Method and device for testing defect using SEM
    1.
    发明授权
    Method and device for testing defect using SEM 有权
    使用SEM测试缺陷的方法和装置

    公开(公告)号:US09390490B2

    公开(公告)日:2016-07-12

    申请号:US13520210

    申请日:2010-12-22

    IPC分类号: H04N7/18 G06T7/00 H01L21/66

    摘要: In performing a programmed-point inspection of a circuit pattern using a review SEM, stable inspection can be performed while suppressing the generation of a false report even when a variation in a circuit pattern to be inspected is large. SEM images that are obtained by sequentially imaging a predetermined circuit pattern using the review SEM are stored into a storage unit. Images that meet a set condition are selected from the stored SEM images, and averaged to create an average image (GP image). By performing pattern check by GP comparison using this GP image, an inspection can be performed while suppressing the generation of a false report even when a variation in the circuit patterns is large.

    摘要翻译: 在使用复查SEM执行电路图案的编程点检查时,即使在要检查的电路图案的变化大的情况下,也可以抑制误报的产生而进行稳定的检查。 通过使用评价SEM将预定电路图案顺序成像获得的SEM图像存储在存储单元中。 从存储的SEM图像中选择满足设定条件的图像,并平均以创建平均图像(GP图像)。 通过使用该GP图像通过GP比较进行模式检查,即使当电路图案的变化大时也可以在抑制伪报告的产生的同时执行检查。

    Semiconductor device defect inspection method and system thereof
    2.
    发明授权
    Semiconductor device defect inspection method and system thereof 有权
    半导体器件缺陷检查方法及其系统

    公开(公告)号:US09153020B2

    公开(公告)日:2015-10-06

    申请号:US14119138

    申请日:2012-04-27

    申请人: Yuji Takagi

    发明人: Yuji Takagi

    IPC分类号: G06K9/00 G06T7/00 H01L21/66

    摘要: Provided are a semiconductor device defect inspection method and system thereof, with which predetermined hot spots are inspected using a SEM, and with which the frequency of defects occurring at the hot spot is estimated statistically and with reliability. An inspection point is designated in design data by the defect type. A plurality of pre-designated inspection points is selected by the defect type from the designated inspection points. The plurality of pre-designated inspection points by defect type thus selected are image captured by the inspection points. A defect ratio, which is a ratio of the plural inspection points which are image captured by the defect type to the plural defects detected, and a reliability interval of the defect ratio which is computed by the defect type is compared with a preset reference value. A defect type having a defect occurrence ratio which exceeds the reference value is derived.

    摘要翻译: 提供了一种半导体器件缺陷检查方法及其系统,利用SEM对该预定热点进行检查,利用该半导体器件缺陷检查方法和系统可靠地估计在热点处发生的缺陷的频率。 缺陷类型在设计数据中指定检查点。 通过来自指定检查点的缺陷类型来选择多个预先指定的检查点。 由这样选择的缺陷类型的多个预先指定的检查点是由检查点捕获的图像。 将由缺陷类型捕获的多个检查点与检测到的多个缺陷的多个检查点的比率和通过缺陷类型计算的缺陷率的可靠性间隔的比率与预设的参考值进行比较。 导出具有超过参考值的缺陷发生率的缺陷类型。

    Composite hose with a corrugated metal tube and method for making the same
    3.
    发明授权
    Composite hose with a corrugated metal tube and method for making the same 有权
    具有波纹金属管的复合软管及其制造方法

    公开(公告)号:US08919173B2

    公开(公告)日:2014-12-30

    申请号:US13238600

    申请日:2011-09-21

    摘要: A composite hose is constructed to have an outer peripheral portion and an inner peripheral portion. The outer peripheral portion includes an elastic layer and a reinforcing layer provided on an outer periphery of the elastic layer. The inner peripheral portion includes a corrugated metal tube which is provided with a corrugated portion formed with corrugation hills and corrugation valleys. A distance between the reinforcing layer and tops of the corrugation hills of the corrugated metal tube is designed 0.27 mm or less.

