摘要:
A method for manufacturing a P-type MOS transistor includes forming a gate insulating film on the substrate, forming a gate electrode from amorphous silicon containing no impurities on the gate insulating film, performing a heat treatment for controlling the film characteristics of the amorphous silicon, depositing a nickel (Ni) layer on the gate electrode, and forming nickel silicides from the gate electrode and the nickel (Ni).
摘要:
The Ge channel device comprises: a Ge channel layer (2); a Si-containing interface layer (4) formed on the Ge channel layer (2); a La2O3 layer (6) formed on the interface layer (4); and an electrically conductive layer (8) formed on the La2O3 layer (6). In this device, the Si-containing interface layer (4) functions to suppress the diffusion of Ge atoms into the La2O3 layer (6) and thereby prevents the formation of Ge oxide in the La2O3 layer (6); accordingly, a Ge channel device whose C-V characteristic exhibits only a small hysteresis can be achieved.
摘要翻译:Ge沟道器件包括:Ge沟道层(2); 形成在所述Ge沟道层(2)上的含Si界面层(4); 在所述界面层(4)上形成的La 2 O 3层(6); 和形成在La 2 O 3层(6)上的导电层(8)。 在该器件中,含Si界面层(4)用于抑制Ge原子扩散到La2O3层(6)中,从而防止La2O3层(6)中Ge氧化物的形成; 因此,可以实现其C-V特性仅具有小滞后的Ge通道器件。
摘要:
The semiconductor device according to the present invention comprises a gate insulating film 16 formed on a silicon substrate 10 and including a silicon oxide film 12 and a Hf-based high dielectric constant insulating film 14 doped with Al; a gate electrode 18 of a polysilicon film formed on the gate insulating film 16; and a sidewall insulating film 20 formed on the side walls of the gate electrode 18 and the Hf-based high dielectric constant insulating film 14, and the maximum value of the depth-wise concentration distribution of the Al doped in the Hf-based high dielectric constant insulating film 14 is 1×1021-4×1021 atoms/cm3.
摘要翻译:根据本发明的半导体器件包括形成在硅衬底10上并包括氧化硅膜12和掺杂有Al的Hf基高介电常数绝缘膜14的栅极绝缘膜16; 形成在栅极绝缘膜16上的多晶硅膜的栅电极18; 以及形成在栅电极18和Hf基高介电常数绝缘膜14的侧壁上的侧壁绝缘膜20以及掺杂在Hf基高介电常数绝缘膜14中的Al的深度方向浓度分布的最大值 恒定绝缘膜14为1×1021-4×10 21原子/ cm 3。
摘要:
A semiconductor device fabrication method by which CMOS transistors with low-resistance metal gate electrodes each having a proper work function can be fabricated. A HfN layer in which nitrogen concentration in an nMOS transistor formation region differs from nitrogen concentration in a pMOS transistor formation region is formed. A MoN layer is formed over the HfN layer and heat treatment is performed. Nitrogen diffuses from the MoN layer into the HfN layer in which nitrogen concentration is low and a work function is set by the HfN layer according to nitrogen concentration which depends on the nitrogen content of the HfN layer before the heat treatment and the amount of nitrogen that diffuses into the HfN layer. On the other hand, nitrogen hardly diffuses from the MoN layer into the HfN layer which originally has a certain nitrogen content, and a work function is set by the HfN layer according to nitrogen concentration in the HfN layer before the heat treatment. By controlling the nitrogen content of each layer and the amount of nitrogen that diffuses, a low-resistance metal gate electrode having a predetermined work function can be formed in each of the nMOS transistor formation region and the pMOS transistor formation region.
摘要:
A method of making a thin film transistor device, including forming and patterning a semiconductor film to form first and second semiconductor films in, respectively, low-voltage driven and high-voltage driven thin film transistor formation regions. The method also includes forming a first insulating film on the first and second semiconductor films, and forming a first gate electrode on the first insulating film in the low-voltage driven thin film transistor formation region. Additionally, a second insulating film is formed on the entire surface of the resultant structure above the substrate, and a second gate electrode is formed on the second insulating film in the high-voltage driven thin film transistor formation region. The method also includes etching the first and second insulating films, thus forming first and second gate insulating films below, respectively, the first and second gate electrodes, with the second gate insulating film being wider than the second gate electrode.
摘要:
An MIM device includes a lower electrode of a metal nitride film, a hysteresis film of an oxide film containing Nb formed on the lower electrode, and an upper electrode of a metal nitride film formed on the hysteresis film.
摘要:
A method of manufacturing a semiconductor device including a substrate; an insulating film formed thereon; a first semiconductor layer where strain is induced in the directions parallel to the surface of the substrate, the first semiconductor layer being on the insulating film; a source region and a drain region formed in the first semiconductor layer; and a gate layered body formed of a gate insulating film and a gate electrode on the first semiconductor layer is disclosed. The method includes the steps of (a) forming a second semiconductor layer by epitaxial growth on the first semiconductor layer; (b) heating the second semiconductor layer; and (c) removing the second semiconductor layer. The second semiconductor layer is different in lattice constant in an in-plane direction from the first semiconductor layer. Step (b) induces the strain in the first semiconductor layer by exposing the surface of the second semiconductor layer to energy lines.
摘要:
On an insulation layer 12 formed on a silicon substrate 10, there are formed in an NMOS transistor region 16 an NMOS transistor 14 comprising a silicon layer 34, a lattice-relaxed silicon germanium layer 22 formed on the silicon layer 34, a tensile-strained silicon layer 24 formed on the silicon germanium layer 22 and a gate electrode 28 formed on the silicon layer 24 with a gate insulation film 26 formed therebetween and in a PMOS transistor region 20 a PMOS transistor 18 comprising a silicon layer 34, a compression-strained silicon germanium layer formed on the silicon layer 34 and a gate electrode 28 formed on the silicon germanium layer 36 with a gate insulation film 26 formed therebetween.
摘要:
A first layer made of polysilicon is formed on the surface of an underlying substrate. The surface of the first layer is exposed to an environment which etches silicon oxide. If the surface of the first layer is covered with a silicon oxide film, the silicon oxide film is removed. An energy is supplied to the first layer, the energy allowing silicon crystal to re-grow. Solid phase growth of silicon occurs in the first layer to planarize the surface thereof. A polysilicon film having small root mean square of roughness can be formed.
摘要:
In an active matrix-type display device where scan bus lines (S.sub.i) and data bus lines (D.sub.j) are formed on different substrates, two kinds of scan bus lines (SP.sub.i, SN.sub.i) are provided. A first switching element (TFTN.sub.ij) is connected between a reference voltage supply line (V.sub.R) and a display electrode (E.sub.ij), and is controlled by a first scan bus line (SN.sub.i), and a second switching element (TFTP.sub.ij) is connected between the reference voltage supply bus line (V.sub.R) and the display electrode, and is controlled by a second scan bus line (SP.sub.i). The first switching element (TFTN.sub.ij) is turned ON by a positive or negative potential at the first scan bus line.