Cloverleaf microgyroscope with electrostatic alignment and tuning
    1.
    发明授权
    Cloverleaf microgyroscope with electrostatic alignment and tuning 有权
    三叶草微陀螺具有静电对准和调谐

    公开(公告)号:US07159441B2

    公开(公告)日:2007-01-09

    申请号:US10843139

    申请日:2004-05-11

    IPC分类号: G01C19/00

    摘要: A micro-gyroscope (10) having closed loop output operation by a control voltage (Vty), that is demodulated by a drive axis (x-axis) signal Vthx of the sense electrodes (S1, S2), providing Coriolis torque rebalance to prevent displacement of the micro-gyroscope (10) on the output axis (y-axis) Vthy˜0. Closed loop drive axis torque, Vtx maintains a constant drive axis amplitude signal, Vthx. The present invention provides independent alignment and tuning of the micro-gyroscope by using separate electrodes and electrostatic bias voltages to adjust alignment and tuning. A quadrature amplitude signal, or cross-axis transfer function peak amplitude is used to detect misalignment that is corrected to zero by an electrostatic bias voltage adjustment. The cross-axis transfer function is either Vthy/Vty or Vtnx/Vtx. A quadrature signal noise level, or difference in natural frequencies estimated from measurements of the transfer functions is used to detect residual mistuning, that is corrected to zero by a second electrostatic bias voltage adjustment.

    摘要翻译: 具有通过驱动轴(x轴)信号V S x S X解调的控制电压(V SUB)的闭环输出操作的微型陀螺仪(10) 的感测电极(S1,S2),提供科里奥利扭矩重新平衡以防止微陀螺仪(10)在输出轴(y轴)上的位移。 闭环驱动轴转矩V 维持恒定的驱动轴振幅信号V thxx。 本发明通过使用单独的电极和静电偏置电压来提供微陀螺仪的独立对准和调谐,以调整对准和调谐。 使用正交幅度信号或交叉轴传递函数峰值振幅来检测通过静电偏置电压调整校正为零的未对准。 交叉轴传递函数是V / T / T / T / T或T VX。 使用正交信号噪声电平或由传递函数的测量估计的固有频率的差异来检测残余失谐,其通过第二静电偏置电压调整被校正为零。

    Microgyroscope with closed loop output
    2.
    发明授权
    Microgyroscope with closed loop output 有权
    具有闭环输出的微型光学仪器

    公开(公告)号:US06360601B1

    公开(公告)日:2002-03-26

    申请号:US09488425

    申请日:2000-01-20

    IPC分类号: G01P904

    摘要: A micro-gyroscope (10) having closed loop operation by a control voltage (VTY), that is demodulated by an output signal of the sense electrodes (S1, S2), providing Coriolis torque rebalance to prevent displacement of the micro-gyroscope (10) on the output axis (y-axis). The present invention provides wide-band, closed-loop operation for a micro-gyroscope (10) and allows the drive frequency to be closely tuned to a high Q sense axis resonance. A differential sense signal (S1−S2) is compensated and fed back by differentially changing the voltage on the drive electrodes to rebalance Coriolis torque. The feedback signal is demodulated in phase with the drive axis signal (K&ohgr;⊖x) to produce a measure of the Coriolis force.

    摘要翻译: 一种具有通过感测电极(S1,S2)的输出信号解调的控制电压(VTY)的闭环操作的微型陀螺仪(10),提供科里奥利扭矩重新平衡以防止微型陀螺仪(10)的位移 )在输出轴(y轴)上。 本发明为微型陀螺仪(10)提供宽带,闭环操作,并允许将驱动频率紧密地调谐到高Q感测轴共振。 差分感测信号(S1-S2)被补偿并通过差动地改变驱动电极上的电压进行反馈,以重新平衡科里奥利扭矩。 反馈信号与驱动轴信号(Komega⊖x)同相解调,以产生科里奥利力的量度。

    Non-inertial calibration of vibratory gyroscopes
    3.
    发明授权
    Non-inertial calibration of vibratory gyroscopes 有权
    振动陀螺仪的非惯性校准

    公开(公告)号:US06598455B1

    公开(公告)日:2003-07-29

    申请号:US09608994

    申请日:2000-06-30

    IPC分类号: H04B7185

    CPC分类号: G01C19/5719 G01C25/005

    摘要: The electrostatic elements already present in a vibratory gyroscope are used to simulate the Coriolis forces. An artificial electrostatic rotation signal is added to the closed-loop force rebalance system. Because the Coriolis force is at the same frequency as the artificial electrostatic force, the simulated force may be introduced into the system to perform an inertial test on MEMS vibratory gyroscopes without the use of a rotation table.

    摘要翻译: 已经存在于振动陀螺仪中的静电元件用于模拟科里奥利力。 将人造静电转动信号加到闭环力平衡系统中。 由于科里奥利力与人造静电力的频率相同,所以可以将仿真的力引入到系统中以对MEMS振动陀螺仪进行惯性测试而不使用旋转台。

    Lens barrel assembly for a camera
    4.
    发明授权
    Lens barrel assembly for a camera 有权
    相机镜头组件

    公开(公告)号:US07769284B2

    公开(公告)日:2010-08-03

    申请号:US11565518

    申请日:2006-11-30

    IPC分类号: G01B3/00 G01B13/00

    摘要: A lens barren assembly for a camera is disclosed. The lens barrel assembly comprises a lens barrel, at least one optical element disposed within the lens barrel, and an actuator configured to move the optical element. The actuator can be disposed entirely or partially within the lens barrel. The actuator can be a MEMS actuator, such as a MEMS actuator that is formed at least partially of silicon. The optical element can be a lens.

