公开(公告)号：US09450140B2

公开(公告)日：2016-09-20

申请号：US12869830

申请日：2010-08-27

申请人： Chang-Mog Jo ,  Jong-Heon Kim ,  Yong-Sup Choi ,  Sang-Soo Kim ,  Hee-Cheol Kang ,  Young-Mook Choi

发明人： Chang-Mog Jo ,  Jong-Heon Kim ,  Yong-Sup Choi ,  Sang-Soo Kim ,  Hee-Cheol Kang ,  Young-Mook Choi

IPC分类号： B05D5/06 ,  C23C16/00 ,  B05D1/32 ,  H01L21/00 ,  H01L33/00 ,  C23C14/04 ,  C23C14/12 ,  C23C14/24 ,  C23C14/56 ,  H01L21/67 ,  H01L21/683 ,  H01L51/00 ,  H01L51/56 ,  H01L27/32

CPC分类号： H01L33/005 ,  C23C14/042 ,  C23C14/12 ,  C23C14/243 ,  C23C14/246 ,  C23C14/568 ,  H01L21/67173 ,  H01L21/67225 ,  H01L21/67236 ,  H01L21/6831 ,  H01L27/3211 ,  H01L51/001 ,  H01L51/0011 ,  H01L51/56

摘要： A thin film deposition apparatus used to manufacture large substrates on a mass scale and that allows high-definition patterning, and a method of manufacturing an organic light-emitting display apparatus using the same, the apparatus includes a loading unit fixing a substrate onto an electrostatic chuck; a deposition unit including a chamber maintained in a vacuum state and a thin film deposition assembly disposed in the chamber, separated from the substrate by a predetermined distance, to deposit a thin film on the substrate fixed on the electrostatic chuck; an unloading unit separating the substrate on which a deposition process is completed, from the electrostatic chuck; a first circulation unit sequentially moving the electrostatic chuck on which the substrate is fixed, to the loading unit, the deposition unit, and the unloading unit; and a second circulation unit returning the electrostatic chuck separated from the substrate to the loading unit from the unloading unit, wherein the first circulation unit passes through the chamber when passing through the deposition unit.

摘要翻译： 一种薄膜沉积装置，用于大规模制造大型基板并允许高分辨率图案化，以及制造使用其的有机发光显示装置的方法，该装置包括将基板固定在静电上的装载单元 卡盘 沉积单元，其包括保持在真空状态的室和设置在所述室中的薄膜沉积组件，其与所述基板隔开预定距离，以在固定在所述静电卡盘上的所述基板上沉积薄膜; 从所述静电卡盘将分离完成了沉积处理的基板的卸载单元; 顺序地将固定有基板的静电卡盘移动到加载单元，沉积单元和卸载单元的第一循环单元; 以及第二循环单元，其将从所述基板分离的所述静电卡盘从所述卸载单元返回到所述装载单元，其中所述第一循环单元在通过所述沉积单元时通过所述室。

公开(公告)号：US20130298829A1

公开(公告)日：2013-11-14

申请号：US13943221

申请日：2013-07-16

申请人： Chang-Mog Jo ,  Jong-Heon Kim ,  Yong-Sup Choi ,  Sang-Soo Kim ,  Hee-Cheol Kang ,  Young-Mook Choi

发明人： Chang-Mog Jo ,  Jong-Heon Kim ,  Yong-Sup Choi ,  Sang-Soo Kim ,  Hee-Cheol Kang ,  Young-Mook Choi

IPC分类号： H01L33/00

CPC分类号： H01L33/005 ,  C23C14/042 ,  C23C14/12 ,  C23C14/243 ,  C23C14/246 ,  C23C14/568 ,  H01L21/67173 ,  H01L21/67225 ,  H01L21/67236 ,  H01L21/6831 ,  H01L27/3211 ,  H01L51/001 ,  H01L51/0011 ,  H01L51/56

摘要： A thin film deposition apparatus used to manufacture large substrates on a mass scale and that allows high-definition patterning, and a method of manufacturing an organic light-emitting display apparatus using the same, the apparatus inclues a loading unit fixing a substrate onto an electrostatic chuck; a deposition unit including a chamber maintained in a vacuum state and a thin film deposition assembly disposed in the chamber, separated from the substrate by a predetermined distance, to deposit a thin film on the substrate fixed on the electrostatic chuck; an unloading unit separating the substrate on which a deposition process is completed, from the electrostatic chuck; a first circulation unit sequentially moving the electrostatic chuck on which the substrate is fixed, to the loading unit, the deposition unit, and the unloading unit; and a second circulation unit returning the electrostatic chuck separated from the substrate to the loading unit from the unloading unit, wherein the first circulation unit passes through the chamber when passing through the deposition unit.

