公开(公告)号：US09260241B2

公开(公告)日：2016-02-16

申请号：US13805164

申请日：2011-06-10

Applicant: Yasuhiko Hashimoto ,  Tetsuya Yoshida

Inventor： Yasuhiko Hashimoto ,  Tetsuya Yoshida

IPC: B65G65/00 ,  B65G1/04 ,  B65G49/06 ,  H01L21/677

CPC classification number: B65G1/04 ,  B65G49/062 ,  B65G49/063 ,  B65G49/067 ,  B65G49/068 ,  H01L21/67718 ,  H01L21/67736 ,  H01L21/67769

Abstract: A stocker facility includes a rack configured to store glass plates in a standing state such that the glass plates are arranged in a front-rear direction and a stocker configured to cause the glass plate to move in a left-right direction to transfer the glass plate to and from the rack. Thus, the present invention provides a plate-shaped member transfer facility capable of carrying the plate-shaped member in between two spaced-apart plate-shaped members between which a storage pitch is short and carrying any one of a plurality of plate-shaped members out from the rack without inserting an end effect in a substrate storage portion of the rack.

Abstract translation: 贮存器设备包括：搁架，其被构造成将处于玻璃板的前后方向上的玻璃板保持在立起状态的玻璃板，以及储存器，其构造成使玻璃板沿左右方向移动以将玻璃板 往返于机架。 因此，本发明提供一种板状构件传递装置，其能够将板状构件承载在两个间隔开的板状构件之间，在该两个间隔开的板状构件之间存储间距短，并且承载多个板状构件中的任一个 在机架的基板存储部分中没有插入端部效应。

公开(公告)号：US08882431B2

公开(公告)日：2014-11-11

申请号：US13121518

申请日：2009-09-28

Applicant: Yasuhiko Hashimoto

Inventor： Yasuhiko Hashimoto

IPC: H01L21/67 ,  B25J9/10 ,  B25J9/04 ,  H01L21/677

CPC classification number: B25J9/041 ,  B25J9/104 ,  H01L21/67742 ,  H01L21/67745

Abstract: A robot that includes an end effector for holding a substrate in a substantially horizontal state; a vertical driving unit for driving the end effector to move in a vertical direction; a horizontal driving unit for driving the vertical driving unit to move in a horizontal direction; and a rotation driving unit for rotating the horizontal driving unit about a rotation axis extending in the vertical direction. In this case, one end of the end effector is connected with the vertical driving unit. One end of the vertical driving unit is connected with the horizontal driving unit.

Abstract translation: 一种机器人，其包括用于将基板保持在基本水平状态的端部执行器; 垂直驱动单元，用于驱动末端执行器沿垂直方向移动; 水平驱动单元，用于驱动垂直驱动单元沿水平方向移动; 以及用于围绕在垂直方向上延伸的旋转轴旋转水平驱动单元的旋转驱动单元。 在这种情况下，端部执行器的一端与垂直驱动单元连接。 垂直驱动单元的一端与水平驱动单元连接。

公开(公告)号：US08855818B2

公开(公告)日：2014-10-07

申请号：US13062426

申请日：2008-09-30

Applicant: Yasuhiko Hashimoto

Inventor： Yasuhiko Hashimoto

IPC: G05B19/18 ,  B66C1/02 ,  B25J15/06 ,  B65G47/91 ,  B25J15/00 ,  B25J13/08

CPC classification number: B25J15/0616 ,  B25J13/087 ,  B25J15/0052 ,  B25J19/0095 ,  B65G47/917 ,  B65G47/918 ,  B66C1/0218 ,  B66C1/0243

Abstract: The invention is a monitoring apparatus for monitoring a condition of an end-effector of a robot having a vacuum absorption pad to hold an article. The pad is elastically supported by the end-effector. The apparatus includes a pad receiving part having a front surface and a through hole, the pad receiving part being movable in a direction perpendicular to the front surface; an elastically supporting unit for elastically supporting the pad receiving part in a direction perpendicular to the front surface; a movement detection unit for detecting a movement of the pad receiving part; a vacuum sensor connected to the through hole; and a judging unit for judging conditions of an elastic support of the pad and a vacuum absorption of the pad based on detection results of the movement detection unit and the vacuum sensor.

