公开(公告)号：US20120255581A1

公开(公告)日：2012-10-11

申请号：US13527904

申请日：2012-06-20

申请人： Yasuyuki KOMETANI ,  Takeshi Hirao ,  Kentaro Yamamura ,  Kenichi Miyamoto

发明人： Yasuyuki KOMETANI ,  Takeshi Hirao ,  Kentaro Yamamura ,  Kenichi Miyamoto

IPC分类号： B08B9/00 ,  B08B3/04

CPC分类号： B08B9/00 ,  H01L21/67057 ,  H01L21/6715

摘要： A cleaning and drying-preventing method including: positioning a nozzle in a container such that a funnel-like inner circumferential surface of the container is located around a periphery of a distal end of the nozzle; sucking a liquid in the nozzle to retract a level of the liquid to a side of a supply passage; supplying a solvent into the container to form a swirl flow of the solvent turning around the distal end of the nozzle, and cleaning the nozzle by the swirl flow; supplying a solvent into the container to form a liquid pool of the solvent; and further retracting the level of the liquid in the nozzle to the side of the supply passage. A liquid layer, an air layer, and a solvent layer are formed in the nozzle in this order from the side of the supply passage, to prevent drying of the liquid in the nozzle.

摘要翻译： 一种清洁和防干燥方法，包括：将容器的漏斗状内周面位于所述喷嘴的前端周边的容器内， 在喷嘴中吸入液体以将液体的一定水平回缩到供给通道的一侧; 将溶剂供应到容器中以形成围绕喷嘴的远端转动的溶剂的旋转流，并通过涡流清洗喷嘴; 将溶剂供应到容器中以形成溶剂的液体池; 并且进一步将喷嘴中的液体的水平回缩到供给通道的侧面。 在喷嘴中，从供给通道一侧依次形成液体层，空气层和溶剂层，以防止喷嘴中的液体干燥。

公开(公告)号：US07485188B2

公开(公告)日：2009-02-03

申请号：US11362105

申请日：2006-02-27

申请人： Takashi Takekuma ,  Yasuyuki Kometani ,  Yoshiteru Fukuda ,  Junya Minamida

发明人： Takashi Takekuma ,  Yasuyuki Kometani ,  Yoshiteru Fukuda ,  Junya Minamida

IPC分类号： B05C11/10

CPC分类号： H01L21/67253 ,  H01L21/6715

摘要： A coating process method in which a coating liquid is discharged onto the surface of a target substrate to be processed while rotating the target substrate so as to expand the coating liquid radially outward on the target substrate and, thus, to form a coated film comprises the step of detecting that the actual discharging of a coating liquid from a coating liquid discharging nozzle is started, and the step of controlling based on a signal of the detection at least one of the driving timing of a pump for allowing the coating liquid to be discharged from the coating liquid discharging nozzle, the operation timing of a valve mounted to a pipe for supplying the coating liquid into the coating liquid discharging nozzle, and the rotation starting or stopping timing of the target substrate.

摘要翻译： 一种涂布处理方法，其中在旋转目标衬底的同时将涂布液排放到待加工的目标衬底的表面上，以便在目标衬底上径向向外扩展涂覆液体，从而形成涂膜包括 检测是否开始从涂布液排出喷嘴实际排出涂布液的步骤，以及根据检测信号进行控制的步骤，用于使涂布液排出的泵的驱动正时中的至少一个 从涂布液排出喷嘴，安装到用于将涂布液供给到涂布液排出喷嘴中的管道的操作时间，以及目标基板的旋转开始或停止时机。

公开(公告)号：US08512478B2

公开(公告)日：2013-08-20

申请号：US13527904

申请日：2012-06-20

申请人： Yasuyuki Kometani ,  Takeshi Hirao ,  Kentaro Yamamura ,  Kenichi Miyamoto

发明人： Yasuyuki Kometani ,  Takeshi Hirao ,  Kentaro Yamamura ,  Kenichi Miyamoto

IPC分类号： B08B3/00

CPC分类号： B08B9/00 ,  H01L21/67057 ,  H01L21/6715

摘要： A cleaning and drying-preventing method including: positioning a nozzle in a container such that a funnel-like inner circumferential surface of the container is located around a periphery of a distal end of the nozzle; sucking a liquid in the nozzle to retract a level of the liquid to a side of a supply passage; supplying a solvent into the container to form a swirl flow of the solvent turning around the distal end of the nozzle, and cleaning the nozzle by the swirl flow; supplying a solvent into the container to form a liquid pool of the solvent; and further retracting the level of the liquid in the nozzle to the side of the supply passage. A liquid layer, an air layer, and a solvent layer are formed in the nozzle in this order from the side of the supply passage, to prevent drying of the liquid in the nozzle.

