公开(公告)号：US10448738B2

公开(公告)日：2019-10-22

申请号：US13674778

申请日：2012-11-12

申请人： Darush David Hashemi ,  Xiaoping Zhou ,  Xiwen Wang

发明人： Darush David Hashemi ,  Xiaoping Zhou ,  Xiwen Wang

IPC分类号： A47B88/473 ,  A47B88/46 ,  E05B47/00 ,  E05B65/462 ,  E05B65/52 ,  E05C3/12 ,  A47B88/40

摘要： A drawer slide with lock mechanism has an elongated outer slide member extendably coupled to an inner slide member. A latch arm or pin is fixed to the inner slide member for latching by a lock mechanism fixed to the outer slide member. The lock mechanism uses a latch receiver that rotates with respect to the lock mechanism and is in a travel path of the latch arm. A lever arm rotates with respect to the lock mechanism and is positionable to block rotation of the latch receiver in a locked position to retain the latch arm. A motor drives a cam to position the lever arm to free the latch receiver from the locked position.

公开(公告)号：US09248509B2

公开(公告)日：2016-02-02

申请号：US14447557

申请日：2014-07-30

申请人： Hamid Tavassoli ,  Surajit Kumar ,  Kallol Bera ,  Xiaoping Zhou ,  Shane C. Nevil ,  Douglas A. Buchberger, Jr.

发明人： Hamid Tavassoli ,  Surajit Kumar ,  Kallol Bera ,  Xiaoping Zhou ,  Shane C. Nevil ,  Douglas A. Buchberger, Jr.

IPC分类号： B23K10/00 ,  B23B31/28 ,  H01L21/67 ,  H01L21/683 ,  H05H1/46 ,  B23Q3/15

CPC分类号： B23B31/28 ,  B23B2231/24 ,  B23Q3/15 ,  H01L21/67069 ,  H01L21/6833 ,  H05H1/46 ,  Y10T279/23

摘要： An electrostatic chuck assembly including a dielectric layer with a top surface to support a workpiece. A cooling channel base disposed below the dielectric layer includes a plurality of inner fluid conduits disposed beneath an inner portion of the top surface, and a plurality of outer fluid conduits disposed beneath an outer portion of the top surface. A chuck assembly includes a thermal break disposed within the cooling channel base between the inner and outer fluid conduits. A chuck assembly includes a fluid distribution plate disposed below the cooling channel base and the base plate to distribute a heat transfer fluid delivered from a common input to each inner or outer fluid conduit. The branches of the inner input manifold may have substantially equal fluid conductance.

摘要翻译： 一种静电卡盘组件，包括具有顶表面以支撑工件的电介质层。 布置在电介质层下方的冷却通道底座包括设置在顶表面的内部下方的多个内部流体导管，以及设置在顶部表面外部的多个外部流体导管。 卡盘组件包括设置在内部和外部流体管道之间的冷却通道底部内的热断裂。 卡盘组件包括布置在冷却通道底部和底板下方的流体分配板，用于将从公共输入端输送的传热流体分配到每个内部或外部流体导管。 内部输入歧管的分支可以具有基本相等的流体电导。

公开(公告)号：US09123762B2

公开(公告)日：2015-09-01

申请号：US12910547

申请日：2010-10-22

申请人： Xing Lin ,  Douglas A. Buchberger, Jr. ,  Xiaoping Zhou ,  Andrew Nguyen ,  Anchel Sheyner

发明人： Xing Lin ,  Douglas A. Buchberger, Jr. ,  Xiaoping Zhou ,  Andrew Nguyen ,  Anchel Sheyner

IPC分类号： C23C16/00 ,  C23F1/00 ,  H01L21/306 ,  H01L21/683 ,  H01J37/32 ,  H01L21/67

CPC分类号： H01L21/67069 ,  H01J37/32532 ,  H01J37/32577 ,  H01J37/32715 ,  H01J37/32724 ,  H01L21/6831

摘要： Apparatus for processing a substrate is disclosed herein. In some embodiments, a substrate support may include a substrate support having a support surface for supporting a substrate the substrate support having a central axis; a first electrode disposed within the substrate support to provide RF power to a substrate when disposed on the support surface; an inner conductor coupled to the first electrode about a center of a surface of the first electrode opposing the support surface, wherein the inner conductor is tubular and extends from the first electrode parallel to and about the central axis in a direction away from the support surface of the substrate support; an outer conductor disposed about the inner conductor; and an outer dielectric layer disposed between the inner and outer conductors, the outer dielectric layer electrically isolating the outer conductor from the inner conductor. The outer conductor may be coupled to electrical ground.