Abstract translation: 本发明是一种监测装置，用于监测具有真空吸附垫的机器人的末端执行器的状态以保持物品。 该垫由末端执行器弹性支撑。 该装置包括具有前表面和通孔的焊盘接收部分，该焊盘接收部分可在垂直于前表面的方向上移动; 弹性支撑单元，用于沿垂直于所述前表面的方向弹性地支撑所述垫接收部; 移动检测单元，用于检测所述垫接收部的移动; 连接到通孔的真空传感器; 以及判断单元，用于基于移动检测单元和真空传感器的检测结果来判断垫的弹性支撑的状态和垫的真空吸收。

公开(公告)号：US20130202394A1

公开(公告)日：2013-08-08

申请号：US13816029

申请日：2011-08-25

Applicant: Yasuhiko Hashimoto ,  Shigeki Ono ,  Kenji Bando

Inventor： Yasuhiko Hashimoto ,  Shigeki Ono ,  Kenji Bando

IPC: B65G1/04

CPC classification number: B65G1/04 ,  B65G49/061 ,  B65G49/063 ,  B65G49/067 ,  B65G49/068 ,  H01L21/6734 ,  H01L21/67718 ,  H01L21/67736 ,  H01L21/67769

Abstract: Provided is a plate-shaped member transfer facility capable of inserting a plate-shaped member in a raised state into a rack and retrieving the plate-shaped member in the raised state from the rack. A stocker facility includes: a rack configured to store glass plates such that the stored glass plates are arranged in a front-rear direction in a raised state; and a track robot configured to transfer the glass plates between the track robot and the rack by moving the glass plates to the left and right. The track robot includes a track-side running base, a flip, a track-side conveyance base, and rollers.

Abstract translation: 提供一种板状部件传送设备，其能够将升高状态的板状部件插入到齿条中，并且从升起状态将该板状部件从搁架中取出。 储料器设备包括：被配置为存储玻璃板的搁架，使得储存的玻璃板在升高状态下沿前后方向布置; 以及轨道机器人，其被配置为通过左右移动玻璃板来将轨道机器人和机架之间的玻璃板传送。 轨道机器人包括轨道侧运行基座，翻盖，轨道侧输送基座和滚子。

公开(公告)号：US20130202393A1

公开(公告)日：2013-08-08

申请号：US13805164

申请日：2011-06-10

Applicant: Yasuhiko Hashimoto ,  Tetsuya Yoshida

Inventor： Yasuhiko Hashimoto ,  Tetsuya Yoshida

IPC: B65G1/04

CPC classification number: B65G1/04 ,  B65G49/062 ,  B65G49/063 ,  B65G49/067 ,  B65G49/068 ,  H01L21/67718 ,  H01L21/67736 ,  H01L21/67769

Abstract: A stocker facility includes a rack configured to store glass plates in a standing state such that the glass plates are arranged in a front-rear direction and a stocker configured to cause the glass plate to move in a left-right direction to transfer the glass plate to and from the rack. Thus, the present invention provides a plate-shaped member transfer facility capable of carrying the plate-shaped member in between two spaced-apart plate-shaped members between which a storage pitch is short and carrying any one of a plurality of plate-shaped members out from the rack without inserting an end effect in a substrate storage portion of the rack.

Abstract translation: 贮存器设备包括：搁架，其被构造成将处于玻璃板的前后方向上的玻璃板保持在立起状态的玻璃板，以及储存器，其构造成使得玻璃板沿左右方向移动以将玻璃板 往返于机架。 因此，本发明提供一种板状构件传递装置，其能够将板状构件承载在两个间隔开的板状构件之间，在该两个间隔开的板状构件之间存储间距短，并且承载多个板状构件中的任一个 在机架的基板存储部分中没有插入端部效应。

公开(公告)号：US08121732B2

公开(公告)日：2012-02-21

申请号：US12232441

申请日：2008-09-17

Applicant: Yasuhiko Hashimoto ,  Nobuyasu Shimomura ,  Takao Yamaguchi ,  Tetsuya Yoshida

Inventor： Yasuhiko Hashimoto ,  Nobuyasu Shimomura ,  Takao Yamaguchi ,  Tetsuya Yoshida

IPC: G05B19/00

CPC classification number: H01L21/67778 ,  B25J9/1692 ,  G05B2219/37411 ,  G05B2219/39013 ,  G05B2219/39041 ,  G05B2219/39413 ,  H01L21/67259 ,  H01L21/67766 ,  H01L21/68