摘要翻译： 一种薄膜沉积装置，用于大规模制造大型基板并允许高分辨率图案化，以及制造使用其的有机发光显示装置的方法，该装置包括将基板固定在静电上的装载单元 卡盘 沉积单元，其包括保持在真空状态的室和设置在所述室中的薄膜沉积组件，其与所述基板隔开预定距离，以在固定在所述静电卡盘上的所述基板上沉积薄膜; 从所述静电卡盘将分离完成了沉积处理的基板的卸载单元; 顺序地将固定有基板的静电卡盘移动到加载单元，沉积单元和卸载单元的第一循环单元; 以及第二循环单元，将从所述基板分离的所述静电卡盘从所述卸载单元返回到所述装载单元，其中，所述第一循环单元在通过所述沉积单元时通过所述室。

公开(公告)号：US20110165320A1

公开(公告)日：2011-07-07

申请号：US12820355

申请日：2010-06-22

申请人： Yong-Sup CHOI ,  Hee-Cheol Kang ,  Young-Mook Choi ,  Jong-Heon Kim ,  Jae-Kwang Ryu

发明人： Yong-Sup CHOI ,  Hee-Cheol Kang ,  Young-Mook Choi ,  Jong-Heon Kim ,  Jae-Kwang Ryu

IPC分类号： B05D5/06 ,  C23C16/00 ,  C23C16/44

CPC分类号： C23C14/243 ,  C23C14/12 ,  H01L51/0008 ,  H01L51/56

摘要： A deposition source, a thin film deposition apparatus, and a method of manufacturing an organic light-emitting display apparatus, the deposition source including: a crucible to hold a deposition material; a heater to heat the deposition material; a nozzle unit disposed at a side of the crucible; a first connector disposed between the crucible and the nozzle unit; a first valve disposed on the first connector to control the flow of the deposition material to the nozzle unit; a deposition material recovery unit to collect the deposition material; a second connector to connect the first connector to the deposition material recovery unit; and a second valve to control the flow of the deposition material through the second connector.

摘要翻译： 沉积源，薄膜沉积设备和制造有机发光显示设备的方法，所述沉积源包括：用于保持沉积材料的坩埚; 用于加热沉积材料的加热器; 布置在所述坩埚的一侧的喷嘴单元; 设置在所述坩埚和所述喷嘴单元之间的第一连接器; 设置在所述第一连接器上以控制所述沉积材料流到所述喷嘴单元的第一阀; 沉积材料回收单元，用于收集沉积材料; 将第一连接器连接到沉积材料回收单元的第二连接器; 以及第二阀，以控制通过第二连接器的沉积材料的流动。

公开(公告)号：US20110033964A1

公开(公告)日：2011-02-10

申请号：US12849193

申请日：2010-08-03

申请人： Ji-Sook OH ,  Yong-Sup Choi ,  Jong-Heon Kim ,  Hee-Cheol Kang ,  Yun-Mi Lee ,  Chang-Mog Jo

发明人： Ji-Sook OH ,  Yong-Sup Choi ,  Jong-Heon Kim ,  Hee-Cheol Kang ,  Yun-Mi Lee ,  Chang-Mog Jo

IPC分类号： H01L21/20

CPC分类号： H01L51/001 ,  C23C14/042 ,  C23C14/12 ,  C23C14/243 ,  H01L27/3211 ,  H01L51/0011 ,  H01L51/56

摘要： A thin film deposition apparatus and a method of manufacturing an organic light-emitting display device using the thin film deposition apparatus. The thin film deposition apparatus includes a plurality of thin film deposition assemblies, each of which includes: a deposition source that discharges a deposition material; a deposition source nozzle unit that is disposed at a side of the deposition source and includes a plurality of deposition source nozzles; a patterning slit sheet that is disposed opposite to the deposition source nozzle unit and includes a plurality of patterning slits arranged in a first direction; and a barrier plate assembly that is disposed between the deposition source nozzle unit and the patterning slit sheet, in the first direction. The barrier plate assembly includes a plurality of barrier plates that partition a space between the deposition source nozzle unit and the patterning slit sheet into a plurality of sub-deposition spaces.