摘要翻译： 本文公开了用于处理衬底的装置。 在一些实施例中，衬底支撑件可以包括具有用于支撑衬底的支撑表面的衬底支撑件，衬底支撑件具有中心轴线; 设置在所述基板支撑件内的第一电极，用于当设置在所述支撑表面上时向基板提供RF功率; 内部导体，其围绕第一电极的与支撑表面相对的表面的中心耦合到第一电极，其中内部导体是管状的，并且从第一电极沿着远离支撑表面的方向平行于中心轴并围绕中心轴线延伸 的基板支撑; 设置在内部导体周围的外部导体; 以及设置在所述内部和外部导体之间的外部电介质层，所述外部电介质层将所述外部导体与所述内部导体电隔离。 外部导体可以耦合到电气接地。

公开(公告)号：US20140346743A1

公开(公告)日：2014-11-27

申请号：US14447557

申请日：2014-07-30

申请人： Hamid Tavassoli ,  Surajit Kumar ,  Kallol Bera ,  Xiaoping Zhou ,  Shane C. Nevil ,  Douglas A. Buchberger, JR.

发明人： Hamid Tavassoli ,  Surajit Kumar ,  Kallol Bera ,  Xiaoping Zhou ,  Shane C. Nevil ,  Douglas A. Buchberger, JR.

IPC分类号： B23B31/28 ,  B23Q3/15

CPC分类号： B23B31/28 ,  B23B2231/24 ,  B23Q3/15 ,  H01L21/67069 ,  H01L21/6833 ,  H05H1/46 ,  Y10T279/23

摘要： An electrostatic chuck assembly including a dielectric layer with a top surface to support a workpiece. A cooling channel base disposed below the dielectric layer includes a plurality of inner fluid conduits disposed beneath an inner portion of the top surface, and a plurality of outer fluid conduits disposed beneath an outer portion of the top surface. A chuck assembly includes a thermal break disposed within the cooling channel base between the inner and outer fluid conduits. A chuck assembly includes a fluid distribution plate disposed below the cooling channel base and the base plate to distribute a heat transfer fluid delivered from a common input to each inner or outer fluid conduit. The branches of the inner input manifold may have substantially equal fluid conductance.

摘要翻译： 一种静电卡盘组件，包括具有顶表面以支撑工件的电介质层。 布置在电介质层下方的冷却通道底座包括设置在顶表面的内部下方的多个内部流体导管，以及设置在顶部表面的外部部分下方的多个外部流体导管。 卡盘组件包括设置在内部和外部流体管道之间的冷却通道底部内的热断裂。 卡盘组件包括布置在冷却通道底部和底板下方的流体分配板，用于将从公共输入端输送的传热流体分配到每个内部或外部流体导管。 内部输入歧管的分支可以具有基本相等的流体电导。

公开(公告)号：US20140021843A1

公开(公告)日：2014-01-23

申请号：US13945831

申请日：2013-07-18

申请人： Darush David Hashemi ,  Xiaoping Zhou ,  Quinn Chi

发明人： Darush David Hashemi ,  Xiaoping Zhou ,  Quinn Chi

IPC分类号： E05B47/00 ,  E05B65/46

CPC分类号： E05B47/0001 ,  E05B47/0012 ,  E05B47/06 ,  E05B65/46 ,  E05B2047/0024 ,  E05B2047/0069 ,  E05B2047/0094 ,  E05C3/24 ,  Y10T70/7062

摘要： An electrically actuated locking mechanism may include a microprocessor for control of the locking mechanism, and the locking mechanism may be used to lock a drawer slide in a closed position. The microprocessor may be in a housing of the locking mechanism, and the microprocessor may command a motor to operate in a first direction to drive lock components to a locked status and command the motor to operate in a second direction to drive the lock components to an unlocked state.