Abstract: A target position detection apparatus for a robot includes: a robot including an arm configured to be freely moved in at least two directions of X and Y axes, the arm having a wrist axis provided at a distal end of the arm and configured to be freely moved in a horizontal direction, and the wrist axis being provided with an end effector; and a control unit adapted for driving a memory to store a teaching point therein and controlling an operation of the robot such that the end effector will be moved toward the teaching point stored in the memory. The control unit is further adapted for changing a pressing force of the end effector against a target by changing a control loop gain, and bringing the end effector into contact with the target, while setting the control loop gain of the wrist axis lower than a predetermined value at least from a position adjacent to the teaching point at which the target is located, so as to capture a position in a state in which the end effector is in contact with the target, thereby detecting the position of the target.

Abstract translation: 一种用于机器人的目标位置检测装置，包括：机器人，其包括构造成能够在X轴和Y轴的至少两个方向上自由移动的臂，所述臂具有设置在所述臂的前端的手腕轴， 沿水平方向移动，腕轴设置有端部执行器; 以及控制单元，适于驱动存储器以存储其中的教导点，并且控制机器人的操作，使得末端执行器将朝向存储在存储器中的教学点移动。 控制单元还适于通过改变控制环增益来改变端部执行器对目标的按压力，并且使端部执行器与目标接触，同时将手腕轴的控制环增益设置为低于预定值 至少从与目标所在的教导点相邻的位置获得值，以便捕获末端执行器与目标物接触的状态下的位置，从而检测目标的位置。

公开(公告)号：US20110182702A1

公开(公告)日：2011-07-28

申请号：US13121518

申请日：2009-09-28

Applicant: Yasuhiko Hashimoto

Inventor： Yasuhiko Hashimoto

IPC: B25J11/00 ,  B25J9/02 ,  H01L21/677

CPC classification number: B25J9/041 ,  B25J9/104 ,  H01L21/67742 ,  H01L21/67745

Abstract: A robot that includes an end effector for holding a substrate in a substantially horizontal state; a vertical driving unit for driving the end effector to move in a vertical direction; a horizontal driving unit for driving the vertical driving unit to move in a horizontal direction; and a rotation driving unit for rotating the horizontal driving unit about a rotation axis extending in the vertical direction. In this case, one end of the end effector is connected with the vertical driving unit. One end of the vertical driving unit is connected with the horizontal driving unit.

Abstract translation: 一种机器人，其包括用于将基板保持在基本水平状态的端部执行器; 垂直驱动单元，用于驱动末端执行器沿垂直方向移动; 水平驱动单元，用于驱动垂直驱动单元沿水平方向移动; 以及用于围绕在垂直方向上延伸的旋转轴旋转水平驱动单元的旋转驱动单元。 在这种情况下，端部执行器的一端与垂直驱动单元连接。 垂直驱动单元的一端与水平驱动单元连接。

公开(公告)号：US07651311B2

公开(公告)日：2010-01-26

申请号：US11889653

申请日：2007-08-15

Applicant: Yasuhiko Hashimoto ,  Masao Takatori

Inventor： Yasuhiko Hashimoto ,  Masao Takatori

IPC: B65B69/00

CPC classification number: H01L21/67772 ,  Y10S414/139

Abstract: In this invention, a movable body movable in forward and backward directions and a connector fixed to an opener-side door are connected with each other by link members so as to constitute a parallel link mechanism, such that they can be angularly displaced relative to each other. Link member angular displacement means controls the angular displacement of each link member relative to the movable body to be in a predetermined angular position, corresponding to the position of the movable body along the forward and backward directions. Reciprocation of the movable body in the forward and backward directions by movable body drive means moves the opener-side door in the forward and backward directions as well as in the upward and downward directions, thereby opening an opener-side opening. Since the movable body is moved only in the forward and backward directions, and necessity of moving and guiding the movable body in the upward and downward directions can be eliminated, the substrate container opener can be downsized, and a space provided below a FOUP supporting portion can be utilized effectively.

