利索-全球专利检索

  1. 登录
  2. 注册

搜索结果

7 条记录 (耗时 0.012 秒)

    Electromagnetic Noise Evaluation System, Electromagnetic Environment Evaluation System And Program
    4.
    发明申请
    Electromagnetic Noise Evaluation System, Electromagnetic Environment Evaluation System And Program 审中-公开
    电磁噪声评估系统，电磁环境评估系统及程序

    公开(公告)号：US20130231062A1

    公开(公告)日：2013-09-05

    申请号：US13883792

    申请日：2011-10-14

    申请人： Yasuo Yahagi ,  Satoshi Nakamura ,  Tatsuji Noma

    发明人： Yasuo Yahagi ,  Satoshi Nakamura ,  Tatsuji Noma

    IPC分类号： H04B17/00

    CPC分类号： H04B17/309 ,  H04B17/104

    摘要： There are cases where electromagnetic waves radiated from a device influence another device, whereby the operation of the other device becomes unstable. The present invention provides a system having a detailed database of a device that radiates electromagnetic waves, so that a spatial distribution of electromagnetic waves radiated from an electric/electronic device can be computed, and the influence of the electromagnetic waves on another electric/electronic device can be evaluated.

    摘要翻译： 存在从设备发射的电磁波影响另一装置的情况，其他装置的操作变得不稳定。 本发明提供了一种具有放射电磁波的装置的详细数据库的系统，从而可以计算从电气/电子设备辐射的电磁波的空间分布，以及电磁波对另一电气/电子设备的影响 可以评估。

    Method for evaluating semiconductor device error and system for supporting the same
    5.
    发明授权
    Method for evaluating semiconductor device error and system for supporting the same 失效
    评估半导体器件误差的方法及其支持系统

    公开(公告)号：US07395168B2

    公开(公告)日：2008-07-01

    申请号：US11037105

    申请日：2005-01-19

    申请人： Hidefumi Ibe ,  Yasuo Yahagi ,  Hideaki Kameyama

    发明人： Hidefumi Ibe ,  Yasuo Yahagi ,  Hideaki Kameyama

    IPC分类号： G01V5/10

    CPC分类号： G01R31/31816 ,  G01R31/002 ,  G01R31/2849 ,  G01R31/2881 ,  G01R31/30

    摘要： Spectrum data of white neutrons having different spectrum shapes, and SEE counts obtained by a white neutron method using this multiple spectrum data, are stored. A computing section reads out the spectrum data, divides the data into energy groups, and calculates and stores a total flux of each energy group. Furthermore, the computing section reads out the SEE counts with respect to each of the spectrum data and the total flux of each energy group, substitutes the SEE counts and the total flux into a simultaneous equation, and calculates the SEE cross section for each of the energy groups. Subsequently, the computing section calculates parameters which determine a formula of the approximate function of the SEE cross section as a function of energy, so that computed values of error counts obtained by integration of multiple spectra and the approximate function sufficiently match the actual measured values thereof.

    摘要翻译： 存储具有不同光谱形状的白色中子的光谱数据，以及使用该多光谱数据通过白中子法获得的SEE计数。 计算部分读取频谱数据，将数据分成能量组，并计算并存储每个能量组的总通量。 此外，计算部分读出关于每个能量组的每个频谱数据和总通量的SEE计数，将SEE计数和总通量替换为联立方程，并且计算每个能量组的SEE横截面 能源团体 随后，计算部分计算确定作为能量的函数的SEE截面的近似函数的公式的参数，使得通过积分多个光谱获得的误差计数值与近似函数充分匹配其实际测量值 。

    APPARATUS HAVING VACUUM VESSEL
    6.
    发明申请
    APPARATUS HAVING VACUUM VESSEL 审中-公开
    具有真空容器的装置

    公开(公告)号：US20080190928A1

    公开(公告)日：2008-08-14

    申请号：US11964754

    申请日：2007-12-27

    申请人： Yasuo Yahagi ,  Masayuki Kobayashi ,  Hiroaki Mito ,  Tomohiro Kudo ,  Tomonori Saeki

    发明人： Yasuo Yahagi ,  Masayuki Kobayashi ,  Hiroaki Mito ,  Tomohiro Kudo ,  Tomonori Saeki

    IPC分类号： B65D53/06

    CPC分类号： G01N33/00 ,  H01J37/16 ,  H01J37/28 ,  H01J2237/022 ,  H01J2237/16 ,  H01J2237/182 ,  H01J2237/2817

    摘要： An apparatus having a vacuum vessel that has a mechanism using a lubricant therein and not causing defects and faults to samples introduced into the vacuum vessel even it is an apparatus where lubricating oil or grease is applied is provided. An apparatus having a vacuum vessel that has a mechanism using a lubricant therein such as CD-SEM, in which a lubricant (oil, grease) whose adsorption amount per minute to a surface of a material introduced into the vacuum vessel of an apparatus for evaluating a lubricant after the start of vacuum evacuation and after reaches a quasi-equilibrium state is below 0.09 ng/cm2 is employed.