    摘要翻译: 复合软管被构造成具有外周部分和内周部分。 外周部包括弹性层和设置在弹性层的外周上的增强层。 内周部包括波纹状金属管,该波纹金属管设置有形成有波纹状山丘和波纹谷的波纹状部分。 波纹状金属管的波纹状山体的加强层与顶部之间的距离为0.27mm以下。

    Combustion control device
    4.
    发明授权
    Combustion control device 有权
    燃烧控制装置

    公开(公告)号:US08485137B2

    公开(公告)日:2013-07-16

    申请号:US11661993

    申请日:2006-01-19

    IPC分类号: F24H9/20

    摘要: The present invention relates to a combustion control device incorporated in an apparatus such as water heater and provides the combustion control device having an improved configuration with a main controller and a sub controller, capable of employing a microcomputer with lower capability as the sub controller, and ensuring higher safety than ever before.Signals indicating a combustion state of a combustion apparatus are inputted into the main controller 35 and the sub controller 36 in parallel. Upon fulfillment of a predetermined condition of stopping, the main and sub controllers 35 and 36 each output a stop signal to cut off a current to be supplied to a device driving circuit 42. The conditions of stopping in outputting of the stop signal by the main and sub controllers are such that the sub controller 36 is less apt to execute the cutoff than the main controller 35.

    摘要翻译: 燃烧控制装置技术领域本发明涉及一种燃烧控制装置,其结合在热水器等装置中,具有能够采用具有较低能力的微型计算机作为副控制器的具有主控制器和副控制器的改进结构的燃烧控制装置,以及 确保比以往更高的安全性。 指示燃烧装置的燃烧状态的信号被并入主控制器35和副控制器36。 在执行预定的停止状态的情况下,主控制器35和副副控制器36各自输出停止信号以截断要提供给设备驱动电路42的电流。停止信号由主机停止的状态 并且副控制器使得副控制器36比主控制器35更不容易执行截止。

    Information recording device, information reproducing device, and information recording medium
    5.
    发明授权
    Information recording device, information reproducing device, and information recording medium 有权
    信息记录装置,信息再现装置和信息记录介质

    公开(公告)号:US08254233B2

    公开(公告)日:2012-08-28

    申请号:US12921976

    申请日:2009-12-10

    IPC分类号: G11B20/18

    摘要: An information recording device, an information reproducing device, and an information recording medium securely protect copyright of main information, and prevent illegal access to the recorded main information. The information recording device includes a medium unique information generating section that generates second sub information by data-converting stamper unique information based on disc identification information that differs for each optical disc after transferring main information and first sub information from a stamper having the main information and the first sub information recorded thereon onto an optical disc, and a medium unique information recording section that records the second sub information on the optical disc having recorded thereon in advance the main information and the first sub information in a form different from the forms of the main information and the first sub information.

    摘要翻译: 信息记录装置,信息再现装置和信息记录介质安全地保护主信息的版权,并防止非法访问所记录的主要信息。 该信息记录装置包括一个媒体唯一信息产生部分,该媒体唯一信息产生部分通过数据转换压缩数据唯一信息来生成第二子信息,该信息是在从具有主信息的压模传送主信息和第一子信息之后,基于每个光盘不同的盘识别信息,以及 其中记录在光盘上的第一子信息和介质唯一信息记录部分,其以预先记录在其上的光盘上预先记录第二子信息,形式与第 主要信息和第一个子信息。

    OPTICAL DISC RECORDING APPARATUS, OPTICAL DISC RECORDING CIRCUIT AND OPTICAL DISC
    6.
    发明申请
    OPTICAL DISC RECORDING APPARATUS, OPTICAL DISC RECORDING CIRCUIT AND OPTICAL DISC 有权
    光盘记录装置,光盘记录电路和光盘