摘要翻译： 电驱动的锁定机构可以包括用于控制锁定机构的微处理器，并且锁定机构可用于将抽屉滑块锁定在关闭位置。 微处理器可以在锁定机构的壳体中，并且微处理器可以命令电动机在第一方向上操作以将锁定部件驱动到锁定状态，并且命令电动机在第二方向上操作以将锁定部件驱动到 解锁状态。

公开(公告)号：US20130231497A1

公开(公告)日：2013-09-05

申请号：US13884609

申请日：2011-11-10

申请人： Xiaoping Zhou ,  Jiaruo Huang ,  Whensheng Li

发明人： Xiaoping Zhou ,  Jiaruo Huang ,  Whensheng Li

IPC分类号： C07C51/00 ,  C07C67/08

CPC分类号： C07C67/40 ,  C07C51/00 ,  C07C51/16 ,  C07C67/00 ,  C07C67/08 ,  C07C69/68 ,  C07C59/08

摘要： A method for synthesizing lactic acid and lactate is invented from carbohydrates, such as monosaccharides and/or polysaccharides in the presence of the catalyst that is the combinations of nitrogen-heterocycle aromatic ring cation salts and metal compounds. In the reaction, at least one alcohol and at least one solvent are used. Specifically, in the presence of [SnCl4-1-ethyl-3-methylimidazolium chloride ([EMIM]Cl)], SnCl4-1, 3-dimethylimidazolium methyl sulfate ([DMIM] CH3SO4)], [SnCl2-1-ethyl-3-methylimidazolium chloride ([EMIM]Cl)], or SnCl2-1, 3-dimethylimidazolium methyl sulfate ([DMIM] CH3SO4)] in methanol.

摘要翻译： 在作为氮杂环芳香族环阳离子盐和金属化合物的组合的催化剂存在下，由碳水化合物如单糖和/或多糖发明合成乳酸和乳酸的方法。 在该反应中，使用至少一种醇和至少一种溶剂。 具体地说，在[SnCl4-1-乙基-3-甲基咪唑鎓氯化物（[EMIM] Cl）]存在下，将SnCl4-1,3-二甲基咪唑鎓甲基硫酸盐（[DMIM] CH 3 SO 4）]，[SnCl 2 -1-乙基-3 （[EMIM] Cl）]或SnCl 2 -1,3-二甲基咪唑鎓甲基硫酸盐（[DMIM] CH 3 SO 4）]的甲醇溶液。

公开(公告)号：US20130190509A1

公开(公告)日：2013-07-25

申请号：US13878223

申请日：2011-02-16

申请人： Yifei Wang ,  Guowen Xing ,  Huaiqiang Ju ,  Wenhui Lin ,  Chuiwen Qian ,  Min Xia ,  Xiaoping Zhou ,  Meiying Zhang

发明人： Yifei Wang ,  Guowen Xing ,  Huaiqiang Ju ,  Wenhui Lin ,  Chuiwen Qian ,  Min Xia ,  Xiaoping Zhou ,  Meiying Zhang

IPC分类号： C07D231/56

CPC分类号： C07D231/56 ,  A61K31/416

摘要： Disclosed are an Hsp90 inhibitor and a preparation method and use thereof. The Hsp90 inhibitor is 2-(4-(3-acetylcarnitineacyloxy)cyclohexylamino)-4-(1-(3,6,6-trimethyl-4-oxy-4,5,6,7-tetrahydroindazole))benzamide. The Hsp90 inhibitor has good water solubility and high bioavailability, and can effectively inhibit the proliferation of cancer cells, such as leukemia, cervical cancer, breast cancer, human laryngeal epithelial carcinoma, or malignant melanoma cells. It can also effectively inhibit the activity of herpes simplex virus. The maximal non-toxic concentration of the Hsp90 inhibitor on normal cells is a high, and the Hsp90 inhibitor only has specific inhibition effect on cancer cells.

摘要翻译： 公开了一种Hsp90抑制剂及其制备方法和用途。 Hsp90抑制剂是2-（4-（3-乙酰基肉桂酰氧基）环己基氨基）-4-（1-（3,6,6-三甲基-4-氧基-4,5,6,7-四氢吲唑））苯甲酰胺。 Hsp90抑制剂具有良好的水溶性和高生物利用度，可有效抑制白血病，宫颈癌，乳腺癌，喉癌，恶性黑色素瘤等癌细胞的增殖。 它也可以有效抑制单纯疱疹病毒的活动。 Hsp90抑制剂对正常细胞的最大无毒浓度高，Hsp90抑制剂对癌细胞仅具有特异性抑制作用。

公开(公告)号：US08475625B2

公开(公告)日：2013-07-02

申请号：US11381523

申请日：2006-05-03

申请人： Sharma Pamarthy ,  Huutri Dao ,  Xiaoping Zhou ,  Kelly A. McDonough ,  Jivko Dinev ,  Farid Abooameri ,  David E. Gutierrez ,  Jim Zhongyi He ,  Robert S. Clark ,  Dennis M. Koosau ,  Jeffrey William Dietz ,  Declan Scanlan ,  Subhash Deshmukh ,  John P. Holland ,  Alexander Paterson

