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公开(公告)号：US20030137389A1
公开(公告)日：2003-07-24
申请号：US10313621
申请日：2002-12-09
发明人： Billy L. Weaver , Douglas P. Goetz , Kathy L. Hagen , Mike E. Hamerly , Robert G. Smith , Silva K. Theiss
IPC分类号： H01H061/00
CPC分类号： B81B3/0024 , B81B3/0037 , B81B2201/031 , B81B2201/045 , B81B2203/0109 , B81B2203/0118 , B81B2203/058 , B82Y15/00 , H01H2061/006 , H01H2061/008
摘要： A micrometer sized, single-stage, vertical thermal actuator with controlled bending capable of repeatable and rapid movement of a micrometer-sized optical device off the surface of a substrate. The vertical thermal actuator is constructed on a surface of a substrate. At least one hot arm has a first end anchored to the surface and a free end located above the surface. A cold arm has a first end anchored to the surface and a free end. The cold arm is located above the hot arm relative to the surface. The cold arm is adapted to provide controlled bending near the first end thereof. A member mechanically and electrically couples the free ends of the hot and cold arms such that the actuator bends generally at the flexure so that the member moves away from the substrate when current is applied to at least the hot arm.
摘要翻译： 具有受控弯曲的微米尺寸的单级垂直热致动器，其能够将微米尺寸的光学器件重复并快速移动离开衬底的表面。 垂直热致动器构造在基板的表面上。 至少一个热臂具有锚固在表面上的第一端和位于表面上方的自由端。 冷臂具有锚固在表面上的第一端和自由端。 冷臂相对于表面位于热臂上方。 冷臂适于在其第一端附近提供受控的弯曲。 机构和电气耦合热臂和冷臂的自由端，使得致动器大体上弯曲弯曲，使得当电流施加到至少热臂时，构件移动离开衬底。
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公开(公告)号：US20030155910A1
公开(公告)日：2003-08-21
申请号：US10392417
申请日：2003-03-19
IPC分类号： G01B007/14
CPC分类号： G05D1/0263
摘要： A detection system determines the position of an object moving along a first direction. The system includes a magnetic field source generating a magnetic field signal and a magnetic field detection system coupled to the object. The detection system includes a source interface module with magnetic field sensors positioned a known distance apart along a second direction different from the first direction. Each sensor detects the magnetic field generated by the magnetic field source and generates a magnetic field signal. A processing module processes the magnetic field intensity signal produced by the source interface module. The processing module generates data for each sensor in the source interface module, which is made up of points representing peak magnetic field and sensor location along the second direction. The points are compared to determine the distance of the object from the magnetic field source along the second direction.
摘要翻译： 检测系统确定沿着第一方向移动的对象的位置。 该系统包括产生磁场信号的磁场源和耦合到该物体的磁场检测系统。 检测系统包括源接口模块，其具有沿着不同于第一方向的第二方向定位成已知距离的磁场传感器。 每个传感器检测由磁场源产生的磁场并产生磁场信号。 处理模块处理由源接口模块产生的磁场强度信号。 处理模块为源接口模块中的每个传感器生成数据，该数据由表示峰值磁场和沿着第二方向的传感器位置的点组成。 比较点以确定物体沿着第二方向与磁场源的距离。
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公开(公告)号：US20030038703A1
公开(公告)日：2003-02-27
申请号：US10263117
申请日：2002-10-02
发明人： Billy L. Weaver , Douglas P. Goetz , Kathy L. Hagen , Mike E. Hamerly , Robert G. Smith , Silva K. Theiss
IPC分类号： H01H037/52
CPC分类号： B81B3/0024 , B81B2201/031 , H01H1/0036 , H01H61/01 , H01H2001/0068 , H01H2061/006 , H01H2061/008
摘要： A micrometer sized, single-stage, horizontal and vertical thermal actuator capable of repeatable and rapid movement of a micrometer-sized optical device off the surface of a substrate. The horizontal and vertical thermal actuator is constructed on a surface of a substrate. At least one hot arm has a first end anchored to the surface and a free end located above the surface. A cold arm has a first end anchored to the surface and a free end. The cold arm is located above and laterally offset from the hot arm relative to the surface. The cold arm is adapted to provide controlled bending near the first end thereof. A member mechanically and electrically couples the free ends of the hot and cold arms such that the actuator exhibits horizontal and vertical displacement when current is applied to at least the hot arm.
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公开(公告)号：US20030048102A1
公开(公告)日：2003-03-13
申请号：US10213235
申请日：2002-08-06
IPC分类号： G01R033/00
CPC分类号： G05D1/0263
摘要： A detection system determines the position of an object moving along a first direction. The system includes a magnetic field source generating a magnetic field signal and a magnetic field detection system coupled to the object. The detection system includes a source interface module with magnetic field sensors positioned a known distance apart along a second direction different from the first direction. Each sensor detects the magnetic field generated by the magnetic field source and generates a magnetic field signal. A processing module processes the magnetic field intensity signal produced by the source interface module. The processing module generates data for each sensor in the source interface module, which is made up of points representing peak magnetic field and sensor location along the second direction. The points are compared to determine the distance of the object from the magnetic field source along the second direction.
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公开(公告)号：US20020195674A1
公开(公告)日：2002-12-26
申请号：US10217714
申请日：2002-08-13
发明人： Billy L. Weaver , Douglas P. Goetz , Kathy L. Hagen , Mike E. Hamerly , Robert G. Smith , Silva K. Theiss
IPC分类号： H01L029/82
CPC分类号： G02B6/358 , B81B3/0024 , B81B3/0037 , B81B2201/031 , B81B2201/045 , B81B2203/0109 , B81B2203/0118 , B81B2203/053 , B82Y15/00 , G02B6/352 , G02B6/3576 , H01G5/18 , H01H1/0036 , H01H61/04 , H01H2061/006 , H01H2061/008
摘要： A micrometer sized, single-stage, vertical thermal actuator capable of repeatable and rapid movement of a micrometer-sized optical device off the surface of a substrate. The vertical thermal actuator is constructed on a surface of a substrate. At least one hot arm has a first end anchored to the surface and a free end located above the surface. A cold arm has a first end anchored to the surface and a free end. The cold arm is located above the hot arm relative to the surface. A member mechanically and electrically couples the free ends of the hot and cold arms such that the member moves away from the substrate when current is applied to at least the hot arm. The hot arm can optionally include a grounding tab to minimize thermal expansion of the cold arm.
摘要翻译： 微米尺寸的单级垂直热致动器，其能够将微米尺寸的光学器件重复并快速地移动离开衬底的表面。 垂直热致动器构造在基板的表面上。 至少一个热臂具有锚固在表面上的第一端和位于表面上方的自由端。 冷臂具有锚固在表面上的第一端和自由端。 冷臂相对于表面位于热臂上方。 机构和电气耦合热臂和冷臂的自由端，使得当电流施加到至少热臂时，构件远离基板移动。 热臂可以可选地包括接地片，以最小化冷臂的热膨胀。
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