    公开(公告)号:US20110007616A1

    公开(公告)日:2011-01-13

    申请号:US12599118

    申请日:2009-03-04

    IPC分类号: G11B20/10 G11B7/26

    摘要: An optical disc recording apparatus (10) is provided with a tracking servo (13) for tracking a spiral track of concave and convex marks, an analog signal processor (14) for extracting a reproduction signal corresponding to the concave and convex marks, a digital signal processor (15) for extracting a channel clock synchronized with a channel bit length of the concave and convex marks, and a sub-information recording section (30) for recording sub-information by irradiating laser light based on the tracking to the spiral track. The sub-information recording section (30) records all the sub-information by repeating a process of recording a part of the sub-information by discretely irradiating laser light at a specified interval and with a specified frequency in synchronism with a channel clock by one tracking to form recordable marks on a reflective film a plurality of times. By this construction, a tracking control to the concave and convex marks can be stably executed and the sub-information can be stably recorded.

    摘要翻译: 一种光盘记录装置(10)具有跟踪伺服(13),用于跟踪凹凸标记的螺旋轨道,用于提取对应于凹凸标记的再现信号的模拟信号处理器(14) 信号处理器(15),用于提取与凹凸标记的通道位长度同步的通道时钟;以及子信息记录部(30),用于通过基于跟踪将激光照射到螺旋轨道来记录子信息 。 子信息记录部(30)通过重复通过以指定的间隔离散地照射激光并以指定频率与通道时钟同步地记录一部分子信息的处理来记录所有子信息 跟踪以在反射膜上形成多次可记录标记。 通过这种结构,可以稳定地执行对凹凸标记的跟踪控制,并且可以稳定地记录子信息。

    Refrigerant transportation hose
    7.
    发明授权
    Refrigerant transportation hose 有权
    制冷剂运输软管

    公开(公告)号:US07849887B2

    公开(公告)日:2010-12-14

    申请号:US11806474

    申请日:2007-05-31

    IPC分类号: F16L11/00

    摘要: A refrigerant transportation hose having excellent flexibility and high resistance to permeation of refrigerant. The refrigerant transportation hose includes an innermost layer formed by using polyamide resin, a low-permeation layer formed on an outer peripheral surface of the innermost layer and rubber layers (of an inner rubber layer and an outer rubber layer) formed on an outer peripheral surface of the low-permeation layer, wherein the low-permeation layer is a resin film in thickness of 5 to 100 μm made of polyvinyl alcohol having a degree of saponification of not less than 90%.

    摘要翻译: 一种制冷剂输送软管,具有优良的柔性和高耐制冷剂的渗透性。 制冷剂输送软管包括通过使用聚酰胺树脂形成的最内层,形成在最内层的外周表面上的低渗透层和形成在外周表面上的橡胶层(内橡胶层和外橡胶层) 的低渗透层,其中低渗透层是由皂化度不小于90%的聚乙烯醇制成的厚度为5至100μm的树脂膜。

    Pattern Inspection Method and Pattern Inspection System
    8.
    发明申请
    Pattern Inspection Method and Pattern Inspection System 有权
    模式检验方法和模式检验系统

    公开(公告)号:US20100310180A1

    公开(公告)日:2010-12-09

    申请号:US12858209

    申请日:2010-08-17

    IPC分类号: G06K9/46

    摘要: A pattern data examination method and system capable of accurately and speedily examining a circuit pattern without failing to extract pattern contour data are provided. While pattern comparison is ordinarily made by using a secondary electron image, a contour of a pattern element is extracted by using a backscattered electron image said to be suitable for observation and examination of a three dimensional configuration of a pattern element, and pattern inspection is executed by using the extracted contour of the pattern element. More specifically, pattern inspection is executed by comparing a contour of a pattern element with design data such as CAD data to measure a difference between the contour and the data, and by computing, for example, the size of the circuit pattern element from the contour of a pattern. From two or more backscattered electron images formed by detecting backscattered electrons at two or more different spatial positions, pattern contour data contained in the backscattered electron images may be obtained.