    摘要翻译: 公开了一种用于相机的透镜残余组件。 镜筒组件包括透镜镜筒,设置在透镜镜筒内的至少一个光学元件以及被配置为移动光学元件的致动器。 致动器可以完全地或部分地设置在镜筒内。 致动器可以是MEMS致动器,例如至少部分地由硅形成的MEMS致动器。 光学元件可以是透镜。

    Silicon base plate with low parasitic electrical interference for sensors
    5.
    发明授权
    Silicon base plate with low parasitic electrical interference for sensors 有权
    传感器具有低寄生电干扰的硅基板

    公开(公告)号:US06405594B1

    公开(公告)日:2002-06-18

    申请号:US09612327

    申请日:2000-07-06

    IPC分类号: G01P1500

    摘要: A microgyroscope has a baseplate made of the same material as the rest of the microgyroscope. The baseplate is a silicon baseplate having a heavily p-doped epilayer covered by a thick dielectric film and metal electrodes. The metal electrodes are isolated from the ground plane by the dielectric. This provides very low parasitic capacitive coupling between the electrodes. The thick dielectric reduces the capacitance between the electrodes and the ground plane.

    摘要翻译: 微型陀螺仪具有由与微型扫描仪的其余部分相同的材料制成的基板。 基板是具有由厚电介质膜和金属电极覆盖的重p掺杂的外延层的硅基板。 金属电极通过电介质与接地层隔离。 这提供了电极之间非常低的寄生电容耦合。 厚电介质减小了电极和接地层之间的电容。

    Microgyroscope with integrated vibratory element
    8.
    发明授权
    Microgyroscope with integrated vibratory element 有权
    带集成振动元件的微型陀螺仪

    公开(公告)号:US06758093B2

    公开(公告)日:2004-07-06

    申请号:US10309538

    申请日:2002-12-03

    IPC分类号: G01P900

    CPC分类号: G01C19/56

    摘要: A microgyroscope having a suspended vertical post uses the Coriolis force to detect the rotation rate. The microgyroscope consists of a single vertical post which is the rotation rate sensing element. The vertical post is formed from the same silicon wafers as the rest of the microgyroscope. A first portion of the vertical post and the clover-leaf structure are made from a first silicon wafer. A second portion of the vertical post and the baseplate are made from a second silicon wafer. The two portions are then bonded together to from the clover-leaf gyroscope with an integrated post structure.

    摘要翻译: 具有悬挂垂直柱的微型陀螺仪使用科里奥利力来检测旋转速率。 微型陀螺仪由单个垂直柱,即旋转速率感测元件组成。 垂直柱由与微陀螺的其余部分相同的硅晶片形成。 垂直柱和三叶草叶结构的第一部分由第一硅晶片制成。 垂直柱和底板的第二部分由第二硅晶片制成。 然后将这两个部分用具有整体柱结构的三叶草叶轮陀螺仪结合在一起。

    High resolution and large dynamic range resonant pressure sensor based
on Q-factor measurement
    10.
    发明授权
    High resolution and large dynamic range resonant pressure sensor based on Q-factor measurement 失效
    基于Q因子测量的高分辨率和大动态范围谐振压力传感器

    公开(公告)号:US6085594A

    公开(公告)日:2000-07-11

    申请号:US158163

    申请日:1998-09-04

    IPC分类号: G01L9/00 G01L11/00

    CPC分类号: G01L9/0008

    摘要: A pressure sensor has a high degree of accuracy over a wide range of pressures. Using a pressure sensor relying upon resonant oscillations to determine pressure, a driving circuit drives such a pressure sensor at resonance and tracks resonant frequency and amplitude shifts with changes in pressure. Pressure changes affect the Q-factor of the resonating portion of the pressure sensor. Such Q-factor changes are detected by the driving/sensing circuit which in turn tracks the changes in resonant frequency to maintain the pressure sensor at resonance. Changes in the Q-factor are reflected in changes of amplitude of the resonating pressure sensor. In response, upon sensing the changes in the amplitude, the driving circuit changes the force or strength of the electrostatic driving signal to maintain the resonator at constant amplitude. The amplitude of the driving signals become a direct measure of the changes in pressure as the operating characteristics of the resonator give rise to a linear response curve for the amplitude of the driving signal. Pressure change resolution is on the order of 10.sup.-6 torr over a range spanning from 7,600 torr to 10.sup.-6 torr. No temperature compensation for the pressure sensor of the present invention is foreseen. Power requirements for the pressure sensor are generally minimal due to the low-loss mechanical design of the resonating pressure sensor and the simple control electronics.

    摘要翻译: 压力传感器在宽范围的压力下具有高精度。 使用依赖于谐振振荡的压力传感器来确定压力,驱动电路在谐振下驱动这样的压力传感器,并随着压力的变化跟踪谐振频率和幅度偏移。 压力变化影响压力传感器谐振部分的Q因子。 这种Q因子变化由驱动/感测电路检测,驱动/感测电路又跟踪谐振频率的变化,以保持压力传感器共振。 Q因子的变化反映在谐振压力传感器的幅度变化中。 作为响应,在感测振幅的变化时,驱动电路改变静电驱动信号的力或强度,以使谐振器保持恒定的振幅。 当谐振器的工作特性产生驱动信号的幅度的线性响应曲线时,驱动信号的振幅变为对压力变化的直接测量。 在从7600托到10-6托的范围内,压力变化分辨率为10-6托的数量级。 本发明的压力传感器不需要温度补偿。 由于谐振压力传感器和简单的控制电子设备的低损耗机械设计,压力传感器的功率要求通常很小。