摘要翻译： 一种清洁和防干燥方法，包括：将容器的漏斗状内周面位于所述喷嘴的前端周边的容器内， 在喷嘴中吸入液体以将液体的一定水平缩回到供给通道的一侧; 将溶剂供应到容器中以形成围绕喷嘴的远端转动的溶剂的旋转流，并通过涡流清洗喷嘴; 将溶剂供应到容器中以形成溶剂的液体池; 并且进一步将喷嘴中的液体的水平回缩到供给通道的侧面。 在喷嘴中，从供给通道一侧依次形成液体层，空气层和溶剂层，以防止喷嘴中的液体干燥。

公开(公告)号：US20100051059A1

公开(公告)日：2010-03-04

申请号：US12549573

申请日：2009-08-28

申请人： Yasuyuki Kometani ,  Takeshi Hirao ,  Kentaro Yamamura ,  Kenichi Miyamoto

发明人： Yasuyuki Kometani ,  Takeshi Hirao ,  Kentaro Yamamura ,  Kenichi Miyamoto

IPC分类号： B08B3/00

CPC分类号： B08B9/00 ,  H01L21/67057 ,  H01L21/6715

摘要： A cleaning and drying-preventing method including: positioning a nozzle in a container such that a funnel-like inner circumferential surface of the container is located around a periphery of a distal end of the nozzle; sucking a liquid in the nozzle to retract a level of the liquid to a side of a supply passage; supplying a solvent into the container to form a swirl flow of the solvent turning around the distal end of the nozzle, and cleaning the nozzle by the swirl flow; supplying a solvent into the container to form a liquid pool of the solvent; and further retracting the level of the liquid in the nozzle to the side of the supply passage. A liquid layer, an air layer, and a solvent layer are formed in the nozzle in this order from the side of the supply passage, to prevent drying of the liquid in the nozzle.

摘要翻译： 一种清洁和防干燥方法，包括：将容器的漏斗状内周面位于所述喷嘴的前端周边的容器内， 在喷嘴中吸入液体以将液体的一定水平缩回到供给通道的一侧; 将溶剂供应到容器中以形成围绕喷嘴的远端转动的溶剂的旋转流，并通过涡流清洗喷嘴; 将溶剂供应到容器中以形成溶剂的液体池; 并且进一步将喷嘴中的液体的水平回缩到供给通道的侧面。 在喷嘴中，从供给通道一侧依次形成液体层，空气层和溶剂层，以防止喷嘴中的液体干燥。

公开(公告)号：US08216390B2

公开(公告)日：2012-07-10

申请号：US12549573

申请日：2009-08-28

申请人： Yasuyuki Kometani ,  Takeshi Hirao ,  Kentaro Yamamura ,  Kenichi Miyamoto

发明人： Yasuyuki Kometani ,  Takeshi Hirao ,  Kentaro Yamamura ,  Kenichi Miyamoto

IPC分类号： B08B7/00 ,  B08B7/04 ,  B08B3/00

CPC分类号： B08B9/00 ,  H01L21/67057 ,  H01L21/6715

摘要： A cleaning and drying-preventing method including: positioning a nozzle in a container such that a funnel-like inner circumferential surface of the container is located around a periphery of a distal end of the nozzle; sucking a liquid in the nozzle to retract a level of the liquid to a side of a supply passage; supplying a solvent into the container to form a swirl flow of the solvent turning around the distal end of the nozzle, and cleaning the nozzle by the swirl flow; supplying a solvent into the container to form a liquid pool of the solvent; and further retracting the level of the liquid in the nozzle to the side of the supply passage. A liquid layer, an air layer, and a solvent layer are formed in the nozzle in this order from the side of the supply passage, to prevent drying of the liquid in the nozzle.

摘要翻译： 一种清洁和防干燥方法，包括：将容器的漏斗状内周面位于所述喷嘴的前端周边的容器内， 在喷嘴中吸入液体以将液体的一定水平缩回到供给通道的一侧; 将溶剂供应到容器中以形成围绕喷嘴的远端转动的溶剂的旋转流，并通过涡流清洗喷嘴; 将溶剂供应到容器中以形成溶剂的液体池; 并且进一步将喷嘴中的液体的水平回缩到供给通道的侧面。 在喷嘴中，从供给通道一侧依次形成液体层，空气层和溶剂层，以防止喷嘴中的液体干燥。

公开(公告)号：US20060144330A1

公开(公告)日：2006-07-06

申请号：US11362105

申请日：2006-02-27

申请人： Takashi Takekuma ,  Yasuyuki Kometani ,  Yoshiteru Fukuda ,  Junya Minamida

发明人： Takashi Takekuma ,  Yasuyuki Kometani ,  Yoshiteru Fukuda ,  Junya Minamida

IPC分类号： B05C11/00 ,  B05D3/12 ,  C23C16/52 ,  B05C13/02

CPC分类号： H01L21/67253 ,  H01L21/6715

摘要： A coating process method in which a coating liquid is discharged onto the surface of a target substrate to be processed while rotating the target substrate so as to expand the coating liquid radially outward on the target substrate and, thus, to form a coated film comprises the step of detecting that the actual discharging of a coating liquid from a coating liquid discharging nozzle is started, and the step of controlling based on a signal of the detection at least one of the driving timing of a pump for allowing the coating liquid to be discharged from the coating liquid discharging nozzle, the operation timing of a valve mounted to a pipe for supplying the coating liquid into the coating liquid discharging nozzle, and the rotation starting or stopping timing of the target substrate.