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公开(公告)号：US20220350181A1
公开(公告)日：2022-11-03
申请号：US17762982
申请日：2020-09-17
摘要： An optical modulator includes an acousto-optic assembly and a thermal management apparatus. The acousto-optic assembly includes: an acousto-optic material; a first side configured to receive an incident light beam; and a second side configured to emit an output light beam based on the incident light beam. The thermal management apparatus includes: a first thermally conductive material in thermal contact with the first side of the acousto-optic assembly; and a second thermally conductive material in thermal contact with the second side of the acousto-optic assembly.
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公开(公告)号：US10222702B2
公开(公告)日：2019-03-05
申请号：US15550855
申请日：2016-01-21
发明人： Arno Jan Bleeker , Ramon Mark Hofstra , Erik Petrus Buurman , Johannes Hubertus Josephina Moors , Alexander Matthijs Struycken , Harm-Jan Voorma , Sumant Sukdew Ramanujan Oemrawsingh , Markus Franciscus Antonius Eurlings , Peter Frans Maria Muys
摘要： A laser radiation source for a lithographic tool comprising a laser module to emit a first laser beam having a first wavelength and a second laser beam having a second wavelength, a beam separation device to separate the optical paths of the first and second laser beams and substantially recombine the optical paths, a beam delivery system to direct the first and second laser beams to a fuel target and an optical isolation apparatus to: adjust the polarization state of the first laser beam, adjust the polarization state of the second laser beam and to block radiation having the adjusted polarization states such that the reflection of the first laser beam and the reflection of the second laser beam are substantially blocked from propagating towards the laser module.
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