摘要:
In performing a programmed-point inspection of a circuit pattern using a review SEM, stable inspection can be performed while suppressing the generation of a false report even when a variation in a circuit pattern to be inspected is large. SEM images that are obtained by sequentially imaging a predetermined circuit pattern using the review SEM are stored into a storage unit. Images that meet a set condition are selected from the stored SEM images, and averaged to create an average image (GP image). By performing pattern check by GP comparison using this GP image, an inspection can be performed while suppressing the generation of a false report even when a variation in the circuit patterns is large.
摘要:
Provided are a semiconductor device defect inspection method and system thereof, with which predetermined hot spots are inspected using a SEM, and with which the frequency of defects occurring at the hot spot is estimated statistically and with reliability. An inspection point is designated in design data by the defect type. A plurality of pre-designated inspection points is selected by the defect type from the designated inspection points. The plurality of pre-designated inspection points by defect type thus selected are image captured by the inspection points. A defect ratio, which is a ratio of the plural inspection points which are image captured by the defect type to the plural defects detected, and a reliability interval of the defect ratio which is computed by the defect type is compared with a preset reference value. A defect type having a defect occurrence ratio which exceeds the reference value is derived.
摘要:
A composite hose is constructed to have an outer peripheral portion and an inner peripheral portion. The outer peripheral portion includes an elastic layer and a reinforcing layer provided on an outer periphery of the elastic layer. The inner peripheral portion includes a corrugated metal tube which is provided with a corrugated portion formed with corrugation hills and corrugation valleys. A distance between the reinforcing layer and tops of the corrugation hills of the corrugated metal tube is designed 0.27 mm or less.
摘要:
The present invention relates to a combustion control device incorporated in an apparatus such as water heater and provides the combustion control device having an improved configuration with a main controller and a sub controller, capable of employing a microcomputer with lower capability as the sub controller, and ensuring higher safety than ever before.Signals indicating a combustion state of a combustion apparatus are inputted into the main controller 35 and the sub controller 36 in parallel. Upon fulfillment of a predetermined condition of stopping, the main and sub controllers 35 and 36 each output a stop signal to cut off a current to be supplied to a device driving circuit 42. The conditions of stopping in outputting of the stop signal by the main and sub controllers are such that the sub controller 36 is less apt to execute the cutoff than the main controller 35.
摘要:
An information recording device, an information reproducing device, and an information recording medium securely protect copyright of main information, and prevent illegal access to the recorded main information. The information recording device includes a medium unique information generating section that generates second sub information by data-converting stamper unique information based on disc identification information that differs for each optical disc after transferring main information and first sub information from a stamper having the main information and the first sub information recorded thereon onto an optical disc, and a medium unique information recording section that records the second sub information on the optical disc having recorded thereon in advance the main information and the first sub information in a form different from the forms of the main information and the first sub information.
摘要:
An optical disc recording apparatus (10) is provided with a tracking servo (13) for tracking a spiral track of concave and convex marks, an analog signal processor (14) for extracting a reproduction signal corresponding to the concave and convex marks, a digital signal processor (15) for extracting a channel clock synchronized with a channel bit length of the concave and convex marks, and a sub-information recording section (30) for recording sub-information by irradiating laser light based on the tracking to the spiral track. The sub-information recording section (30) records all the sub-information by repeating a process of recording a part of the sub-information by discretely irradiating laser light at a specified interval and with a specified frequency in synchronism with a channel clock by one tracking to form recordable marks on a reflective film a plurality of times. By this construction, a tracking control to the concave and convex marks can be stably executed and the sub-information can be stably recorded.
摘要:
A refrigerant transportation hose having excellent flexibility and high resistance to permeation of refrigerant. The refrigerant transportation hose includes an innermost layer formed by using polyamide resin, a low-permeation layer formed on an outer peripheral surface of the innermost layer and rubber layers (of an inner rubber layer and an outer rubber layer) formed on an outer peripheral surface of the low-permeation layer, wherein the low-permeation layer is a resin film in thickness of 5 to 100 μm made of polyvinyl alcohol having a degree of saponification of not less than 90%.
摘要:
A pattern data examination method and system capable of accurately and speedily examining a circuit pattern without failing to extract pattern contour data are provided. While pattern comparison is ordinarily made by using a secondary electron image, a contour of a pattern element is extracted by using a backscattered electron image said to be suitable for observation and examination of a three dimensional configuration of a pattern element, and pattern inspection is executed by using the extracted contour of the pattern element. More specifically, pattern inspection is executed by comparing a contour of a pattern element with design data such as CAD data to measure a difference between the contour and the data, and by computing, for example, the size of the circuit pattern element from the contour of a pattern. From two or more backscattered electron images formed by detecting backscattered electrons at two or more different spatial positions, pattern contour data contained in the backscattered electron images may be obtained.
摘要:
A pattern data examination method and system capable of accurately and speedily examining a circuit pattern without failing to extract pattern contour data are provided. While pattern comparison is ordinarily made by using a secondary electron image, a contour of a pattern element is extracted by using a backscattered electron image said to be suitable for observation and examination of a three dimensional configuration of a pattern element, and pattern inspection is executed by using the extracted contour of the pattern element. More specifically, pattern inspection is executed by comparing a contour of a pattern element with design data such as CAD data to measure a difference between the contour and the data, and by computing, for example, the size of the circuit pattern element from the contour of a pattern. From two or more backscattered electron images formed by detecting backscattered electrons at two or more different spatial positions, pattern contour data contained in the backscattered electron images may be obtained.
摘要:
With the objective of achieving defect kind training in a short period of time to teach classification conditions of defects detected as a result of inspecting a thin film device, according to one aspect of the present invention, there is provided a visual inspection method, and an apparatus therefore, comprising the steps of: detecting defects based on inspection images acquired by optical or electronic defect detection means, and at the same time calculating features of the defects; and classifying the defects according to classification conditions set beforehand, wherein said classification condition setting step further includes the steps of: collecting defect features over a large number of defects acquired beforehand from the defect detection step; sampling defects based on the distribution of the collected defect features over the large number of defects; and setting defect classification conditions based on the result of reviewing the sampled defects.