摘要翻译： 一种薄膜沉积设备和使用该薄膜沉积设备制造有机发光显示设备的方法。 薄膜沉积设备包括多个薄膜沉积组件，每个薄膜沉积组件包括：沉积源，其沉积沉积材料; 沉积源喷嘴单元，其设置在所述沉积源的一侧并且包括多个沉积源喷嘴; 图案化缝隙片，其与所述沉积源喷嘴单元相对地设置并且包括沿第一方向布置的多个图案化狭缝; 以及在第一方向上设置在沉积源喷嘴单元和图案化缝隙片之间的阻挡板组件。 阻挡板组件包括将沉积源喷嘴单元和图案化缝隙片之间的空间分隔成多个次沉积空间的多个阻挡板。

公开(公告)号：US08865252B2

公开(公告)日：2014-10-21

申请号：US13031756

申请日：2011-02-22

申请人： Yong Sup Choi ,  Myeng-Woo Nam ,  Jong-Won Hong ,  Seok-Rak Chang ,  Eun-Sun Choi

发明人： Yong Sup Choi ,  Myeng-Woo Nam ,  Jong-Won Hong ,  Seok-Rak Chang ,  Eun-Sun Choi

IPC分类号： C23C16/00 ,  B05D5/06 ,  H01L21/677 ,  H01L51/56 ,  H01L21/67 ,  H01L21/673 ,  H01L21/687

CPC分类号： H01L21/6776 ,  H01L21/67173 ,  H01L21/6732 ,  H01L21/68764 ,  H01L51/56

摘要： A thin film deposition apparatus that can be easily used to manufacture large-sized display devices on a mass scale and that improves manufacturing yield, and a method of manufacturing an organic light-emitting display device by using the thin film deposition apparatus. The thin film deposition apparatus includes: a loading unit to place a substrate, which is a deposition target, on an electrostatic chuck; a deposition unit including a chamber, and a thin film deposition assembly that is disposed in the chamber and forms a thin film on the substrate placed on the electrostatic chuck; an unloading unit to separate the substrate on which deposition is completed from the electrostatic chuck; a first conveyor unit to sequentially move the electrostatic chuck having the substrate thereon to the loading unit, to the deposition unit, and finally, to the unloading unit, wherein the first conveyor unit includes: one pair of first guide rails and one pair of second guide rails disposed in parallel; at least one first guide block engaged with the first guide rails, respectively; and at least one second guide block engaged with the second guide rails, respectively.

摘要翻译： 可以容易地用于大规模制造大尺寸显示装置并提高制造成品率的薄膜沉积装置，以及通过使用薄膜沉积装置制造有机发光显示装置的方法。 薄膜沉积装置包括：装载单元，将作为沉积靶的基板放置在静电卡盘上; 包括室的沉积单元和设置在室中并在放置在静电卡盘上的基板上形成薄膜的薄膜沉积组件; 卸载单元，用于将其上完成了沉积的基板从静电卡盘分离; 第一传送单元，其顺序地将其上具有基板的静电卡盘移动到装载单元，到沉积单元，最后到达卸载单元，其中第一传送单元包括：一对第一导轨和一对第二传送单元 平行布置的导轨; 分别与所述第一导轨接合的至少一个第一引导块; 以及分别与第二导轨接合的至少一个第二引导块。

公开(公告)号：US08298844B2

公开(公告)日：2012-10-30

申请号：US12963928

申请日：2010-12-09

申请人： Kang-Il Lee ,  Yong-Sup Choi ,  Chool-Lae Roh

发明人： Kang-Il Lee ,  Yong-Sup Choi ,  Chool-Lae Roh

IPC分类号： H01L21/00

CPC分类号： H01L51/0016 ,  H01L51/50

摘要： A method of manufacturing an organic thin film pattern, the method including: forming a dummy organic thin film on a substrate; radiating light on the dummy organic thin film pattern the dummy organic thin film; forming a main organic thin film, having a sublimation temperature is higher than that of the dummy organic thin film, on the substrate and the patterned dummy organic thin film; and heating patterned the dummy organic thin film and the main organic thin film, to sublimate the dummy organic thin film and thereby pattern the main organic thin film.