    摘要翻译： 具有真空容器的装置是具有使用润滑剂的机构，即使是施加润滑油或润滑脂的装置，也不会引入到真空容器中的样品的缺陷和缺陷。 一种具有真空容器的设备，该真空容器具有使用其中的润滑剂的机构，例如CD-SEM，其中将润滑剂（油，油脂）的每分钟吸附量引入到用于评估的设备的真空容器中的材料的表面 在真空抽真空之后并且达到准平衡状态之后的润滑剂低于0.09ng / cm 2。

    Method for evaluating semiconductor device error and system for supporting the same
    7.
    发明申请
    Method for evaluating semiconductor device error and system for supporting the same 失效
    评估半导体器件误差的方法及其支持系统

    公开(公告)号：US20050211890A1

    公开(公告)日：2005-09-29

    申请号：US11037105

    申请日：2005-01-19

    申请人： Hidefumi Ibe ,  Yasuo Yahagi ,  Hideaki Kameyama

    发明人： Hidefumi Ibe ,  Yasuo Yahagi ,  Hideaki Kameyama

    IPC分类号： G01R31/30 ,  G06F9/44 ,  G06F11/22 ,  G06F12/16 ,  G06F17/18 ,  G06F17/50 ,  G11C11/412 ,  G11C29/50 ,  G11C29/56 ,  G01V5/10

    CPC分类号： G01R31/31816 ,  G01R31/002 ,  G01R31/2849 ,  G01R31/2881 ,  G01R31/30

    摘要： When resistivity against errors caused by cosmic ray neutrons in a semiconductor device is evaluated, the storage in the evaluation apparatus stores multiple spectrum data of white neutrons having different spectrum shapes, and multiple SEE counts obtained by the white neutron method using this multiple spectrum data. A computing section performs processing, with respect to each spectrum data, to read out the spectrum data from the storage, divide the data into multiple energy groups, calculates and stores a total flux of each energy group. Furthermore, the computing section reads out from the storage, the SEE counts with respect to each of the multiple spectrum data and the total flux of each energy group, substitutes the SEE counts and the total flux into a simultaneous equation, where a product of matrix elements indicating the total flux of each of the energy groups as to each of the multiple spectrum data and vectors indicating the SEE cross section of each of the energy groups represents the SEE count as to each of the multiple spectrum data, and calculates the SEE cross section for each of the energy groups. Subsequently, the computing section performs a calculation so that parameters are calculated, which determine a formula of the approximate function of the SEE cross section as a function of energy, so that computed values of error counts obtained by integration of multiple spectra and the approximate function sufficiently match the actual measured values thereof. With the processing as described above, there has been achieved an error evaluation in the semiconductor device using white neutrons independent from an accelerator.

    摘要翻译： 评估半导体装置中由宇宙射线中子引起的误差的电阻率时，评价装置中的存储存储具有不同光谱形状的白色中子的多个光谱数据，以及使用该多光谱数据通过白中子法获得的多个SEE计数。 计算部对每个频谱数据进行处理，从存储器读出频谱数据，将数据分割成多个能量组，计算并存储各能量组的总磁通量。 此外，计算部分从存储器读出相对于多个频谱数据中的每一个和每个能量组的总通量的SEE计数，将SEE计数和总通量替换为联立方程，其中矩阵的乘积 指示每个能量组对于每个多个频谱数据和指示每个能量组的SEE横截面的矢量的总能量的元素表示对于多个频谱数据中的每一个的SEE计数，并且计算SEE交叉 每个能量组的部分。 随后，计算部分执行计算，从而计算参数，其确定作为能量的函数的SEE截面的近似函数的公式，使得通过积分多个光谱获得的误差计数值和近似函数 充分匹配其实际测量值。 通过如上所述的处理，已经在使用独立于加速器的白色中子的半导体器件中实现了误差评估。