    摘要翻译: 提供了能够准确且快速地检查电路图案而不会提取图案轮廓数据的图形数据检查方法和系统。 虽然通常使用二次电子图像进行图案比较,但是通过使用所述适合于观察和检查图案元素的三维构造的背散射电子图像来提取图案元素的轮廓,并且执行图案检查 通过使用所提取的图案元素的轮廓。 更具体地,通过将​​图案元素的轮廓与诸如CAD数据的设计数据进行比较来测量轮廓和数据之间的差异,并且例如通过计算来自轮廓的电路图案元素的尺寸来执行图案检查 的模式。 通过在两个或更多个不同的空间位置检测反向散射电子形成的两个或更多个背散射电子图像,可以获得包含在背散射电子图像中的图案轮廓数据。

    Pattern inspection method and pattern inspection system
    9.
    发明授权
    Pattern inspection method and pattern inspection system 有权
    图案检验方法和图案检验制度

    公开(公告)号:US07786437B2

    公开(公告)日:2010-08-31

    申请号:US12188096

    申请日:2008-08-07

    IPC分类号: G01N23/00 G06K9/00

    摘要: A pattern data examination method and system capable of accurately and speedily examining a circuit pattern without failing to extract pattern contour data are provided. While pattern comparison is ordinarily made by using a secondary electron image, a contour of a pattern element is extracted by using a backscattered electron image said to be suitable for observation and examination of a three dimensional configuration of a pattern element, and pattern inspection is executed by using the extracted contour of the pattern element. More specifically, pattern inspection is executed by comparing a contour of a pattern element with design data such as CAD data to measure a difference between the contour and the data, and by computing, for example, the size of the circuit pattern element from the contour of a pattern. From two or more backscattered electron images formed by detecting backscattered electrons at two or more different spatial positions, pattern contour data contained in the backscattered electron images may be obtained.

    摘要翻译: 提供了能够准确且快速地检查电路图案而不会提取图案轮廓数据的图形数据检查方法和系统。 虽然通常使用二次电子图像进行图案比较,但是通过使用所述适合于观察和检查图案元素的三维构造的背散射电子图像来提取图案元素的轮廓,并且执行图案检查 通过使用所提取的图案元素的轮廓。 更具体地,通过将​​图案元素的轮廓与诸如CAD数据的设计数据进行比较来测量轮廓和数据之间的差异,并且例如通过计算来自轮廓的电路图案元素的尺寸来执行图案检查 的模式。 通过在两个或更多个不同的空间位置检测反向散射电子形成的两个或更多个背散射电子图像,可以获得包含在背散射电子图像中的图案轮廓数据。

    Method and apparatus for detecting pattern defects
    10.
    发明授权
    Method and apparatus for detecting pattern defects 有权
    检测图案缺陷的方法和装置

    公开(公告)号:US07720275B2

    公开(公告)日:2010-05-18

    申请号:US11319271

    申请日:2005-12-29

    IPC分类号: G06K9/00 G06K9/62

    摘要: With the objective of achieving defect kind training in a short period of time to teach classification conditions of defects detected as a result of inspecting a thin film device, according to one aspect of the present invention, there is provided a visual inspection method, and an apparatus therefore, comprising the steps of: detecting defects based on inspection images acquired by optical or electronic defect detection means, and at the same time calculating features of the defects; and classifying the defects according to classification conditions set beforehand, wherein said classification condition setting step further includes the steps of: collecting defect features over a large number of defects acquired beforehand from the defect detection step; sampling defects based on the distribution of the collected defect features over the large number of defects; and setting defect classification conditions based on the result of reviewing the sampled defects.

    摘要翻译: 为了在短时间内实现缺陷种类训练,目的在于教导检查薄膜装置的检测缺陷的分类条件,根据本发明的一个方面,提供一种目视检查方法, 因此,包括以下步骤:基于由光学或电子缺陷检测装置获取的检查图像,同时计算缺陷的特征来检测缺陷; 并根据预先设定的分类条件对缺陷进行分类,其中所述分类条件设置步骤还包括以下步骤:从缺陷检测步骤预先获取的大量缺陷中收集缺陷特征; 基于收集的缺陷特征分布在大量缺陷上的采样缺陷; 并根据检查采样缺陷的结果设置缺陷分类条件。