摘要翻译： 一种制造有机薄膜图案的方法，所述方法包括：在基板上形成虚拟有机薄膜; 在虚拟有机薄膜图案上照射虚拟有机薄膜; 在基板和图案化的有机薄膜上形成升华温度高于虚拟有机薄膜的主要有机薄膜; 并且对虚拟有机薄膜和主有机薄膜进行加热图案，使虚拟有机薄膜升华，从而对主要有机薄膜进行图案化。

公开(公告)号：US08193011B2

公开(公告)日：2012-06-05

申请号：US13277112

申请日：2011-10-19

申请人： Hee-Cheol Kang ,  Hyun-Sook Park ,  Jae-Kwang Ryu ,  Yong-Sup Choi ,  Yun-Mi Lee ,  Sang-Soo Kim

发明人： Hee-Cheol Kang ,  Hyun-Sook Park ,  Jae-Kwang Ryu ,  Yong-Sup Choi ,  Yun-Mi Lee ,  Sang-Soo Kim

IPC分类号： H01L33/26 ,  C23C16/44 ,  H01L21/76 ,  C23C16/00

CPC分类号： C23C14/044 ,  C23C14/12 ,  C23C14/243 ,  C23C14/568 ,  H01L51/001 ,  H01L51/0081 ,  H01L51/56 ,  Y10S414/135 ,  Y10T279/23

摘要： A thin film deposition apparatus and an organic light-emitting display device by using the same. The thin film deposition apparatus includes an electrostatic chuck, a plurality of chambers; at least one thin film deposition assembly; a carrier; a first power source plug; and a second power source plug. The electrostatic chuck includes a body having a supporting surface that contacts a substrate to support the substrate, wherein the substrate is a deposition target; an electrode embedded into the body and applying an electrostatic force to the supporting surface; and a plurality of power source holes formed to expose the electrode and formed at different locations on the body.

摘要翻译： 一种薄膜沉积装置和使用该薄膜沉积装置的有机发光显示装置。 薄膜沉积装置包括静电卡盘，多个室; 至少一个薄膜沉积组件; 承运人 第一个电源插头; 和第二电源插头。 静电卡盘包括具有与基板接触以支撑基板的支撑表面的主体，其中基板是沉积靶; 电极，其嵌入到所述主体中并向所述支撑表面施加静电力; 以及形成为暴露电极并形成在身体上的不同位置处的多个电源孔。

公开(公告)号：US20110244120A1

公开(公告)日：2011-10-06

申请号：US13031756

申请日：2011-02-22

申请人： Yong Sup CHOI ,  Myeng-Woo Nam ,  Jong-Won Hong ,  Seok-Rak Chang ,  Eun-Sun Choi

发明人： Yong Sup CHOI ,  Myeng-Woo Nam ,  Jong-Won Hong ,  Seok-Rak Chang ,  Eun-Sun Choi

IPC分类号： B05D5/06 ,  B05C13/00 ,  B05B1/00 ,  B05B15/04

CPC分类号： H01L21/6776 ,  H01L21/67173 ,  H01L21/6732 ,  H01L21/68764 ,  H01L51/56

摘要： A thin film deposition apparatus that can be easily used to manufacture large-sized display devices on a mass scale and that improves manufacturing yield, and a method of manufacturing an organic light-emitting display device by using the thin film deposition apparatus. The thin film deposition apparatus includes: a loading unit to place a substrate, which is a deposition target, on an electrostatic chuck; a deposition unit including a chamber, and a thin film deposition assembly that is disposed in the chamber and forms a thin film on the substrate placed on the electrostatic chuck; an unloading unit to separate the substrate on which deposition is completed from the electrostatic chuck; a first conveyor unit to sequentially move the electrostatic chuck having the substrate thereon to the loading unit, to the deposition unit, and finally, to the unloading unit, wherein the first conveyor unit includes: one pair of first guide rails and one pair of second guide rails disposed in parallel; at least one first guide block engaged with the first guide rails, respectively; and at least one second guide block engaged with the second guide rails, respectively.