发明人： Sharma Pamarthy ,  Huutri Dao ,  Xiaoping Zhou ,  Kelly A. McDonough ,  Jivko Dinev ,  Farid Abooameri ,  David E. Gutierrez ,  Jim Zhongyi He ,  Robert S. Clark ,  Dennis M. Koosau ,  Jeffrey William Dietz ,  Declan Scanlan ,  Subhash Deshmukh ,  John P. Holland ,  Alexander Paterson

IPC分类号： H01L21/3065

CPC分类号： H01J37/3266 ,  H01J37/3244 ,  H01J37/32706 ,  H01J2237/3347

摘要： Embodiments of the invention provide a method and apparatus, such as a processing chamber, suitable for etching high aspect ratio features. Other embodiments include a showerhead assembly for use in the processing chamber. In one embodiment, a processing chamber includes a chamber body having a showerhead assembly and substrate support disposed therein. The showerhead assembly includes at least two fluidly isolated plenums, a region transmissive to an optical metrology signal, and a plurality of gas passages formed through the showerhead assembly fluidly coupling the plenums to the interior volume of the chamber body.

公开(公告)号：US08440049B2

公开(公告)日：2013-05-14

申请号：US11421208

申请日：2006-05-31

申请人： Xiaoping Zhou ,  Jeffrey William Dietz

发明人： Xiaoping Zhou ,  Jeffrey William Dietz

IPC分类号： H01L21/3065

CPC分类号： H01L21/02002 ,  H01J37/32477 ,  H01L21/67069 ,  H01L21/67109 ,  H01L21/67253 ,  H01L21/6831

摘要： Embodiments of the invention provide a method and apparatus, such as a processing chamber, suitable for etching high aspect ratio features. Other embodiments include a showerhead assembly for use in the processing chamber. In one embodiment, a processing chamber includes a chamber body having a showerhead assembly and substrate support disposed therein. The showerhead assembly includes at least two fluidly isolated plenums, a region transmissive to an optical metrology signal, and a plurality of gas passages formed through the showerhead assembly fluidly coupling the plenums to the interior volume of the chamber body.

摘要翻译： 本发明的实施例提供了一种适于蚀刻高纵横比特征的方法和装置，例如处理室。 其他实施例包括用于处理室中的喷头组件。 在一个实施例中，处理室包括具有布置在其中的喷头组件和基板支撑件的室主体。 喷头组件包括至少两个流体隔离的增压室，对光学测量信号透射的区域，以及通过喷淋头组件形成的多个气体通道，其将气室流体耦合到室主体的内部空间。

公开(公告)号：US08328299B2

公开(公告)日：2012-12-11

申请号：US12768669

申请日：2010-04-27

申请人： Darush David Hashemi ,  Xiaoping Zhou ,  Xiwen Wang

发明人： Darush David Hashemi ,  Xiaoping Zhou ,  Xiwen Wang

IPC分类号： A47B95/00

CPC分类号： A47B88/40 ,  E05B47/00 ,  E05B65/462 ,  E05B65/5215 ,  E05C3/12 ,  Y10T292/1021 ,  Y10T292/1028 ,  Y10T292/1077

摘要： A drawer slide with lock mechanism has an elongated outer slide member extendably coupled to an inner slide member. A latch arm or pin is fixed to the inner slide member for latching by a lock mechanism fixed to the outer slide member. The lock mechanism uses a latch receiver that rotates with respect to the lock mechanism and is in a travel path of the latch arm. A lever arm rotates with respect to the lock mechanism and is positionable to block rotation of the latch receiver in a locked position to retain the latch arm. A motor drives a cam to position the lever arm to free the latch receiver from the locked position.

摘要翻译： 具有锁定机构的抽屉滑动件具有可延伸地联接到内部滑动构件的细长外部滑动构件。 闩锁臂或销固定到内滑动构件上，用于通过固定到外滑动构件的锁定机构来锁定。 锁定机构使用相对于锁定机构旋转并且处于闩锁臂的行进路径中的闩锁接收器。 杠杆臂相对于锁定机构旋转并且可定位成阻止闩锁接收器在锁定位置的旋转以保持闩锁臂。 马达驱动凸轮以定位杠杆臂以将闩锁接收器从锁定位置释放。