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1.Structure and method for forming isolation and buried plate for trench capacitor 有权
标题翻译: 用于形成沟槽电容器的隔离和掩埋板的结构和方法公开(公告)号:US08637958B2
公开(公告)日:2014-01-28
申请号:US13617576
申请日:2012-09-14
申请人: Abhishek Dube , Subramanian S. Iyer , Babar Ali Khan , Oh-jung Kwon , Junedong Lee , Paul C. Parries , Chengwen Pei , Gerd Pfeiffer , Ravi Todi , Geng Wang
发明人: Abhishek Dube , Subramanian S. Iyer , Babar Ali Khan , Oh-jung Kwon , Junedong Lee , Paul C. Parries , Chengwen Pei , Gerd Pfeiffer , Ravi Todi , Geng Wang
IPC分类号: H01L21/02
CPC分类号: H01L29/945 , H01L21/76229 , H01L21/84 , H01L29/66181
摘要: A structure and method for forming isolation and a buried plate for a trench capacitor is disclosed. Embodiments of the structure comprise an epitaxial layer serving as the buried plate, and a bounded deep trench isolation area serving to isolate one or more deep trench structures. Embodiments of the method comprise angular implanting of the deep trench isolation area to form a P region at the base of the deep trench isolation area that serves as an anti-punch through implant.
摘要翻译: 公开了用于形成隔离的结构和方法以及用于沟槽电容器的掩埋板。 该结构的实施例包括用作掩埋板的外延层和用于隔离一个或多个深沟槽结构的有界深沟槽隔离区。 该方法的实施例包括深沟槽隔离区域的角度注入,以在用作抗穿孔植入物的深沟槽隔离区域的底部形成P区。
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公开(公告)号:US07164358B2
公开(公告)日:2007-01-16
申请号:US10917112
申请日:2004-08-12
申请人: Ming-Ren Lian , Ravi Todi , Kevin Coffey , Kalpathy Sundaram , Parag Gadkari
发明人: Ming-Ren Lian , Ravi Todi , Kevin Coffey , Kalpathy Sundaram , Parag Gadkari
IPC分类号: G08B13/14
CPC分类号: G08B13/2414 , G08B13/2431 , G08B13/2448
摘要: Method and apparatus for a frequency divider using variable capacitance are described.
摘要翻译: 描述了使用可变电容的分频器的方法和装置。
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公开(公告)号:US20050179551A1
公开(公告)日:2005-08-18
申请号:US10917112
申请日:2004-08-12
申请人: Ming-Ren Lian , Ravi Todi , Kevin Coffey , Kalpathy Sundaram , Parag Gadkari
发明人: Ming-Ren Lian , Ravi Todi , Kevin Coffey , Kalpathy Sundaram , Parag Gadkari
CPC分类号: G08B13/2414 , G08B13/2431 , G08B13/2448
摘要: Method and apparatus for a frequency divider using variable capacitance are described.
摘要翻译: 描述了使用可变电容的分频器的方法和装置。
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