Abstract translation: 在本发明中，可沿前后方向移动的移动体和固定在开启侧门上的连接器通过连接构件相互连接，构成平行连杆机构，使得它们能够相对于每个 其他。 链接构件角位移装置将每个连杆构件相对于可动体的角位移控制在预定的角位置，对应于可移动体沿着前后方向的位置。 可移动体驱动装置在向前和向后方向上可移动体的往复运动使开启侧门沿前后方向以及上下方向移动，从而打开开启器侧开口。 由于可移动体仅沿前后方向移动，并且可以消除上下方向的移动和引导移动体的必要性，因此能够使基板容器开启器小型化，并且设置在FOUP支撑部下方的空间 可以有效利用。

公开(公告)号：US20090093908A1

公开(公告)日：2009-04-09

申请号：US12232441

申请日：2008-09-17

Applicant: Yasuhiko Hashimoto ,  Nobuyasu Shimomura ,  Takao Yamaguchi ,  Tetsuya Yoshida

Inventor： Yasuhiko Hashimoto ,  Nobuyasu Shimomura ,  Takao Yamaguchi ,  Tetsuya Yoshida

IPC: G05B19/408 ,  G06F19/00

CPC classification number: H01L21/67778 ,  B25J9/1692 ,  G05B2219/37411 ,  G05B2219/39013 ,  G05B2219/39041 ,  G05B2219/39413 ,  H01L21/67259 ,  H01L21/67766 ,  H01L21/68

Abstract: A target position detection apparatus for a robot includes: a robot including an arm configured to be freely moved in at least two directions of X and Y axes, the arm having a wrist axis provided at a distal end of the arm and configured to be freely moved in a horizontal direction, and the wrist axis being provided with an end effector; and a control unit adapted for driving a memory to store a teaching point therein and controlling an operation of the robot such that the end effector will be moved toward the teaching point stored in the memory. The control unit is further adapted for changing a pressing force of the end effector against a target by changing a control loop gain, and bringing the end effector into contact with the target, while setting the control loop gain of the wrist axis lower than a predetermined value at least from a position adjacent to the teaching point at which the target is located, so as to capture a position in a state in which the end effector is in contact with the target, thereby detecting the position of the target.

Abstract translation: 一种用于机器人的目标位置检测装置，包括：机器人，其包括构造成能够在X轴和Y轴的至少两个方向上自由移动的臂，所述臂具有设置在所述臂的前端的手腕轴， 沿水平方向移动，腕轴设置有端部执行器; 以及控制单元，适于驱动存储器以存储其中的教导点，并且控制机器人的操作，使得末端执行器将朝向存储在存储器中的教学点移动。 控制单元还适于通过改变控制环增益来改变端部执行器对目标的按压力，并且使端部执行器与目标接触，同时将手腕轴的控制环增益设置为低于预定值 至少从与目标所在的教导点相邻的位置获得值，以便捕获末端执行器与目标物接触的状态下的位置，从而检测目标的位置。

公开(公告)号：US20080069670A1

公开(公告)日：2008-03-20

申请号：US11889653

申请日：2007-08-15

Applicant: Yasuhiko Hashimoto ,  Masao Takatori

Inventor： Yasuhiko Hashimoto ,  Masao Takatori

IPC: H01L21/677

CPC classification number: H01L21/67772 ,  Y10S414/139

Abstract: In this invention, a movable body movable in forward and backward directions and a connector fixed to an opener-side door are connected with each other by link members so as to constitute a parallel link mechanism, such that they can be angularly displaced relative to each other. Link member angular displacement means controls the angular displacement of each link member relative to the movable body to be in a predetermined angular position, corresponding to the position of the movable body along the forward and backward directions. Reciprocation of the movable body in the forward and backward directions by movable body drive means moves the opener-side door in the forward and backward directions as well as in the upward and downward directions, thereby opening an opener-side opening. Since the movable body is moved only in the forward and backward directions, and necessity of moving and guiding the movable body in the upward and downward directions can be eliminated, the substrate container opener can be downsized, and a space provided below a FOUP supporting portion can be utilized effectively.

Abstract translation: 在本发明中，可沿前后方向移动的移动体和固定在开启侧门上的连接器通过连接构件相互连接，构成平行连杆机构，使得它们能够相对于每个 其他。 链接构件角位移装置将每个连杆构件相对于可动体的角位移控制在预定的角位置，对应于可移动体沿着前后方向的位置。 可移动体驱动装置在向前和向后方向上可移动体的往复运动使开启侧门沿前后方向以及上下方向移动，从而打开开启器侧开口。 由于可移动体仅沿前后方向移动，并且可以消除上下方向的移动和引导移动体的必要性，因此可以使基板容器开启器小型化，并且设置在FOUP支撑部下方的空间 可以有效利用。