Abstract:
A distribution of AC electric field regularly arranged in a cell is formed while storing a sample having particles dispersed in a medium in the cell, whereby the particles are dielectrically migrated in the medium to generate a diffraction grating by density distribution of the particles. Diffracted light generated by irradiating the diffraction grating by density distribution with measuring light is detected, and evaluation of dielectrophoretic intensities of the particles and/or the medium is performed from the detection result. According to this method, evaluation of dielectrophoretic characteristics can be performed without adhering a phosphor to particles, and since even a particle small in size can achieve a detection level by collecting a number of such particles to form a diffraction grating, dielectric characteristics of microparticles of several nanometers in diameter can be thus quantitatively measured with high sensitivity.
Abstract:
A distribution of AC electric field regularly arranged in a cell is formed while storing a sample having particles dispersed in a medium in the cell, whereby the particles are dielectrically migrated in the medium to generate a diffraction grating by density distribution of the particles. Diffracted light generated by irradiating the diffraction grating by density distribution with measuring light is detected, and evaluation of dielectrophoretic intensities of the particles and/or the medium is performed from the detection result. According to this method, evaluation of dielectrophoretic characteristics can be performed without adhering a phosphor to particles, and since even a particle small in size can achieve a detection level by collecting a number of such particles to form a diffraction grating, dielectric characteristics of microparticles of several nanometers in diameter can be thus quantitatively measured with high sensitivity.
Abstract:
There is disclosed a method of manufacturing a porous ceramic structure, comprising the steps of: preparing a formed structure using a ceramic material containing a pore former and a binder; and drying and firing the formed structure, wherein the process of firing the formed structure comprises the steps of: holding a firing atmosphere temperature in a temperature range of −50 to +10° C. with respect to a combustion start temperature of the binder from the time when the temperature reaches the combustion start temperature of the binder contained in the porous ceramic structure to be fired to the time when the binder is burnt out. According to this method, ceramic structures having not only a low porosity but also a high porosity can be manufactured without generating any crack during the firing.
Abstract:
A method of drying a honeycomb formed body comprising an outer wall, partition walls disposed inside the outer wall, and cells surrounded by the partition walls and extending in an axial direction of the honeycomb formed body. The method of drying a honeycomb formed body comprises a drying step of starting to dry in a state of covering at least a part of the outer wall with a guide covering the outer wall so as not to come into contact with the outer wall. Alternatively, the method of drying a honeycomb formed body comprises a drying step of drying in a state of covering at least a part of the outer wall with a guide that covers the outer wall so as to come into contact with the outer wall, wherein in the drying step the pressure applied to the outer wall by the guide at the contact portion is less than 0.2 MPa.
Abstract:
A method for manufacturing an electronic device comprising the steps of: dry-etching a Ti-containing metal film formed on a substrate with a gas containing fluorine; and treating the substrate with a chemical solution containing fluorine ions after the dry etching step.
Abstract:
Electronic device cleaning equipment includes a cleaning stage having a processing face on which a substrate having an obverse face at which an electronic device is formed is to be placed, a vapor supply nozzle for supplying vapor to the obverse face of the substrate, and chemical solution supply means for supplying a chemical solution to the obverse face of the substrate. Accordingly, static electricity present on the obverse face of the substrate is diselectrified.
Abstract:
A method of producing a honeycomb structure of the present invention includes the steps of: forming plugged portions 2 by dipping an end face of a honeycomb structure 1 in slurry 8 in a container 9, and pressing the honeycomb structure against an inner bottom surface of the container 9 to force the slurry 8 into at least some of the cells 8; and bringing out the honeycomb structure 1 from the container 9 to obtain the honeycomb structure 1 having at least some of the cells 3 being plugged. An air layer 10 is formed between the plugged portions 2 and the inner bottom surface of the container 9 to separate them from each other in advance of bringing out the honeycomb structure 1 having plugged portions 2 from the container 9.
Abstract:
An electronic device having a component containing a refractory metal such as tungsten is cleaned by using a cleaning solution composed of an acidic solution which does not substantially contain aqueous hydrogen peroxide or an alkaline solution which does not substantially contain aqueous hydrogen peroxide.
Abstract:
A process for producing a ceramic honeycomb structural body, comprises the steps of placing a green ceramic honeycomb structural body on a ceramic plate, and then firing the green ceramic honeycomb structural body. The green ceramic honeycomb structural body is placed on the ceramic plate in the state that a cell-opened end face contacts the ceramic plate. The ceramic plate is composed mainly of heat-resistive inorganic fibers, and has a bulk density of not less than 1.00 g/cm.sup.3.
Abstract:
A ceramic honeycomb structural body-firing process includes the steps of: formulating a raw material from talc, kaolin and other cordierite-forming materials to give cordierite having a chemical composition of SiO.sub.2 : 42-56% by weight, Al.sub.2 O.sub.3 : 30-45% by weight and MgO: 12-16% by weight as a main component and a crystalline phase mainly composed of cordierite, shaping a honeycomb structural body from the resulting mixture by extrusion, and firing the honeycomb structural body. In the firing step, a heating rate in a temperature range in which the honeycomb structural body is thermally shrunk is set at not less than 20.degree. C./hr but not more than 60.degree. C./hr, the heating rate in a temperature range in which the solid phase reaction of the honeycomb structure body proceeds is set at not less than 80.degree. C./hr but not more than 130.degree. C./hr, and the heating rate in a temperature range in which the liquid phase reaction of the honeycomb structural body proceeds is set at not less than 20.degree. C./hr but not more than 60.degree. C./hr.