摘要翻译： 可以容易地用于大规模制造大尺寸显示装置并提高制造成品率的薄膜沉积装置，以及通过使用薄膜沉积装置制造有机发光显示装置的方法。 薄膜沉积装置包括：装载单元，将作为沉积靶的基板放置在静电卡盘上; 包括室的沉积单元和设置在室中并在放置在静电卡盘上的基板上形成薄膜的薄膜沉积组件; 卸载单元，用于将其上完成了沉积的基板从静电卡盘分离; 第一传送单元，其顺序地将其上具有基板的静电卡盘移动到装载单元，到沉积单元，最后到达卸载单元，其中第一传送单元包括：一对第一导轨和一对第二传送单元 平行布置的导轨; 分别与所述第一导轨接合的至少一个第一引导块; 以及分别与第二导轨接合的至少一个第二引导块。

公开(公告)号：US20080233283A1

公开(公告)日：2008-09-25

申请号：US12073455

申请日：2008-03-05

申请人： Yong-Sup Choi ,  Jin-Pil Kim ,  Kang-Il Lee

发明人： Yong-Sup Choi ,  Jin-Pil Kim ,  Kang-Il Lee

IPC分类号： C23C16/00

CPC分类号： H01L21/67173 ,  C23C14/564 ,  C23C14/566 ,  H01L21/67155 ,  H01L21/67748 ,  H01L21/6776

摘要： An apparatus and method for depositing a protective layer. The apparatus includes an anti-hydration module, wherein a substrate is loaded through a substrate input hole and mounted on a carrier; a load lock chamber, which is connected to the anti-hydration module and maintains a vacuum; a plurality of vacuum chambers; a depositing chamber, which is installed in one of the vacuum chambers; a target unit, which is installed in the depositing chamber and deposits a raw material of a protective layer on the substrate; a transferring unit which is continuously installed in the anti-hydration module, the load lock chamber, the vacuum chambers, and the depositing chamber, and transfers the substrate mounted on the carrier. Accordingly, since the carrier is not exposed to the atmosphere, moisture pressure inside the depositing chamber does not increase even if the apparatus is used for a long time.

摘要翻译： 一种用于沉积保护层的装置和方法。 该装置包括一个抗水化模块，其中一个衬底通过衬底输入孔加载并安装在一个载体上; 负载锁定室，其连接到抗水化模块并保持真空; 多个真空室; 沉积室，其安装在一个真空室中; 目标单元，其安装在沉积室中并将保护层的原料沉积在基板上; 传送单元，其连续地安装在防水​​化模块，负载锁定室，真空室和沉积室中，并且传送安装在载体上的基板。 因此，由于载体不暴露于大气中，即使长时间使用该装置，沉积室内的湿气压也不会增加。

公开(公告)号：US10246769B2

公开(公告)日：2019-04-02

申请号：US12979656

申请日：2010-12-28

申请人： Hyun-Sook Park ,  Chang-Mog Jo ,  Hee-Cheol Kang ,  Yun-Mi Lee ,  Un-Cheol Sung ,  Yong-Sup Choi ,  Jong-Heon Kim ,  Jae-Kwang Ryu

发明人： Hyun-Sook Park ,  Chang-Mog Jo ,  Hee-Cheol Kang ,  Yun-Mi Lee ,  Un-Cheol Sung ,  Yong-Sup Choi ,  Jong-Heon Kim ,  Jae-Kwang Ryu

IPC分类号： C23C14/00 ,  C23C14/24 ,  C23C14/04 ,  H01L51/00

摘要： A thin film deposition apparatus that can be simply applied to produce large-sized display devices on a mass scale and that improves manufacturing yield. The thin film deposition apparatus includes a deposition source that discharges a deposition material; a deposition source nozzle unit disposed at a side of the deposition source and including a plurality of deposition source nozzles arranged in a first direction; and a patterning slit sheet disposed opposite to the deposition source nozzle unit and including a plurality of patterning slits arranged in a second direction that is perpendicular to the first direction. A deposition is performed while the substrate or the thin film deposition apparatus moves relative to each other in the first direction, and the deposition source, the deposition source nozzle unit, and the patterning slit sheet are formed integrally with each other.