件，使得当扫描测试对象时，测量对象的表面通过成像光学元件的最佳焦点的表面，针对扫描期间的测试对象的一系列位置中的每一个， 使用成像光学元件的测量对象的单个图像，其中最佳对焦表面中的光的强度调制对于连续的图像是不同的，并且基于获取的图像形成测试对象的三维图像。
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公开(公告)号：US20120229621A1
公开(公告)日：2012-09-13
申请号：US13043784
申请日：2011-03-09
申请人： Justin Turner , Tyler Steele , Stephen L. Mielke , Xavier M. Colonna de Lega , Bruce E. Truax , Andrew D. Meigs
发明人： Justin Turner , Tyler Steele , Stephen L. Mielke , Xavier M. Colonna de Lega , Bruce E. Truax , Andrew D. Meigs
CPC分类号： G01B11/06 , G01B9/02021 , G01B9/0209 , G01B11/2441
摘要： Determining spatial information about a part includes positioning the part in a fixture having two reference surfaces, where the part is positioned between the two reference surfaces, imaging the two reference surfaces and opposing surfaces of the part to different locations of a multi-element detector, simultaneously acquiring images of the opposing sides of the part and the two reference surfaces using the multi-element detector, and determining spatial information about the part based on the simultaneously acquired images.
摘要翻译： 确定关于部件的空间信息包括将部件定位在具有两个参考表面的夹具中，其中部件位于两个参考表面之间，将该部件的两个参考表面和相对表面成像到多元件检测器的不同位置， 使用多元素检测器同时获取部分和两个参考表面的相对侧的图像，以及基于同时获取的图像确定关于该部分的空间信息。
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公开(公告)号：US20120140243A1
公开(公告)日：2012-06-07
申请号：US13309244
申请日：2011-12-01
IPC分类号： G01B11/24
CPC分类号： G01B11/2441 , A61F9/00836 , A61F2009/00844 , G02B21/244
摘要： Methods for forming a three-dimensional image of a test object include directing light to a surface of best-focus of an imaging optic, where the light has an intensity modulation in at least one direction in the surface of best-focus, scanning a test object relative to the imaging optic so that a surface of the measurement object passes through the surface of best-focus of the imaging optic as the test object is scanned, acquiring, for each of a series of positions of the test object during the scan, a single image of the measurement object using the imaging optic, in which the intensity modulation of the light in the surface of best-focus is different for successive images, and forming a three-dimensional image of the test object based on the acquired images.
摘要翻译： 用于形成测试对象的三维图像的方法包括将光引导到成像光学元件的最佳焦点的表面，其中光在最佳对焦表面中的至少一个方向上具有强度调制，扫描测试 相对于成像光学元件，使得当扫描测试对象时，测量对象的表面通过成像光学元件的最佳焦点的表面，针对扫描期间的测试对象的一系列位置中的每一个， 使用成像光学元件的测量对象的单个图像，其中最佳对焦表面中的光的强度调制对于连续的图像是不同的，并且基于获取的图像形成测试对象的三维图像。
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